The present invention provides a speaker device having a support structure with a support body provided with a sound chamber and an annular sound hole. The speaker device further includes an ultrasonic sound emitting unit for emitting symmetrical ultrasonic waves, and a demodulation structure with a diaphragm and multiple fixed parts. The diaphragm is spaced apart from the sound hole. The ultrasonic waves emitted by the ultrasonic sound emitting unit drive the demodulation structure to vibrate, adjusting the size of the gap. Compared with the prior art, the speaker device of the present invention has high sound wave demodulation efficiency, good improvement in vibration system amplitude, and excellent acoustic performance.
H04R 1/28 - Supports de transducteurs ou enceintes conçus pour réponse de fréquence spécifiqueEnceintes de transducteurs modifiées au moyen d'impédances mécaniques ou acoustiques, p. ex. résonateur, moyen d'amortissement
H04R 1/02 - BoîtiersMeublesMontages à l'intérieur de ceux-ci
The present disclosure provides a MEMS speaker including a supporting member, a diaphragm used for emitting an amplitude-modulated ultrasonic wave, and an acoustic valve. The supporting member includes a supporting body and an acoustic hole, the acoustic valve includes a valve body fixed with a peripheral side of the supporting body and located in the acoustic hole and a variable section valve hole permeating from one end of the valve body to the other end thereof, the diaphragm is fixed with an inner peripheral side of the supporting body and located in the acoustic hole, the variable section valve hole allows the amplitude-modulated ultrasonic wave passing through the variable section valve hole to produce a modulated acoustic wave. Compared with the related art, the MEMS speaker could enhance the efficiency and amplitude of acoustic wave demodulation, and the acoustic performance could be enhanced.
Provided in the present invention is a loudspeaker apparatus. The loudspeaker apparatus comprises: a support structure, the support structure comprising a support body provided with a sound generation cavity, and an annular sound hole formed at one end of the support body; an ultrasonic generation unit, the ultrasonic generation unit being located inside the sound generation cavity and fixed on the inner peripheral side of the support body, and being used for generating symmetrical ultrasonic waves; and a demodulation structure, the demodulation structure comprising a diaphragm and a plurality of fixing portions extending from the outer peripheral side of the diaphragm and distributed at intervals, wherein the fixing portions are fixed to the inner side of the sound hole and suspend the diaphragm in the sound hole, the diaphragm and the sound hole are spaced apart from each other and enclose a gap together with the fixing portions, and the ultrasonic waves generated by the ultrasonic generation unit drive the demodulation structure to vibrate, so as to adjust the size of the gap. Compared with the prior art, the loudspeaker apparatus of the present invention has a high acoustic demodulation efficiency, a good effect in increasing the amplitude of a vibration system, and a good acoustic performance.
Provided is a MEMS speaker, comprising: a supporting structure, the supporting structure comprising a supporting body and a sound hole extending from one end of the supporting body through to the other end; a diaphragm, the diaphragm being fixed to an inner peripheral side of the supporting body and located within the sound hole, and the diaphragm being used for emitting amplitude-modulated ultrasonic waves; and an acoustic valve, the acoustic valve comprising a valve body which has a peripheral edge fixed to the supporting body and is located within the sound hole, and a variable cross-section valve hole extending from one end of the valve body through to the other end, wherein the variable cross-section valve hole enables the amplitude-modulated ultrasonic waves passing therethrough to be demodulated into modulated sound waves. The sound wave demodulation efficiency and amplitude of the MEMS speaker of the present invention can be improved, thereby improving the acoustic performance of the MEMS speaker.
An accelerometer, comprising a substrate, a first anchor (31), an inner mass unit (1), an outer mass unit (2), a first seesaw unit (4), a second seesaw unit (5), a first acceleration measurement unit (6) and a second acceleration measurement unit. The first anchor (31) is fixed at a central portion of the substrate; the inner mass unit (1) surrounds the outer side of the first anchor (31); the outer mass unit (2) surrounds the outer side of the inner mass unit (1); the first seesaw unit (4) and the second seesaw unit (5) are arranged opposite to each other, and define an annular structure; the annular structure surrounds the outer side of the outer mass unit (2); the first acceleration measurement unit (6) is at least partially arranged on the annular structure and is used for measuring the acceleration in an out-of-plane Z-axis direction; the second acceleration measurement unit is arranged on the outer mass unit (2) and is used for measuring the acceleration in an in-plane X-axis direction and the acceleration in an in-plane Y-axis direction. The accelerometer can achieve the technical effects of reasonable design and higher sensitivity.
