There is provided a measuring device capable of improving measurement accuracy by eliminating influences of user operations in setting a base point and in finalizing measurement data. An operation reception unit of a measuring device receives a measurement data finalization command to finalize measurement data. A central control unit sequentially stores measurement values in a memory as tentatively finalized measurement data when a proximity sensor detects that a finger has approached the operation reception unit. The central control unit determines one or two or more pieces in the tentatively finalized measurement data stored in the memory as finalized measurement data when the operation reception unit receives the measurement data finalization command.
G01B 21/04 - Dispositions pour la mesure ou leurs détails, où la technique de mesure n'est pas couverte par les autres groupes de la présente sous-classe, est non spécifiée ou est non significative pour mesurer la longueur, la largeur ou l'épaisseur en mesurant les coordonnées de points
A binarized image generation method that generates a binarized image of a target object, wherein for each pixel in an image of the target object: a reference value calculation step calculates a reference value based on the brightness values of the pixels around the subject pixel; a defect candidate region extraction threshold calculation step calculates a defect candidate region extraction threshold by multiplying a certain constant by the reference value; an over-detection reduction threshold setting step sets a threshold; and a threshold comparison step determines whether the brightness value of the subject pixel is above both the defect candidate region extraction threshold and the over-detection reduction threshold, and then generates a binarized image of the target object, where the image is binarized into two regions: one region consisting of pixels whose brightness values are greater than or equal to both thresholds, and the other region.
A coordinate measuring machine (measuring apparatus) includes: a probe (measurement performing unit) performing a measurement process on a measurement target; an electrical section disposed in a part of the probe; a temperature sensor provided for the electrical section and outputting a detection signal based on a temperature obtained by measurement; and a controller (measurement calculator) calculating a measurement result of the measurement target, in which the controller calculates the measurement result by compensating a measurement value obtained by the measurement process based on a processed signal obtained by applying a low-pass filter to the detection signal output from the temperature sensor.
An image measuring apparatus that can flexibly perform distortion correction in response to environmental changes is provided. The image measuring apparatus according to the present invention comprises: a stage on which a measurement target is placed; a reference pattern display unit on which a reference pattern is displayed; an image capturing unit that captures images of a subject; a distortion information generation unit that generates distortion information based on an image of the reference pattern captured by the image capturing unit and design information of the reference pattern; and a correction unit that corrects an image of the measurement target captured by the image capturing unit using the distortion information.
G06T 7/586 - Récupération de la profondeur ou de la forme à partir de plusieurs images à partir de plusieurs sources de lumière, p. ex. stéréophotométrie
G06T 7/80 - Analyse des images capturées pour déterminer les paramètres de caméra intrinsèques ou extrinsèques, c.-à-d. étalonnage de caméra
6.
APPEARANCE INSPECTION METHOD, INSPECTION AREA DESIGNATION METHOD AND PROGRAM
An appearance inspection method that can be used to inspect for solder defects using an image measuring apparatus is provided. An appearance inspection method inspects solder bumps formed on the pads of the inspection target based on an image of an inspection target. The appearance inspection method comprises: an inspection area designation step for designating the inspection area in the image of the inspection target; a pad area detection step for detecting a pad area included in the inspection area; a bump area detection step for detecting a bump area included in the inspection area; and a defect judgment step for judging the presence or absence of the defect based on the detected pad area and/or bump area.
A metrology system is provided including a lighting configuration and camera which are controlled to acquire image stacks of a workpiece, wherein each image stack is acquired utilizing different lighting (e.g., corresponding to different lighting positions). Sets of pixel intensity values from the image stacks are utilized to determine a composite stack which includes one pixel intensity value for each pixel position and focus position. At least some of the pixel intensity values of the composite stack are determined according to a glare reduction process which determines a corresponding pixel intensity value for the composite stack that is less than a maximum pixel intensity value of the corresponding set of pixel intensity values. Focus curve data is determined based at least in part on the pixel intensity values of the composite stack, wherein the focus curve data indicates three dimensional positions of a plurality of surface points on the workpiece.
A shape measurement unit S100 comprises: a cylindrical housing 31 that has an opening 31a; an emission part 33 that is arranged within the housing 31 and that emits measurement light irradiated from the opening 31a toward a measurement object; a light-receiving part 35 that is arranged within the housing 31 and that receives reflected light obtained by the measurement light being reflected by the measurement object; and an optical element that is arranged within the housing 31 and that reflects or refracts the reflected light to the light-receiving part 35 side.
G01B 11/25 - Dispositions pour la mesure caractérisées par l'utilisation de techniques optiques pour mesurer des contours ou des courbes en projetant un motif, p. ex. des franges de moiré, sur l'objet
B23Q 17/20 - Agencements sur les machines-outils pour indiquer ou mesurer pour indiquer ou mesurer les caractéristiques de la pièce, p. ex. contour, dimensions, dureté
B23Q 17/24 - Agencements sur les machines-outils pour indiquer ou mesurer utilisant des moyens optiques
G01C 3/06 - Utilisation de moyens électriques pour obtenir une indication finale
A shape measurement unit S100 comprises a cylindrical housing 31 that is to be mounted on a tool holding part 13 of a machine tool 10, an emission part 33 that is provided inside the housing 31 and emits measurement light that is irradiated at a measurement target, a light reception part 35 that is provided inside the housing 31 and receives reflection light that is measurement light that has been reflected by the measurement target, and a shutter device 40 that has an opening/closing mechanism 41 that opens/closes an opening 31a in the housing 31 through which the measurement light and the reflection light pass.
B23Q 17/20 - Agencements sur les machines-outils pour indiquer ou mesurer pour indiquer ou mesurer les caractéristiques de la pièce, p. ex. contour, dimensions, dureté
B23Q 11/08 - Protecteurs pour des parties des machines-outilsCapots antiprojections
B23Q 17/24 - Agencements sur les machines-outils pour indiquer ou mesurer utilisant des moyens optiques
G01B 11/25 - Dispositions pour la mesure caractérisées par l'utilisation de techniques optiques pour mesurer des contours ou des courbes en projetant un motif, p. ex. des franges de moiré, sur l'objet
An image detection apparatus includes an image detector that detects an image of a detection target through a liquid resonant variable-focus lens system, a distance detector that detects a detection distance to the detection target, and a detection controller that controls the image detector and the distance detector. The detection controller controls a focal position of the image detector on a basis of the detection distance detected by the distance detector.
09 - Appareils et instruments scientifiques et électriques
Produits et services
Laboratory apparatus and instruments; photographic apparatus
and instruments; cinematographic apparatus and instruments;
optical machines and apparatus; coordinate measuring
machines; parts and accessories for coordinate measuring
machines; measuring machines and instruments; profile
projectors; telecommunication machines and apparatus; image
processing apparatus; magnetic encoders; data processing
equipment; computer software for operating coordinate
measuring machines; magnetic discs recorded with computer
programs for management of measuring instruments.
13.
METHOD FOR DETERMINING A SURFACE MAP AND IMAGING SYSTEM FOR SAME
The invention relates to a method for determining a surface map, such as a height map, of a sample surface having a first region with a first reflectivity and a second region with a second reflectivity. The invention further relates to an imaging system for determining a surface map of a sample surface having a first region with a first reflectivity and a second region having a second reflectivity. The invention is further related to a digital data carrier including a computer program which, when run on a processor of an imaging system according to the invention, causes the imaging system to perform the method according to the invention.
G01N 21/45 - RéfringencePropriétés liées à la phase, p. ex. longueur du chemin optique en utilisant des méthodes interférométriquesRéfringencePropriétés liées à la phase, p. ex. longueur du chemin optique en utilisant les méthodes de Schlieren
G06V 10/60 - Extraction de caractéristiques d’images ou de vidéos relative aux propriétés luminescentes, p. ex. utilisant un modèle de réflectance ou d’éclairage
A surface shape measuring device measures the three-dimensional shape of a measurement surface in an object to be measured shaped as a rotating body or an approximate rotating body. The surface shape measuring device includes: a rotary table that rotates the object to be measured; an encoder that sequentially outputs signals according to the rotation angle of the rotary table; an optical sectioning sensor that irradiates light onto the measurement surface and acquires a plurality of optical section line image data by sequentially capturing optical section lines generated by the irradiated light, which move across the measurement surface as the rotary table rotates, triggered by a signal output from the encoder; and an image processing unit that generates an image showing the surface shape of the measurement surface by sequentially arranging the respective optical section line image data according to the corresponding rotation angle.
G01B 11/25 - Dispositions pour la mesure caractérisées par l'utilisation de techniques optiques pour mesurer des contours ou des courbes en projetant un motif, p. ex. des franges de moiré, sur l'objet
G01B 11/00 - Dispositions pour la mesure caractérisées par l'utilisation de techniques optiques
G01B 11/08 - Dispositions pour la mesure caractérisées par l'utilisation de techniques optiques pour mesurer des diamètres
15.
METHOD FOR DETERMINING A HEIGHT MAP USING A WHITE LIGHT INTERFEROMETER AND WHITE LIGHT INTERFEROMETER FOR THE SAME
The invention relates to a method for determining a height map of a surface of a sample through white light interferometry wherein use is made of a white light interferometer with a broad band light source and an optical sensor including pixels. The invention further relates to a white light interferometer including a broad band light source, an optical sensor including pixels and a processor configured for performing the method of the invention. The invention further relates to a digital data carrier including a computer program which, when run on a processor of a white light interferometer according to the invention, causes the white light interferometer to perform the method according to the invention.
