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2024
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Invention
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Method and device for depositing a chemically modified metal film. The present invention pertains... |
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Invention
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Measuring device for measuring a thickness of a film of material deposited on a substrate and fil... |
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Invention
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Wafer holder. ccc is defined as a distance in a direction parallel to axis Z between said annular... |
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Invention
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Soft magnetic multilayer desposition apparatus, methods of manufacturing and magnetic multilayer.... |
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2023
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Invention
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A microwave plasma reactor with a plurality of emitters and absorbers and a method for plasma pro... |
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Invention
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Chamber for degassing substrates.
A heater and/or cooler chamber includes a heat storage block o... |
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Invention
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Process to deposit quantized nano layers by magnetron sputtering. mp1mhh 5 nm. |
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P/S
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Machines for manufacturing semi-conductor substrates and
thin-film deposits using vacuum techniq... |
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Invention
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Process device for pecvd-processing. ccc) with its outer circumference over an outer diameter of ... |
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P/S
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Machines for manufacturing semi-conductor substrates and thin film deposits using vacuum techniqu... |
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Invention
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Vacuum layer deposition apparatus and method of depositing a layer on a substrate, especially on ... |
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2022
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Invention
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Methods of and apparatus for magnetron sputtering. In a magnetron sputtering reaction space a mag... |
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Invention
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Process shutter arrangement.
A process shutter arrangement for a vacuum process system is disclo... |
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Invention
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Process shutter arrangement. DoDo1-31-3SiSiSi, and corresponding with positioning mortises (4) to... |
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Invention
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Sputtering apparatus for coating of 3d-objects. An apparatus to coat at least one three-dimension... |
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Invention
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Substrate processing apparatus for temperature measurement of a moving substrate and method of me... |
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Invention
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Sputtering apparatus for coating of 3d-objects. 122 transverse to axis Z, both being offset to th... |
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Invention
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Vacuum treatment apparatus and methods for manufacturing vacuum treated substrates.
The substrat... |
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Invention
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Vacuum treatment apparatus and methods for manufacturing vacuum treated substrates. The substrate... |
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2021
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Invention
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Measuring device and method for measuring parameters of a piezoelectric crystal onto which a thin... |
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Invention
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Biometric authentication system.
A biometric authentication system including:
... |
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Invention
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Biometric authentication system. xxx layer, and/or a blocking layer deposited on the outermost si... |
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Invention
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Vacuum treatment apparatus.
So as to perform a vacuum surface treatment on a workpiece at a pred... |
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Invention
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Vacuum treatment apparatus. So as to perform a vacuum surface treatment on a workpiece at a prede... |
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Invention
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Apparatus and process with a dc-pulsed cathode array.
An apparatus for sputter deposition of mat... |
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Invention
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Apparatus and process with a dc-pulsed cathode array. T jSDTTTS TS ; • - a pedestal (15) designed... |
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Invention
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Vacuum recipient apparatus with at least one treatment station. maxmax) into maintenance position... |
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2020
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Invention
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Phase shift controlled sputter system and process. 2 2 to the pedestal to form a bias electrode; ... |
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Invention
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Method of sputter-coating substrates or of manufacturing sputter coated substrates and apparatus.... |
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Invention
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Gas ring for a pvd source.
A gas ring for a PVD-source with a cathode having a target for materi... |
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Invention
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Gas ring for a pvd source. A gas ring for a PVD-source (1) with a cathode (24) having a target (6... |
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Invention
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Vacuum process treatment chamber and method of treating a substrate by means of a vacuum treatmen... |
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Invention
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Substrate support unit, and apparatus and method for depositing a layer using the same.
A substr... |
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Invention
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Substrate support unit, and apparatus and method for depositing a layer using the same. A substra... |
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Invention
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Piezoelectric coating and deposition process. d.
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Invention
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Method of producing ions and apparatus.
A method of producing hydrogen ions includes generating ... |
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2019
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Invention
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Vacuum treatment apparatus and method for vacuum plasma treating at least one substrate or for ma... |
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Invention
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Vacuum system and method to deposit a compound layer. A vacuum apparatus to deposit a compound la... |
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Invention
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Liquid sputter target. A sputtering device to sputter a liquid target. The sputtering device incl... |
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Invention
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Vacuum treatment apparatus and method of vacuum treating substrates.
For vacuum treatment, a sub... |
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Invention
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Plasma enhanced atomic layer deposition (peald) apparatus.
Within a vacuum recipient plasma enha... |
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Invention
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Deposition process for piezoelectric coatings. A method to deposit a coating including a material... |
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Invention
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Method and aparatus for low particle plasma etching.
A plasma etching device including a vacuum ... |
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Invention
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Substrate vacuum treatment apparatus and method therefor. A vacuum treatment apparatus for substr... |
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2018
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Invention
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Rf power delivery to vacuum plasma processing. Rf power is supplied to a vacuum processing module... |
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Invention
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Method and apparatus for treating a substrate.
A method of treating a substrate or of manufactur... |
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2015
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P/S
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Machines and machine tools, in particular vacuum treatment installations; vacuum coating faciliti... |
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P/S
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Chemicals used in industry, science, in particular for
coatings, surface layers, ceramic and met... |
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2012
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P/S
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Coatings and thin layers of semiconductors, metals,
dielectrics or plastics or their compounds s... |
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2011
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P/S
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Machines and equipment for producing photovoltaic solar
modules, panels, cells and generators, n... |
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P/S
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Machines and equipment for the plasma assisted manufacture of, and the plasma treatment of, semic... |
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P/S
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Machinery and equipment for the plasma assisted manufacture
or the plasma treatment of parts suc... |
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2009
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P/S
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Vacuum coating installations, in particular for plasma
enhanced chemical vapour deposition (PECV... |
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P/S
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Vacuum deposition installations, in particular for PECVD, PVD and CVD processes, manufacturing in... |
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1997
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P/S
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machinery used to fabricate semi-conductors |
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1996
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P/S
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Machine modules for manufacturing semi-conductors, by
cathode sputtering, by evaporation, by che... |
