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2025
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Invention
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Film-forming apparatus, film-forming method, and method for manufacturing electronic device. This... |
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Invention
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Measurement device, film formation system, and manufacturing method. Provided is a measurement de... |
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Invention
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Film deposition device, film deposition method, and production method. This film deposition devic... |
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Invention
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Inspection device, film deposition device, inspection method, and production method for electroni... |
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Invention
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Inspection device, film formation device, inspection method, and electronic device production met... |
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Invention
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Conveyance device, control method, film forming system, and method for manufacturing electronic d... |
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Invention
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Mask unit, film deposition apparatus, film deposition method, and method for manufacturing electr... |
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Invention
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Film deposition apparatus, control method, method for manufacturing electronic device, and mask. ... |
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Invention
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Substrate processing device, film deposition system, control method, and electronic device manufa... |
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Invention
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Film-forming apparatus, moving apparatus, film-forming method, and electronic device manufacturin... |
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Invention
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Film formation system, film thickness measurement method, and method for manufacturing electronic... |
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Invention
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Film forming apparatus, film forming method, and method for manufacturing electronic device. Prov... |
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2024
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Invention
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Film forming apparatus, film forming method, and method for manufacturing electronic device. The ... |
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Invention
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Chuck device, film formation device, chucking method, film formation method, and manufacturing me... |
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Invention
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Sticking device, film formation device, sticking method, and production method. Provided is a sti... |
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Invention
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Film forming device, adjustment method, film forming method, and manufacturing method for electro... |
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Invention
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Inspection device, film formation system, inspection method, and method for manufacturing electro... |
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Invention
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Film forming apparatus. The present invention employs a film forming apparatus for forming a film... |
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Invention
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Opening/closing device, film forming device, film forming method, and method for manufacturing el... |
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Invention
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Mask storage device and film formation device. Provided are a mask storage device and a film form... |
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Invention
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Mask storage device, film formation device, and mask cassette. Provided are a mask storage device... |
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Invention
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Film forming device, alignment method, and method for manufacturing electronic device. Provided a... |
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Invention
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Film formation device and film formation method. This film formation device for depositing a vapo... |
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Invention
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Film forming device and film forming method. This film forming device forms a film of a vapor dep... |
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Invention
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Film forming apparatus and film forming method. This film forming apparatus includes: an alignmen... |
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Invention
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Vacuum pump system, film formation apparatus, power supply control method for vacuum pump system,... |
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Invention
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Film-forming apparatus, film-forming method, and method for manufacturing electronic device. A fi... |
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Invention
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Film forming apparatus and film forming method. This film forming apparatus comprises: an alignme... |
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Invention
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Alignment device, alignment method, film deposition device, and manufacturing method. Provided is... |
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Invention
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Vacuum chamber and film formation device. A vacuum chamber constituting a film formation device i... |
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Invention
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Alignment device, film forming apparatus, alignment method, and film forming method. The present ... |
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Invention
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Film formation apparatus, electronic device manufacturing method, and film formation method. This... |
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Invention
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Alignment device, film formation device, alignment method, and film formation method. The purpose... |
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Invention
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Electrostatic chuck system, film formation device, clamping method, film formation method, and el... |
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Invention
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Film forming apparatus, film forming method, method for manufacturing electronic device, and mask... |
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Invention
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Substrate support unit, transfer device, film deposition device, film deposition method, and elec... |
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Invention
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Vacuum chamber, electronic device manufacturing apparatus, and electronic device manufacturing me... |
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Invention
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Holding device, alignment device, film formation device, film formation method, and manufacturing... |
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Invention
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Film deposition device, film deposition method, and production method. Provided is a film deposit... |
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Invention
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Film forming apparatus and film forming method. The present invention provides: a film forming ap... |
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Invention
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Film formation device, film formation method, and manufacturing method. This film formation devic... |
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Invention
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Film formation device, film formation method, and production method. Provided is a film formation... |
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Invention
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Alignment method and alignment device. An alignment method in which marks provided on a substrate... |
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Invention
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Evaluation method and evaluation device. This evaluation method includes an evaluation step in wh... |
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Invention
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Film forming device, film forming method, and method for manufacturing electronic device. This fi... |
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2023
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Invention
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Substrate holding device, film forming device, and method for controlling film forming device. Pr... |
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Invention
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Film forming device, film forming method, and method for manufacturing electronic device. Provide... |
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Invention
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Film forming apparatus, film forming method and method for producing electronic device. The prese... |
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Invention
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Film deposition device. Provided is a technology which can heighten the accuracy of substrate ali... |
