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2024
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Invention
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Porous showerheads for substrate processing systems. A porous showerhead includes a porous top su... |
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2023
|
Invention
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Nozzle design for laser waterjet micro-machining. A waterjet nozzle assembly for a waterjet guide... |
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Invention
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Silicon components welded by electron beam melting.
A welded component for a substrate processin... |
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Invention
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Silicon components welded by electron beam melting. A welded component for a substrate processing... |
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2022
|
Invention
|
Halogen plasma etch-resistant silicon crystals.
Various compositions of a material resistant to ... |
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Invention
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Halogen plasma etch-resistant silicon crystals. Various compositions of a material resistant to e... |
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2021
|
Invention
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Additive manufacturing of silicon components.
A method of performing 3D printing of a silicon co... |
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Invention
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Additive manufacturing of silicon components. A method of performing 3D printing of a silicon com... |
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2020
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Invention
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3d printing of fully dense and crack free silicon with selective laser melting/sintering at eleva... |
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Invention
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Near netshape additive manufacturing using low temperature plasma jets.
A system comprises an ap... |
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Invention
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Near netshape additive manufacturing using low temperature plasma jets. A system comprises an app... |
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Invention
|
Textured silicon semiconductor processing chamber components.
Textured silicon components of a s... |
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2018
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Invention
|
L-shaped plasma confinement ring for plasma chambers. A plasma confinement ring for a plasma cham... |
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Invention
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Crucible for casting near-net shape (nns) silicon. A crucible includes an outer element and an in... |
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Invention
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Furnace for casting near-net shape (nns) silicon. A furnace includes a pedestal, a crucible, firs... |
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Invention
|
Growth of a shaped silicon ingot by feeding liquid onto a shaped ingot. A system comprises a sili... |