G01P 15/125 - Mesure de l'accélérationMesure de la décélérationMesure des chocs, c.-à-d. d'une variation brusque de l'accélération en ayant recours aux forces d'inertie avec conversion en valeurs électriques ou magnétiques au moyen de capteurs à capacité
G01P 15/08 - Mesure de l'accélérationMesure de la décélérationMesure des chocs, c.-à-d. d'une variation brusque de l'accélération en ayant recours aux forces d'inertie avec conversion en valeurs électriques ou magnétiques
An acceleration sensor, which comprises a first acceleration detection unit (5), a second acceleration detection unit (6), a substrate, a connecting arm (4), a first anchor point (11), a first elastic element (2), and a second elastic element (3). The first acceleration detection unit (5) is used for detecting an acceleration along an out-of-plane Z-axis direction. The first acceleration detection unit (5) comprises a first seesaw unit (51) and a second seesaw unit (52). The first seesaw unit (51) and the second seesaw unit (52) are oppositely arranged, and the first seesaw unit (51) and the second seesaw unit (52) enclose to form an annular structure. The second acceleration detection unit (6) is used for detecting an acceleration along an in-plane X-axis direction and/or an in-plane Y-axis direction. The annular structure surrounds an outer side of the second acceleration detection unit (6). The connecting arm (4) is fixed to the substrate by means of the first anchor point (11). The connecting arm (4) is located between the first acceleration detection unit (5) and the second acceleration detection unit (6). Thus, technical effects of a reasonable structural design and stronger anti-interference capability are achieved.
G01P 15/125 - Mesure de l'accélérationMesure de la décélérationMesure des chocs, c.-à-d. d'une variation brusque de l'accélération en ayant recours aux forces d'inertie avec conversion en valeurs électriques ou magnétiques au moyen de capteurs à capacité
G01P 15/08 - Mesure de l'accélérationMesure de la décélérationMesure des chocs, c.-à-d. d'une variation brusque de l'accélération en ayant recours aux forces d'inertie avec conversion en valeurs électriques ou magnétiques
An acceleration sensor, comprising a substrate, anchor points (1), inner side support units (2), a first seesaw unit (3), a second seesaw unit (4) and out-of-plane displacement measuring units (5). The middle of each inner side support unit (2) is fixed to the substrate by means of an anchor point (1); the first seesaw unit (4) is elastically connected to the outer side of a first end of each inner side support unit (2), and the second seesaw unit (4) is elastically connected to the outer side of a second end of each inner side support unit (2); the first seesaw unit (3) and the second seesaw unit (4) are each symmetrically distributed along the symmetry axis (100) of the acceleration sensor; the first seesaw unit (3) forms two first seesaw structures on two sides of the symmetry axis (100) respectively, and the second seesaw unit forms two second seesaw structures on two sides of the symmetry axis (100) respectively. The present invention achieves the technical effects of reducing the impact of Y-axis angular acceleration on acceleration sensors, and improving the cross-axis suppression ratio of acceleration sensors.
G01P 15/125 - Mesure de l'accélérationMesure de la décélérationMesure des chocs, c.-à-d. d'une variation brusque de l'accélération en ayant recours aux forces d'inertie avec conversion en valeurs électriques ou magnétiques au moyen de capteurs à capacité
G01P 15/08 - Mesure de l'accélérationMesure de la décélérationMesure des chocs, c.-à-d. d'une variation brusque de l'accélération en ayant recours aux forces d'inertie avec conversion en valeurs électriques ou magnétiques
An acceleration sensor, including a base; anchor point; an inner side supporting unit, a middle part of which is fixed to the base through the anchor point, a first seesaw unit elastically connected to an outer side of a first end of the inner side supporting unit; a second seesaw unit elastically connected to an outer side of a second end of the inner side supporting unit; and an out-of-plane displacement detection unit. Each of the first seesaw unit and the second seesaw unit is symmetrically distributed about a symmetry axis of the acceleration sensor. The first seesaw unit includes two first seesaw structures at two sides of the symmetry axis and the second seesaw unit includes two second seesaw structures at two sides of the symmetry axis. An influence of Y-axis angular acceleration on the acceleration sensor is greatly reduced and a cross inhibition ratio thereof is improved.
G01P 15/125 - Mesure de l'accélérationMesure de la décélérationMesure des chocs, c.-à-d. d'une variation brusque de l'accélération en ayant recours aux forces d'inertie avec conversion en valeurs électriques ou magnétiques au moyen de capteurs à capacité
G01P 15/08 - Mesure de l'accélérationMesure de la décélérationMesure des chocs, c.-à-d. d'une variation brusque de l'accélération en ayant recours aux forces d'inertie avec conversion en valeurs électriques ou magnétiques
G01P 15/18 - Mesure de l'accélérationMesure de la décélérationMesure des chocs, c.-à-d. d'une variation brusque de l'accélération dans plusieurs dimensions
Provided is an acceleration sensor, including a base; a first anchor point fixed to a middle part of the base; an inner side mass unit surrounding an outer side of the first anchor point, an outer side mass unit surrounding an outer side of the inner side mass unit, a first seesaw unit and a second seesaw unit arranged opposite to each other to define an annular structure surrounding an outer side of the outer side mass unit, a first acceleration detection unit and a second acceleration detection unit. Part of the first acceleration detection unit is arranged at the annular structure to detect acceleration in an out-of-plane Z-axis direction, the second acceleration detection unit is arranged at the outer side mass unit to detect acceleration in an in-plane X-axis direction and in an in-plane Y-axis direction. A design thereof is reasonable and the sensitivity is high.
