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2024
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Invention
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Plasma generator, plasma treatment device, and method for providing electric power in a pulsed ma... |
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Invention
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System and method for temperature measurement, and calibration method. The present invention rela... |
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P/S
|
Machines for processing semiconductors [atmospheric or sub-atmospheric or under predefined gas at... |
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P/S
|
Machines for processing semiconductors [atmospheric or
sub-atmospheric or under predefined gas a... |
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2023
|
Invention
|
End effector and robot having an end effector. The invention relates to an end effector which is ... |
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Invention
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Device for thermally treating substrates, in particular semiconductor wafers. The invention relat... |
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|
Invention
|
Cleaning method for cleaning a high-temperature oven. The invention relates to a cleaning method ... |
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|
Invention
|
Process assembly for semiconductor processing and semiconductor processing method.
A process ass... |
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P/S
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Machines for processing semiconductors, solar cells, fibers and other substrates; machines for et... |
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P/S
|
Machines for processing semiconductors, solar cells, fibers
and other substrates; machines for e... |
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P/S
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Machines for processing of solar cells or semiconductors; surface treatment machines for semicond... |
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P/S
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Machines for processing of solar cells or semiconductors;
surface treatment machines for semicon... |
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2022
|
Invention
|
Heating element. A description is given of a heating element, in particular a heating element for... |
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2021
|
Invention
|
Method and system for producing a substrate. The present invention relates to a method and a syst... |
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|
Invention
|
Workpiece holder, system, and operating method for pecvd.
A workpiece holder for a plasma-enhanc... |
|
|
Invention
|
Device, system and method for plasma-enhanced chemical vapor deposition.
A device for plasma-enh... |
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|
Invention
|
Device, system and method for plasma-enhanced chemical vapor deposition. The present invention re... |
|
|
Invention
|
Workpiece holder, system and operating method for pecvd. The present invention relates to a workp... |
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|
Invention
|
Continuous fibres based on cellulose and/or cellulose derivatives, method for the production ther... |
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P/S
|
Machines for processing semiconductors, solar cells, fibers and other substrates; surface treatme... |
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P/S
|
Machines for processing semiconductors, solar cells, fibers
and other substrates; surface treatm... |
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2019
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P/S
|
Surface treatment machines for semiconductor surfaces, under vacuum using the CVD method, atmosph... |
|
|
Invention
|
Method and device for stabilizing precursor fibers or films for producing carbon fibers or films.... |
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|
Invention
|
Plasma treatment device and method for emitting pulses of electrical power to at least one proces... |
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|
Invention
|
Transport unit and method for the parallel insertion or retraction of substrate carriers into pro... |
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|
Invention
|
Tube closure for a process tube, and process unit. The invention relates to a tube closure for a ... |
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|
Invention
|
Wafer boat. The invention relates to a wafer boat for holding wafers, in particular semiconductor... |
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P/S
|
Machines for processing wafers; surface treatment machines, especially for wafers, by diffusion a... |
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|
P/S
|
Machines for processing wafers; surface treatment machines,
especially for wafers, by diffusion ... |
|
|
P/S
|
Machine for processing solar cells; machine for evaporating
or coating semiconductor surfaces e.... |
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P/S
|
Machine for processing solar cells; machine for evaporating and coating semiconductor surfaces of... |
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|
Invention
|
Heating unit for a horizontal furnace. The invention relates to heating units for a horizontal fu... |
|
|
Invention
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Method and device for stabilizing precursor fibers for the production of carbon fibers. The inven... |
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2018
|
Invention
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Method for operating a deposition installation, and deposition installation. The invention relate... |
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|
Invention
|
Method for operating a depositing system. The invention relates to a method for operating a depos... |
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|
Invention
|
Treatment device for substrates and method for operating a treatment device for substrates of thi... |
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|
Invention
|
Contact-making device for connecting a waferboat to an electrical power supply. Here, a contact-m... |
|
|
Invention
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Method and device for forming a layer on a semiconductor substrate, and semiconductor substrate. ... |
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2017
|
Invention
|
Method for passivating a surface of a semiconductor material and semiconductor substrate.
A meth... |
|
|
Invention
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Method for passivating a surface of a semiconductor material and semiconductor substrate. Method ... |
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|
Invention
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Device and method for sequentially depositing a multiplicity of layers on substrates, and receivi... |
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2016
|
Invention
|
Method and device for the thermal treatment of substrates and holding unit for substrates.
The i... |
|
|
Invention
|
Method and device for the thermal treatment of substrates and holding unit for substrates. The in... |
|
|
Invention
|
Wafer boat and plasma treatment device for wafers.
The invention relates to a plate element for ... |
|
|
Invention
|
Wafer boat and plasma treatment device for wafers. The invention relates to a plate element for a... |
|
|
Invention
|
Method and device for passivating defects in semiconductor substrates. The invention relates to m... |
|
|
Invention
|
Methods and device for passivating defects in semiconductor substrates. The invention relates to ... |
|
|
Invention
|
Wafer boat and plasma treatment device for wafers.
Wafer boats for the plasma treatment of disc-... |
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2014
|
P/S
|
Service for material coating, namely, material modification and processing of surfaces, in partic... |
|
|
P/S
|
Machines for processing of semiconductors and solar cells;
machines for thermal processing of se... |
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2012
|
Invention
|
Cooling module and apparatus for thermally treating substrates. A cooling module for cooling subs... |
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2007
|
P/S
|
Machines and machine tools, parts therefor, semiconductors and compound semiconductors, all for t... |
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2005
|
P/S
|
Installations for processing semiconductors, in particular for processing semiconductors under va... |
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1996
|
P/S
|
plants and equipment for thermal processing or manufacturing methods, namely, diffusion furnaces,... |
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|
P/S
|
Hardware and software for the operation of the products
mentioned in class 11 (included in this ... |
