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2025
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Invention
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Etching method and etching apparatus.
A technique increases verticality in etching. An etching m... |
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Invention
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Substrate processing method and substrate processing apparatus.
Provided are a substrate process... |
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Invention
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Plasma processing apparatus.
A plasma processing apparatus includes a chamber; a substrate suppo... |
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Invention
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Substrate processing method and substrate processing apparatus.
A processing method of a combine... |
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Invention
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Method and apparatus for in-situ dry development.
An embodiment etching tool includes an etch ch... |
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Invention
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Extreme ultraviolet lithography patterning method.
A method for fabricating a semiconductor devi... |
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Invention
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Temperature control system and method of controlling temperature control system.
A temperature c... |
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Invention
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Plasma processing method and plasma processing apparatus.
A plasma processing method for perform... |
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Invention
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Plasma processing apparatus and substrate support.
A plasma processing apparatus includes a cham... |
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Invention
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Substrate processing apparatus and transfer method.
A substrate processing apparatus that perfor... |
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Invention
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Cleaning method and plasma processing apparatus.
A cleaning method is provided, which is perform... |
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Invention
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Substrate processing device and inner chamber assembly.
A substrate processing device includes a... |
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Invention
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Process environment for inorganic resist patterning.
The processing of radiation patternable org... |
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Invention
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Semiconductor device manufacturing method and semiconductor device manufacturing system.
A semic... |
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Invention
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Test apparatus and method for setting parameters.
A test apparatus includes a base on which a su... |
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Invention
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Information processing method, computer program, and information processing apparatus.
An inform... |
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Invention
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Teaching method for substrate transfer device and substrate processing apparatus.
There is a tea... |
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Invention
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Substrate processing device and control method.
A substrate processing device includes: a proces... |
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Invention
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Substrate processing method and substrate processing apparatus.
A substrate processing method in... |
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Invention
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Plasma processing apparatus and plasma generating method.
A plasma processing apparatus includes... |
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Invention
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Particle measurement device, particle measurement system, and particle measurement method. This p... |
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Invention
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Bonding apparatus and bonding method. This bonding apparatus bonds a first substrate to a second ... |
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Invention
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Etching method and etching device. An etching method according to the present disclosure includes... |
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Invention
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Measurement device and measurement method. This measurement device measures a bonded substrate ha... |
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Invention
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Method for forming ruthenium film and apparatus for forming ruthenium film. In the present invent... |
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Invention
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Substrate processing apparatus, information processing method, and computer program. Provided are... |
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Invention
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Etching method and plasma processing system. mnn (wherein, m is an integer of 0 or more, and n is... |
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Invention
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Plasma processing apparatus and method of controlling the same.
The plasma processing apparatus ... |
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Invention
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Semiconductor manufacturing apparatus and support method.
A semiconductor manufacturing apparatu... |
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Invention
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Film formation method and film formation device. A film formation method disclosed herein compris... |
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Invention
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Examination method, examination system, and tester system. Provided is an examination method for ... |
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Invention
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Method for controlling plasma measuring system and plasma measuring system.
There is a method fo... |
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Invention
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Plasma measurement method and plasma measurement system.
Provided is a plasma measurement method... |
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Invention
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Substrate processing method and substrate processing device. The present invention reduces the am... |
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Invention
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Substrate processing device, and substrate processing method. This substrate processing device co... |
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Invention
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Computer program, information processing device, and information processing method. Provided are ... |
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Invention
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Method and apparatus for forming metal silicide layer on substrate.
A method for forming a metal... |
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Invention
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Plasma processing device and etching method. This plasma processing device comprises a chamber, a... |
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Invention
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Method for embedding ruthenium and device for embedding ruthenium. The present invention reduces ... |
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G/S
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Semiconductor manufacturing machines and parts therefor; flat panel display manufacturing machine... |
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G/S
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Semiconductor manufacturing machines and their component
parts and fittings; flat panel display ... |
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Invention
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Methods for determining a temperature achieved by a heating process.
A method for determining a ... |
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Invention
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Modification device, processing system, and processing method. This modification device for modif... |
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Invention
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Film formation method and film formation device. [Problem] To selectively and vertically form a c... |
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Invention
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Film forming method and film forming apparatus. A film forming method according to one embodiment... |
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Invention
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Plasma-enhanced chemical vapor deposition method. A method for processing a substrate includes ha... |
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G/S
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Installation, maintenance and repair of semiconductor manufacturing machines; installation, maint... |
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G/S
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Installation, maintenance and repair of semiconductor
manufacturing machines; installation, main... |
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2024
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G/S
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Semiconductor manufacturing machines and their component parts and fittings |
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G/S
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Semiconductor manufacturing machines and their component parts and fittings; flat panel display m... |
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Invention
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In-situ wafer monitoring with dynamic backside gas feedback control as wafer bow countermeasure. ... |
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Invention
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Electrical energy produced by rotating magnets.
A substrate processing apparatus includes a subs... |
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Invention
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Plasma-enhanced chemical vapor deposition method.
A method for processing a substrate includes h... |
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Invention
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Conformal spacer-defined line cut structures.
A method of forming a line cut structure in a spac... |
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G/S
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Semiconductor manufacturing machines used for coating and deposition processes, and their compone... |
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G/S
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Downloadable computer software for controlling semiconductor manufacturing processes; downloadabl... |
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G/S
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Downloadable computer software for controlling semiconductor
manufacturing processes; downloadab... |
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2023
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Invention
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Abnormality management method, management device, and storage medium.
An abnormality management ... |
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G/S
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Machines and instruments used for measuring and testing semiconductor manufacturing machines, nam... |
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G/S
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Machines and instruments used for measuring and testing
semiconductor manufacturing machines; co... |
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Invention
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Substrate treatment apparatus.
Provided is a substrate treatment apparatus capable of reducing t... |
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2022
|
G/S
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Semiconductor manufacturing machines and their component
parts and fittings. |
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2021
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G/S
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Semiconductor manufacturing machines and their component parts and fittings; machines for mainten... |
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G/S
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Semiconductor manufacturing machines and their component
parts and fittings; machines for mainte... |