B81B 3/00 - Dispositifs comportant des éléments flexibles ou déformables, p. ex. comportant des membranes ou des lamelles élastiques
G01P 15/125 - Mesure de l'accélérationMesure de la décélérationMesure des chocs, c.-à-d. d'une variation brusque de l'accélération en ayant recours aux forces d'inertie avec conversion en valeurs électriques ou magnétiques au moyen de capteurs à capacité
An acceleration sensor, including a first acceleration detection unit configured to detect acceleration in an out-of-plane Z-axis direction, a second acceleration detection unit configured to detect acceleration in an in-plane X-axis direction and/or an in-plane Y-axis direction, a base, a connecting arm, a first anchor point, a first elastic member and a second elastic member. The first acceleration detection unit includes a first seesaw unit and a second seesaw unit arranged opposite to each other to define an annular structure. The annular structure surrounds an outer side of the second acceleration detection unit. The first anchor point is located at a middle part of the substrate, and the connection arm is fixed to the substrate through the first anchor point. The connection arm is located between the first acceleration detection unit and the second acceleration detection unit. A structure design thereof is reasonable and the anti-interference capability is great.
G01P 15/18 - Mesure de l'accélérationMesure de la décélérationMesure des chocs, c.-à-d. d'une variation brusque de l'accélération dans plusieurs dimensions
G01P 15/08 - Mesure de l'accélérationMesure de la décélérationMesure des chocs, c.-à-d. d'une variation brusque de l'accélération en ayant recours aux forces d'inertie avec conversion en valeurs électriques ou magnétiques
G01P 15/125 - Mesure de l'accélérationMesure de la décélérationMesure des chocs, c.-à-d. d'une variation brusque de l'accélération en ayant recours aux forces d'inertie avec conversion en valeurs électriques ou magnétiques au moyen de capteurs à capacité
Provided is a fully decoupled MEMS gyroscope, including a base, a sensing unit elastically connected to the base, and a driving unit coupled with the sensing unit and driving the sensing unit to move. The base includes a coupling anchor point located at a center of a rectangle and a coupling structure elastically connected to the coupling anchor point. The driving unit includes four driving members located at inner positions of four corners of the rectangle. The sensing unit includes two X mass blocks symmetrically arranged in two of the avoiding intervals, two Y mass blocks symmetrically arranged in the other two of the avoiding intervals, four Z mass blocks elastically connected to the adjacent driving members and located at the four corners of the rectangle, and four Z detection decoupling members elastically connected to the adjacent Z mass blocks and elastically connected to each other around the rectangle.
G01C 19/5656 - Dispositifs sensibles à la rotation utilisant des masses vibrantes, p. ex. capteurs vibratoires de vitesse angulaire basés sur les forces de Coriolis utilisant des barres ou des poutres vibrantes les dispositifs comportant une structure micromécanique
G01C 19/5747 - Details de structure ou topologie les dispositifs ayant deux masses de détection en mouvement en opposition de phase chaque masse de détection étant reliée à une masse d'entraînement, p. ex. cadres d'entraînement
The present invention provides a MEMS piezoelectric speaker including a substrate with a back cavity, a diaphragm, a capacitive system and a flexible film. The diaphragm includes a fixed end, a suspended end. Adjacent suspended ends are at least partially spaced to form a slit. The suspended end includes a support section and a piezoelectric section. Along the thickness direction of the MEMS piezoelectric speaker, a flexible film is at least partially spaced from the diaphragm and the flexible film is spaced from the substrate. This design can improve the sound pressure level of the MEMS piezoelectric speaker in the middle and high frequency, and improve the acoustic performance of the MEMS piezoelectric speaker.