G01B 11/06 - Dispositions pour la mesure caractérisées par l'utilisation de techniques optiques pour mesurer la longueur, la largeur ou l'épaisseur pour mesurer l'épaisseur
G01B 11/30 - Dispositions pour la mesure caractérisées par l'utilisation de techniques optiques pour mesurer la rugosité ou l'irrégularité des surfaces
A system is provided including a lens, a camera, a lighting configuration, one or more processors, and a memory. The lens is configured to input image light arising from a workpiece, and to transmit the image light along an imaging optical path. The camera is configured to receive image light transmitted along the imaging optical path and to provide images of the workpiece. The lighting configuration comprises lighting channels configured to illuminate the workpiece for producing the image light. In various implementations, representations of groups of lighting channels are provided in a display area. When it is determined that a group of lighting channels has been selected, current lighting settings may be displayed for the selected group of lighting channels. Adjustments to the lighting settings for a group of lighting channels may apply to all of the lighting channels in the group.
A system is provided including a lens, a camera, a lighting configuration, one or more processors, and a memory. The lens is configured to input image light arising from a workpiece and to transmit the image light along an imaging optical path. The camera is configured to receive the image light and to provide images of the workpiece. The lighting configuration comprises lighting channels configured to illuminate the workpiece for producing the image light. In various implementations, an option is provided for selecting a lighting optimization mode that that is at least one of an edge detection lighting optimization mode, a defect detection lighting optimization mode or a points from focus lighting optimization mode. A lighting optimization process may be performed based on the selected lighting optimization mode, and determines lighting for illuminating the workpiece for which the determined lighting comprises settings for the lighting channels of the lighting configuration.
Provided are: an observation optical system suitable for observation/measurement of the inner diameter of a pore even when the diameter thereof is narrow; and a measurement device suitable for using the optical system. This observation optical system according to the present invention comprises, in order from the object side, at least: a reducing lens system that has an angle of view of at least 120 degrees and that comprises a first lens group having a negative refractive power and a second lens group having a positive refractive power; and a magnifying lens system that magnifies an object image from the reducing lens system and forms an image on an imaging element, and that comprises a third lens group having a positive refractive power and a fourth lens group having a negative refractive power. The magnifying lens system is characterized by: generating pincushion distortion that cancels barrel distortion generated in the reducing lens system; and restricting the distortion generated by the entire observation optical system, in a range from 70% to 80% of the maximum image height, to within ± 5%.
A measuring instrument includes a movable portion configured to rotate in an arc motion about a pivot portion, and an electronic position encoder configured to measure an absolute relative position between a detector portion and a scale portion, one of which forms part of the movable portion. In the detector portion, first and second scale element portions of first and second track portions are linear and parallel to each other, with the second track portion closer to the pivot portion than the first track portion. In the scale portion, first signal modulating scale elements are disposed along a first scale element portion according to a first signal modulating element linear spatial step WSME1 and second signal modulating scale elements are disposed along a second scale element portion according to a second signal modulating element linear spatial step WSME2 different than the first signal modulating element linear spatial step WSME1.
G01D 5/20 - Moyens mécaniques pour le transfert de la grandeur de sortie d'un organe sensibleMoyens pour convertir la grandeur de sortie d'un organe sensible en une autre variable, lorsque la forme ou la nature de l'organe sensible n'imposent pas un moyen de conversion déterminéTransducteurs non spécialement adaptés à une variable particulière utilisant des moyens électriques ou magnétiques influençant la valeur d'un courant ou d'une tension en faisant varier l'inductance, p. ex. une armature mobile
A measuring instrument includes a movable portion configured to rotate in an arc motion about a pivot portion, and an electronic position encoder configured to measure an absolute relative position between a detector portion and a scale portion, one of which forms part of the movable portion. In the detector portion, first and second scale element portions of first and second track portions are arc-shaped and parallel to each other. In the scale portion, first signal modulating scale elements are disposed along a first scale element portion according to a first signal modulating element angular spatial step θWSME1 and second signal modulating scale elements are disposed along a second scale element portion according to a second signal modulating element angular spatial step θWSME2 that is different than the first signal modulating element angular spatial step θWSME1.
G01D 5/20 - Moyens mécaniques pour le transfert de la grandeur de sortie d'un organe sensibleMoyens pour convertir la grandeur de sortie d'un organe sensible en une autre variable, lorsque la forme ou la nature de l'organe sensible n'imposent pas un moyen de conversion déterminéTransducteurs non spécialement adaptés à une variable particulière utilisant des moyens électriques ou magnétiques influençant la valeur d'un courant ou d'une tension en faisant varier l'inductance, p. ex. une armature mobile
22.
METROLOGY SYSTEM WITH HIGH SPEED POSITION AND ORIENTATION TRACKING MODE
A metrology system is provided for use with a movement system that moves an end tool. The metrology system includes a sensor configuration, a light beam source configuration and a processing portion. The light beam source configuration directs light beams to light beam sensors to indicate a position and orientation of the light beam source configuration. In a high speed operating mode (e.g., an alternative to a standard speed operating mode), the metrology system determines a region of interest (“ROI”) for each light beam sensor of a set of light beam sensors, wherein each ROI includes a measurement spot produced by a light beam. Measurement signals are processed resulting from the ROIs, and a position and orientation of the light beam source configuration is determined. In various implementations, the ROIs are determined (e.g., including position and/or size, etc.) based at least in part on position information from the movement system.
G01B 11/00 - Dispositions pour la mesure caractérisées par l'utilisation de techniques optiques
G01B 11/14 - Dispositions pour la mesure caractérisées par l'utilisation de techniques optiques pour mesurer la distance ou la marge entre des objets ou des ouvertures espacés
23.
METROLOGY SYSTEM WITH POSITION AND ORIENTATION TRACKING UTILIZING PATTERNS OF LIGHT BEAMS
A metrology system is provided for use with a movement system that moves an end tool. The metrology system includes a sensor configuration, a light beam source configuration and a processing portion. The light beam source configuration directs a first pattern of light beams and a second pattern of light beams to light beam sensors to indicate a position and orientation of the light beam source configuration. The first pattern of light beams has a lower density of light beams as compared to the second pattern of light beams. Measurement signals from the light beam sensors are processed to determine a position and orientation of the light beam source configuration. The first pattern light beams and the second pattern light beams have at least one different characteristic (e.g., wavelength, polarity, timing, etc.) that enables the first pattern light beams to be distinguished from the second pattern light beams.
G01D 5/30 - Moyens mécaniques pour le transfert de la grandeur de sortie d'un organe sensibleMoyens pour convertir la grandeur de sortie d'un organe sensible en une autre variable, lorsque la forme ou la nature de l'organe sensible n'imposent pas un moyen de conversion déterminéTransducteurs non spécialement adaptés à une variable particulière utilisant des moyens optiques, c.-à-d. utilisant de la lumière infrarouge, visible ou ultraviolette avec déviation des rayons lumineux, p. ex. pour une indication optique directe les rayons lumineux étant détectés par des cellules photo-électriques
09 - Appareils et instruments scientifiques et électriques
Produits et services
Laboratory apparatus and instruments; photographic apparatus and instruments; cinematographic apparatus and instruments; optical machines and apparatus; coordinate measuring machines; parts and accessories for coordinate measuring machines; measuring machines and instruments; profile projectors; telecommunication machines and apparatus; image processing apparatus; magnetic encoders; data processing equipment; computer software for operating coordinate measuring machines; magnetic discs recorded with computer programs for management of measuring instruments.
27.
METHOD FOR COMBINING HEIGHT MAPS AND PROFILOMETER FOR THE SAME
The invention relates to a method for measuring a first height map and a second height map of a sample surface with a profilometer and combining the first and second height maps to a composite height map. The invention further relates to a profilometer configured for measuring a first height map and a second height map and combining the first and second height maps to a composite height map.
G01B 11/06 - Dispositions pour la mesure caractérisées par l'utilisation de techniques optiques pour mesurer la longueur, la largeur ou l'épaisseur pour mesurer l'épaisseur
A contactless distance measurement machine (1) irradiates a stylus (20) from a distal end part to a side thereof with measurement light from an interferometer (30). The contactless distance measurement machine comprises: a cylindrical light generation unit (21) that converts measurement light from the interferometer (30) into cylindrical light; an optical element group that changes the cylindrical light from the cylindrical light generation unit (21) into light along an extension axis (E) of the stylus (20); a planar light generation unit (24) that converts the light along the extension axis (E) into light oriented outward around the extension axis (E), and that converts light which is reflected off the surface of a measurement object W and returns inward around the extension axis (E) into light along the extension axis (E); an azimuth detection unit (28) that detects an azimuth at which the light returning to the planar light generation unit (24) reaches a maximum intensity; and a spatial light modulation unit (25) that restricts the light which has returned to the planar light generation unit (24) to light of the azimuth detected by the azimuth detection unit (28).
