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2012
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Invention
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Lithographic apparatus and device manufacturing method. An immersion lithography apparatus includ... |
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Invention
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Lithographic apparatus and device manufacturing method. Liquid is supplied to a space between the... |
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2011
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Invention
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Lithographic apparatus and device manufacturing method. In an immersion lithography apparatus or ... |
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2009
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Invention
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Dielectric mirror and method for the production thereof, and a projection illumination system for... |
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Invention
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Transmitting optical element consisting of magnesium-aluminium spinel. The invention relates to a... |
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Invention
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Field facet mirror for use in an illumination optic of a projection illumination system for euv m... |
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Invention
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Illumination system for a projection exposure apparatus in semiconductor lithography and projecti... |
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Invention
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Projection exposure apparatus for semiconductor lithography comprising a device for the thermal m... |
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Invention
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Method and apparatus for determining an optical characteristic of an optical system. A method for... |
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Invention
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Lithographic apparatus comprising an internal sensor and a mini-reactor, and method for treating ... |
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Invention
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Method for describing a retardation distribution in a microlithographic projection exposure appar... |
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Invention
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Illumination optics for euv microlithography and illumination system and projection exposure appa... |
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Invention
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Component for setting a scan-integrated illumination energy in an object plane of a microlithogra... |
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Invention
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Device for microlithographic projection illumination and method for testing such a device. The in... |
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Invention
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Device for microlithographic projection illumination and device for the inspection of a surface o... |
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Invention
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Projection objective for a microlithography apparatus and method.
A projection objective for a m... |
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Invention
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Projection optic for microlithography comprising an intensity-correcting device. A projection opt... |
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Invention
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Projection objective for microlithography. A projection objective (7) for microlithography is use... |
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Invention
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Method of bonding two components by,,fusion bonding" to form a bonded structure. The present inve... |
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Invention
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Method for operating an illumination system of a microlithographic projection exposure apparatus.... |
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Invention
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Facet mirror for use in a projection exposure apparatus for microlithography. A facet mirror is t... |
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Invention
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Optcal system for a microlithographic projection exposure apparatus and microlithographic exposur... |
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Invention
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Cleaning module, euv lithography device and method for the cleaning thereof. In order to be able ... |
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Invention
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Protection module and euv lithography apparatus with protection module. In EUV lithography appara... |
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Invention
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Imaging device in a projection exposure machine.
An imaging device in a projection exposure mach... |
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Invention
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Lighting system for a microlithography projection exposure installation. The invention relates to... |
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Invention
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Illumination system of a microlithographic projection exposure apparatus. An illumination system ... |
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Invention
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Projection exposure system for microlithography with a measurement device. A projection exposure ... |
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2008
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Invention
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Illumination system for a microlithographic projection exposure apparatus. An illumination system... |
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Invention
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Optical device comprising a spring device with a range of constant spring force. The present inve... |
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Invention
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Microlithographic projection exposure apparatus. A projection exposure apparatus for microlithogr... |
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Invention
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Projection illumination system for euv microlithography. The invention relates to a projection il... |
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Invention
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Illumination system for illuminating a mask in a microlithographic exposure apparatus. An illumin... |
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Invention
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An element, in particular an optical element, for immersion lithography. The present invention re... |
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Invention
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Illumination optics and projection exposure apparatus. An illumination optics is used for illumin... |
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Invention
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Illumination optics for microlithography. An illumination optics for microlithography comprises a... |
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Invention
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Cleaning module and euv lithography device with cleaning module. In order to enable a more gentle... |
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Invention
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Polariser. The invention concerns an optical system having an optical axis (OA) and comprising a ... |
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Invention
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Illumination system of a microlithographic projection exposure apparatus. The invention concerns ... |
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Invention
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Optical system and method for characterising an optical system. The invention concerns an optical... |
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Invention
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Optical element for the reflection of uv radiation, method for manufacturing the same and project... |
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Invention
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Device and method for conditioning optical elements by means of laser ablation. The present inven... |
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Invention
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Optical device with improved imaging behaviour and method therefor. The invention relates to an o... |
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Invention
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Imaging optical system, projection exposure installation for micro-lithography comprising an imag... |
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Invention
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Imaging optical system and projection exposure installation for micro-lithography with an imaging... |
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Invention
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Optical aperture device. There is provided an optical module (106.1) comprising an aperture devic... |
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Invention
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Optical aperture device. There is provided an optical module comprising an aperture device and a ... |
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2007
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Invention
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Method for removing a contamination layer from an optical surface, method for generating a cleani... |
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2006
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Invention
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Catadioptric projection objective with intermediate image.
In a catadioptric projection objectiv... |