H04R 7/20 - Dispositions pour monter ou pour tendre des membranes ou des cônes à la périphérie pour fixer une membrane ou un cône élastiquement à un support au moyen d'un matériau flexible, ressorts, fils ou cordes
H04R 7/06 - Membranes planes comportant plusieurs sections ou couches
H04R 17/10 - Transducteurs résonnants, c.-à-d. adaptés pour produire une puissance de sortie maximum pour une fréquence déterminée
Provided in the present utility model is an MEMS loudspeaker. The MEMS loudspeaker only comprises: a substrate, which forms a cavity; a piezoelectric diaphragm, which is stacked on the substrate and covers the cavity; and a flexible structural layer, which covers the piezoelectric diaphragm, wherein the piezoelectric diaphragm and the flexible structural layer are both of a complete sheet-like structure, the Young's modulus of the flexible structural layer is less than the Young's modulus of the piezoelectric diaphragm, and the Young's modulus of the flexible structural layer ranges from 100 MPa to 50 GPa. A relatively soft flexible structural layer rather than a relatively hard structural layer is used in the MEMS loudspeaker of the present utility model, such that displacement is better ameliorated, and the MEMS loudspeaker has a more impressive acoustic performance.
A MEMS speaker is provided, including only a substrate enclosing a cavity, a piezoelectric diaphragm disposed above the substrate and covering the cavity, and a flexible structure layer covering the piezoelectric diaphragm. Both the piezoelectric diaphragm and the flexible structure layer are complete sheet structures, a young modulus of the flexible structure layer is less than a young modulus of the piezoelectric diaphragm, and the young modulus of the flexible structure layer is in a range of 100 MPa to 50 GPa. The MEMS speaker in the present disclosure does away with a harder structure layer and adopts a softer flexible structure layer, which better enhances the displacement and has a more prominent acoustic performance.
Embodiments of the present application provide a micromechanical gyroscope and an electronic product. The micromechanical gyroscope comprises a first mass block, a plurality of second mass blocks, a plurality of driving members, a plurality of first flexible beams, and a plurality of second flexible beams. The first mass block is provided with a mounting region; the plurality of second mass blocks are distributed in a first direction; the plurality of driving members are distributed in the first direction; the driving members are respectively arranged on two opposite sides of the plurality of second mass blocks in the first direction; the plurality of driving members and the plurality of second mass blocks are all located in the mounting region; the first mass block surrounds the outer sides of the plurality of driving members and the plurality of second mass blocks; each driving member is connected to the first mass block by means of the corresponding first flexible beam; and each second mass block is, by means of the corresponding second flexible beam, connected to the driving member adjacent to the second mass block. According to the micromechanical gyroscope and the electronic product, the Coriolis conversion rate of the first mass block can be improved, thereby utilizing the chip area to the maximum extent.
G01C 19/574 - Details de structure ou topologie les dispositifs ayant deux masses de détection en mouvement en opposition de phase
G01C 19/5712 - Dispositifs sensibles à la rotation utilisant des masses vibrantes, p. ex. capteurs vibratoires de vitesse angulaire basés sur les forces de Coriolis utilisant des masses entraînées dans un mouvement de rotation alternatif autour d'un axe les dispositifs comportant une structure micromécanique
G01C 19/56 - Dispositifs sensibles à la rotation utilisant des masses vibrantes, p. ex. capteurs vibratoires de vitesse angulaire basés sur les forces de Coriolis
Provided are a micromechanical gyroscope and an electronic product. The micromechanical gyroscope includes a first mass, a plurality of second masses, a plurality of first flexible beams and a plurality of second flexible beams. The first mass is provided with a mounting area, the plurality of second masses are distributed in a first direction, and the plurality of drivers are distributed in first direction and disposed on two opposite sides of the plurality of second masses in first direction. The plurality of drivers and the plurality of second masses are all located within the mounting area, and the first mass surrounds outer sides of the plurality of drivers and outer sides of the plurality of second masses. With the micromechanical gyroscope and the electronic product, the coriolis conversion rate of the first mass 1 can be improved, and the utilization of a chip area can be maximized.
G01C 19/00 - GyroscopesDispositifs sensibles à la rotation utilisant des masses vibrantesDispositifs sensibles à la rotation sans masse en mouvementMesure de la vitesse angulaire en utilisant les effets gyroscopiques
An accelerometer. The accelerometer comprises a substrate (100) and measurement devices (1); the substrate (100) is provided with supporting anchor points (2) and electrode fixing anchor points (3) arranged adjacent to the supporting anchor points (2); each measurement device (1) comprises two measurement plates (11) and correspondingly arranged measurement electrodes (12); each measurement electrode (12) is connected to a corresponding electrode fixing anchor point (3) by means of a connecting arm (14); each measurement plate (11) is elastically connected to a corresponding supporting anchor point (2); two measurement plates (11) are asymmetrically arranged relative to the axis of the supporting anchor point (2), are parallel to each other and are opposite in direction; the measurement electrode (12) and the corresponding measurement plate (11) are spaced apart and are used for forming measurement capacitance. The accelerometer comprises two measurement devices (1), the two measurement devices (1) are located in the same plane, the measurement plates (11) of the two measurement devices (1) are respectively arranged perpendicular to each other, the two measurement plates (11) of the same measurement device (1) are arranged adjacent to each other, and the wires of in-plane measurement electrodes (121) between different measurement devices (1) can be separated from each other and do not intersect with each other, thereby reducing the influence of parasitic capacitance caused by complex wiring, and further improving the measurement accuracy of the accelerometer.
