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2022
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Invention
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Substrate transport apparatus.
A transport apparatus including a frame, a drive section connecte... |
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2021
|
Invention
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Tray engine and methods for transferring trays to and from tools and in sorters.
A tray engine i... |
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Invention
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Substrate transport apparatus with independent accessory feedthrough.
A substrate transport appa... |
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Invention
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Dual scara arm.
A substrate transport apparatus having a drive section and a scara arm operably ... |
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2020
|
Invention
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Wafer aligner.
A semiconductor wafer transport apparatus includes a frame, a transport arm movab... |
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Invention
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Robot embedded vision apparatus. A substrate transport apparatus includes a transport chamber, a ... |
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Invention
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Substrate process apparatus.
A process apparatus including a front end with a load opening for l... |
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Invention
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Method and apparatus for substrate transport apparatus position compensation. A substrate transpo... |
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Invention
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Substrate processing apparatus. A substrate processing apparatus including a frame, a first SCARA... |
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Invention
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Method and apparatus for brushless electrical machine control. A variable reluctance motor load m... |
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2019
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Invention
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Load lock fast pump vent. A semiconductor processing tool is disclosed, the tool having a frame f... |
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Invention
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Compact direct drive spindle. A substrate transport apparatus including a frame, at least one arm... |
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Invention
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Scalable motion control system.
A control system includes a clustered architecture having a mast... |
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Invention
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Load port module. A substrate loading device including a frame adapted to connect to a substrate ... |
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Invention
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Load port module. Substrate loading device including a frame adapted to connect the substrate loa... |
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Invention
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Substrate processing apparatus. A substrate processing apparatus including a frame, a SCARA arm m... |
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Invention
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Unequal link scara arm.
A substrate transport apparatus comprising a drive section, a controller... |
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Invention
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Substrate transport. A substrate transport system includes a carrier having a housing forming an ... |
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Invention
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Substrate transport apparatus. A substrate transport apparatus including a frame, an upper arm ro... |
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Invention
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Automatic wafer centering method and apparatus. A substrate transport apparatus including a trans... |
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2018
|
Invention
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Transport apparatus. A substrate transport apparatus for transporting substrates, the substrate t... |
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Invention
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Dual scara arm. A substrate transport apparatus having a drive section and a scara arm operably c... |
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Invention
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On the fly automatic wafer centering method and apparatus. A Substrate processing apparatus inclu... |
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Invention
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Intelligent condition monitoring and fault diagnostic system for preventative maintenance. A syst... |
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Invention
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Substrate transport apparatus with independent accessory feedthrough. A substrate transport appar... |
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Invention
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End effector with slides for transferring trays. An end effector for transferring a tray is descr... |
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Invention
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Time-optimal trajectories for robotic transfer devices. A time-optimal trajectory generation meth... |
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Invention
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Semiconductor process transport apparatus comprising an adapter pendant. A semiconductor process ... |
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Invention
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Inspection system and method of inspection for substrate containers.
The present disclosure rela... |
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Invention
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Side opening unified pod. A substrate processing system including a processing section arranged t... |
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Invention
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Sealed robot drive. A transport apparatus including a housing, a drive mounted to the housing, an... |
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Invention
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Tool compiler. Automatic generation of documentation and software for an equipment or tool, toget... |
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Invention
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Workpiece support structures and apparatus for accessing same. A workpiece container stores at le... |
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Invention
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Semiconductor wafer handling and transport. A substrate processing system including at least two ... |
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2017
|
Invention
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Integrated systems for interfacing with substrate container storage systems. A storage system and... |
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Invention
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Substrate processing apparatus. A substrate processing apparatus including a frame and at least o... |
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Invention
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Substrate handling system for aligning and orienting substrates during a transfer operation. A sy... |
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Invention
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Collaborative robot. A collaborative robot employs low ratio drives for three or more axes of mov... |
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Invention
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Dual arm robot. A substrate processing apparatus including a frame, a first arm coupled to the fr... |
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2016
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Invention
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Wafer tray sorter with door coupled to detector. A tray engine includes a vertical drive column, ... |
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Invention
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Substrate transport apparatus with interchangeable motor modules. A transport apparatus including... |
