|
2007
|
Invention
|
Micromechanical slow acting valve system.
The present invention provides an integrated microvalv... |
|
|
Invention
|
Micromechanical slow acting valve system. The present invention provides an integrated microvalve... |
|
|
Invention
|
Micro system based solid state gas storage. The present invention provides a gas storage system (... |
|
|
Invention
|
Miniaturized high conductivity thermal/electrical switch. The present invention is a thermally co... |
|
|
Invention
|
Micromachined continuous time delay phase shifter. The present invention relates to methods and s... |