G01P 15/125 - Mesure de l'accélérationMesure de la décélérationMesure des chocs, c.-à-d. d'une variation brusque de l'accélération en ayant recours aux forces d'inertie avec conversion en valeurs électriques ou magnétiques au moyen de capteurs à capacité
G01P 15/18 - Mesure de l'accélérationMesure de la décélérationMesure des chocs, c.-à-d. d'une variation brusque de l'accélération dans plusieurs dimensions
G01P 15/08 - Mesure de l'accélérationMesure de la décélérationMesure des chocs, c.-à-d. d'une variation brusque de l'accélération en ayant recours aux forces d'inertie avec conversion en valeurs électriques ou magnétiques
The present invention relates to an accelerometer, which comprises a substrate and detecting devices. The substrate is provided with supporting anchor points and electrode fixing anchor points; the detecting device comprises two detecting plates and corresponding detecting electrodes, and the detecting electrodes are connected to the electrode fixing anchor points through connecting arms; the detecting plate is elastically connected to the supporting anchor point, the two detecting plates are asymmetrically arranged with respect to axes of the supporting anchor points, and the two detecting plates are parallel to each other and in opposite directions; and the detecting electrodes and the detecting plates are arranged at intervals to form a detecting capacitor. The wiring of in-plane detecting electrodes of different detecting devices can be separated, and wire crossing can be avoided to reduce the influence of parasitic capacitance caused by complex wiring, thus improving the detection accuracy of the accelerometer.
G01P 15/125 - Mesure de l'accélérationMesure de la décélérationMesure des chocs, c.-à-d. d'une variation brusque de l'accélération en ayant recours aux forces d'inertie avec conversion en valeurs électriques ou magnétiques au moyen de capteurs à capacité
G01P 15/18 - Mesure de l'accélérationMesure de la décélérationMesure des chocs, c.-à-d. d'une variation brusque de l'accélération dans plusieurs dimensions
The present invention provides a dual-axis gyroscope and an electronic device. The dual-axis gyroscope comprises first mass blocks, second mass blocks, a driving unit and a detecting unit. Tightly coupled connections are formed between adjacent first mass blocks, and between adjacent second mass blocks, thus improving the accuracy of displacement ratios of the first mass blocks and the second mass blocks, and enhancing the operational accuracy and stability of the dual-axis gyroscope. Furthermore, the requirement for the machining precision of the first mass blocks and the second mass blocks is reduced, thus lowering the manufacturing cost of the dual-axis gyroscope and the electronic device.
G01C 19/5705 - Dispositifs sensibles à la rotation utilisant des masses vibrantes, p. ex. capteurs vibratoires de vitesse angulaire basés sur les forces de Coriolis utilisant des masses entraînées dans un mouvement de rotation alternatif autour d'un axe
A biaxial gyroscope and an electronic product. The biaxial gyroscope comprises first mass blocks (11), second mass blocks (21), a driving apparatus (3), and a detection apparatus. Each first mass block (11) can swing in a first plane around a corresponding first anchor point (12), and the first mass block (11) can swing around a first central axis of the first anchor point (12); each second mass block (21) can swing in the first plane around a corresponding second anchor point (22), and the second mass block (21) can swing around the second central axis of the second anchor point (22); a plurality of first mass blocks (11) are distributed in a second direction (Y), a plurality of second mass blocks (21) are distributed in the second direction (Y), adjacent first mass blocks (11) are strongly coupled and connected by means of first coupling connecting rods (13), and adjacent second mass blocks (21) are strongly coupled and connected by means of second coupling connecting rods (23), thereby improving the accuracy of displacement ratios of the first mass blocks (11) to the second mass blocks (21), and improving the working accuracy and stability of the biaxial gyroscope; in addition, the requirements of the machining precision of the first mass blocks (11) and the second mass blocks (21) are reduced, thereby reducing the machining costs of the biaxial gyroscope and an electronic device.
