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2026
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Invention
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Power control technique for raman spectroscopy. A Raman spectroscopy system configured for high-v... |
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2025
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Invention
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Multiple-height, spectral-based metrology. Systems and methods for OCD metrology are provided inc... |
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Invention
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High-resolution, acoustic-optical metrology system. Systems and methods of optical metrology and ... |
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Invention
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Nanosheet characterization using power-dependent raman spectroscopy. The present disclosure provi... |
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Invention
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Single-shot, multi-spectral interferometry. An optical interferometry system and associated metho... |
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Invention
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Optical metrology with supercontinuum laser illumination. A system and methods of optical metrolo... |
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Invention
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Synthetic grating pump probe scatterometry. The present disclosure provides an optical metrology ... |
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Invention
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Photoreflectance method and system. A system is presented for use in photoreflectance (PR) measur... |
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Invention
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Time-domain optical metrology and inspection of semiconductor devices.
Semiconductor device metr... |
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Invention
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Systems and methods for optical metrology.
A method for measuring characteristics of a workpiece... |
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Invention
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Optical metrology system and method.
A measurement system for use in optical metrology, the meas... |
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Invention
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Hybrid metrology method and system.
A method and system are presented for use in measuring chara... |
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Invention
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Confocal raman. An optical measurement system that includes a confocal optics that includes an il... |
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Invention
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Depth-resolution optical measurement system. The present disclosure provides an optical measureme... |
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Invention
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Pump-probe, thz time-domain spectroscopy for semiconductor metrology. A system and methods for ch... |
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Invention
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Metrology method and system. A control system for use in metrology measurements of patterned stru... |
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Invention
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Machine and deep learning methods for spectra-based metrology and process control.
A system and ... |
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Invention
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System and method for use in depth-resolved inspection of multi-layer patterned structures. N N N... |
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Invention
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Metrology and process control for semiconductor manufacturing.
A semiconductor metrology system ... |
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2024
|
Invention
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Vertically-resolved metrology with asymmetry-sensitive measurement. A system and methods for OCD ... |
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Invention
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Accurate raman spectroscopy.
An optical measurement system, which include an illumination path t... |
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Invention
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Accurate raman spectroscopy.
An optical measurement system, the optical measurement system compr... |
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Invention
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Raman spectroscopy based measurements in patterned structures.
A method for use in measuring one... |
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Invention
|
Motor thermal management by field-oriented control currents. Apparatus and methods are provided f... |
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Invention
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Multi purpose channel for optical metrology. An integrated metrology system that includes a metro... |
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Invention
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Method and system for optimizing optical inspection of patterned structures.
A system for use in... |
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Invention
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Detecting outliers and anomalies for ocd metrology machine learning.
A system and methods for OC... |
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Invention
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An interferometry technique. An interferometry system for evaluating a sample having a region of ... |
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Invention
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Broadband interferometry. A broadband interferometry system that includes (i) an interferometer t... |
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Invention
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High throughput optical metrology. There is provided an integrated system that includes (i) an in... |
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Invention
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Optics for use in generating an x-ray beam. A system for perturbations based evaluation of a prop... |
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Invention
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Configurable illumination source for optical metrology and related methods. The application perta... |
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Invention
|
Optical technique for material characterization. A polarized Raman Spectrometric system for defin... |
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Invention
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Optical phase measurement method and system. A measurement system for use in measuring parameters... |
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Invention
|
Raman spectroscopy based measurement system. A method and system are presented for use in measuri... |
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Invention
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Full wafer metrology. A method for operating an integrated evaluation system, the method includes... |
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Invention
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Method and system for optical characterization of patterned samples.
A method and system are pre... |
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2023
|
Invention
|
Coherent spectroscopy for tsv.
A system and methods for OCD metrology are provided including set... |
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Invention
|
Machine and deep learning methods for spectra-based metrology and process control. A system and m... |
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Invention
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Evaluation of abnormalities of a sample.
A method for evaluating a sample, the method includes p... |
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Invention
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Optical critical dimensions (ocd) metrology for thick stacks.
A method for evaluating a thick tr... |
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Invention
|
Full-wafer metrology up-sampling.
A system and methods for OCD metrology are provided including ... |
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Invention
|
High frequency modulation chopper.
A system for evaluating a sample, the system includes (i) a c... |
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Invention
|
Combined photothermal and ocd for semi-opaque structures.
A metrology system that may include (i... |
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|
Invention
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System and method for determining parameters of patterned structures from optical data.
A contro... |
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2022
|
Invention
|
High throughput optical measurement system.
There is provided an optical measurement system that... |
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|
Invention
|
Moving apparatus along multiple axes.
Positioning apparatus by determining multiple candidate pa... |
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|
Invention
|
Systems and methods for optical measuring of properties of samples using polarized optical beams.... |
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Invention
|
System and method for library construction and use in measurements on patterned structures.
A co... |
|
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Invention
|
Metrology technique for semiconductor devices.
A method for semiconductor device metrology. The ... |
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2020
|
P/S
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Optical monitoring, measurement and inspection equipment for measuring dimensional and/or materia... |
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2018
|
P/S
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Monitoring, measurement and inspection equipment for measuring physical dimensions of samples, th... |
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|
P/S
|
Monitoring, measurement and inspection equipment and systems
for process control of semiconducto... |
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2005
|
P/S
|
Optical test equipment, namely, monitoring, measuring and inspection instruments and computer ope... |
