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2024
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Invention
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Method for manufacturing three-dimensional nand flash memory array.
According to one embodiment ... |
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Invention
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Method for manufacturing semiconductor device. The present invention relates to a method for manu... |
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Invention
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High-pressure substrate processing apparatus and high-pressure chemical vapor deposition method f... |
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Invention
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Semiconductor device and semiconductor device manufacturing method.
The present invention relate... |
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Invention
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High pressure gaseous hydrogen oxide providing device, and high pressure substrate processing app... |
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Invention
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High-pressure substrate processing apparatus. This high-pressure substrate processing apparatus i... |
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Invention
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High-pressure substrate processing apparatus. Disclosed is a high-pressure substrate processing a... |
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Invention
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High-pressure substrate processing apparatus and method. Disclosed are a high-pressure substrate ... |
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Invention
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Wafer processing apparatus for combined high-pressure process and vacuum process, and wafer proce... |
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Invention
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High-pressure substrate processing apparatus. The present invention provides a high-pressure subs... |
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2023
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Invention
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High pressure substrate processing apparatus.
Provided is a high pressure substrate processing a... |
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Invention
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High-pressure substrate processing apparatus, and processing gas line used therefor. The present ... |
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Invention
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Manufacturing method for semiconductor device. The present invention relates to a manufacturing m... |
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Invention
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Gas box assembly for high pressure processing apparatus.
Provided is a gas box assembly for a hi... |
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Invention
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High pressure processing apparatus.
Provided is a high pressure processing apparatus including: ... |
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Invention
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Method for manufacturing three-dimensional nand flash memory array. According to one embodiment o... |
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Invention
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Thin film transistor and method for manufacturing thin film transistor. The present invention rel... |
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Invention
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Method for manufacturing semiconductor device. The present specification relates to a method for ... |
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Invention
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Dram cell manufacturing method. A DRAM cell manufacturing method according to one mode may compri... |
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Invention
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Semiconductor device and method for manufacturing semiconductor device.
The present invention re... |
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Invention
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Semiconductor device and method for manufacturing semiconductor device. The present invention rel... |
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Invention
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Semiconductor device and semiconductor device manufacturing method. The present invention relates... |
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Invention
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High-pressure wafer processing method using dual high-pressure wafer processing facility.
The pr... |
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Invention
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High-pressure wafer processing method using dual high-pressure wafer processing facility. The pre... |
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Invention
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Insulation film manufacturing method of semiconductor process.
The present invention provides an... |
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Invention
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Insulation film manufacturing method of semiconductor process. The present invention provides an ... |
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2022
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Invention
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High pressure heat treatment apparatus.
Provided is a high pressure heat treatment apparatus inc... |
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Invention
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High-pressure heat treatment apparatus and gas monitoring module used therefor.
The present inve... |
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Invention
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Method for doping carbon in thin film on wafer.
The present invention provides a method for dopi... |
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Invention
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Method for doping carbon in thin film on wafer. The present invention provides a method for dopin... |
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Invention
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High-pressure heat treatment apparatus and gas monitoring module used therefor. The present inven... |
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Invention
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Wafer treatment device for combined high-pressure process and vacuum process, and wafer treatment... |
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Invention
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Gas management assembly for high pressure heat-treatment apparatus.
Provided is a gas management... |
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P/S
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Machines for manufacturing semiconductors; Exposure apparatus for manufacturing semiconductors; S... |
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P/S
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Machines for manufacturing semiconductors; apparatus for
manufacturing semiconductors; semicondu... |
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2015
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Invention
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Methods and apparatuses for deuterium recovery. Novel methods, systems, and apparatuses for recla... |
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2013
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Invention
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Computer readable medium for high pressure gas annealing. Novel methods and apparatuses for annea... |
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2009
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Invention
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Method for high pressure gas annealing. Novel methods and apparatuses for annealing semiconductor... |