G01C 19/5642 - Dispositifs sensibles à la rotation utilisant des masses vibrantes, p. ex. capteurs vibratoires de vitesse angulaire basés sur les forces de Coriolis utilisant des barres ou des poutres vibrantes
A micromechanical gyroscope and an electronic product. The micromechanical gyroscope comprises a first sensing assembly (1), a second sensing assembly (2), driving members (3), first coupling beams (4), and second coupling beams (5). The driving members (3) are located on opposite sides of the first sensing assembly (1) and the second sensing assembly (2) in a first direction (X). The first sensing assembly (1) is connected to the driving members (3) by means of the first coupling beams (4). The second sensing assembly (2) is connected to the driving members (3) by means of the second coupling beams (5). The rigidity of the first coupling beams (4) in a second direction (Y) is greater than the rigidity of the first coupling beams (4) in a third direction (Z), the third direction (Z) being perpendicular to a first plane. The rigidity of the second coupling beams (5) in the second direction (Y) is greater than the rigidity of the second coupling beams (5) in the first direction (X). The micromechanical gyroscope and the electronic product have relatively high working precision.
G01C 19/5642 - Dispositifs sensibles à la rotation utilisant des masses vibrantes, p. ex. capteurs vibratoires de vitesse angulaire basés sur les forces de Coriolis utilisant des barres ou des poutres vibrantes
An accelerometer includes a substrate. The substrate includes anchor points. An external coupling unit is annular and is parallel to the substrate. A first torsion plate is disposed on an inner side of the external coupling unit and is connected to the anchor points. Inner coupling beams are disposed on a side, close to the anchor points, of the first torsion plate. A second torsion plate is disposed on the inner side of the external coupling unit and is connected to the anchor points, the second torsion plate is connected to the first torsion plate through two of the inner coupling beams, the second torsion plate and the first torsion plate are mutually embedded, the first torsion plate and the second torsion plate are symmetrical about a first axis of symmetry. The accelerometer reduces cross coupling reduced, and accuracy and anti-interference performance of the accelerometer are improved.
G01P 15/125 - Mesure de l'accélérationMesure de la décélérationMesure des chocs, c.-à-d. d'une variation brusque de l'accélération en ayant recours aux forces d'inertie avec conversion en valeurs électriques ou magnétiques au moyen de capteurs à capacité
G01P 15/08 - Mesure de l'accélérationMesure de la décélérationMesure des chocs, c.-à-d. d'une variation brusque de l'accélération en ayant recours aux forces d'inertie avec conversion en valeurs électriques ou magnétiques
G01P 15/18 - Mesure de l'accélérationMesure de la décélérationMesure des chocs, c.-à-d. d'une variation brusque de l'accélération dans plusieurs dimensions
An accelerometer. The accelerometer comprises a substrate (100); the substrate (100) is provided with an anchor point (101); an outer coupling unit (1) is ring-shaped and parallel to the substrate (100); a first torsion plate (2) is arranged on the inner side of the outer coupling unit (1), and is connected to the anchor point (101); the side of the first torsion plate (2) close to the anchor point (101) is provided with inner coupling beams (7); a second torsion plate (3) is arranged on the inner side of the outer coupling unit (1), and is connected to the anchor point (101); the second torsion plate (3) is connected to the first torsion plate (2) by means of the two inner coupling beams (7); the second torsion plate (3) and the first torsion plate (2) are fitted to each other, and the first torsion plate (2) and the second torsion plate (3) are symmetrical in a second direction; two torsion beams (11, 14) are respectively located at two sides of the inner coupling beams (7) in a first direction; and the first torsion plate (2) and the second torsion plate (3) can respectively rotate around the torsion beams (11, 14). Thus, cross coupling can be reduced, and the accuracy and anti-interference performance of the accelerometer can be improved.
G01P 15/125 - Mesure de l'accélérationMesure de la décélérationMesure des chocs, c.-à-d. d'une variation brusque de l'accélération en ayant recours aux forces d'inertie avec conversion en valeurs électriques ou magnétiques au moyen de capteurs à capacité
A manufacturing method for an MEMS acoustic sensor. The method comprises the following steps: stacking a structural layer (2) and a piezoelectric material layer (3) on a substrate (1); sequentially performing photoetching on the piezoelectric material layer (3) and the structural layer (2) to form a structural gap (4); stacking a polymer layer (5) on the piezoelectric material layer (3); etching the substrate (1) to form a cavity (10); stacking a first portion (201) of a jig (200) on the polymer layer (5), forming an arched groove (2011) on the first portion (201), so that the arched groove (2011) and the structural gap (4) are oppositely arranged, and then heating to a first temperature, so that the polymer layer (5) is in a rubbery state; blowing gas through the cavity (10), and controlling the air pressure in the cavity (10) to reach a preset value, so that the polymer layer (5) forms an arched portion (51); maintaining the air pressure load of the gas and cooling to a temperature below the first temperature, so that the polymer layer (5) is in a glassy state; and stopping controlling the air pressure in the cavity (10) and reducing the air pressure, disassembling the jig (200), and cutting a wafer to obtain the MEMS acoustic sensor (100). Compared with the related art, use of the technical solution of the present invention can effectively improve the machining precision, and the reliability is high.
