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2012
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Invention
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Narrow width loadport mechanism for cleanroom material transfer systems. A system and method of t... |
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Invention
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Horizontal displacement mechanism for cleanroom material transfer systems. A spiral cam has a tub... |
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2011
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Invention
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Port door positioning apparatus and associated methods. A loadport has a port door and a frame wi... |
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2010
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Invention
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Substrate container storage system. A storage system and methods for operating a storage system a... |
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Invention
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Integrated systems for interfacing with substrate container storage systems. A storage system is ... |
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2008
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Invention
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A modular cluster tool. A modular cluster tool is disclosed. According to one embodiment, a syste... |
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2004
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Invention
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A method and apparatus for semiconductor processing. A method and apparatus for semiconductor pro... |
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1997
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Invention
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Smif pod storage, delivery and retrieval system. A storage, delivery and retrieval system having ... |
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Invention
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Integrated intrabay buffer, delivery, and stocker system. An integrated intrabay buffer, delivery... |
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1996
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Invention
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Load port opener. A load port opener for separating a pod top from a pod door so that a wafer-car... |
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Invention
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Rotated, orthogonal load compatible front-opening interface. A rotating and translating support a... |
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Invention
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Molecular contamination control system. The system and method for molecular contamination control... |
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1995
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Invention
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Docking and environmental purging system for integrated circuit wafer transport assemblies. The d... |
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Invention
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Stage assembly for a substrate processing system. A stage assembly for a substrate processing sys... |
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Invention
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Smif port interface adaptor. An adaptor plate for allowing 200 mm SMIF pods carrying one or more ... |
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Invention
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Pod loader interface. The pod loader interface is a machine that is able to automatically open a ... |
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Invention
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Direct loadlock interface. A loadlock chamber for transferring one or more semiconductor wafers f... |
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1994
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Invention
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Method and apparatus for transferring articles between two controlled environments. A method and ... |
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Invention
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Surface defect inspection system and method. System and method are disclosed for inspecting objec... |
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Invention
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Apparatus and methods for viewing identification marks on semiconductor wafers. Apparatus and met... |
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1993
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Invention
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Devices and methods for reading identification marks on semiconductor wafers. Methods and apparat... |
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1992
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Invention
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Vapor device and method for drying articles such as semiconductor wafers with substances such as ... |
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1991
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Invention
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Very low frequency tracking system. Apparatus identifying an instrumentality such as a person's h... |
