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2025
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Invention
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Navigation accuracy using imaging assembly coupled with detector assemblies.
A system for X-ray ... |
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2024
|
Invention
|
Small-angle x-ray scatterometry.
An x-ray apparatus includes a mount that is configured to hold ... |
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Invention
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X-ray analysis system with laser-driven source. A system (10, 11) for X-ray analysis, the system ... |
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2023
|
Invention
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Analysis of x-ray scatterometry data using deep learning.
A method for training a neural network... |
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Invention
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X-ray diffraction imaging detector having multiple angled input faces. A detector assembly of an ... |
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Invention
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Small-angle x-ray scatterometry. A method for evaluating a sample that includes an array of struc... |
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P/S
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X-ray data analysis software for semiconductor characterization, metrology and inspection. |
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2022
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Invention
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Monitoring properties of x-ray beam during x-ray analysis. A system for X-ray analysis, includes:... |
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P/S
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Downloadable computer software for use in X-ray data analysis for semiconductor characterization,... |
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Invention
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Spot-size control in reflection-based and scatterometry-based x-ray metrology systems. An X-ray s... |
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Invention
|
Navigation accuracy using camera coupled with detector assembly. A system includes first and seco... |
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2021
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Invention
|
Small-angle x-ray scatterometry. A method for evaluating an array of high aspect ratio (HAR) stru... |
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P/S
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X-ray apparatus not for medical purposes; X-ray apparatus for semiconductor characterization, met... |
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Invention
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Transmission x-ray critical dimension (t-xcd) characterization of shift and tilt of stacks of hig... |
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P/S
|
Measuring apparatus; measuring instruments. |
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P/S
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X-ray measuring apparatus other than for medical purposes; X-ray measuring instruments other than... |
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P/S
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X-ray apparatus not for medical purposes |
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2019
|
Invention
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X-ray tube. An X-ray tube that may include a cathode that is configured to generate an electron b... |
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Invention
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Method and apparatus for x-ray scatterometry. A method for X-ray scatterometry includes receiving... |
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Invention
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Small-angle x-ray scatterometry. An x-ray apparatus, that may include a mount that is configured ... |
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Invention
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Wafer alignment for small-angle x-ray scatterometry. An X-ray apparatus includes a mount, an X-ra... |
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Invention
|
X-ray source optics for small-angle x-ray scatterometry. An X-ray apparatus includes a mount, an ... |
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Invention
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X-ray detection optics for small-angle x-ray scatterometry. An X-ray apparatus includes a mount, ... |
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Invention
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Image contrast in x-ray topography imaging for defect inspection. A system for X-ray topography, ... |
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2018
|
P/S
|
Computer software for processing data of laboratory and semiconductor process control instruments |
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P/S
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Computer software for processing data of laboratory and semiconductor process control instruments. |
|
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Invention
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X-ray fluorescence apparatus for contamination monitoring. An apparatus for X-ray measurement, in... |
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2017
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P/S
|
X-ray apparatus not for medical purposes; X-ray sources. |
|
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Invention
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Closed-loop control of x-ray knife edge. Apparatus for X-ray scatterometry includes an X-ray sour... |
|
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Invention
|
X-ray tube. An X-ray tube includes a cathode, which is configured to generate an electron beam, a... |
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2015
|
Invention
|
Measurement of small features using xrf. A method for X-ray measurement includes, in a calibratio... |
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Invention
|
X-ray tube anode. An X-ray tube includes a cathode and an anode. The cathode is configured to gen... |
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Invention
|
X-ray scatterometry apparatus. Apparatus, including a sample-support that retains a sample in a p... |
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|
Invention
|
Method for accurately determining the thickness and/or elemental composition of small features on... |
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2014
|
Invention
|
X-ray source assembly. An apparatus includes an X-ray tube, X-ray optics, one or more coils and c... |
|
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Invention
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Angle calibration for grazing-incidence x-ray fluorescence (gixrf). A method includes directing a... |
|
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Invention
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Estimation of xrf intensity from an array of micro-bumps. A method for inspection includes captur... |
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2013
|
Invention
|
X-ray detector assembly with shield. An X-ray detector assembly includes an integrated circuit, w... |
|
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Invention
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X-ray beam conditioning. An X-ray optical device includes a crystal containing a channel, which p... |
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2012
|
Invention
|
X-ray inspection of bumps on a semiconductor substrate. A method for inspection includes irradiat... |
|
|
Invention
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Detection of wafer-edge defects. Apparatus for inspection of a disk, which includes a crystalline... |
|
|
Invention
|
High-resolution x-ray diffraction measurement with enhanced sensitivity. A method for analysis in... |
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|
Invention
|
Combining x-ray and vuv analysis of thin film layers. Apparatus for inspection of a sample includ... |
|
|
Invention
|
Optical vacuum ultra-violet wavelength nanoimprint metrology. An optical metrology apparatus for ... |
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2011
|
Invention
|
Enhancing accuracy of fast high-resolution x-ray diffractometry. A method for analysis includes d... |
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2010
|
Invention
|
Fast measurement of x-ray diffraction from tilted layers. A method for analysis includes directin... |
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|
Invention
|
Broad band referencing reflectometer. A spectroscopy system is provided which is optimized for op... |
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Invention
|
Method and apparatus for accurate calibration of vuv reflectometer. A calibration technique is pr... |
|
|
Invention
|
Method and system for using reflectometry below deep ultra-violet (duv) wavelengths for measuring... |
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2009
|
Invention
|
Method and apparatus for optically measuring periodic structures using orthogonal azimuthal sampl... |
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Invention
|
Method and apparatus for using multiple relative reflectance measurements to determine properties... |
|
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Invention
|
Automated calibration methodology for vuv metrology system. A calibration pad having multiple cal... |
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2008
|
Invention
|
Accurate measurement of layer dimensions using xrf. A method for inspection of a sample includes ... |
|
|
Invention
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Automated selection of x-ray reflectometry measurement locations. The computer-implemented method... |
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2007
|
Invention
|
X-ray measurement of properties of nano-particles. A method for analyzing a sample includes direc... |
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2006
|
Invention
|
Contamination monitoring and control techniques for use with an optical metrology instrument. A t... |
|
|
P/S
|
Scientific, measuring and analytical apparatus and instruments; scientific, measuring and analyti... |
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2004
|
P/S
|
X-ray metrology instruments for analysis and characterization of thin films, and accessories, nam... |
|
|
P/S
|
Instruments for analysis of materials and for characterization and metrology of thin films, namel... |
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2000
|
P/S
|
X-ray generating tubes and detectors; x-ray focusing devices. Consulting services in x-ray techno... |
|
1997
|
P/S
|
non-medical X-ray generating tubes; [non-medical X-ray detectors;] non-medical X-ray focusing dev... |