Provided is a non-contact surface property evaluation device that is easy to use, compact, and relatively inexpensive. The surface property evaluation device comprises: a light detector (240) that receives and detects scattered light from a measurement target object; and a single optical aperture (250) or arrayed optical apertures (250) disposed so as to face a light receiving surface (242) of the light detector (240). The relative positions of the optical aperture (250) and the light detector (240) are fixed such that a gap between the optical aperture (250) and the light receiving surface (242) of the light detector (240) is constant. The surface properties of the measurement target object are evaluated on the basis of the intensity distribution of the light detected by the light detector (240).
G01B 11/30 - Dispositions pour la mesure caractérisées par l'utilisation de techniques optiques pour mesurer la rugosité ou l'irrégularité des surfaces
09 - Appareils et instruments scientifiques et électriques
Produits et services
Optical apparatus and instruments; image processing
apparatus; measuring apparatus and instruments; profile
projectors; computer software for processing digital images;
computer programs; electron microscopes; digital graphic
scanners.
32.
TEMPERATURE COMPENSATION APPARATUS, MEASUREMENT SYSTEM, AND TEMPERATURE COMPENSATION METHOD
A temperature compensation apparatus including: a measured temperature acquisition part that acquires temperatures of the three-dimensional measurement apparatus during measurement; a measurement result acquisition part that acquires a measurement result of an object to be measured output by the three-dimensional measurement apparatus; a correction value calculation part that calculates a correction value of the measurement result using a model formula of temperature compensation, including a polynomial composed of values obtained by multiplying each of a plurality of temperatures by coefficients corresponding to each of the plurality of temperature sensors; and a correction part that calculates a corrected measurement value, which is a corrected measurement result obtained by adding the correction value to the measurement result or multiplying the correction value by the measurement result.
G01B 21/04 - Dispositions pour la mesure ou leurs détails, où la technique de mesure n'est pas couverte par les autres groupes de la présente sous-classe, est non spécifiée ou est non significative pour mesurer la longueur, la largeur ou l'épaisseur en mesurant les coordonnées de points
33.
FLUCTUATION BASED METHOD FOR DETERMINING SUB-SURFACE DEFECTS OF A SAMPLE
The invention relates to a method for sub-surface defect detection of a sample having a sample surface wherein use is made of an imaging system. The invention further relates to an imaging system for sub-surface defect detection for use in the method of the invention. The imaging system comprises: - a sample holder for holding the sample therein; - an excitation source for exciting the sample in the sample holder; - an optical sensor for obtaining an image of the sample surface of the sample in the sample holder, wherein the optical sensor comprises multiple pixels; and - a processor operatively connected to the excitation source and the optical sensor.
G01N 29/00 - Recherche ou analyse des matériaux par l'emploi d'ondes ultrasonores, sonores ou infrasonoresVisualisation de l'intérieur d'objets par transmission d'ondes ultrasonores ou sonores à travers l'objet
G01N 29/06 - Visualisation de l'intérieur, p. ex. microscopie acoustique
A machine vision system includes a vision components portion and an inspection portion. The inspection portion includes a variable focal length (VFL) lens, a VFL lens controller, an inspection portion light source, an inspection portion objective lens, and an inspection portion camera. The vision components portion performs an autofocus process which indicates z-heights of a plurality of sampling points on a surface of a workpiece for determining coarse surface profile data. The inspection portion thereafter performs an inspection process, which comprises acquiring an extended depth of field (EDOF) image for each inspection point of a plurality of inspection points on the surface of the workpiece, and for which an inspection scan path is followed which includes adjustments in relation to the distance between the inspection portion and the surface of the workpiece and is determined based at least in part on the coarse surface profile data from the autofocus process.
G01N 21/88 - Recherche de la présence de criques, de défauts ou de souillures
G02B 7/09 - Montures, moyens de réglage ou raccords étanches à la lumière pour éléments optiques pour lentilles avec mécanisme de mise au point ou pour faire varier le grossissement adaptés pour la mise au point automatique ou pour faire varier le grossissement de façon automatique
G02B 7/10 - Montures, moyens de réglage ou raccords étanches à la lumière pour éléments optiques pour lentilles avec mécanisme de mise au point ou pour faire varier le grossissement par déplacement axial relatif de plusieurs lentilles, p. ex. lentilles d'objectif à distance focale variable
G03F 7/00 - Production par voie photomécanique, p. ex. photolithographique, de surfaces texturées, p. ex. surfaces impriméesMatériaux à cet effet, p. ex. comportant des photoréservesAppareillages spécialement adaptés à cet effet
An inductive encoder system includes a scale including a periodic scale pattern, and a detector portion configured to move along a measuring axis direction relative to the periodic scale pattern. The detector portion includes a field generating portion configured to generate a changing magnetic flux, and a sensing portion comprising one or more sets of sensing elements and configured to provide detector signals which respond to a local effect on the changing magnetic flux provided by the periodic scale pattern, wherein each set of sensing elements is coupled to a set of sensor vias. The detector portion further includes a plurality of shield structures SST, wherein each shield structure SST is located proximate to a set of sensor vias and comprises a plurality of shield vias, and in each shield structure one or more shield loops are formed by the plurality of shield vias as coupled together by conductor portions.
G01D 5/20 - Moyens mécaniques pour le transfert de la grandeur de sortie d'un organe sensibleMoyens pour convertir la grandeur de sortie d'un organe sensible en une autre variable, lorsque la forme ou la nature de l'organe sensible n'imposent pas un moyen de conversion déterminéTransducteurs non spécialement adaptés à une variable particulière utilisant des moyens électriques ou magnétiques influençant la valeur d'un courant ou d'une tension en faisant varier l'inductance, p. ex. une armature mobile
The measurement machine includes: a holding section where a measurement target is held; a measurement unit (a first measurement unit and a second measurement unit) disposed at a position facing the holding section and provided with sensors that is configured to perform a measurement process on the measurement target; a frame whose position with respect to the holding section is fixed; and a plurality of arms coupling the frame with the measurement unit.
A calibration data acquisition method includes: a first holding step of holding an inspection gauge provided with a plurality of portions to be examined in a first posture with a gauge moving apparatus; a first measuring step of acquiring first distance data by measuring a distance between the plurality of portions to be examined with the three-dimensional measuring apparatus; a second holding step of holding the inspection gauge in a second posture with the gauge moving apparatus, after the first measuring step; a second measuring step of acquiring second distance data by measuring a distance between the plurality of portions to be examined of the inspection gauge in the second posture with the three-dimensional measuring apparatus; and a step of generating calibration data including the first distance data and the second distance data.
G01B 5/008 - Dispositions pour la mesure caractérisées par l'utilisation de techniques mécaniques pour mesurer les coordonnées de points en utilisant des machines de mesure de coordonnées
A working machine (base supporting device) includes a base having an upper surface that defines a horizontal plane including X and Y directions; first supports provided for opposite end portions in the X direction of the base and supporting the base in a Z direction; a second support disposed between the opposite end portions of the base supported by the first supports, supporting the base in the Z direction, and being adjustable in a position in the Z direction at which the base is supported; a deflection detecting section that detects an amount of deflection in the Z direction of the base; and a deflection controlling section that controls the second support, in which the deflection controlling section controls, based on the amount of deflection detected by the deflection detecting section, the second support to make the upper surface parallel to the X direction.
An image measuring apparatus includes: a CAD data storage unit that stores CAD data of at least one object and CAD data information including designed dimensions extracted from the CAD data, measurement points corresponding to the design dimensions, and edge detection tool conditions used to detect the edges of the measurement points in advance for each different CAD data; a CAD data retrieval unit that retrieves CAD data from the CAD data storage unit that are similar in shape to the measurement object represented in the captured image; a CAD data setting unit that performs best-fit of the CAD data identified based on the retrieval to the image of the measurement object as the CAD data of the measurement object, and sets the coordinate system of the CAD data; and a measurement performing unit that performs edge detection and dimensional measurement for each measurement point using the CAD data information.
G01B 11/00 - Dispositions pour la mesure caractérisées par l'utilisation de techniques optiques
G01B 11/03 - Dispositions pour la mesure caractérisées par l'utilisation de techniques optiques pour mesurer la longueur, la largeur ou l'épaisseur en mesurant les coordonnées de points
An image measuring apparatus and a program with good operability even when the information display screen is small or the operator's skill level is low is provided. An image measuring apparatus according to the present invention captures an image of a measurement object and measures the dimensions of the measurement object through a plurality of operation steps. The image measuring apparatus comprises: a display unit that displays user interfaces that accept inputs through input operations by an operator; a process control unit that causes the display unit to display only the user interfaces that accept the inputs necessary to use the available functions in each of the operation steps; and a function execution unit that executes the function for which the input related to use is made on the user interface.
An image measuring apparatus includes: a mounting table on which a measurement object is placed; an image capturing unit disposed opposite the mounting table and captures an image of the measurement object; a control unit that controls the image measuring apparatus; and a memory unit that stores at least the shape of the measurement object and the measurement method corresponding to the measurement object, associated to each other. The control unit includes: a placement judging unit that judges whether or not the measurement object is placed on the mounting table in a state ready for measurement based on the image captured by the image capturing unit; and a measurement performing unit that selects a measurement method based on the shape of the measurement object appearing in the image and performs the measurement, when the placement judging unit determines that the measurement object is ready for measurement.