A micromechanical gyroscope and an electronic product. The micromechanical gyroscope comprises: first mass blocks (1), a second mass block (2), and coupling components (3), there being a plurality of first mass blocks (1), and along a first direction, the plurality of first mass blocks (1) being respectively located on two opposing sides of the second mass block (2); the coupling components (3) comprising a coupling connecting rod (31) and a plurality of connecting beams (32) connected to the two ends of the coupling connecting rod (31), the connecting beams (32) being flexible beams, and the coupling components (3) being located between a first mass block (1) and the second mass block (2), and connecting the first mass block (1) to the second mass block (2), wherein a connecting beam (32) connected to one end of a coupling connecting rod (31) is connected to a first mass block (1), and a connecting beam (32) connected to the other end of the coupling connecting rod (31) is connected to the second mass block (2). Providing the coupling connecting rods (31) allows the micromechanical gyroscope and the electronic product to achieve strong coupling between a first mass block (1) and the second mass block (2), thereby enhancing the anti-interference performance of the micromechanical gyroscope during operation, and improving operational stability.
G01C 19/56 - Dispositifs sensibles à la rotation utilisant des masses vibrantes, p. ex. capteurs vibratoires de vitesse angulaire basés sur les forces de Coriolis
Provided is a method for manufacturing a MEMS acoustic sensor. A structural layer and a piezoelectric material layer are stacked on the substrate. Photolithography modeling is performed on the piezoelectric material layer and the structural layer. A polymer layer is stacked on the piezoelectric material layer. The substrate is etched to form a cavity. A first part of a jig is stacked on the polymer layer. The jig, the substrate, the piezoelectric material layer, and the polymer layer are heated. Air is introduced into the cavity and a pressure inside the cavity is controlled. An atmospheric pressure load of the air is maintained and the air is cooled. The pressure inside the cavity is stopped to be controlled and the pressure inside the cavity is reduced, the jig is disassembled, and a wafer is cut to obtain the MEMS acoustic sensor, to effectively improve the accuracy and reliability in processing.
H10N 30/05 - Fabrication de dispositifs piézo-électriques ou électrostrictifs multicouches ou de leurs parties constitutives, p. ex. en empilant des corps piézo-électriques et des électrodes
H10N 30/06 - Formation d’électrodes ou d’interconnexions, p. ex. de connections électriques ou de bornes
A micromechanical gyroscope and an electronic product. The micromechanical gyroscope comprises first mass blocks (1), second mass blocks (2), driving members (3), first connection beams (4) and second connection beams (5), wherein a plurality of first mass blocks (1) and a plurality of second mass blocks (2) are provided, the first mass blocks (1) are arranged oppositely in a first direction (Y), the second mass blocks (2) are positioned between the first mass blocks (1), and the second mass blocks (2) are arranged oppositely in a second direction (X) perpendicular to the first direction (Y); a plurality of driving members (3) are provided and are positioned on two opposite sides of the first mass blocks (1) and the second mass blocks (2) in the second direction (X); the first connection beams (4) and the second connection beams (5) are all flexible beams; and two ends of each first mass block (1) in the second direction (X) are respectively connected, by means of a first connection beam (4), to the driving members (3) positioned on two sides of the first mass block (1), and each second mass block (2) is connected to the driving member (3) adjacent thereto by means of a second connection beam (5). The micromechanical gyroscope and the electronic product reduce the mutual interference degree of the mass blocks in different modes, thereby improving the measurement accuracy.
G01C 19/5712 - Dispositifs sensibles à la rotation utilisant des masses vibrantes, p. ex. capteurs vibratoires de vitesse angulaire basés sur les forces de Coriolis utilisant des masses entraînées dans un mouvement de rotation alternatif autour d'un axe les dispositifs comportant une structure micromécanique
The present application provides a micromechanical gyroscope and an electronic product. The micromechanical gyroscope comprises first mass blocks, second mass blocks, a first driving member, a second driving member, a first coupling part, and a second coupling part; the first mass blocks are oppositely arranged in a first direction; the second mass blocks, the first driving member, and the second driving member are located between the first mass blocks; the first driving member and the second driving member are oppositely arranged in the first direction; the second mass blocks are located on two opposite sides of the first driving member and the second driving member in a second direction; the first mass block located on the side of the first driving member facing away from the second driving member is connected to the first driving member by means of the first coupling part; the first mass block located on the side of the second driving member facing away from the first driving member is connected to the second driving member by means of the first coupling part; and two ends of the second mass blocks in the first direction are respectively connected to the first driving member and the second driving member by means of the second coupling part. By means of such an arrangement, the mutual interference degree of the mass blocks in different modes can be reduced.
