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2022
|
Invention
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Methods for forming doped silicon oxide thin films.
The present disclosure relates to the deposi... |
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2021
|
Invention
|
Synthesis and use of precursors for ald of tellurium and selenium thin films. 3 are alkyl groups.... |
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2020
|
Invention
|
Methods for forming doped silicon oxide thin films. The present disclosure relates to the deposit... |
|
|
Invention
|
Methods for depositing thin films comprising indium nitride by atomic layer deposition.
Atomic l... |
|
|
Invention
|
Atomic layer deposition apparatus and method for processing substrates using an apparatus. An ato... |
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2019
|
Invention
|
Process for passivating dielectric films. Methods are disclosed herein for depositing a passivati... |
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|
Invention
|
Precursors and methods for atomic layer deposition of transition metal oxides. Methods are provid... |
|
|
Invention
|
Enhanced thin film deposition. Methods of producing metal-containing thin films with low impurity... |
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2018
|
Invention
|
Selective formation of metallic films on metallic surfaces. Metallic layers can be selectively de... |
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|
Invention
|
Atomic layer deposition of antimony oxide films. 3. The oxygen source may be, for example, ozone.... |
|
|
Invention
|
Metal silicide, metal germanide, methods for making the same.
In one aspect, methods of silicida... |
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2017
|
Invention
|
Metal silicide, metal germanide, methods for making the same. In one aspect, methods of silicidat... |
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2016
|
Invention
|
Floating wafer track with lateral stabilization mechanism.
An apparatus (100) comprising:—a proc... |
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|
Invention
|
Methods for depositing nickel films and for making nickel silicide and nickel germanide. In one a... |
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|
Invention
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Method for cleaning deposition apparatus. A method for easily removing a deposition residue from ... |
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2015
|
Invention
|
Apparatus and method for high-throughput atomic layer deposition.
Atomic layer deposition appara... |
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|
Invention
|
A photovoltaic cell with a passivation layer as well as a method for manufacturing such a photovo... |
|
|
Invention
|
Doped metal germanide and methods for making the same. In one aspect, methods of silicidation and... |
|
|
Invention
|
Crystalline strontium titanate and methods of forming the same. Methods of forming a crystalline ... |
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2014
|
Invention
|
Methods for forming conductive titanium oxide thin films. The present disclosure relates to the d... |
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|
Invention
|
Selective deposition of noble metal thin films. Processes are provided for selectively depositing... |
|
|
Invention
|
Substrate processing apparatus. A substrate processing apparatus (100) comprising a process tunne... |
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2013
|
Invention
|
Combination cvd/ald method and source.
The present invention relates generally to methods and ap... |
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|
Invention
|
Enhanced deposition of noble metals. The invention relates generally to processes for enhancing t... |
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2012
|
Invention
|
Floating substrate monitoring and control device, and method for the same. Disclosed is a process... |
