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2021
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Invention
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Substrate processing apparatus. A substrate processing apparatus including a frame, a first SCARA... |
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Invention
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Automatic teach apparatus for robotic systems and method therefor. An automatic teaching system f... |
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Invention
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Substrate mapping apparatus and method therefor. A semiconductor wafer mapping apparatus comprisi... |
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Invention
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Substrate processing apparatus. A linear electrical machine comprising a frame with a level refer... |
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Invention
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Substrate processing apparatus. A substrate transport apparatus comprising a support frame an art... |
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Invention
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Substrate transport apparatus. A substrate transport apparatus comprising a frame, a drive sectio... |
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Invention
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Vessel gripper. A gripper provides for gripping labware having a variety of diameters and shapes.... |
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2020
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Invention
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Substrate processing apparatus. A substrate transport apparatus having a drive section and at lea... |
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Invention
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Robot embedded vision apparatus. A substrate transport apparatus includes a transport chamber, a ... |
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Invention
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Automated system for storing, retrieving and managing samples. An automated storage system for st... |
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Invention
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Promoter and carrier composed of same and application thereof.
An improved promoter and a use th... |
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Invention
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Promoter and use thereof.
An improved promoter and a use thereof. An improvement is to mutate a ... |
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Invention
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Substrate process apparatus. A process apparatus including a front end with a load opening for lo... |
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2019
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Invention
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Load port module. A substrate loading device including a frame adapted to connect to a substrate ... |
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Invention
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Load port module. Substrate loading device including a frame adapted to connect the substrate loa... |
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Invention
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Automated sample storage system having storage consumable with sub-optimal storage density. An au... |
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Invention
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Transport apparatus with linear bearing and method therefor. A vacuum substrate transport apparat... |
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Invention
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Substrate processing apparatus. A substrate processing apparatus including a frame, a SCARA arm m... |
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Invention
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Tool auto-teach method and apparatus. A substrate transport apparatus auto-teach system for auto-... |
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Invention
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Substrate transport apparatus. A substrate processing apparatus includes a frame and a transport ... |
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G/S
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Semiconductor device manufacturing machines; semiconductor wafer processing equipment; semiconduc... |
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Invention
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Pneumatic drive cryocooler. A Gifford-McMahon cryogenic refrigerator comprises a reciprocating di... |
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Invention
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Substrate transport apparatus. A substrate transport apparatus including, a torsional motion driv... |
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Invention
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Automated cryogenic storage and retrieval system. A cryogenic storage system (100) includes a tra... |
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Invention
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Automatic wafer centering method and apparatus. A substrate transport apparatus including a trans... |
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2018
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Invention
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Cryopump with peripheral first and second stage arrays. In a cryopump, a primary cryopumping arra... |
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Invention
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Substrate transport apparatus with independent accessory feedthrough. A substrate transport appar... |
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Invention
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Transport apparatus and adapter pendant. A semiconductor process transport apparatus including a ... |
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Invention
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Method and apparatus for health assessment of a transport apparatus. A method for health assessme... |
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Invention
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Method and apparatus for health assessment of a transport apparatus. pkBase) for each of the dyna... |
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Invention
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Method and apparatus for substrate transport. A substrate processing apparatus includes a linearl... |
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Invention
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Method and apparatus for substrate transport.
A substrate processing apparatus includes a linear... |
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Invention
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A capping and de-capping apparatus and a method of operating such an apparatus. A capping and de-... |
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Invention
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Method and apparatus for substrate transport apparatus position compensation. A substrate transpo... |
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2017
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Invention
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Method and device for compensation for dimensional variations in low temperature sample group hol... |
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Invention
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Sample tube and method. A sample tube includes a barcode split into components at the bottom of t... |
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Invention
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Substrate processing apparatus. A substrate processing apparatus including a frame and at least o... |
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Invention
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Modular sample store. A modular sample store including a storage area; a service area; a transfer... |
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Invention
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Substrate processing apparatus. A substrate processing apparatus including a frame (106), a first... |
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Invention
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Sample selector. An apparatus includes a frame configured to hold sample holders in an array, a l... |
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2016
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Invention
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On the fly automatic wafer centering method and apparatus. Substrate processing apparatus includi... |
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Invention
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Automated vault module. Cryogenic storage system provides automated storage and retrieval of samp... |
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Invention
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Substrate transport apparatus. A transport apparatus including a drive section connected to a fra... |
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Invention
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Automated cryogenic storage system. An automated cryogenic storage system includes a freezer (120... |
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Invention
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Cryogenic freezer. A configurable cryogenic storage device has a freezer (120) and a rack carrier... |
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Invention
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Tube sealer. A device for sealing sample tubes comprises a tool assembly configured to interface ... |
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2005
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G/S
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Semiconductor wafer processing machines, load port module for use in the field of manufacturing a... |
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G/S
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Computer software for use in automating and controlling semiconductor wafer processing machines i... |
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2003
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G/S
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Machines for handling semiconductor wafers; robots for handling semiconductor wafers; material ha... |
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G/S
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Repair and maintenance services for semiconductor fab manufacturing equipment [ Training in the u... |
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1997
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G/S
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industrial robot used for transport in the process of manufacturing integrated circuits and elect... |
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1994
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G/S
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vacuum pumps; vacuum pumps and electronic controls therefor sold as a unit electronic controllers... |
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1986
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G/S
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MAINTENANCE AND REPAIR OF HIGH-VACUUM PUMPS, AND CONSULTING SERVICES IN CONNECTION THEREWITH [TRA... |
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1983
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G/S
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Compressors for Cryogenic Refrigerators; Cryopump Systems and Parts Therefor Primarily Comprising... |
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1973
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G/S
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PORTABLE MECHANICAL REFRIGERATION CHILLER CAPABLE OF SUPPLYING LIQUID COOLANT |
