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2024
|
Invention
|
Apparatus for processing a wafer. Apparatus for processing a wafer, comprising: a support for sup... |
|
2023
|
Invention
|
Gas mixture including hydrogen fluoride, alcohol and an additive for preventing stiction of and/o... |
|
|
Invention
|
Device for conveying a wafer-shaped article. Device for conveying a wafer-shaped article, compris... |
|
|
Invention
|
Apparatus and method with quartz crystal microbalance and flow cell. An apparatus comprising: a q... |
|
|
Invention
|
System for processing wafer-shaped articles. A system for processing wafer-shaped articles, the s... |
|
|
Invention
|
Apparatus for processing a wafer-shaped article. Apparatus for processing a wafer-shaped article,... |
|
2022
|
Invention
|
Device for holding a wafer-shaped article.
A device for holding a wafer-shaped article, the devi... |
|
|
Invention
|
Device for holding a wafer-shaped article. A device for holding a wafer-shaped article, the devic... |
|
|
Invention
|
Apparatus for processing a wafer-shaped article.
Apparatus for processing a wafer-shaped article... |
|
|
Invention
|
Apparatus for dispensing a liquid.
An apparatus for dispensing a liquid comprising: a supply flo... |
|
|
Invention
|
Apparatus for dispensing a liquid. An apparatus for dispensing a liquid comprising: a supply flow... |
|
2021
|
Invention
|
Apparatus for processing a wafer-shaped article.
An apparatus for processing a wafer-shaped arti... |
|
|
Invention
|
Apparatus for processing a wafer-shaped article. An apparatus for processing a wafer-shaped artic... |
|
|
Invention
|
Apparatus for processing wafer-shaped articles.
Apparatus for processing wafer-shaped articles, ... |
|
|
Invention
|
Apparatus for processing wafer-shaped articles. Apparatus for processing wafer-shaped articles, t... |
|
|
Invention
|
Apparatus for processing a wafer.
An apparatus for processing a wafer, the apparatus comprising:... |
|
|
Invention
|
Apparatus for processing a wafer. An apparatus for processing a wafer, the apparatus comprising: ... |
|
2020
|
Invention
|
Method and apparatus for processing wafer-shaped articles. An apparatus for processing wafer-shap... |
|
|
Invention
|
Apparatus for processing a wafer, and method of controlling such an apparatus.
An apparatus for ... |
|
|
Invention
|
Apparatus for processing a wafer, and method of controlling such an apparatus. An apparatus for p... |
|
2019
|
Invention
|
Method and apparatus for treating semiconductor substrate. The present invention relates to gas d... |
|
|
Invention
|
Method and apparatus for processing wafer-shaped articles. A device for processing wafer-shaped a... |
|
|
Invention
|
Wafer cleaning method and apparatus therefore. The present invention relates to a method for trea... |
|
|
Invention
|
Vapor delivery head for preventing stiction of high aspect ratio structures and/or repairing high... |
|
|
Invention
|
Etchant composition. The present invention relates to an etchant composition, in particular to an... |
|
|
Invention
|
Method of producing rinsing liquid. The present application discloses a method of producing an aq... |
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2018
|
Invention
|
Systems and methods for preventing stiction of high aspect ratio structures and/or repairing high... |
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2017
|
Invention
|
Spin chuck with concentrated center and radial heating. A substrate processing system to treat a ... |
|
|
Invention
|
Liquid mixture and method for etching a substrate using the liquid mixture.
A liquid mixture for... |
|
|
Invention
|
Passivation mixture and systems and methods for selectively passivating substrate materials inclu... |
|
|
Invention
|
Systems and methods for detecting undesirable dynamic behavior of liquid dispensed onto a rotatin... |
|
|
Invention
|
Liquid mixture and method for selectively wet etching silicon germanium. A liquid mixture for etc... |
|
2016
|
Invention
|
Point-of-use mixing systems and methods for controlling temperatures of liquids dispensed at a su... |
|
|
Invention
|
Spin chuck including edge ring.
Apparatus for treating a substrate includes a stationary plate a... |
|
|
Invention
|
Reduction of surface and embedded substrate charge by controlled exposure to vacuum ultraviolet (... |
|
|
Invention
|
Apparatus and radiant heating plate for processing wafer-shaped articles. An apparatus for proces... |
|
|
Invention
|
Method and apparatus for processing wafer-shaped articles. A method for drying wafer-shaped artic... |
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2009
|
G/S
|
Chemicals; liquid and gaseous media for the processing of
semi-finished products for semiconduct... |
|
|
G/S
|
Machines for the manufacture of semiconductors and microelectronic semiconductors products; machi... |
|
2003
|
G/S
|
Apparatus, namely, machines for producing semiconductors and microelectronic semiconductor produc... |
|
|
G/S
|
Chemicals, liquid and gaseous media for the processing of
semi-finished products for semi-conduc... |
|
2001
|
G/S
|
Chemicals, especially liquid and gaseous media for the
processing of semi-finished products for ... |