A measurement control device includes a screen interface and controls a measurement operation of a measurement machine through the screen interface, the measurement control device including: a normal display screen that forms a part of the screen interface; one or more functional components provided on the normal display screen; a help mode button provided on a part of the normal display screen to switch a normal display mode from/to a help display mode; one or more help icons displayed on the normal display screen in the help display mode in a manner each associated with corresponding one of the functional components; a summary description field displayed on a part of the normal display screen when one of the help icons is selected; a detail display button displayed on a part of the summary description field; and a detailed description field displayed when the detail display button is selected.
G06F 9/451 - Dispositions d’exécution pour interfaces utilisateur
G06F 3/04817 - Techniques d’interaction fondées sur les interfaces utilisateur graphiques [GUI] fondées sur des propriétés spécifiques de l’objet d’interaction affiché ou sur un environnement basé sur les métaphores, p. ex. interaction avec des éléments du bureau telles les fenêtres ou les icônes, ou avec l’aide d’un curseur changeant de comportement ou d’aspect utilisant des icônes
An inductive linear encoder configured to measure a relative position between two elements along a measuring axis direction includes a scale including a periodic scale pattern and a detector portion configured to move along the measuring axis direction relative to the periodic scale pattern, wherein the detector portion and the scale are separated by a gap. The detector portion includes a field generating portion configured to generate a changing magnetic flux, and a sensing portion configured to provide detector signals which respond to a local effect on the changing magnetic flux provided by adjacent signal modulating elements of the scale pattern. The encoder includes one or more actuators coupled to the detector portion and configured to be electronically controlled to adjust a position of the detector portion so as to adjust the gap based at least in part on the detector signals from the sensing portion.
G01D 5/20 - Moyens mécaniques pour le transfert de la grandeur de sortie d'un organe sensibleMoyens pour convertir la grandeur de sortie d'un organe sensible en une autre variable, lorsque la forme ou la nature de l'organe sensible n'imposent pas un moyen de conversion déterminéTransducteurs non spécialement adaptés à une variable particulière utilisant des moyens électriques ou magnétiques influençant la valeur d'un courant ou d'une tension en faisant varier l'inductance, p. ex. une armature mobile
An image detection device includes: a variable focal length lens whose focal length is periodically changed in response to a drive signal that is periodic; an illuminator configured to illuminate a measurement target; an image detector configured to detect an image of the measurement target through the variable focal length lens; a drive controller configured to output the drive signal to the variable focal length lens; a light-emission controller configured to output a light-emission signal, which is in synchronization with the drive signal, to the illuminator; an oscillation sensor configured to detect oscillation information of the variable focal length lens; and a synchronous controller configured to adjust an output timing of the light-emission signal based on the oscillation information.
H04N 23/74 - Circuits de compensation de la variation de luminosité dans la scène en influençant la luminosité de la scène à l'aide de moyens d'éclairage
G02B 3/14 - Lentilles remplies d'un fluide ou à l'intérieur desquelles le vide a été fait à distance focale variable
H04N 23/68 - Commande des caméras ou des modules de caméras pour une prise de vue stable de la scène, p. ex. en compensant les vibrations du boîtier de l'appareil photo
Provided is an automatic measuring device for automating a contact-type measuring instrument that is inexpensive and easy to use. This automatic measuring device is provided with a holding unit that holds at least one of a workpiece and a measuring instrument such that when the workpiece and a movable element are in contact with one another, the relative positions and attitudes of the workpiece and the measuring instrument are changed at a pressure equal to or less than a predetermined measuring pressure that is preset in the measuring instrument, thereby bringing the contacting surfaces of the workpiece and the movable element into close contact with one other. The holding unit comprises: a translation permitting mechanism unit that permits translational displacement within a plane parallel to a measuring axis direction; and a first rotation permitting mechanism unit that permits rotation with an axis that is non-parallel with respect to the measuring axis as the axis of rotation.
A manufacturing method of a scale includes forming a metal-containing layer on a resin layer that is provided on at least a first face of a substrate, forming an outline of a pattern on the metal-containing layer by irradiating a first laser to the metal-containing layer from a side opposite to the substrate, irradiating a second laser to a margin outside of the outline of the metal-containing layer from a side of a second face of the substrate opposite to the first face, and peeling a part of the metal-containing layer corresponding to the margin.
G01D 5/245 - Moyens mécaniques pour le transfert de la grandeur de sortie d'un organe sensibleMoyens pour convertir la grandeur de sortie d'un organe sensible en une autre variable, lorsque la forme ou la nature de l'organe sensible n'imposent pas un moyen de conversion déterminéTransducteurs non spécialement adaptés à une variable particulière utilisant des moyens électriques ou magnétiques influençant les caractéristiques d'impulsionsMoyens mécaniques pour le transfert de la grandeur de sortie d'un organe sensibleMoyens pour convertir la grandeur de sortie d'un organe sensible en une autre variable, lorsque la forme ou la nature de l'organe sensible n'imposent pas un moyen de conversion déterminéTransducteurs non spécialement adaptés à une variable particulière utilisant des moyens électriques ou magnétiques produisant des impulsions ou des trains d'impulsions utilisant un nombre variable d'impulsions dans un train
B23K 26/352 - Travail par rayon laser, p. ex. soudage, découpage ou perçage pour le traitement de surface
47.
INDUCTIVE POSITION TRANSDUCER SYSTEM WITH IMPEDANCE CIRCUIT PORTION
An inductive position transducer system is provided, including an inductive position transducer and one or more sensing circuit portions. Each sensing circuit portion is connected to first and second sensing coil terminals and is configured to receive a signal from a respective sensing coil and comprises an impedance circuit portion and an input circuit portion (e.g., of an ASIC). The impedance circuit portion comprises at least first and second impedance circuit portion components. The first impedance circuit portion component is coupled between first and second impedance circuit portion nodes. The second impedance circuit portion component is at least one of: coupled between the first coil terminal and the first impedance circuit portion node; or coupled between the first impedance circuit portion node and the second impedance circuit portion node (for which a third impedance circuit portion component may also be provided in some implementations).
G01D 5/22 - Moyens mécaniques pour le transfert de la grandeur de sortie d'un organe sensibleMoyens pour convertir la grandeur de sortie d'un organe sensible en une autre variable, lorsque la forme ou la nature de l'organe sensible n'imposent pas un moyen de conversion déterminéTransducteurs non spécialement adaptés à une variable particulière utilisant des moyens électriques ou magnétiques influençant la valeur d'un courant ou d'une tension en faisant varier l'inductance, p. ex. une armature mobile influençant deux bobines par une action différentielle
G01B 7/00 - Dispositions pour la mesure caractérisées par l'utilisation de techniques électriques ou magnétiques
There is provided an automatic measuring apparatus that automates an inexpensive and easy-to-use contact-type measuring device. An automatic measuring apparatus includes a measuring device including a movable element that is displaceable with respect to a fixed element and moves forward and backward to be brought into contact with or away from a workpiece, and a displacement detection part that detects a displacement or position of the movable element, and an automatic operation part that automates the forward/backward movement of the movable element by power. When the movable element is brought into contact with the workpiece, vibration is applied directly or indirectly to at least one of the workpiece and the measuring device in such a manner that contacting surfaces of the workpiece and the measuring device are in close contact with each other by changing a relative position and posture between the workpiece and the measuring device.
G01B 7/02 - Dispositions pour la mesure caractérisées par l'utilisation de techniques électriques ou magnétiques pour mesurer la longueur, la largeur ou l'épaisseur
G01B 3/38 - Calibres à mâchoire ouverte et faces opposées, c.-à-d. compas à calibrer, où la distance interne entre les faces est fixe, mais peut être réglée à l'avance
G01B 7/00 - Dispositions pour la mesure caractérisées par l'utilisation de techniques électriques ou magnétiques
An automatic measuring apparatus includes a measuring device that measures a dimension of a workpiece, the measuring device including a movable element that is displaceable with respect to a fixed element and moves forward and backward to be brought into contact with or away from the workpiece, and a displacement detection part that detects a displacement or position of the movable element, and an automatic operation part that automates the forward/backward movement of the movable element by power. A workpiece holding part that holds the workpiece in such a manner that a position and posture of the workpiece is changed at a pressure lower than a predetermined measurement pressure set in advance in the measuring device when the movable element is brought into contact with the workpiece.
G01B 3/24 - Calibres à aiguille sensible, p. ex. calibres à cadrans à mâchoire ouverte, c.-à-d. compas à calibrer
G01B 5/00 - Dispositions pour la mesure caractérisées par l'utilisation de techniques mécaniques
G01B 5/06 - Dispositions pour la mesure caractérisées par l'utilisation de techniques mécaniques pour mesurer la longueur, la largeur ou l'épaisseur pour mesurer l'épaisseur
09 - Appareils et instruments scientifiques et électriques
Produits et services
Optical apparatus and instruments; image processing apparatus; measuring apparatus and instruments; profile projectors; computer software for processing digital images; computer programs; electron microscopes; digital graphic scanners.
An encoder that can measure displacement with high accuracy by canceling out the effects of external noise is provided. The encoder includes a rotor, a stator and a calculation unit. The stator has an even number of detectors that read the graduations and output a signal. The calculation unit has a phase calculation unit that calculates the phase based on the signals output by the detectors, and an averaging unit that averages the phase calculated by the phase calculation unit. The even number of detectors are each located at a position displaced by an integer multiple of the period of the graduations along the measurement direction from the other adjacent detectors.
