2013
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Invention
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Liquid doping systems and methods for controlled doping of single crystal semiconductor material.... |
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Invention
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Fabrication of indium-doped silicon by the czochralski method. A method of growing a monocrystall... |
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Invention
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Indium-doped silicon wafer and solar cell using the same. A solar cell is provided, the solar cel... |
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Invention
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Method for transferring heat between two process streams.
Shell and tube heat exchangers that in... |
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Invention
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Dopant feeding device for dispensing dopant. A dopant feeding device for releasing dopant into a ... |
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Invention
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Gas doping systems for controlled doping of a melt of semiconductor or solar-grade material. A cr... |
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Invention
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System for machining seed rods for use in a chemical vapor deposition polysilicon reactor. A meth... |
2012
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Invention
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Systems and methods for controlling surface profiles of wafers sliced in a wire saw. Systems and ... |
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Invention
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Systems and methods for controlling surface profiles of wafers sliced in a wire saw.
Systems and... |
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Invention
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Systems and methods for controlling surface profiles of wafers sliced in a wire saw. Systems (100... |
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Invention
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Method for preparing molten silicon melt using high pressure meltdown. A method for melting granu... |
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Invention
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Method of loading a charge of polysilicon into a crucible. A method of loading a crucible include... |
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Invention
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Methods and systems for removing contamination from a wire of a saw. A system (100) for ultrasoni... |
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Invention
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Methods and systems for removing contaminants from a wire of a saw.
A system for ultrasonically ... |
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Invention
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Controlled doping device for single crystal semiconductor material and related methods.
A doping... |
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Invention
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Saw for cutting silicon into seed rods for use in a chemical vapor deposition polysilicon reactor... |
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Invention
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Methods and systems for monitoring and controlling silicon rod temperature. Systems and methods a... |
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Invention
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Cleaning tool for polysilicon reactor. Systems and methods are provided for cleaning an interior ... |
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Invention
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Cleaning tool for polysilicon reactor.
Systems and methods are provided for cleaning an interior... |
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Invention
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Methods and systems for controlling silicon rod temperature. Systems and methods are provided for... |
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Invention
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Methods and systems for controlling siiicon rod temperature.
Systems and methods are provided fo... |
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Invention
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Tool for harvesting polycrystalline silicon-coated rods from a chemical vapor deposition reactor.... |
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Invention
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Shell and tube heat exchangers and methods of using such heat exchangers. Shell and tube heat exc... |
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Invention
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Shell and tube heat exchangers and methods of using such heat exchangers.
Shell and tube heat ex... |
2011
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Invention
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Methods for controlling surface profiles of wafers sliced in a wire saw.
Methods are disclosed f... |
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Invention
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Systems for controlling surface profiles of wafers sliced in a wire saw.
Systems are disclosed f... |
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Invention
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Methods for controlling displacement of bearings in a wire saw.
Methods are disclosed for contro... |
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Invention
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Systems for controlling temperature of bearings in a wire saw.
Systems and are disclosed for con... |
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Invention
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Bell jar for siemens reactor including thermal radiation shield.
A bell jar for a Siemens reacto... |
2010
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Invention
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Bell jar for siemens reactor including thermal radiation shield. A bell jar for a Siemens reactor... |
2005
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Invention
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Process and plant for the purification of trichlorosilane and silicon tetrachloride. The inventio... |
2002
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Invention
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Automated control of wafer slicing process. A method and system for managing a sequence of proces... |
2001
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Invention
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Ideal oxygen precipitating epitaxial silicon wafers and oxygen out-diffusion-less process therefo... |
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Invention
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Method for treating an exhausted glycol-based slurry. A method of separating, recovering and reus... |
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Invention
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Method of forming a thin wax layer on a mounting block for mounting a semiconductor wafer. A meth... |
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Invention
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Contaminating particle classification system and method. A system and method for classifying cont... |
2000
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Invention
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Semiconductor wafer, polishing apparatus and method. A wafer polishing apparatus for polishing a ... |
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Invention
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Wire saw and process for slicing multiple semiconductor ingots. A wire saw (10) for simultaneousl... |
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Invention
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Method of polishing wafers. The method comprises the steps of mounting a first wafer (13) on the ... |
1999
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Invention
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Ideal oxygen precipitating silicon wafers and oxygen out-diffusion-less process therefor. A proce... |
1993
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Invention
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Process for the preparation of silicon wafers having controlled distribution of oxygen precipitat... |
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Invention
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Silicon wafers having controlled precipitation distribution. A silicon wafer containing oxygen pr... |
1991
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Invention
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Process for achieving controlled precipitation profiles in silicon wafers. The object of the inve... |