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2024
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Invention
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A method and a device for detecting crystalline defects in a substrate by dark field and photolum... |
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Invention
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A device and a method for detecting crystalline defects in a substrate by dark field. The inventi... |
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Invention
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A method and a device for spectral dispersion compensation in interferometers. The invention rela... |
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Invention
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A method and a system for characterizing structures through a substrate. The invention relates to... |
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Invention
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Method and a device for detecting crystalline defects in a substrate by dark field and photolumin... |
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Invention
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Substrate dimension adapter. The invention concerns an adapter (1) for retaining a wafer (W). The... |
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Invention
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Method and a system for characterizing structures through a substrate. A method for characterizin... |
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Invention
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Method and a system for characterising structures through a substrate.
A method for characterizi... |
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Invention
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Substrate dimension adapter. An adapter for retaining a wafer has a back side intended to be plac... |
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2023
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Invention
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Inspection method for detecting a defective bonding interface in a sample substrate, and measurem... |
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Invention
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Device for inspecting substrates. The invention relates to an inspection device (100, 200, 300, 4... |
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Invention
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System for optical inspection of a substrate using same or different wavelengths. A system for op... |
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Invention
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A system for optical inspection of a substrate using same or different wavelengths. The invention... |
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Invention
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Method and a system for characterising structures etched in a substrate. A method for characteris... |
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Invention
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Method and a system for characterising structures through a substrate. A method for characterizin... |
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Invention
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Method and a system for combined characterisation of structures etched in a substrate. A method a... |
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Invention
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A method and a system for characterising structures through a substrate. The invention relates to... |
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Invention
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A method and a system for characterising structures etched in a substrate. The invention relates ... |
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Invention
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A method and a system for combined characterisation of structures etched in a substrate. The inve... |
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Invention
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Method and system for measuring a surface of an object comprising different structures using low ... |
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2022
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Invention
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A method and system for discriminating defects present on a frontside from defects present on a b... |
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2021
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Invention
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Method for inspecting a surface of an object. The invention relates to a method employing a devic... |
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2020
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Invention
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Method for measuring film thickness distribution of wafer with thin films. A method includes: det... |
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Invention
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Method for measuring film thickness distribution of wafer having thin film. The present invention... |
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Invention
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Device for inspecting a surface of an object. A device (1) for inspecting a surface (S) of an obj... |
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2019
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Invention
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Method and system for measuring a surface of an object comprising different structures using low-... |
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Invention
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Dark-field optical inspection device. A device for dark-field optical inspection of a substrate c... |
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Invention
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Dark-field optical inspecting device. The invention relates to a dark-field optical device (1) fo... |
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Invention
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Lighting device for microscope.
A lighting device for an imaging system with an imaging objectiv... |
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Invention
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Lighting device for microscope. The present invention relates to a lighting device (1, 100) for a... |
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Invention
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Method and device for inspecting a surface of an object comprising nonsimilar materials. A method... |
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Invention
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Method and device for inspecting a surface of an object comprising non-similar materials. The pre... |
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2018
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Invention
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Method and system for optically inspecting a substrate. A method and related system for substrate... |
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Invention
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Method and system for optically inspecting a substrate. The present invention relates to a method... |
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Invention
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Multichannel confocal sensor and related method for inspecting a sample. A multichannel confocal ... |
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Invention
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Method and system for reconstituting colour information of a sample measured by white light optic... |
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2017
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Invention
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Positioning device for an integrated circuit board, and inspection apparatus for an integrated ci... |
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Invention
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Method and system for the optical inspection and measurement of a face of an object.
A method fo... |
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Invention
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Method and system for inspecting and measuring optically a face of an object. The present inventi... |
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Invention
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Method and system for inspecting boards for microelectronics or optics by laser doppler effect. d... |
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Invention
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Method and system for inspecting boards for microelectronics or optics by laser doppler effect. T... |
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2016
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Invention
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Device and method for measuring height in the presence of thin layers.
A device for measuring he... |
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Invention
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Integrated chromatic confocal sensor. A confocal chromatic device is provided, including at least... |
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Invention
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Method for 2d/3d inspection of an object such as a wafer. A method is provided for inspecting the... |
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P/S
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Devices and systems for inspection in the semiconductors, micro-optics and micro-electro-mechanic... |
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2015
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Invention
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Interferometric method and system using variable fringe spacing for inspecting transparent wafers... |
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Invention
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Device and method for surface profilometry for the control of wafers during processing. A device ... |
