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2015
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Invention
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Wafer processing device and method therefor. Disclosed in this invention is a wafer processing ap... |
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Invention
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Marker having focusing and tilt correction design and alignment method. A marker having a focusin... |
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Invention
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Gantry device and control method. A gantry device and control method; the gantry device comprises... |
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Invention
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Exposure device and out-of-focus and tilt error compensation method. Disclosed are an exposure de... |
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Invention
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Laser annealing device. A laser annealing device is used for annealing a silicon chip placed on a... |
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Invention
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Packaging system and packaging method for laser-sealed glass package. A packaging system and pack... |
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Invention
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Laser packaging system and method. A laser packaging system is used for heating glass material (1... |
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Invention
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Lithography machine workpiece table and vertical position initialization method thereof. A micro-... |
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Invention
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Laser annealing dodging apparatus. A laser annealing dodging apparatus (500) is applied in a lase... |
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2014
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Invention
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Silicon wafer pre-alignment device and method therefor. Provided is a silicon wafer pre-alignment... |
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Invention
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Silicon wafer edge protection device with collision protection function. A silicon wafer edge pro... |
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Invention
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Objective lens support device and photoetching machine. Disclosed are an objective lens support d... |
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Invention
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Focusing leveling device. A focusing leveling device, comprising: an illumination light source (2... |
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Invention
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Magnetic array and magnetic suspension planar motor. Provided are a magnetic array (100) and magn... |
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Invention
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Mask plate surface shaping device and photolithographic machine. A mask plate surface shaping dev... |
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Invention
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Flat voice coil motor. A flat voice coil motor, comprising a coil unit and two main magnetic pole... |
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Invention
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Counterforce cancelling device for moving table. Disclosed is a counterforce cancelling device, c... |
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Invention
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Euv photoetching device and exposure method therefor. An EUV photoetching device and an exposure ... |
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Invention
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Halbach array and magnetic suspension damper using same. A Halbach array, comprising first magnet... |
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Invention
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Mask shaping device and method, and exposure device using same. A mask shaping device (100), comp... |
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Invention
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Magnetic alignment system and alignment method therefor. A magnetic alignment system, comprising ... |
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Invention
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Four-axis four-subdividing interferometer. Four-axis four-subdividing interferometer comprising a... |
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Invention
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Six-axis four-subdividing interferometer. Six-axis four-subdividing interferometer comprising a s... |
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2013
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Invention
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Warped silicon-chip adsorption device and adsorption method thereof. A warped silicon-chip adsorp... |
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Invention
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Work station cable apparatus. A work station cable apparatus comprises a work station (110), a si... |
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Invention
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Negative stiffness system for gravity compensation of micropositioner. A negative stiffness syste... |
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Invention
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Wafer stage having function of anti-collision.
A silicon wafer platform with anti-collision func... |
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Invention
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Silicon wafer platform with anti-collision function. A silicon wafer platform with anti-collision... |
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Invention
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Photolithographic illuminator device enabling controlled diffraction. The invention relates to a ... |
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Invention
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Photolithographic illuminator that is telecentric in two directions. The invention relates to a p... |
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Invention
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Balance mass system shared by workpiece table and mask table, and lithography machine. A balance ... |
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Invention
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Off-axis alignment system and alignment method. Disclosed is an off-axis alignment system, which ... |
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Invention
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Laser annealing apparatus and laser annealing method. A laser annealing apparatus comprises: a la... |
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Invention
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Linear motor and platform device. Disclosed is a linear motor, comprising a magnet unit (2) and a... |
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Invention
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Method for measuring displacement of planar motor rotor. y are X-direction displacement resolutio... |
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Invention
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Method for measuring displacement of planar motor rotor. A method for measuring the displacement ... |
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Invention
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Planar motor rotor displacement measuring device and its measuring method. A planar motor rotor d... |
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2012
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Invention
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Interference exposure device and method. An interference exposure device, including: a beam sourc... |
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Invention
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Step photolithography device and photolithography exposure method. A step photolithography device... |
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Invention
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Centre of mass calibration method for coarse stage of lithography equipment. A centre of mass cal... |
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Invention
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Method for measuring distortion of projection objective. A method for measuring a distortion of a... |
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Invention
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Split type aerostatic bearing. Disclosed is a split type aerostatic bearing for supporting a movi... |
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2011
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Invention
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Backside registration apparatus and method. Disclosed are a backside registration apparatus and a... |
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Invention
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Large view field projection lithography objective. A projection lithography objective (30) focuse... |
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Invention
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Interferometer with six axes and 4 subdivisions. An interferometer with six axes and 4 subdivisio... |
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Invention
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Interferometer with four axes and 4 subdivisions. An interferometer with four axes and 4 subdivis... |
