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2024
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Invention
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Epitaxial wafer and a method for manufacturing an epitaxial wafer.
A method for manufacturing an... |
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Invention
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Wafer double-side polishing apparatus and method of evaluating the same.
A wafer double-side pol... |
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Invention
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Wafer and shape analysis method therefor. The present invention provides a shape analysis method ... |
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Invention
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External crucible accommodating silicon melt and silicon single crystal ingot growth apparatus in... |
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2023
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Invention
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Apparatus for analyzing metal contamination of a wafer and a method thereof.
A method for analyz... |
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Invention
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Device and method for separating wafers.
Disclosed is a device for separating wafers sheet by sh... |
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Invention
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Carrier recycling process.
Disclosed is a carrier recycling process designed to recycle carriers... |
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Invention
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Polishing control system and final polishing equipment comprising same. The present invention rel... |
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Invention
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Wafer cleaning apparatus and cleaning method therefor. A wafer cleaning apparatus of the present ... |
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Invention
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Wafer wrapping device and method for controlling same. The wafer wrapping device comprises: a low... |
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Invention
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Wire sawing device and method thereof. This wire sawing device comprises: wires for cutting an in... |
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Invention
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Single crystal silicon ingot and method of growing the same.
Disclosed is a method of growing a ... |
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Invention
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Semiconductor substrate and method for cleaning semiconductor substrate. In this method for clean... |
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Invention
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Ingot growing apparatus and monitoring method thereof. An apparatus for growing an ingot from a m... |
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Invention
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Ingot growing apparatus and method thereof.
An ingot growing apparatus is composed of a neck por... |
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Invention
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Device for evaluating edge defects in a silicon wafer and method therof.
A device for evaluating... |
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Invention
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Apparatus and method for growing silicon single crystal ingot. Provided in an embodiment is an ap... |
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Invention
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Wax coating apparatus for wafer mounting and wafer mounting apparatus including same.
A wax coat... |
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2022
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Invention
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Apparatus and method for cleaning substrate. According to an aspect of an embodiment, provided is... |
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Invention
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Automatic abrasion compensation system of lower plate and wafer lapping apparatus having the same... |
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Invention
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Pin hole inspection apparatus and method. Disclosed are a pin hole inspection apparatus and metho... |
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Invention
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Liner and epitaxial reactor comprising same.
According to an aspect of the present disclosure, t... |
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Invention
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Method for determining fine particle defects on silicon wafer.
Disclosed is a method for determi... |
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Invention
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Device for measuring wafer polishing amount, and measurement method therefor.
An embodiment of t... |
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Invention
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Device for measuring wafer polishing amount, and measurement method therefor. An embodiment of th... |
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Invention
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Method for evaluating of defect area of wafer.
A method of evaluating a defect area on a wafer, ... |
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Invention
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Method for growing epitaxial layer on wafer.
Embodiments provide a method of growing an epitaxia... |
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Invention
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Workplate for y-axis compensation of ingot and y-axis compensation method of ingot using the same... |
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Invention
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Method and apparatus for growing silicon single crystal ingot. Embodiments provide a method of gr... |
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Invention
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Method and apparatus of evaluating quality of wafer or single crystal ingot. A method of evaluati... |
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2021
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Invention
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Air circulation system and final polishing apparatus including the same. Disclosed are an air cir... |
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Invention
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Raw material feed hopper and single crystal growth system. A raw material feed hopper according t... |
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Invention
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Apparatus of oxidation-combusting an ingot grower and method thereof. A method of oxidation-combu... |
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Invention
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Apparatus of cleaning a polishing pad and polishing device. An apparatus of cleaning a polishing ... |
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Invention
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Single wafer-type wafer cleaning device and method for controlling surface roughness of wafer usi... |
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2020
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Invention
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Method and apparatus for growing silicon single crystal ingots.
An embodiment provides a method ... |
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Invention
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Method and apparatus for growing silicon single crystal ingots. An embodiment provides a method f... |
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Invention
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Wafer and method for analyzing shape thereof. Disclosed is a method for analyzing a shape of a wa... |
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Invention
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Asc process automation device.
The present invention provides an ASC process automation device i... |
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Invention
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Asc process automation device. The present invention provides an ASC process automation device in... |
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Invention
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Polishing pad for wafer polishing device, and apparatus and method for manufacturing same.
The p... |
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Invention
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Ingot temperature controller and wire sawing device having same. Provided is a wire sawing device... |
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Invention
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Raw material supply unit, single-crystal silicon ingot growing apparatus comprising same and raw ... |
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Invention
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Raw material supply unit, and apparatus comprising same for growing single-crystal silicon ingot.... |
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Invention
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Wafer evaluation method. An embodiment provides an epitaxial water evaluation method comprising t... |
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Invention
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Single crystal ingot growth control device. A single crystal ingot growth control device includes... |
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Invention
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Lift pin, wafer processing apparatus comprising same, and method for producing wafers.
One embod... |
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2019
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Invention
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Wafer polishing head, method for manufacturing wafer polishing head, and wafer polishing apparatu... |
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Invention
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Silicon single crystal growth method and apparatus. An embodiment provides a silicon single cryst... |
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1992
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P/S
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silicon wafers |