An encoder that can measure displacement with high accuracy by canceling out the effects of external noise is provided. The encoder includes a rotor, a stator and a calculation unit. The stator has an even number of detectors that read the graduations and output a signal. The calculation unit has a phase calculation unit that calculates the phase based on the signals output by the detectors, and an averaging unit that averages the phase calculated by the phase calculation unit. The even number of detectors are each located at a position displaced by an integer multiple of the period of the graduations along the measurement direction from the other adjacent detectors.
The first signal output by half of the detectors and the second signal output by the other half of the detectors to have opposite polarity at the input to the phase calculation unit.
G01D 5/20 - Moyens mécaniques pour le transfert de la grandeur de sortie d'un organe sensibleMoyens pour convertir la grandeur de sortie d'un organe sensible en une autre variable, lorsque la forme ou la nature de l'organe sensible n'imposent pas un moyen de conversion déterminéTransducteurs non spécialement adaptés à une variable particulière utilisant des moyens électriques ou magnétiques influençant la valeur d'un courant ou d'une tension en faisant varier l'inductance, p. ex. une armature mobile
G01B 7/30 - Dispositions pour la mesure caractérisées par l'utilisation de techniques électriques ou magnétiques pour mesurer des angles ou des cônesDispositions pour la mesure caractérisées par l'utilisation de techniques électriques ou magnétiques pour tester l'alignement des axes
There is provided a displacement measuring apparatus capable of reducing power consumption in a sleep mode. An operation mode of a signal processing unit includes a measurement operation execution mode to calculate a displacement or position as a measurement value using a sensor signal from a displacement sensor, and a sleep mode to reduce power consumption compared to the measurement operation execution mode. In the sleep mode, the signal processing unit performs a substitute calculation process at a predetermined sampling frequency to calculate a substitute value related to the displacement or position using fewer sensor signals than in the measurement operation execution mode. The operation-mode control unit assumes that a variation of the displacement sensor has been detected when there is a variation in the substitute value, cancels the sleep mode, and switches the signal processing unit to the measurement operation execution mode.
G01B 7/30 - Dispositions pour la mesure caractérisées par l'utilisation de techniques électriques ou magnétiques pour mesurer des angles ou des cônesDispositions pour la mesure caractérisées par l'utilisation de techniques électriques ou magnétiques pour tester l'alignement des axes
G01D 5/20 - Moyens mécaniques pour le transfert de la grandeur de sortie d'un organe sensibleMoyens pour convertir la grandeur de sortie d'un organe sensible en une autre variable, lorsque la forme ou la nature de l'organe sensible n'imposent pas un moyen de conversion déterminéTransducteurs non spécialement adaptés à une variable particulière utilisant des moyens électriques ou magnétiques influençant la valeur d'un courant ou d'une tension en faisant varier l'inductance, p. ex. une armature mobile
54.
MEASUREMENT INFORMATION MANAGEMENT DEVICE, MEASUREMENT PROGRAM, MEASUREMENT METHOD, AND MEASUREMENT SYSTEM
This measurement information management device comprises a measurement information management unit that transmits a measurement command signal, receives measurement result signals respectively transmitted from a plurality of measurement instruments, and manages the plurality of measurement result signals. The measurement information management unit is provided with a first wireless transmission/reception unit that transmits the measurement command signal by using a first communication scheme and that receives the measurement result signals. The first wireless transmission/reception unit transmits the measurement command signal a plurality of times at different timings by using different wireless frequency bands, and receives the measurement result signals transmitted by second wireless transmission/reception units of the plurality of measurement instruments at mutually different timings by using a second communication scheme in which are used different wireless frequency bands from those of the first communication scheme.
Three-dimensional geometry measurement apparatuses includes: a first identification part that identifies a primary absolute phase value corresponding to each of a plurality of pixels of a first image capturing part; a second identification part that identifies a secondary absolute phase value corresponding to each of a plurality of pixels of a second image capturing part; a conversion identification part that identifies a conversion value for converting primary coordinates or secondary coordinates; and a geometry identification part that converts the primary coordinates or the secondary coordinates on the basis of the conversion value, and identifies a three-dimensional geometry of an object to be measured on the basis of the converted coordinates.
G06T 7/521 - Récupération de la profondeur ou de la forme à partir de la télémétrie laser, p. ex. par interférométrieRécupération de la profondeur ou de la forme à partir de la projection de lumière structurée
G01B 11/25 - Dispositions pour la mesure caractérisées par l'utilisation de techniques optiques pour mesurer des contours ou des courbes en projetant un motif, p. ex. des franges de moiré, sur l'objet
A method for eliminating lens flare that eliminates lens flare is provided. The lens flare elimination method performs: a step for acquiring images by irradiating the coaxial episcopic illumination light with varying irradiation intensities and capturing images at each irradiation intensity while the object is not placed on the mounting table; a step for capturing an image of the object by irradiating the object placed on the mounting table with the coaxial episcopic illumination light at an arbitrary irradiation intensity; a step for estimating an image for correction, which is the image at the irradiation intensity irradiated when the measurement object is captured, based on the images acquired in the image acquiring step; and a step for generating a post-correction image in which the lens flare is eliminated from the image of the object by obtaining the difference between the image of the object and the image for correction.
H04N 25/61 - Traitement du bruit, p. ex. détection, correction, réduction ou élimination du bruit le bruit provenant uniquement de l'objectif, p. ex. l'éblouissement, l'ombrage, le vignettage ou le "cos4"
An image measuring apparatus, according to the present invention, captures an image of the measurement object and measures the dimensions of the measurement point of the measurement object by analyzing the image. The image measuring apparatus comprises: a display unit that displays the image of the measurement object; an input unit that accepts input of the trajectory traced by an operator on the image displayed on the display unit; an edge detection unit that detects an edge based on the traced trajectory on the image; and a measurement performing unit that performs measurement based on one or more detected edges.
G01B 11/03 - Dispositions pour la mesure caractérisées par l'utilisation de techniques optiques pour mesurer la longueur, la largeur ou l'épaisseur en mesurant les coordonnées de points
A variable focal length lens device includes: a variable focal length optical system configured to change a focal length; a beam splitter configured to cause passing light, which is reflected off an object and passes through the variable focal length optical system, to branch into branched beams; an image-forming lens configured to condense the branched beams respectively; an image sensor configured to capture an image of the object by receiving the branched beam condensed by the image-forming lens; and an image sensor configured to capture an image of the object by receiving the branched beam condensed by the image-forming lens. An imaging distance on a first optical axis from the image sensor to the image-forming lens and an imaging distance on a second optical axis from the image sensor to the image-forming lens are different from each other.
H04N 23/45 - Caméras ou modules de caméras comprenant des capteurs d'images électroniquesLeur commande pour générer des signaux d'image à partir de plusieurs capteurs d'image de type différent ou fonctionnant dans des modes différents, p. ex. avec un capteur CMOS pour les images en mouvement en combinaison avec un dispositif à couplage de charge [CCD] pour les images fixes
G02B 3/14 - Lentilles remplies d'un fluide ou à l'intérieur desquelles le vide a été fait à distance focale variable
A calibration jig that calibrates a measurement apparatus for measuring a three-dimensional geometry of a measurement target, including: a plurality of elements to be measured, a frame part to which the plurality of elements to be measured are attached, and a mechanism part that moves the frame part, wherein the mechanism part includes: a rotation mechanism that rotates the frame part about a first axis; a first swinging mechanism that swings the frame part about a second axis orthogonal to the first axis; and a second swinging mechanism that swings the frame part about a third axis orthogonal to the first axis and the second axis.
G01B 11/25 - Dispositions pour la mesure caractérisées par l'utilisation de techniques optiques pour mesurer des contours ou des courbes en projetant un motif, p. ex. des franges de moiré, sur l'objet
60.
CALIBRATION JIG, CALIBRATION METHOD, AND MEASUREMENT SYSTEM
A calibration jig which calibrates a measurement apparatus that measures a three-dimensional geometry of a measurement target and includes a plurality of imaging parts that capture the measurement target, the calibration jig including: a plurality of elements to be measured; and a frame part to which the plurality of elements to be measured are attached, wherein each of the plurality of elements to be measured includes a main body part having a predetermined shape; and a plurality of label parts provided on the main body part, wherein an identification code for identifying the elements to be measured is shown on each label part.
G01B 11/25 - Dispositions pour la mesure caractérisées par l'utilisation de techniques optiques pour mesurer des contours ou des courbes en projetant un motif, p. ex. des franges de moiré, sur l'objet
G06K 7/14 - Méthodes ou dispositions pour la lecture de supports d'enregistrement par radiation électromagnétique, p. ex. lecture optiqueMéthodes ou dispositions pour la lecture de supports d'enregistrement par radiation corpusculaire utilisant la lumière sans sélection des longueurs d'onde, p. ex. lecture de la lumière blanche réfléchie
61.
MACHINE VISION SYSTEM WITH OBJECTIVE LENS AND COLLISION PROTECTION
A machine vision inspection system includes a movement portion comprising one or more movement mechanisms configured to adjust a relative position between an optical assembly portion and a workpiece. The optical assembly portion includes a camera that receives imaging light transmitted along an imaging optical path and provides images of a surface of the workpiece, and an objective lens that inputs the imaging light arising from the surface of the workpiece and transmits the imaging light along the imaging optical path to the camera. The optical assembly portion further includes a lens motion mechanism comprising a motion portion configured to enable motion of the objective lens from a rest position when a corresponding force is applied by a contact with the workpiece or other object (e.g., as corresponding to a collision with the workpiece or other object, and for which the system may stop motion when such a contact occurs).
