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2025
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P/S
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Semiconductor apparatus and components therefor for detecting and measuring defects |
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P/S
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Semiconductor apparatus and components therefor for detecting and measuring features and defects ... |
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2024
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Invention
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Substrate mapping using deep neural-networks.
Various examples include a system and network to m... |
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Invention
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Blur reduction techniques for semiconductor inspection. Disclosed herein are techniques to reduce... |
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Invention
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Interferometer configured to measure small structures. An interferometer is configured to charact... |
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Invention
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Measurements of structures in presence of signal contaminations. Contamination of metrology data ... |
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Invention
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Non-destructive inspection and manufacturing metrology systems and methods.
Measuring or inspect... |
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Invention
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Generating predictions and/or other analyses using artificial intelligence.
A method for predict... |
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Invention
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Generating predictions and/or other analyses using artificial intelligence. A method for predicti... |
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Invention
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Photo response non-uniformity correction during semiconductor inspection. Image sensors assist in... |
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Invention
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Tracking and/or predicting substrate yield during fabrication.
Tracking and/or predicting the yi... |
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Invention
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Tracking and/or predicting substrate yield during fabrication. Tracking and/or predicting the yie... |
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Invention
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A system and method for fast microscopy. A time resolved reflectivity metrology device images str... |
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Invention
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System and method for fast microscopy.
A time resolved reflectivity metrology device images stru... |
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Invention
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Multi pump-probe encoding-decoding for opto-acoustic metrology. An opto-acoustic metrology device... |
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Invention
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Multi pump-probe encoding-decoding for opto-acoustic metrology.
An opto-acoustic metrology devic... |
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Invention
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Transfer learning for metrology data analysis. Non-contact measurements, such as optical measurem... |
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Invention
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Transfer learning for metrology data analysis.
Non-contact measurements, such as optical measure... |
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Invention
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Substrate edge patterning techniques. Various techniques to quickly image one or more edge region... |
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Invention
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Adaptive spatial pattern recognition for defect detection. Systems and methods for identifying an... |
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Invention
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Adaptive spatial pattern recognition for defect detection.
Systems and methods for identifying a... |
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Invention
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Interferometer with auxiliary lens for measurement of a transparent test object. A Mach-Zehnder i... |
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2023
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Invention
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Substrate edge patterning techniques.
Various techniques to quickly image one or more edge regio... |
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Invention
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Polarization interferometer. A polarization interferometer is configured to characterize a test o... |
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Invention
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Overlay correction for advanced integrated-circuit devices.
Various examples described herein in... |
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Invention
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Overlay correction for advanced integrated-circuit devices. Various examples described herein inc... |
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Invention
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Stage actuator particle shield. A particle shield for an actuator housing in a semiconductor equi... |
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Invention
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Inspection method and system for integrated circuit substrates. An inspection system for capturin... |
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Invention
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Two-axis-motion from a linear actuator. Various examples include an apparatus to provide motion i... |
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Invention
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Stage actuator particle shield.
A particle shield for an actuator housing in a semiconductor equ... |
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Invention
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Combined modeling and machine learning in optical metrology. Complex three-dimensional structures... |
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Invention
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Combined modeling and machine learning in optical metrology.
Complex three-dimensional structure... |
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Invention
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Blur reduction techniques for semiconductor inspection.
Disclosed herein are techniques to reduc... |
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Invention
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Parameter aggregation and normalization for manufacturing tools. Management and maintenance of to... |
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Invention
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Parameter aggregation and normalization for manufacturing tools.
Management and maintenance of t... |
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Invention
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Substrate defect-detection and comparison.
Various examples described herein include image-proce... |
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Invention
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Substrate defect-detection and comparison. Various examples described herein include image-proces... |
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Invention
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Log file aggregator and data visualization for semiconductor control systems.
The present disclo... |
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Invention
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Composite data for device metrology. A machine learning model that uses composite metrology data ... |
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Invention
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Composite data for device metrology.
A machine learning model that uses composite metrology data... |
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Invention
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Performance management of semiconductor substrate tools.
Proactive management of semiconductor s... |
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Invention
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Multi-sized substrate fixture.
