|
2023
|
Invention
|
Substrate bonding apparatus and substrate bonding method. [Problem] To bond substrates to each ot... |
|
2015
|
Invention
|
Carrying method and bonding apparatus. A laminate is directly transferred from a first robot arm ... |
|
|
Invention
|
Method for manufacturing laminate, method for manufacturing sealed substrate laminate, sealed sub... |
|
2014
|
Invention
|
Sticking apparatus and sticking method. A sticking apparatus including a pair of plate members sa... |
|
|
Invention
|
Method for processing mold material and method for manufacturing structural body. A method for pr... |
|
|
Invention
|
Attachment method. An attachment method including an overlapping step of overlapping a support pl... |
|
|
Invention
|
Supporting member separation apparatus and supporting member separation method. A supporting memb... |
|
2013
|
Invention
|
Transport arm, transport apparatus and transport method. A transport arm including a holding unit... |
|
|
Invention
|
Attaching device and attaching method. An attaching device configured to attach a substrate and a... |
|
|
Invention
|
Attaching apparatus. An attaching apparatus, a substrate and a support that can be uniformly atta... |
|
|
Invention
|
Overlapping device, and overlapping method. An overlapping device which is configured to detect t... |
|
|
Invention
|
Method of manufacturing laminate. A method of manufacturing a laminate including a substrate, a s... |
|
|
Invention
|
Supporting member separation method and supporting member separation apparatus. A supporting memb... |
|
2012
|
Invention
|
Substrate processing apparatus and substrate processing method. A substrate processing apparatus ... |
|
|
Invention
|
Method of manufacturing multilayer body, method of processing substrate, and multilayer body. A m... |
|
|
Invention
|
Retention device and retention method. A holding device including a first sucking section for suc... |
|
|
Invention
|
Attaching device and attaching apparatus for supporting plate, and attaching method for supportin... |
|
|
Invention
|
Coating apparatus, coating method and coating-film forming apparatus. A coating method, which use... |
|
2011
|
Invention
|
Method for processing process-target object. Provided is a method including the steps of: carryin... |
|
|
Invention
|
Stripping device and stripping method. A stripping method for stripping a support plate from a la... |
|
2010
|
Invention
|
Method of cleaning support plate. A method of cleaning a support plate according to which, while ... |
|
|
Invention
|
Alignment apparatus and alignment method. Provided is an alignment apparatus including holding an... |
|
2009
|
Invention
|
Coating apparatus, coating method and coating-film forming appratus. A coating apparatus comprise... |
|
|
Invention
|
Separating apparatus and separating method. A separating apparatus includes a sucking plate for s... |
|
|
Invention
|
Separating apparatus and separating method. A separating apparatus according to the present inven... |
|
|
Invention
|
Stage for substrate. A stage is provided on which is mounted a substrate that has a concavo-conve... |
|
|
Invention
|
Sucking and holding device. A sucking and holding device includes: a vacuum chuck for vacuum-suck... |
|
|
Invention
|
Treatment liquid permeation unit and treating apparatus. A treatment liquid permeation unit compr... |
|
2008
|
Invention
|
Separating device. A separating device according to the present invention separates a support pla... |
|
|
Invention
|
Liquid solvent abutment unit. In order to provide a liquid solvent abutment unit for accelerating... |
|
2007
|
Invention
|
Method for holding substrate in vacuum. In a method of the present invention for holding a substr... |
|
|
Invention
|
Treatment device, treatment method, and surface treatment jig. b. Thus, the present invention pro... |
|
|
Invention
|
Processing apparatus fluid-processing a process target body. The present invention relates to a p... |
|
|
Invention
|
Substrate assembling apparatus and substrate assembling method using the same. A technique which ... |
|
2006
|
Invention
|
Substrate assembly apparatus and substrate assembly method. A bonding apparatus, suitable for acc... |
|
2005
|
Invention
|
Coating apparatus, coating method and coating-film forming apparatus. A coating apparatus is prov... |
|
2003
|
Invention
|
Substrate holding device including adhesive face with hexagons defined by convex portions. In a m... |
|
2002
|
Invention
|
Film forming apparatus, film forming method and tray for substrate. The object of the present inv... |
