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2021
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Invention
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Method for producing structural body and apparaus for producing structural body. This method for ... |
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2020
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Invention
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Semiconductor device and method for producing structure. A semiconductor device according to the ... |
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Invention
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Nitride semiconductor substrate, multilayer structure, and method of manufacturing nitride semico... |
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Invention
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Method and device for manufacturing structure. This method for manufacturing a structure comprise... |
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Invention
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Method for manufacturing structure, and structure. A method for manufacturing a structure has: a ... |
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Invention
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Method for producing structural body. This method for producing a structural body comprises: a st... |
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Invention
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Structure manufacturing method and intermediate structure. This structure manufacturing method in... |
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Invention
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Method for producing structure, apparatus for producing structure, and intermediate structure. Th... |
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Invention
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Nitride semiconductor substrate, laminated structure, and method for manufacturing nitride semico... |
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2019
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Invention
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Method and apparatus for producing structure, and light irradiation apparatus. Provided is a meth... |
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Invention
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Method for manufacturing nitride semiconductor substrate and nitride semiconductor substrate. Pro... |
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Invention
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Piezoelectric laminate, piezoelectric element, and piezoelectric laminate manufacturing method. 1... |
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Invention
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Nitride semiconductor substrate manufacturing method and laminated structure. A method for manufa... |
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Invention
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Structure manufacturing method and structure manufacturing device. A structure manufacturing meth... |
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Invention
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Method for manufacturing nitride semiconductor substrate, nitride semiconductor substrate, and la... |
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Invention
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Nitride semiconductor substrate, method for manufacturing nitride semiconductor substrate, and la... |
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Invention
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Epitaxial substrate. This epitaxial substrate is provided with: a GaN substrate of which a major ... |
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Invention
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Semiconductor wafer for heterojunction bipolar transistor and heterojunction bipolar transistor. ... |
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Invention
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Method for producing nitride semiconductor layered product, nitride semiconductor layered product... |
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2018
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Invention
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Nitride semiconductor epitaxial substrate. A nitride semiconductor epitaxial substrate which comp... |
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Invention
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Nitride semiconductor substrate, semiconductor laminate, substrate selection program, substrate d... |
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Invention
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Nitride semiconductor epitaxial substrate and semiconductor device. Provided is a nitride semicon... |
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Invention
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Laminated substrate provided with piezoelectric film, element provided with piezoelectric film, a... |
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Invention
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Method of measuring film thickness, method of manufacturing nitride semiconductor laminate and ni... |
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Invention
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Film thickness measuring method, method for manufacturing nitride semiconductor laminate, and nit... |
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Invention
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Nitride semiconductor laminate, semiconductor device, nitride semiconductor laminate production m... |
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Invention
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Layered substrate having piezoelectric film, element having piezoelectric film and production met... |
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Invention
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Crystal laminate, semiconductor device, and production method for semiconductor device. A crystal... |
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Invention
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Nitride crystal substrate, semiconductor laminate, production method for semiconductor laminate, ... |
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Invention
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Semiconductor structure production method, semiconductor structure inspection method, and semicon... |
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Invention
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Production method for nitride semiconductor substrate, and nitride semiconductor substrate. This ... |
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2017
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Invention
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Manufacturing method and inspection method of group-iii nitride laminate, and group-iii nitride l... |
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Invention
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Method for manufacturing group-iii nitride laminate, inspection method, and group-iii nitride lam... |
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Invention
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Semi-insulating crystals, n-type semiconductor crystals, and p-type semiconductor crystals. Provi... |
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Invention
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Semiconductor device and method for manufacturing same. This semiconductor device has: an n condu... |
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Invention
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Method for manufacturing nitride crystal substrate and substrate for crystal growth.
A high-qual... |
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Invention
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Nitride semiconductor laminate, method for manufacturing nitride semiconductor laminate, method f... |
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Invention
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Nitride crystal substrate. Provided is a nitride crystal substrate which includes nitride crystal... |
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Invention
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Nitride semiconductor substrate, semiconductor device, manufacturing method of nitride semiconduc... |
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Invention
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Nitride semiconductor template, method for producing nitride semiconductor template, and method f... |
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2016
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Invention
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Multilayer substrate with piezoelectric thin film, piezoelectric thin film element and method for... |
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Invention
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Semiconductor device. This semiconductor device is provided with: a semiconductor member that inc... |
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2015
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Invention
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Method for manufacturing group 13 nitride crystal and group 13 nitride crystal. 3. An interface l... |
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2008
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Invention
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Group iii nitride crystal, method for growing the group iii nitride crystal, and apparatus for gr... |
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Invention
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Crystal growth method, crystal growth apparatus, group-iii nitride crystal and group iii nitride ... |
