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2024
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Invention
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Chuck for acquiring a warped workpiece.
A chuck includes a chuck surface, a plurality of vacuum ... |
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Invention
|
Configurable chuck and ring apparatus.
A chuck and a method for chemical and mechanical planariz... |
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Invention
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Configurable chuck apparatus for chemical mechanical planarization and cooperating ring. A chuck ... |
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Invention
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Chuck for acquiring a warped workpiece by amplified suction.
A chuck for holding a workpiece, in... |
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2022
|
Invention
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Chuck for acquiring a warped workpiece. A chuck includes a chuck surface and extendible port asse... |
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2021
|
Invention
|
System and method of measuring warpage of a workpiece on a noncontact support platform.
Methods ... |
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Invention
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Coating for aluminum objects having an improved conductivity and method of making same. Methods o... |
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Invention
|
Chuck for acquiring a warped workpiece. A chuck includes a chuck surface, a plurality of vacuum p... |
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|
Invention
|
System and method of measuring warpage of a workpiece on a noncontact support platform. Methods a... |
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2020
|
Invention
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Suction gripper for warped workpiece. A gripper to grip a workpiece includes a body with a flat g... |
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Invention
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Circular wafer lateral positioning device. A wafer positioning device includes at least one fixed... |
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Invention
|
Fluid flow web tension device for roll-to-roll processing. A web tension device includes a pressu... |
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2019
|
Invention
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Non-contact support platform with open-loop control. A non-contact support platform with open-loo... |
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2018
|
Invention
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Port arrangement for noncontact support platform. A noncontact support platform system is configu... |
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Invention
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Layered noncontact support platform. A noncontact support system includes a table with a port lay... |
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Invention
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Vacuum wheel with separate contact and vacuum surfaces. A vacuum wheel for transporting a substra... |
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2017
|
Invention
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Noncontact support platform with blockage detection. A noncontact support platform includes a plu... |
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Invention
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Noncontact support platform with edge lifting. A noncontact support platform includes pressure po... |
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Invention
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Conveying system with vacuum wheel. A system for conveying a substrate includes a noncontact supp... |
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2016
|
Invention
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Wafer gripper. A wafer transport system includes a substantially horizontal non-contact support p... |
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2009
|
Invention
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Method and device for separating sliced wafers. An apparatus for separating a front wafer from a ... |
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Invention
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Method and device for facilitating separation of sliced wafers. An apparatus for separating a fro... |
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|
Invention
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Method and system for locally controlling support of a flat object. A non-contact support platfor... |
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2002
|
Invention
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System and methods for conveying and transporting levitated articles. A system and methodology fo... |
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Invention
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Self-adaptive vacuum gripping system. A self-adaptive vacuum grip apparatus includes a vacuum sou... |
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Invention
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Apparatus for inducing forces by fluid injection. An injection system used to generate an acrodyn... |
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2000
|
Invention
|
A self-adaptive vacuum gripping system. A self-adaptive vacuum grip apparatus includes a vacuum s... |
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Invention
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Apparatus for inducing forces by fluid injection. An injection system used to generate an aerodyn... |
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Invention
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Self adaptive segmented orifice device and method. A flow control device comprising a fluid condu... |
