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2024
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Invention
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Substrate processing apparatus. A substrate processing apparatus according to the present inventi... |
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Invention
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Substrate processing apparatus and control method therefor. The present invention relates to a su... |
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Invention
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Wafer cleaning apparatus and method of controlling the same.
A wafer cleaning apparatus of the p... |
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P/S
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Semiconductor washing machine for cleaning contaminants; etching apparatus for use in manufacturi... |
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Invention
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Etching device and etching method thereof.
The present invention relates to an etching device an... |
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Invention
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Substrate processing device. The disclosed substrate processing apparatus comprises: a substrate ... |
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Invention
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Substrate processing apparatus and method. The present invention relates to a substrate processin... |
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Invention
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Robot control device and method. A robot control device according to an aspect of the present inv... |
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2023
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Invention
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Substrate etching method and substrate etching apparatus. A substrate etching method according to... |
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Invention
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Wafer processing apparatus and wafer processing method.
A wafer processing apparatus includes a ... |
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Invention
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Wafer cleaning apparatus.
A wafer cleaning apparatus according to the present disclosure include... |
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Invention
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Linear actuator. A linear actuator according to the present invention is characterized by compris... |
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Invention
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Linear actuator. A linear actuator according to the present invention comprises: a frame unit hav... |
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2022
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Invention
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Apparatus and method for cleaning fluid discharging nozzle.
A fluid discharging nozzle cleaning ... |
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Invention
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Robot management device and control method therefor. The present invention relates to a robot man... |
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Invention
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Tubular member connecting assembly and robot arm comprising same. A tubular member connecting ass... |
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Invention
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Fluid spray device for processing substrate.
A fluid spray device for processing a substrate acc... |
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Invention
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Wafer processing method.
A wafer processing method of the present invention includes mounting a ... |
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Invention
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Wafer processing method. A wafer processing method of the present invention includes mounting a w... |
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Invention
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Etching apparatus and method of controlling same.
The present invention relates to an etching ap... |
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Invention
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Diagnostic kit and diagnostic method. The present invention relates to a secondary aptamer that b... |
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Invention
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Wafer processing apparatus and wafer processing method. A wafer processing apparatus of the prese... |
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Invention
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Wafer cleaning apparatus.
A wafer cleaning apparatus of the present invention includes a vacuum ... |
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Invention
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Wafer cleaning apparatus and method of controlling the same. A wafer cleaning apparatus of the pr... |
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Invention
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Wafer processing apparatus and method of controlling the same. The disclosed wafer processing app... |
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Invention
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Delta robot and control device and method therefor. The present invention relates to a delta robo... |
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Invention
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Substrate processing apparatus. A substrate processing apparatus of the present invention compris... |
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Invention
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Substrate cleaning apparatus and method for controlling same. A substrate cleaning apparatus of t... |
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2021
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Invention
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Quantum dots and method for producing same. The present invention relates to quantum dots and a m... |
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Invention
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Actuator module with torque output control. An actuator module is provided. The actuator module i... |
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Invention
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Analyte detection system, and analyte detection method using same. Provided are a system for anal... |
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Invention
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Wafer processing apparatus and wafer processing method. A wafer processing apparatus includes a v... |
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Invention
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Wafer processing apparatus and control method thereof. A wafer processing apparatus includes a va... |
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Invention
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Wafer processing apparatus and wafer processing method. A wafer processing apparatus includes a r... |
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Invention
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Wafer processing apparatus. A wafer processing apparatus includes a rotating chuck which is rotat... |
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Invention
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Double tube structure flow cell apparatus.
A double tube structure flow cell apparatus according... |
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2020
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Invention
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Apparatus for manufacturing nanoparticles and method for manufacturing nanoparticles. Disclosed a... |
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Invention
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Etching device using etching chamber.
The present invention relates to an etching device using a... |
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Invention
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Etching device.
The present invention relates to an etching device comprising: an etching chambe... |
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Invention
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Etching device and etching method therefor. The present invention relates to an etching device an... |
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Invention
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Flow cell device. A flow cell device of the present invention comprises a flow path part in which... |
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Invention
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Fluid medium monitoring apparatus. A fluid medium monitoring apparatus of the present invention c... |
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2019
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Invention
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Quantum dot bead having multifunctional ligand, and target antigen detection method and bio-diagn... |
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Invention
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Biosensor comprising linker material and quantum dot beads, and target antigen detection method u... |
