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2026
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G/S
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Semiconductor manufacturing machines and their component
parts and fittings; flat panel display ... |
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G/S
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Semiconductor manufacturing machines |
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Invention
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Measuring device, measuring method, and vacuum processing apparatus.
A measuring device for a va... |
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Invention
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Substrate transfer device and substrate transfer method.
A device includes a planar motor includ... |
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Invention
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Prediction device and etching control system.
An etching control system includes a prediction de... |
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Invention
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Apparatus and method for repairing defect of semiconductor.
The apparatus includes a chamber hou... |
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Invention
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Plasma processing apparatus, power source system, and plasma processing method.
A plasma process... |
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Invention
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Apparatus for processing substrate and method of transferring substrate.
An apparatus for transf... |
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Invention
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Substrate processing apparatus.
A substrate processing apparatus includes: a processing chamber;... |
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Invention
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High-performance adaptable sampling system.
According to an embodiment, a plasma processing syst... |
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Invention
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Substrate processing method and substrate processing system.
A substrate processing method inclu... |
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Invention
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Semiconductor device manufacturing method and semiconductor device manufacturing system.
A semic... |
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Invention
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Communication method, communication system, and communication device. Provided are a communicatio... |
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Invention
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Heat treatment apparatus.
A heat treatment apparatus includes a cylindrical reaction tube having... |
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Invention
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Heat treatment apparatus and heat treatment method.
A heat treatment apparatus includes a proces... |
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Invention
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Substrate processing system and substrate transfer method.
A substrate processing system include... |
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Invention
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Substrate processing system. This substrate processing system comprises a vacuum transfer chamber... |
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Invention
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Substrate processing apparatus and substrate processing method. Provided are a substrate processi... |
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Invention
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Inspection device, joining device, inspection method, and joining method. This inspection device ... |
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Invention
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Waste liquid treatment system, waste liquid treatment method, and storage medium. A waste liquid ... |
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Invention
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Substrate processing method and substrate processing apparatus. A substrate processing method acc... |
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Invention
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Etching method and plasma treatment device. An etching method according to one exemplary embodime... |
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Invention
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Plasma processing device. This plasma processing device comprises a processing container, a rotar... |
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Invention
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Film-forming apparatus, and method for cleaning film-forming apparatus. [Problem] To remove a rea... |
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Invention
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Processing method and processing device. A processing method according to one aspect of the prese... |
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Invention
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Processing method and processing device. The processing method according to an embodiment of the ... |
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Invention
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Substrate processing apparatus and gas supply method.
A substrate processing apparatus includes:... |
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Invention
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Information processing method, computer program, and information processing device. The present i... |
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Invention
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Film formation method and film formation device. A film formation method according to one embodim... |
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Invention
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Sputtering apparatus and control method.
A sputtering apparatus includes: a holder configured to... |
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Invention
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Substrate processing device and method for assembling substrate processing device. This substrate... |
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G/S
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Semiconductor manufacturing machines and parts therefor; semiconductor wafer transfer equipment u... |
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G/S
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Semiconductor manufacturing machines and their component
parts and fittings; semiconductor wafer... |
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Invention
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Wave-assisted hybrid plasma source. A plasma processing apparatus includes a processing chamber i... |
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Invention
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Method for controlling dummy gate profile.
A method includes providing a substrate having a fin ... |
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Invention
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Etching method and plasma processing apparatus.
An etching method includes (a) placing a substra... |
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Invention
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Apparatus and method for wafer bonding. An apparatus is provided for die-to-wafer bonding. The ap... |
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Invention
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Striker for wafer bonding. A method for bonding wafers includes aligning a first wafer with a sec... |
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2025
|
Invention
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Methods and systems for plasma etching process. A method is provided for processing a substrate. ... |
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Invention
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Adjustable chuck for wafer bonding. Conformal semiconductor chucks are disclosed. The semiconduct... |
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G/S
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Semiconductor manufacturing machines and parts therefor; flat panel display manufacturing machine... |
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G/S
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Installation, maintenance and repair of semiconductor manufacturing machines; installation, maint... |
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G/S
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Installation, maintenance and repair of semiconductor
manufacturing machines; installation, main... |
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Invention
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Synchronized multi-arm robot.
A robot transfer system includes a robot arm adapted for rotation ... |
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Invention
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Pulse windowing optical sensor.
An optical emission spectroscopy detection device includes an op... |
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Invention
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Methods and systems for area selective processing.
A method is provided for processing a substra... |
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Invention
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Method for forming patterned mask on substrate.
A method includes a process for forming a patter... |
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Invention
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Striker for wafer bonding.
A method for bonding wafers includes aligning a first wafer with a se... |
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Invention
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Method for stitching lines.
A method of processing a substrate includes exposing a first region ... |
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Invention
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Wave-assisted hybrid plasma source.
A plasma processing apparatus includes a processing chamber ... |
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Invention
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Methods for reducing critical dimension variation.
A method is provided for processing a substra... |
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Invention
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Apparatus and method for wafer bonding.
An apparatus is provided for die-to-wafer bonding. The a... |
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Invention
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Adjustable chuck for wafer bonding.
Conformal semiconductor chucks are disclosed. The semiconduc... |
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2024
|
G/S
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Semiconductor manufacturing machines and their component parts and fittings; flat panel display m... |
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Invention
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Cover ring |
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G/S
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Semiconductor manufacturing machines used for coating and deposition processes, and their compone... |
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Invention
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Bonding apparatus, bonding system, and bonding method.
A bonding apparatus 41 includes a first h... |
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Invention
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Substrate processing apparatus and substrate processing method.
A substrate processing device ac... |
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Invention
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Bonding apparatus, bonding system, and bonding method.
A bonding apparatus includes a chip carri... |
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G/S
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Downloadable computer software for controlling semiconductor manufacturing processes; downloadabl... |
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G/S
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Downloadable computer software for controlling semiconductor
manufacturing processes; downloadab... |
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2023
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G/S
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Machines and instruments used for measuring and testing semiconductor manufacturing machines, nam... |
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G/S
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Machines and instruments used for measuring and testing
semiconductor manufacturing machines; co... |
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2022
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G/S
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Semiconductor manufacturing machines and their component parts and fittings |
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G/S
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Semiconductor manufacturing machines and their component
parts and fittings. |