Various examples include a multi-sized substrate fixture configur... |
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Invention
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Defect detection in manufactured articles using multi-channel images. A system and/or method of d... |
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Invention
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Defect detection in manufactured articles using multi-channel images.
A system and/or method of ... |
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Invention
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Interferometer with auxiliary lens for measurement of a transparent test object.
A Mach-Zehnder ... |
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Invention
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Mask and procedure for process performance detection.
A metrology target is configured for measu... |
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2022
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Invention
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Optical metrology with influence map of unknown section.
Optical measurement of a sample that in... |
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Invention
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Apparatus to characterize substrates and films. Various examples include an apparatus to characte... |
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P/S
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Profilometer, namely, a measuring instrument used to measure
a surface profile and surface rough... |
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Invention
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System and method for performing characterization of a sample.
An optical metrology device inclu... |
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Invention
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System and method for performing characterization of a sample using multi-wavelength laser acoust... |
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P/S
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Instruments for the measurement of thicknesses and
mechanical properties of metal and opaque films. |
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P/S
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Software for data analysis and control manufacturing. |
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P/S
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Metrology equipment that employs spectroscopic ellipsometry
and polarized reflectometry for meas... |
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P/S
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Thin film, structure, and wafer surface measurement devices,
namely, metrology and inspection to... |
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P/S
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Optical fluorescence imaging devices for integrated circuit
device inspection. |
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P/S
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Lithography machines for the manufacture of
microelectronics, integrated circuits, light emittin... |
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P/S
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downloadable software for use in analyzing manufacturing data, making predictions based on manufa... |
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P/S
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Metrology inspection equipment for use in the manufacturing,
inspection, testing and repair of s... |
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P/S
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Inspection and metrology equipment and devices, namely,
equipment and devices that sense and/or ... |
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P/S
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Metrology equipment that employs spectroscopic ellipsometry and polarized reflectometry for measu... |
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P/S
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Instruments for the measurement of thicknesses and mechanical properties of metal and opaque films |
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P/S
|
Inspection and metrology equipment and devices, namely, equipment and devices that sense and/or c... |
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P/S
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Lithography machines for the manufacture of microelectronics, integrated circuits, light emitting... |
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Invention
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Post-overlay compensation on large-field packaging.
A lithography challenge for large heterogene... |
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P/S
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Profilometer, namely, a measuring instrument used to measure a surface profile and surface roughness |
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2021
|
P/S
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Picosecond optoacoustic system comprised of machines,
components and operating software for char... |
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P/S
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Automated system used to measure thin film thickness of
dielectric coatings and critical dimensi... |
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P/S
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Automated system comprising a broad band spectroscopic ellipsometer and reflectometer for use in ... |
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P/S
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Picosecond optoacoustic system comprised of machines, components and operating software for chara... |
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2020
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P/S
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Recorded computer software for use in the operation, control and calibration of metrology inspect... |
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P/S
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Fourier transform infrared system for determining the
composition and quality of semiconductor s... |
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P/S
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Electronic instruments for use in inspection and measurement
of industrial components, namely, a... |
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P/S
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Providing on-line non-downloadable modeling, visualization and analysis software for use in analy... |
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P/S
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Fourier transform infrared system for determining the composition and quality of semiconductor su... |
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P/S
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Electronic instruments for use in inspection and measurement of industrial components, namely, an... |
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2019
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P/S
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Machines for manufacturing semiconductors. |
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P/S
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Metrology inspection equipment for use in the manufacturing, inspection, testing and repair of se... |
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2018
|
P/S
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Machines for manufacturing semiconductors |
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P/S
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Machines for manufacturing semiconductors. Design and development of methods of accommodating dif... |
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P/S
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Inspection equipment and devices for inspecting and characterizing substrates such as semiconduct... |
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2017
|
P/S
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Computer software for determining and assessing characteristics of 3D structures, such as bumps, ... |
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2016
|
P/S
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Inspection and metrology equipment and devices; instruments and devices that sense and/or capture... |
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P/S
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Inspection equipment and devices, namely, equipment and devices that sense and/or capture images ... |
