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2024
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Invention
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Vacuum valve. In the present invention, a sealing blade unit and a rotary shutter unit are operat... |
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2023
|
Invention
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Substrate raising/lowering module, substrate processing module including same, and substrate proc... |
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2020
|
Invention
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Wafer processing apparatus. The present invention relates to a wafer processing apparatus, and mo... |
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Invention
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Vacuum valve. The present invention is configured such that, when a fluid discharge part is open,... |
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Invention
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Vacuum valve. The present invention provides a vacuum valve which is configured such that gas sup... |
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Invention
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Valve module and substrate processing device comprising same. The present invention relates to a ... |
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2018
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Invention
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Vacuum valve actuator. According to the present invention, a main body housing is divided into tw... |
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Invention
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Shutter valve. The present invention configures a shutter valve which opens and closes a substrat... |
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2016
|
Invention
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Bidirectional gate valve. The present invention is characterized by being comprised of: a blade (... |
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Invention
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Blade for vacuum valve. The present invention comprises: an opening and closing plate formed in a... |
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Invention
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Vacuum valve. The present invention comprises: a valve housing having a driving space formed ther... |
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2015
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Invention
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Vacuum valve. The present invention relates to a vacuum valve and is derived in order to solve sp... |
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Invention
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Angle valve having fixed heater block. The present invention relates to an angle valve having a f... |
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2013
|
Invention
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Gate valve
게이트 밸브. The present invention relates to a gate valve (100) comprising: a valve blade ... |
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2010
|
Invention
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Door valve. An up and down operating actuator unit which manages upward and downward motions of a... |
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Invention
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Butterfly valve device. The present invention relates to a butterfly valve device. According to t... |
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2007
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Invention
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Rectangular gate valve. A rectangular gate valve having an improved driving action is disclosed. ... |
