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2026
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G/S
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Semiconductor manufacturing machines |
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Invention
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Cleaning method and film-forming apparatus.
A cleaning method for a film-forming apparatus is pr... |
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Invention
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Plasma processing device.
There is a plasma processing apparatus including a processing chamber;... |
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Invention
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Substrate processing method and substrate processing apparatus.
A substrate processing method an... |
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Invention
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Plasma processing apparatus and etching method.
A plasma processing apparatus includes a chamber... |
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Invention
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Etching method and etching apparatus.
An etching method is provided. The method includes: placin... |
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Invention
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Substrate processing apparatus and a substrate processing method.
A substrate processing apparat... |
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Invention
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Maintenance work system.
In a maintenance work system for a substrate processing plant including... |
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Invention
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Plasma processing apparatus.
A plasma processing apparatus includes: a chamber; a substrate supp... |
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Invention
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Substrate processing system and movable maintenance apparatus.
A substrate processing system inc... |
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Invention
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Deposition method and deposition apparatus.
A film deposition method includes preparing a substr... |
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Invention
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Acid for reactive development of metal oxide resists.
An integrated baking and reactive developm... |
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Invention
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Substrate processing apparatus and substrate processing system.
A substrate processing apparatus... |
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Invention
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System for assembling components of substrate processing apparatus and method for assembling comp... |
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Invention
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Method for automated standard cell design.
In an embodiment, a method includes: receiving data r... |
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Invention
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Balanced resonator source for plasma processing.
According to an embodiment, a plasma processing... |
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G/S
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Semiconductor manufacturing machines and parts therefor; semiconductor wafer transfer equipment u... |
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G/S
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Semiconductor manufacturing machines and their component
parts and fittings; semiconductor wafer... |
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Invention
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Gate valve apparatus and semiconductor manufacturing apparatus.
A gate valve apparatus and a sem... |
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Invention
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Etching method and etching device.
There is an etching method for etching a carbon-containing si... |
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Invention
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Plasma processing device and plasma measuring method.
A plasma processing apparatus comprises a ... |
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Invention
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Substrate processing method and substrate processing apparatus.
A substrate processing method in... |
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Invention
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Substrate processing apparatus, information processing apparatus, and information processing meth... |
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Invention
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Information processing apparatus, substrate processing apparatus, and film thickness prediction m... |
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2025
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Invention
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Determination method, storage medium, substrate processing apparatus, and information processing ... |
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Invention
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Processing apparatus and processing method.
Provided is a processing apparatus comprising: a pro... |
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Invention
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Substrate processing device and substrate processing method. A substrate processing device accord... |
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Invention
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Radical supply device, substrate processing device, radical generation method, and substrate proc... |
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Invention
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Substrate processing device and method for assembling substrate processing device. This substrate... |
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Invention
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Substrate processing device and substrate processing method. This substrate processing device pro... |
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Invention
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Conveyance system, jig substrate, and measurement method. A conveyance system according to an exe... |
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Invention
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Substrate processing method, storage medium, and substrate processing system. A substrate process... |
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Invention
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Semiconductor equipment and pressure control method thereof. A semiconductor equipment and a pres... |
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Invention
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Semiconductor processing system and method of operating the same. A semiconductor processing syst... |
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Invention
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Sealing structure, pressure container and sealing method. A sealing structure is provided. The se... |
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Invention
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Processing method and processing device. A processing method according to one aspect of the prese... |
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Invention
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Substrate processing device. This substrate processing device comprises: a chamber; a substrate s... |
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Invention
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3d imaging by liquid immersion with tilt and/or rotation. A method of 3D imaging includes immersi... |
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Invention
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3d imaging by liquid immersion. A method of 3D imaging includes immersing an objective lens of a ... |
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Invention
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Systems and methods for determining a localized fluid velocity on a spinning substrate by trackin... |
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Invention
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Bonding method using surface activation plasma treatment. A method for bonding wafers includes re... |
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Invention
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Method for post gas development treatment of metal oxide photoresist. A method for processing a s... |
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Invention
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Apparatus and method for die-to-wafer bonding. A method is provided for die-to-wafer bonding. The... |
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G/S
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Semiconductor manufacturing machines and parts therefor; flat panel display manufacturing machine... |
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G/S
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Semiconductor manufacturing machines and their component
parts and fittings; flat panel display ... |
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G/S
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Installation, maintenance and repair of semiconductor manufacturing machines; installation, maint... |
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G/S
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Installation, maintenance and repair of semiconductor
manufacturing machines; installation, main... |
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Invention
|
Method for post gas development treatment of metal oxide photoresist.
A method for processing a ... |
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Invention
|
Bonding method using surface activation plasma treatment.
A method for bonding wafers includes r... |
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Invention
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Apparatus and method for die-to-wafer bonding.
A method is provided for die-to-wafer bonding. Th... |
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Invention
|
3d imaging by liquid immersion with tilt and/or rotation.
A method of 3D imaging includes immers... |
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Invention
|
3d imaging by liquid immersion.
A method of 3D imaging includes immersing an objective lens of a... |
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Invention
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Hyper-scaled static random access memory (sram) based on sequential complimentary field-effective... |
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2024
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G/S
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Semiconductor manufacturing machines and their component parts and fittings; flat panel display m... |
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G/S
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Semiconductor manufacturing machines used for coating and deposition processes, and their compone... |
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G/S
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Downloadable computer software for controlling semiconductor manufacturing processes; downloadabl... |
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G/S
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Downloadable computer software for controlling semiconductor
manufacturing processes; downloadab... |
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2023
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Invention
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Substrate processing apparatus and substrate processing method.
A substrate processing apparatus... |
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G/S
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Machines and instruments used for measuring and testing semiconductor manufacturing machines, nam... |
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G/S
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Machines and instruments used for measuring and testing
semiconductor manufacturing machines; co... |
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Invention
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Information gathering system, substrate for inspection, and information gathering method.
Provid... |
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2022
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G/S
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Semiconductor manufacturing machines and their component parts and fittings |
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G/S
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Semiconductor manufacturing machines and their component
parts and fittings. |
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2021
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G/S
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Semiconductor manufacturing machines and their component parts and fittings; machines for mainten... |