H04N 23/695 - Commande de la direction de la caméra pour modifier le champ de vision, p. ex. par un panoramique, une inclinaison ou en fonction du suivi des objets
62.
Correction value calculation method, correction value calculation program, correction value calculation apparatus, and encoder
A correction value calculation method calculates correction values to correct the 2-phase sinusoidal signals (X, Y) output by the encoder, and includes: a polar coordinate calculation step for calculating, for N phase angles and the Lissajous radius corresponding to each phase angle in the Lissajous waveform drawn by the 2-phase sinusoidal signals, a squared radius, which is the square of the Lissajous radius corresponding to each phase angle; and a correction value calculation step for calculating, based on each phase angle and corresponding squared radius, at least a correction residual of an offset error of the signal X, a correction residual of an offset error of the signal Y, a correction residual of an amplitude ratio error of the signals X and Y, and a correction residual of a phase difference error between the signal X and the signal Y, and then calculating correction values based on the correction residuals.
H03M 13/00 - Codage, décodage ou conversion de code pour détecter ou corriger des erreursHypothèses de base sur la théorie du codageLimites de codageMéthodes d'évaluation de la probabilité d'erreurModèles de canauxSimulation ou test des codes
G06F 17/17 - Évaluation de fonctions par des procédés d'approximation, p. ex. par interpolation ou extrapolation, par lissage ou par le procédé des moindres carrés
H03M 13/25 - Détection d'erreurs ou correction d'erreurs transmises par codage spatial du signal, c.-à-d. en ajoutant une redondance dans la constellation du signal, p. ex. modulation codée en treillis [TMC]
63.
Metrology system utilizing annular optical configuration
An annular optical configuration is provided for utilization in a metrology system to redirect source light. The metrology system includes a camera that provides images of a workpiece at different focus positions through operation of a variable focal length lens and an objective lens configuration (OLC). The OLC includes one of a plurality of objective lenses having respective working distances and working distance focus positions. An annular lighting configuration directs source light toward a first central volume which includes a first working distance focus position of a first objective lens when the first objective lens is included in the OLC. When a second objective lens with a second working distance focus position is included in the OLC, the annular optical configuration is configured to be located in front of the lighting configuration to redirect the source light toward a second central volume which includes the second working distance focus position.
H04N 23/56 - Caméras ou modules de caméras comprenant des capteurs d'images électroniquesLeur commande munis de moyens d'éclairage
H04N 23/67 - Commande de la mise au point basée sur les signaux électroniques du capteur d'image
H04N 23/74 - Circuits de compensation de la variation de luminosité dans la scène en influençant la luminosité de la scène à l'aide de moyens d'éclairage
A scale includes a glass substrate having a frosted glass-like upper surface, a plurality of conductor patterns arranged at predetermined intervals on the upper surface of the glass substrate, and a formation provided on a lower surface of the glass substrate.
G01D 5/20 - Moyens mécaniques pour le transfert de la grandeur de sortie d'un organe sensibleMoyens pour convertir la grandeur de sortie d'un organe sensible en une autre variable, lorsque la forme ou la nature de l'organe sensible n'imposent pas un moyen de conversion déterminéTransducteurs non spécialement adaptés à une variable particulière utilisant des moyens électriques ou magnétiques influençant la valeur d'un courant ou d'une tension en faisant varier l'inductance, p. ex. une armature mobile
66.
Metrology system configured to illuminate and measure apertures of workpieces
A metrology system includes front and back vision components portions, and is configured to have a workpiece positioned between the two portions. The back vision components portion includes a light source and a diffuser. The front vision components portion includes a variable focal length lens, an objective lens and a camera. The metrology system includes a movement mechanism portion configured to align relative positions between the front and back vision components portions and an aperture defined through the workpiece such that at least a portion of the light from the light source that passes through the diffuser passes through the aperture for providing the illumination for imaging the aperture. The camera acquires an image stack of images of the aperture at different focus positions. Based on an analysis of the image stack, measurements related to workpiece features of the aperture (e.g., including a distance between workpiece features) can be determined.
G02F 1/29 - Dispositifs ou dispositions pour la commande de l'intensité, de la couleur, de la phase, de la polarisation ou de la direction de la lumière arrivant d'une source lumineuse indépendante, p. ex. commutation, ouverture de porte ou modulationOptique non linéaire pour la commande de la position ou de la direction des rayons lumineux, c.-à-d. déflexion
G01B 11/24 - Dispositions pour la mesure caractérisées par l'utilisation de techniques optiques pour mesurer des contours ou des courbes
G02F 1/33 - Dispositifs de déflexion acousto-optique
An automatic measuring system includes a measuring sensor tool that detects a surface of an object to be measured to measure a dimension or a shape of the object to be measured, a moving mechanism that relatively moves the measuring sensor tool with respect to the object to be measured, and an observation camera that images the object to be measured. A position and an orientation (posture) of a point to be measured are acquired from image data obtained by imaging the object to be measured by the observation camera, the measuring sensor tool is caused by the moving mechanism to approach the point to be measured, taking into account a position and posture offset between the observation camera and the measuring sensor tool, and a measurement value of the point to be measured is acquired by the measuring sensor tool.
G06T 7/80 - Analyse des images capturées pour déterminer les paramètres de caméra intrinsèques ou extrinsèques, c.-à-d. étalonnage de caméra
G01B 5/20 - Dispositions pour la mesure caractérisées par l'utilisation de techniques mécaniques pour mesurer des contours ou des courbes
G01N 35/00 - Analyse automatique non limitée à des procédés ou à des matériaux spécifiés dans un seul des groupes Manipulation de matériaux à cet effet
There is provided an automatic measuring system that can automate measurement and a control method for automatic measurement. An automatic measuring system includes a measuring sensor tool that detects a surface of an object to be measured with a probe to measure a dimension or a shape of the object to be measured, and a multi-axis moving mechanism that relatively moves the measuring sensor tool with respect to the object to be measured. The measuring sensor tool includes a cover part to protect the probe. In an approaching step in which the moving mechanism causes the measuring sensor tool to approach a point to be measured of the object to be measured, the cover part accommodates the probe inside the cover part. After the approaching step is completed, the probe is exposed from the cover part to detect the surface of the object to be measured.
G01N 35/00 - Analyse automatique non limitée à des procédés ou à des matériaux spécifiés dans un seul des groupes Manipulation de matériaux à cet effet
G01B 3/00 - Instruments de mesure caractérisés par l'utilisation de techniques mécaniques
G01B 5/12 - Dispositions pour la mesure caractérisées par l'utilisation de techniques mécaniques pour mesurer des diamètres des diamètres intérieurs
A system for measuring a hole includes a hole measuring device, processor(s) and a memory. The hole measuring device includes an end portion and an imaging portion. The end portion is configured to be inserted in a hole and includes at least first and second outer contact surface portions configured to be biased against the inner surface of the hole such that a contact distance between the first and second outer contact surface portions varies depending on the diameter of the hole. The end portion includes one or more reference surface portions (e.g., which are each configured to move when a corresponding outer contact surface portion moves). The imaging portion acquires an image of the one or more reference surface portions. The acquired image is used to determine relative positions of the one or more reference surface portions, which in turn are used to determine the diameter of the hole.
A measuring device includes a first scale provided on a rotary scale, arranged around an rotation axis of the rotary scale, and having first patterns arranged along a circumferential direction, a second scale provided on the rotary scale, arranged around the rotation axis, and having a plurality of second patterns arranged along the circumferential direction, first pattern detection sections arranged around the rotation axis, a second detection section that faces the second scale and reads at least a part of the plurality of second patterns, and a calculator configured to identify an absolute angle of the rotary scale, on a basis of a reading result of the first pattern detection sections and a reading result of the second pattern detection section. A number of the second pattern detection section is less than a number of the plurality of first pattern detection sections.
G01B 5/24 - Dispositions pour la mesure caractérisées par l'utilisation de techniques mécaniques pour mesurer des angles ou des cônesDispositions pour la mesure caractérisées par l'utilisation de techniques mécaniques pour tester l'alignement des axes
G01B 3/00 - Instruments de mesure caractérisés par l'utilisation de techniques mécaniques
G01B 11/26 - Dispositions pour la mesure caractérisées par l'utilisation de techniques optiques pour mesurer des angles ou des cônesDispositions pour la mesure caractérisées par l'utilisation de techniques optiques pour tester l'alignement des axes
A displacement measuring instrument includes an encoder that detects the amount of moving displacement of a measuring element while the measuring element is in contact with the surface of an object to be measured, a calculator that calculates a measurement value, and a display that displays at least the measurement value. The calculator includes a measuring section that calculates the measurement value from the amount of moving displacement and displays the measurement value on the display, a speed acquiring section that acquires the speed of the measuring element, an approach analyzing section that analyzes and determines whether the approach of the measuring element to the object to be measured is appropriate or inappropriate, and a warning section that issues a warning when the approach analyzing section determines that the approach of the measuring element to the object to be measured is inappropriate.
