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2025
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Invention
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Method and apparatus for removing particles or photoresist on substrates.
An apparatus removes p... |
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Invention
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Cleaning device and method for package structure. A cleaning device and method for a package stru... |
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Invention
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Gas intake system and furnace pipe apparatus. The present application relates to the technical fi... |
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Invention
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Packaging structure cleaning method and apparatus. The present application provides a packaging s... |
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Invention
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Cleaning method and cleaning device for packaged structure. Provided in the present application a... |
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Invention
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Pre-wetting method and device for wafer. The present application provides a pre-wetting method an... |
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Invention
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Substrate processing device, and method. Disclosed in the present application are a substrate pro... |
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Invention
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Seed layer pretreatment device and method, and substrate treatment apparatus. Disclosed in the pr... |
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Invention
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Substrate processing apparatus and method. The present application discloses a substrate processi... |
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Invention
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Clamping force threshold measurement apparatus for wafer chuck. The present invention relates to ... |
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Invention
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Annealing device and annealing method. Provided in the present invention are an annealing device ... |
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Invention
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Chuck of wafer holding device and wafer holding device. A chuck (100) of a wafer holding device a... |
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Invention
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Substrate cleaning device and cleaning method, and coating and developing apparatus. A substrate ... |
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Invention
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Pipe fixing fixture and furnace tube apparatus. A pipe fixing fixture, comprising: a base (100); ... |
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Invention
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Atomic layer deposition method, and furnace tube device and vacuumizing method therefor. The pres... |
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Invention
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Wafer processing cavity, wafer processing device and wafer processing apparatus. Provided in the ... |
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Invention
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Loading chamber and semiconductor device. Provided in the present invention are a loading chamber... |
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Invention
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Spray head. Provided in the present invention is a spray head, comprising: a panel, which compris... |
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Invention
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Substrate processing apparatus, processing method and buffer module. The present invention relate... |
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Invention
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Substrate holding device and wet processing apparatus. A substrate holding device and a wet proce... |
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Invention
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Substrate cleaning device and wet apparatus. Disclosed in the present invention are a substrate c... |
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Invention
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Substrate electroplating method and device and deformable diffusion plate. Disclosed in the prese... |
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Invention
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Electroplating chuck for square substrate and electroplating method. Provided in the present inve... |
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Invention
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Tank cover and substrate liquid processing tank. A tank cover (1), applied to a substrate liquid ... |
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Invention
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Wafer boat and furnace tube device. Disclosed in the present invention are a wafer boat and a fur... |
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Invention
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Supercritical-fluid drying device. Provided in the present invention is a supercritical-fluid dry... |
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Invention
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Substrate cleaning apparatus, and method. The present invention relates to the technical field of... |
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Invention
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Substrate treatment apparatus. The present invention provides a substrate treatment apparatus, co... |
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Invention
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Drying device. Disclosed in the present invention is a drying device, comprising an upper chamber... |
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Invention
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Airflow regulating structure and airflow regulating method. An airflow regulating structure (3), ... |
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Invention
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Air isolation apparatus and substrate processing device. The present application discloses an air... |
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Invention
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Substrate transfer apparatus and substrate processing apparatus. A substrate transfer apparatus a... |
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2024
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Invention
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Wafer transfer platform and wafer transfer method. The present invention provides a wafer transfe... |
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Invention
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Wafer processing method and wafer processing apparatus. An embodiment of the present application ... |
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Invention
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Substrate detection apparatus. Disclosed in the present invention is a substrate detection appara... |
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Invention
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Electroplating device and substrate cleaning method. The present invention belongs to the technic... |
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Invention
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Electroplating apparatus and cleaning method. The present application discloses an electroplating... |
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Invention
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Substrate control device and semiconductor reaction chamber. Provided in the present application ... |
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Invention
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Electroplating device and cleaning method. Disclosed are an electroplating device and a cleaning ... |
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Invention
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Substrate treatment apparatus. The present invention relates to the technical field of semiconduc... |
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Invention
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Substrate clamping device for substrate chuck and tooling and method for adjusting same. Provided... |
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Invention
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Nozzle cleaning apparatus and method for coating and developing device. A nozzle cleaning apparat... |
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Invention
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Electroplating solution backflow control system and method. An electroplating solution backflow c... |
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Invention
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Thin film deposition device and thin film deposition method. A thin film deposition device, compr... |
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Invention
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Electroplating solution backflow control system and control method. An electroplating solution ba... |
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Invention
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Wafer electroplating device. The present application provides a wafer electroplating device, comp... |
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Invention
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Furnace tube device. The present invention relates to the technical field of semiconductor device... |
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Invention
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Electroplating device for square substrate. Provided in the present invention is an electroplatin... |
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Invention
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Thin film deposition apparatus, thin film deposition method, and thin film deposition device. The... |
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Invention
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Substrate processing apparatus. A substrate processing apparatus, comprising: an RF power supply ... |
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2022
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P/S
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Machines for the electronic industry, namely, semiconductor integrated circuit manufacturing and ... |
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P/S
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Machines for the electronic industry; battery manufacturing
machinery; machines and apparatus fo... |
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2019
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P/S
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Electronic industry equipment, namely semiconductor integrated circuit manufacturing and packagin... |
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P/S
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Electronic industry equipment; battery machine; cleaning
equipment; glue clear machine; solar ce... |
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P/S
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Machines for the electronic industry; battery making
machines; electroplating machines; solar ce... |
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P/S
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Machines for the electronic industry; battery making
machines; metal processing machine; machine... |
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P/S
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Battery making machines; cleaning machines, namely, machines for cleaning semiconductor substrate... |
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P/S
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Battery making machines; cleaning machines; glue clear
machines; metal processing machine; elect... |
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P/S
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Machines for the electronic industry; battery making
machines; cleaning machines; glue clear mac... |
