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2024
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Invention
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Chamber for an ionization vacuum gauge.
A chamber, for bounding a plasma generation area in a va... |
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Invention
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Chamber for an ionization vacuum gauge. Chamber (11, 12, 13) for bounding a plasma generation are... |
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2023
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Invention
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Device and method for determining a density of a radical in a gas.
A device (10) for determining... |
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Invention
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Device and method for determining a density of a radical in a gas. Device (10) for determining a ... |
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2022
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Invention
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Vacuum feedthrough, electrode assembly, and device for generating a silent plasma discharge. A va... |
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Invention
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Device and method for plasma generation in a wide pressure range and system and method for optica... |
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2020
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Invention
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Method for operating a group of pressure sensors.
Method for operating a group 1 of pressure sen... |
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Invention
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Operating method for a group of pressure sensors.
A method for operating a group of pressure sen... |
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Invention
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Operating method for a group of pressure sensors. Method (100) for operating a group of pressure ... |
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Invention
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Method for operating a group of pressure sensors. Method for operating a group 1 of pressure sens... |
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Invention
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Method for determining a pressure in a pressure measurement cell and a measurement cell assembly.... |
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Invention
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Method for determining a pressure in a pressure measurement cell, and measurement cell assembly. ... |
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2019
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Invention
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Vacuum-tight electrical feedthrough. A vacuum pressure sensor includes a vacuum-tight electrical ... |
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Invention
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Method for detecting pressure, and pressure sensor. e) determining 105 the pressure in the vacuum... |
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Invention
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Method for detecting pressure, and pressure sensor. The invention relates to a method (100) for d... |
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Invention
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Vacuum-tight electrical feedthrough. The invention relates to a vacuum-tight electrical feedthrou... |
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2016
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Invention
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Capacitive vacuum measuring cell having a multi-electrode.
The invention relates to a capacitive... |
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Invention
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Capacitive vacuum measuring cell having a multi-electrode. The invention relates to a capacitive ... |
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Invention
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Method for processing a measurement signal from a pressure measurement cell, and a measurement ce... |
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2015
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Invention
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Ionization vacuum measuring cell. The invention relates to an ionization vacuum measuring cell (1... |
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2013
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Invention
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Method and device for measuring a vacuum pressure using a measuring cell arrangement. Arrangement... |