A surface texture measuring machine includes a display section, a touch panel arranged on the display section, a key group, a display control section that causes a first setting screen to be displayed on the display section, a setting section that creates a measurement condition in accordance with an input operation on the first setting screen through the touch panel, a storage that stores the measurement condition, and an input control section that switches a state of the touch panel between a disabled state and an enabled state. When the touch panel is in the disabled state, the display control section causes a second setting screen to be displayed on the display section in accordance with the input operation through the key group and the setting section reads the measurement condition from the storage in accordance with the input operation on the second setting screen through the key group.
A detector detection device includes a detection circuit to which a detecting signal is input, via a connector of a measuring machine, from a detector connected to the connector, and a determination section that determines whether the detector is connected to the connector, in which the detection circuit includes a first ground having a first electric potential that is lower than a reference electric potential of the detector and a comparator that is electrically connected to the first ground, receives the detecting signal from the connector, and compares an input voltage and a predetermined threshold voltage, and the determination section determines based 10 on a binary signal output from the comparator whether the detector is connected to the connector.
G01B 5/28 - Dispositions pour la mesure caractérisées par l'utilisation de techniques mécaniques pour mesurer la rugosité ou l'irrégularité des surfaces
G01R 19/00 - Dispositions pour procéder aux mesures de courant ou de tension ou pour en indiquer l'existence ou le signe
A production line in which a workpiece is conveyed through a conveyance path and machined with a machine tool is provided with a coordinate measuring machine capable of measuring the workpiece subjected to machining with the machine tool, whereby an in-line measurement system is provided. The coordinate measuring machine includes: a measuring machine body located beside the machine tool; a support extending from the measuring machine body to the machine tool; and a probe supported by the support and configured to measure the workpiece subjected to machining with the machine tool.
A measuring device includes a rotary encoder having a rotary scale and a plurality of detection portions, and a control device. The rotary scale are arranged around a rotation axis and has a scale pattern in which a plurality of patterns are arranged along a circumferential direction. The plurality of detection portions are arranged around the rotation axis, and reads the plurality of patterns from the scale pattern. The control device causes one or some detection portions to perform a first reading of the plurality of patterns at a first timing, causes another or other detection portions different from the one or some detection portions to perform a second reading of the plurality of patterns at a second timing different from the first timing, and calculates a measurement result based on a first reading result of the first reading and a second reading result of the second reading.
G01B 3/00 - Instruments de mesure caractérisés par l'utilisation de techniques mécaniques
G01B 5/24 - Dispositions pour la mesure caractérisées par l'utilisation de techniques mécaniques pour mesurer des angles ou des cônesDispositions pour la mesure caractérisées par l'utilisation de techniques mécaniques pour tester l'alignement des axes
G01B 7/30 - Dispositions pour la mesure caractérisées par l'utilisation de techniques électriques ou magnétiques pour mesurer des angles ou des cônesDispositions pour la mesure caractérisées par l'utilisation de techniques électriques ou magnétiques pour tester l'alignement des axes
A calibration method including: a first imaging step of imaging a calibration jig, a second imaging step of imaging the calibration jig after causing the calibration jig to be moved in a predetermined first direction, a third imaging step of imaging the calibration jig after causing the calibration jig to be moved in a predetermined second direction, a fourth imaging step of imaging the calibration jig, a fifth imaging step of imaging the calibration jig after rotating the calibration jig about an axis oriented in a predetermined third direction, a sixth imaging step of imaging the calibration jig after rotating the calibration jig about an axis oriented in a predetermined fourth direction, and identifying calibration parameters used for calibration of the measurement apparatus.
G06T 7/80 - Analyse des images capturées pour déterminer les paramètres de caméra intrinsèques ou extrinsèques, c.-à-d. étalonnage de caméra
H04N 23/695 - Commande de la direction de la caméra pour modifier le champ de vision, p. ex. par un panoramique, une inclinaison ou en fonction du suivi des objets
A calibration method including: an imaging step of capturing a part of the calibration jig with a first imaging part and a second imaging part; a first identifying step of identifying first coordinate positions of a part of the calibration jig on the basis of a capturing result of the first imaging part; a second identifying step of identifying second coordinate positions of a part of the calibration jig on the basis of a capturing result of the second imaging part; a rotating step of rotating the calibration jig; a repeating step of repeating the imaging step, the first identification step, the second identification step, and the rotating step; and identifying a rotation matrix for rotating the first coordinate positions or the second coordinate positions to perform a coordinate transformation and a translation vector for translating the first coordinate positions or the second coordinate positions.
G01B 11/26 - Dispositions pour la mesure caractérisées par l'utilisation de techniques optiques pour mesurer des angles ou des cônesDispositions pour la mesure caractérisées par l'utilisation de techniques optiques pour tester l'alignement des axes
An automatic measuring apparatus includes a measuring device that measures a workpiece dimension by a movable element, an automatic operation part that automates the forward/backward movement of the movable element by power, and a workpiece holding part that holds the workpiece. The workpiece holding part includes a holding shaft having a length in a direction along a direction of the forward/backward movement of the movable element and holds the workpiece in such a manner the workpiece is suspended on the holding shaft while the holding shaft is inserted in a hole in the workpiece. The workpiece holding part allows the workpiece to move in parallel along the holding shaft to change a position of the workpiece and to rotate to change a posture of the workpiece when the movable element is brought into contact with the workpiece.
A measuring system includes: a measuring machine; a plurality of candidate probes attachable to the measuring machine; a selected probe selected from the candidate probes and attached to the measuring machine; and a control device configured to control the measuring machine to perform a measurement operation for a workpiece, the control device including: a calibration value recorder configured to record respective calibration values of the candidate probes with respect to the measuring machine; and a calibration value processor configured to acquire one of the calibration values corresponding to the selected probe from the calibration value recorder.
G01B 21/04 - Dispositions pour la mesure ou leurs détails, où la technique de mesure n'est pas couverte par les autres groupes de la présente sous-classe, est non spécifiée ou est non significative pour mesurer la longueur, la largeur ou l'épaisseur en mesurant les coordonnées de points
A non-contact probe includes: a light irradiating section that scans a measurement target object with spot-like laser beam; an image-capturing section that captures an image of the laser beam reflected by the measurement target object by using a plurality of pixel columns selected from a light-reception surface including a plurality of pixel columns, and generates a captured image; a position sensing section that senses an image-formation position of the laser beam on the captured image; and a pixel column changing section that selects a different plurality of pixel columns such that the image-formation position is included in the selected plurality of pixel columns.
G01C 3/02 - Mesure des distances dans la ligne de viséeTélémètres optiques Détails
G01C 25/00 - Fabrication, étalonnage, nettoyage ou réparation des instruments ou des dispositifs mentionnés dans les autres groupes de la présente sous-classe
85.
SMALL-SIZED MEASURING DEVICE AND OPERATING METHOD OF THE SAME
A small-sized measuring device includes a position detector that is provided on a main body and detects the position of an object to be measured, a photosensor, and a central control unit that controls overall operation. The photosensor is configured to function at least as an input device configured to accept a base-point setting instruction from the user. The central control unit, when accepting the base-point setting instruction from the user through the non-contact input sensor, performs a base-point setting step of setting the position of the object to be measured detected by the position detector as a base point, and performs a measurement step of measuring the position of the object to be measured as a relative position from the base point.
A small-sized measuring device includes a position detector that is provided on a main body and detects the position of an object to be measured, a timer that measures time, and a central control unit that controls overall operation. The central control unit accepts a base-point setting standby time set by a user and stores the base-point setting standby time. The central control unit measures elapse of the base-point setting standby time after accepting an instruction to start measuring time from the user, performs a base-point setting step of setting the position of the object to be measured detected by the position detector as a base point after the base-point setting standby time has elapsed, and then measures the position of the object to be measured as a relative position from the base point.
A multi-degree-of-freedom displacement measuring device includes a rotary scale that has a scale pattern including a plurality of patterns that are arranged around a first rotation axis and arrayed along a circumference direction of the rotary scale, a detection head group including a plurality of detection heads, each of which is provided around the first rotation axis, is arranged on an installation face facing the rotary scale, and is configured to detect each of the plurality of patterns from the scale pattern, and a calculator configured to, based on detection values acquired by the plurality of detection heads, calculate a relative rotation angle around the first rotation axis, and calculate at least one of a relative movement amount in a direction along the first rotation axis and a relative movement amount in a direction along a second rotation axis orthogonal to the first rotation axis.
G01D 5/20 - Moyens mécaniques pour le transfert de la grandeur de sortie d'un organe sensibleMoyens pour convertir la grandeur de sortie d'un organe sensible en une autre variable, lorsque la forme ou la nature de l'organe sensible n'imposent pas un moyen de conversion déterminéTransducteurs non spécialement adaptés à une variable particulière utilisant des moyens électriques ou magnétiques influençant la valeur d'un courant ou d'une tension en faisant varier l'inductance, p. ex. une armature mobile
G01B 7/14 - Dispositions pour la mesure caractérisées par l'utilisation de techniques électriques ou magnétiques pour mesurer la distance ou la marge entre des objets ou des ouvertures espacés
A metrology system includes an illumination configuration having an illumination source, an objective lens configuration, and an image sensor configuration including an image sensor. The objective lens configuration includes an objective lens and has a lens optical axis. The illumination configuration, the objective lens configuration and the image sensor configuration form an optical path along which illumination from the illumination configuration travels. The illumination configuration provides illumination in an illumination direction toward at least a portion of an edge of a circular workpiece that is along the optical path. At least part of the illumination configuration is tilted relative to the objective lens configuration such that the illumination direction is at a first tilt angle in relation to the lens optical axis. The objective lens configuration directs illumination toward the image sensor configuration which is configured to provide an image corresponding to the edge of the circular workpiece.
