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2025
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Invention
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Etching method and etching apparatus.
An etching method includes a first storage process of supp... |
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Invention
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Computer program, information processing method, and information processing device.
The present ... |
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Invention
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Plasma processing with magnetic ring x point.
A plasma etching system that includes a plasma pro... |
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Invention
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Apparatus for transporting substrate, system for processing substrate, and method of transporting... |
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Invention
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Silicon carbonitride film-forming method and plasma processing apparatus.
A silicon carbonitride... |
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Invention
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Substrate processing system.
A technique for suppressing a metal component from remaining at a b... |
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Invention
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Methods to automatically adjust one or more parameters of a camera system for optimal 3d reconstr... |
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Invention
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Polishing apparatus and substrate polishing method.
A polishing apparatus includes: a processing... |
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G/S
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Semiconductor manufacturing machines and parts therefor; flat panel display manufacturing machine... |
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G/S
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Semiconductor manufacturing machines and their component
parts and fittings; flat panel display ... |
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Invention
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Substrate processing method, substrate processing system, and protective film.
A substrate proce... |
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Invention
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Stage, inspection device, and method of operating stage.
A stage includes a substrate support co... |
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Invention
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Control valve control method and substrate processing device. Provided are: a control valve contr... |
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Invention
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Substrate processing method, substrate processing system, and parameter correction method. In thi... |
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Invention
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Method for removing titanium oxide film and substrate processing device. The purpose of the prese... |
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Invention
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Method for determining optimum thickness measurement position, substrate processing method, and s... |
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Invention
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Film, article, and plasma processing device. abcdd, where: M represents a metal atom; a, b, c, an... |
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Invention
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Substrate heating apparatus and substrate heating method.
A substrate heating apparatus includes... |
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Invention
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Temperature regulating device and plasma processing device. This temperature regulating device fo... |
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Invention
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Substrate support and substrate treatment device. Disclosed is a substrate support comprising: a ... |
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Invention
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Substrate treatment method and substrate treatment apparatus.
A substrate treatment method inclu... |
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Invention
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Transfer device, semiconductor manufacturing system, and transfer method.
A transfer device incl... |
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Invention
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Liquid processing apparatus.
A liquid processing apparatus includes a holder that holds and rota... |
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Invention
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Plasma processing apparatus and upper electrode. Provided are a plasma processing apparatus and a... |
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Invention
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Method for depositing film on substrate and device for depositing film on substrate. When deposit... |
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Invention
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Substrate processing method and substrate processing apparatus.
A substrate processing method is... |
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Invention
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Cleaning method and plasma treatment device. A cleaning method for a plasma treatment apparatus a... |
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Invention
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Substrate processing method and substrate processing device. This substrate processing method inc... |
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Invention
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Film formation method and film formation device. A film formation method according to an embodime... |
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Invention
|
Information processing apparatus, detection method, and substrate processing apparatus.
An infor... |
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Invention
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Plasma processing device. Provided is a technique for improving the accuracy of an electrical par... |
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Invention
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Substrate processing device and control method. This substrate processing device comprises a subs... |
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Invention
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Cable connecting method, production method of connecting member, and thermal processing apparatus... |
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Invention
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Substrate processing device and substrate processing method. A substrate processing device accord... |
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Invention
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Surface passivation for achieving controllable queue time for post-planarization process.
A meth... |
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Invention
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Film-forming method and film-forming apparatus.
A film-forming method includes (a) providing a s... |
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G/S
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Installation, maintenance and repair of semiconductor manufacturing machines; installation, maint... |
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G/S
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Installation, maintenance and repair of semiconductor
manufacturing machines; installation, main... |
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Invention
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Method for selectively depositing etch stop layer. A method for making a semiconductor device can... |
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Invention
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Systems and methods that utilize metal-coated processing heads to improve wet processing of semic... |
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Invention
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Method for etching a metal hard mask. A method for forming a semiconductor device can include rec... |
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Invention
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Substrate processing device and transport method. This substrate processing device includes a cha... |
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Invention
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Substrate processing method and substrate processing apparatus. In one exemplary embodiment of th... |
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Invention
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Wafer overlay registration in hybrid bonding.
A method of hybrid bonding includes accessing firs... |
|
2024
|
G/S
|
Semiconductor manufacturing machines and their component parts and fittings |
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G/S
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Semiconductor manufacturing machines and their component parts and fittings; flat panel display m... |
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G/S
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Semiconductor manufacturing machines used for coating and deposition processes, and their compone... |
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Invention
|
Method of forming hard mask structure.
A method for forming a semiconductor device can include f... |
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Invention
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Method and apparatus for damascene etching.
A method for etching a wafer includes providing the ... |
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Invention
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Method for patterning mask layer over substrate.
A method includes forming a first mask over a s... |
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Invention
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Method for selectively depositing etch stop layer.
A method for making a semiconductor device ca... |
|
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Invention
|
Method for etching a metal hard mask.
A method for forming a semiconductor device can include re... |
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G/S
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Downloadable computer software for controlling semiconductor manufacturing processes; downloadabl... |
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G/S
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Downloadable computer software for controlling semiconductor
manufacturing processes; downloadab... |
|
2023
|
Invention
|
Substrate treatment device and film thickness estimation method.
A substrate processing apparatu... |
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Invention
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Substrate processing method, substrate processing device, and storage medium.
A substrate proces... |
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G/S
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Machines and instruments used for measuring and testing semiconductor manufacturing machines, nam... |
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G/S
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Machines and instruments used for measuring and testing
semiconductor manufacturing machines; co... |
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2022
|
G/S
|
Semiconductor manufacturing machines and their component
parts and fittings. |
|
|
Invention
|
Film forming method and film forming apparatus.
A film forming method includes (A) to (C) as fol... |
|
2021
|
G/S
|
Semiconductor manufacturing machines and their component parts and fittings; machines for mainten... |
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G/S
|
Semiconductor manufacturing machines and their component
parts and fittings; machines for mainte... |
