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2024
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Invention
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Monitoring method for chemical mechanical polishing and chemical mechanical polishing device. A m... |
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2022
|
Invention
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Wafer post-processing device. Disclosed in the present invention is a wafer post-processing devic... |
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Invention
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Rotary wafer exchange system. Disclosed is a rotary wafer exchange system; the rotary wafer excha... |
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Invention
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Wafer vertical rotation processing apparatus based on marangoni effect. Disclosed is a wafer vert... |
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Invention
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Flexible membrane, bearing head and planarization apparatus for chemical mechanical planarization... |
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Invention
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Chemical mechanical planarization control method and system. A chemical mechanical planarization ... |
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2021
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P/S
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Components for machines and machine tools, grinding machines, material handling machines, food pr... |
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P/S
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Buffing and polishing; Burnishing, not by abrasion; Machinery installation, maintenance and repai... |
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Invention
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Vertical marangoni wafer processing device. A vertical marangoni wafer processing device, compris... |
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Invention
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Marangoni drying device with adjustable spray angle. A Marangoni drying device with an adjustable... |
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Invention
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Substrate thinning method, substrate thinning device, and operating method thereof. A substrate t... |
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2018
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Invention
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Adaptive polishing head. An adaptive polishing head (100), comprising: a pivot component (10), a ... |
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Invention
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Polishing head capable of preventing water accumulation. The invention discloses a polishing head... |
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2017
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Invention
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Wafer clamping device. A wafer clamping device (100) comprising: a first clamping member (10) hav... |
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Invention
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Wafer transport apparatus. A wafer transport apparatus (100), comprising: a wafer clamping assemb... |
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Invention
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Gas passage pressure response system. Disclosed is a gas passage pressure response system (100), ... |
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Invention
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Chemical mechanical polishing system. A chemical mechanical polishing system comprises: a front-e... |
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Invention
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Pressure loading film. Disclosed is a pressure loading film (100). The pressure loading film (100... |
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Invention
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Positioning assembly. Disclosed is a positioning assembly (100) comprising: a support (10); and a... |
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Invention
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Cmp equipment polishing head wafer falling detection method and system. A CMP equipment polishing... |
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Invention
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Polishing apparatus. Disclosed is a polishing apparatus (100), comprising a polishing device (10)... |
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Invention
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Apparatus for measuring friction force of lubricant. An apparatus for measuring a friction force ... |
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Invention
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Apparatus for chemical-mechanical polishing. An apparatus for chemical-mechanical polishing is pr... |
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Invention
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Chemical-mechanical polishing machine. A chemical-mechanical polishing machine (100) is provided,... |
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2011
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Invention
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Measuring device for measuring film thickness of silicon wafer. A measuring device for measuring ... |
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Invention
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Method for measuring thickness of film on wafer edge. A method for measuring a film thickness of ... |
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Invention
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Chemical mechanical polishing machine and chemical mechanical polishing apparatus comprising the ... |
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Invention
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Device and method for measuring thickness of slurry and chemical mechanical polishing apparatus c... |