An inductive type absolute electronic position encoder utilizing a single track configuration is provided. The encoder includes a scale portion and a detector portion configured to move relative to each other along a measuring axis direction. The scale portion includes a first scale element portion and a second scale element portion. The detector portion includes a field generating portion configured to generate changing magnetic flux, and a sensing portion including a first sensing element portion configured to operate with the first scale element portion and a second sensing element portion configured to operate with the second scale element portion. The detector portion and the scale portion are arranged in a single track configuration in which the first and second scale element portions are stacked relative to one another and the first and second sensing element portions are at least one of stacked or interleaved relative to one another.
G01D 5/22 - Moyens mécaniques pour le transfert de la grandeur de sortie d'un organe sensibleMoyens pour convertir la grandeur de sortie d'un organe sensible en une autre variable, lorsque la forme ou la nature de l'organe sensible n'imposent pas un moyen de conversion déterminéTransducteurs non spécialement adaptés à une variable particulière utilisant des moyens électriques ou magnétiques influençant la valeur d'un courant ou d'une tension en faisant varier l'inductance, p. ex. une armature mobile influençant deux bobines par une action différentielle
91.
Measuring probe with sensing coils and temperature compensation
A measuring probe for a coordinate measuring machine is provided. The measuring probe includes a stylus position detection portion with a sensing coil configuration, signal processing and control circuitry and a temperature dependent compensation portion. The temperature dependent compensation portion includes a temperature dependent component that is coupled to at least part of the sensing coil configuration such that a change in a characteristic of the temperature dependent component due to an increase in temperature of the temperature dependent component causes a ratio of a first current to a second current to increase in the sensing coil configuration, wherein the first and second currents are in at least one first sensing coil and at least one second sensing coil, respectively, of the sensing coil configuration. Such implementations are configured to increase accuracy of the processed signals by at least partially compensating for certain affects that occur due to temperature changes.
A measuring probe for a coordinate measuring machine is provided. The measuring probe includes a stylus position detection portion, signal processing and control circuitry and a temperature dependent compensation portion. The stylus position detection portion includes a field generating coil configuration and a sensing coil configuration. The temperature dependent compensation portion includes a temperature dependent component that is coupled to a field generating coil of the field generating coil configuration such that a change in a characteristic of the temperature dependent component due to an increase in temperature of the temperature dependent component causes relatively more current to flow through the field generating coil when driven by the coil drive signal than if the characteristic of the temperature dependent component had not changed. Such implementations are configured to increase the accuracy of the processed signals by at least partially compensating for certain affects that occur due to temperature changes.
G01B 5/008 - Dispositions pour la mesure caractérisées par l'utilisation de techniques mécaniques pour mesurer les coordonnées de points en utilisant des machines de mesure de coordonnées
G01B 5/00 - Dispositions pour la mesure caractérisées par l'utilisation de techniques mécaniques
G01B 5/012 - Têtes de contact de palpeurs pour de telles machines
93.
DRIVE CIRCUIT FOR INDUCTIVE POSITION TRANSDUCER SYSTEM
An inductive position transducer system includes a drive circuit and an inductive position transducer with at least a first field generating coil. The drive circuit includes a resonant circuit portion and an amplifier portion. The amplifier portion comprises a current-driven single stage differential amplifier and is configured to provide an oscillating drive signal to the resonant circuit portion which results in a driving of the field generating coil (e.g., at a coil voltage which may be larger than a power supply voltage, such as over 2× larger). A controller may adjust a bias current that is provided to the amplifier portion to maintain the voltage across the field generating coil (e.g., at a specified voltage level). The amplifier portion may comprise CMOS transistors and may be fabricated on a chip (as part of a low-voltage CMOS integrated circuit) along with other portions of the inductive position transducer system.
An inspection method includes an image-data acquisition step of acquiring data about an image of a disk-shaped graduation plate as disk-shaped graduation-plate image data, and a polar-coordinate transformation step of transforming the disk-shaped graduation-plate image data into polar coordinates using a center of the disk-shaped graduation plate as a reference to generate polar-coordinate graduation image data. A defect detection step includes a processing-region setting step of setting a processing region for each of graduation line on a polar-coordinate angle display axis, a center-of-gravity calculation step of calculating a center of gravity for each processing region, and a center-of-gravity pitch calculation step of calculating a pitch of the center of gravity calculated in the center-of-gravity calculation step. the defect detection is executed by comparing a pitch of graduations in the polar-coordinate graduation image data with a predetermined reference value
A variable focal length lens device includes: a liquid resonant liquid lens unit having a refractive index changeable in response to an inputted drive signal; a scanning range setter setting a predetermined standard frequency band as a scanning range of a frequency of the drive signal; a resonance frequency detector scanning the frequency of the drive signal over the scanning range and detecting a resonance frequency of the liquid lens unit based on an oscillation state of the liquid lens unit; and a resonance frequency estimator calculating an estimated value of a target resonance frequency based on a standard resonance frequency detected from the standard frequency band by the resonance frequency detector, the scanning range setter further setting a target frequency band including the estimated value of the target resonance frequency as the scanning range.
G02B 3/14 - Lentilles remplies d'un fluide ou à l'intérieur desquelles le vide a été fait à distance focale variable
G02F 1/29 - Dispositifs ou dispositions pour la commande de l'intensité, de la couleur, de la phase, de la polarisation ou de la direction de la lumière arrivant d'une source lumineuse indépendante, p. ex. commutation, ouverture de porte ou modulationOptique non linéaire pour la commande de la position ou de la direction des rayons lumineux, c.-à-d. déflexion
An optical measurement device includes: a measurement region in which a measurement object is disposed; a light beam scanning unit that irradiates the measurement region with light beam and scans the light beam in a scanning direction intersecting with an irradiation direction of the light beam; a light receiving unit that receives the light beam that has passed through the measurement region and outputs a light receiving signal; a signal processing unit that outputs data indicative of a dimension in the scanning direction of the measurement object based on the light receiving signal; and an optical path cover that is configured to be removably attachable to a housing of the light beam scanning unit and covers an optical path of the light beam in a range from the housing to the measurement object.
The current invention relates to a method of structured lilumination microscopy for determining a height map of a test surface wherein use is made of a structured lilumination microscope. The invention is further related to a structured illumination microscope for determining a height map of a test surface. The microscope comprises a light source, a spatial light modulator, scanner, an optical detector, and a processor.
G01B 11/06 - Dispositions pour la mesure caractérisées par l'utilisation de techniques optiques pour mesurer la longueur, la largeur ou l'épaisseur pour mesurer l'épaisseur
There is provided an inspection method of inspecting a disk-shaped graduation plate accurately and efficiently. An inspection method includes an image-data acquisition step of acquiring data about an image of a disk-shaped graduation plate as disk-shaped graduation-plate image data, and a polar-coordinate transformation step of transforming the disk-shaped graduation-plate image data into polar coordinates using a center of the disk-shaped graduation plate as a reference to generate polar-coordinate graduation image data. A defect detection step includes a processing-region setting step of setting a processing region on a polar-coordinate angle display axis, a center-of-gravity calculation step of calculating a center of gravity for each processing region, and a center-of-gravity pitch calculation step of calculating a pitch of the center of gravity calculated in the center-of-gravity calculation step.
A machine vision inspection system and method perform operations including: acquire a first image at a first image position, wherein the first image includes a first feature of a workpiece and a first measurement marking set of a measurement marking device (MMD); determine a first relative position of the first feature in the first image; move a stage supporting the workpiece to acquire a second image at a second image position, wherein the second image includes a second feature of the workpiece and a second measurement marking set of the MMD; determine a second relative position of the second feature in the second image; and determine a distance between the first feature and the second feature based at least in part on the first relative position, the second relative position and a distance between a measurement marking of the first set and a measurement marking of the second set.
A scale includes a substrate, a plurality of scale patterns that are arranged along a measurement direction with a constant period on a surface of the substrate and are made of conductor, and a plurality of dummy patterns that are provided on at least a part of a region on the surface of the substrate where the plurality of scale patterns are not provided, and are made of the same conductors as the plurality of scale patterns. A diameter of a largest circle that can be formed in each of the plurality of dummy patterns centering on a point in each of the plurality of dummy patterns is ¼ or less of the period of the plurality of scale patterns.
G01D 5/20 - Moyens mécaniques pour le transfert de la grandeur de sortie d'un organe sensibleMoyens pour convertir la grandeur de sortie d'un organe sensible en une autre variable, lorsque la forme ou la nature de l'organe sensible n'imposent pas un moyen de conversion déterminéTransducteurs non spécialement adaptés à une variable particulière utilisant des moyens électriques ou magnétiques influençant la valeur d'un courant ou d'une tension en faisant varier l'inductance, p. ex. une armature mobile