G01C 19/5712 - Dispositifs sensibles à la rotation utilisant des masses vibrantes, p. ex. capteurs vibratoires de vitesse angulaire basés sur les forces de Coriolis utilisant des masses entraînées dans un mouvement de rotation alternatif autour d'un axe les dispositifs comportant une structure micromécanique
The present disclosure provides a micro-mechanical gyroscope and an electronic product. The micro-mechanical gyroscope includes first mass blocks, second mass blocks, a first driving member, a second driving member, first coupling components and second coupling components. The second mass blocks, the first driving member and the second driving member are arranged between the first mass blocks. The second mass blocks are arranged on either sides of the first second driving members. A first mass block arranged on a side of the first driving member is connected to the first driving member through a first coupling component, and a first mass block arranged on a side of the second driving member is connected to the second driving member through a first coupling component. Ends of the second mass block in the first direction are connected to the first driving member and the second driving member, respectively, through the second coupling components.
G01C 19/5747 - Details de structure ou topologie les dispositifs ayant deux masses de détection en mouvement en opposition de phase chaque masse de détection étant reliée à une masse d'entraînement, p. ex. cadres d'entraînement
The present invention provides an MEMS gyroscope and an electronic product. The MEMS gyroscope comprises a plurality of first mass blocks, a second mass block and coupling parts, wherein the plurality of first mass blocks are located at two opposite sides of the second mass block in a first direction; and each coupling part comprises a coupling link and a plurality of connecting beams connected to two ends of the coupling link, the connecting beams are flexible beams, and the coupling part is positioned between the first mass blocks and the second mass block and connects the first mass blocks with the second mass block. Through the arrangement of the coupling links, strong coupling can be realized between the first mass blocks and the second mass block, so that the anti-interference performance of the MEMS gyroscope is enhanced during work and the working stability is improved.
G01C 19/00 - GyroscopesDispositifs sensibles à la rotation utilisant des masses vibrantesDispositifs sensibles à la rotation sans masse en mouvementMesure de la vitesse angulaire en utilisant les effets gyroscopiques
G01C 19/574 - Details de structure ou topologie les dispositifs ayant deux masses de détection en mouvement en opposition de phase
The present disclosure provides a micro-mechanical gyroscope and an electronic product. The micro-mechanical gyroscope includes a plurality of first mass blocks, a plurality of second mass blocks, a plurality of driving members, first connecting beams and second connecting beams. The first mass blocks are arranged to face to each other in a first direction, and the second mass blocks are arranged between the first mass blocks and arranged to face to each other in a second direction perpendicular to the first direction. In the second direction, the driving members are arranged on either sides of the first mass blocks and of the second mass blocks. Ends of the first mass blocks in the second direction are connected to driving members, respectively, through the first connecting beams, and the second mass blocks are connected to adjacent driving members, respectively, through the second connecting beams 5.
G01C 19/00 - GyroscopesDispositifs sensibles à la rotation utilisant des masses vibrantesDispositifs sensibles à la rotation sans masse en mouvementMesure de la vitesse angulaire en utilisant les effets gyroscopiques
The present invention provides a manufacturing process for a MEMS loudspeaker and a MEMS loudspeaker. The manufacturing process for a MEMS loudspeaker of the present invention comprises steps: positioning a PCB material; inverting a MEMS chip and electrically connect same to the side of the PCB material provided with a first recess; filling a gap between the MEMS chip and the PCB material with a high polymer protective material, and performing curing, such that the MEMS chip and the PCB material are bonded integrally. The PCB material and the MEMS chip are bonded integrally by using a high polymer protective member formed by the high polymer protective material, and the high polymer protective member covers a conductive member, such that the overall packaging size of the MEMS loudspeaker is basically consistent with the size of the MEMS chip. Therefore, a sensitive parameter of the MEMS loudspeaker can be remarkably increased, wherein the sensitive parameter is SPL/the planar area of a unit package body, and the conductive member is sealed and thus is not in contact with external air, thereby achieving higher reliability, and being applicable to scenarios having narrow spaces and strict power consumption requirements.
A MEMS loudspeaker manufacturing method and a MEMS loudspeaker are provided. The MEMS loudspeaker manufacturing method includes positioning a printed circuit board (PCB) substrate, inverting a MEMS chip and electrically connecting the PCB substrate to a first side of the PCB substrate having a first groove. filling and solidifying a polymer protection material in the gap between the MEMS chip and the PCB substrate, and combining the MEMS chip and the PCB substrate into a combination component. Since the PCB substrate and the MEMS chip are combined into the combination component through using the polymer protection component made of the polymer protection material, and the polymer protection component is coated with the conducting component, an overall packaging size of the MEMS loudspeaker basically is enabled to be consistent with a size of the MEMS chip, and sensitivity parameters of the MEMS loudspeaker may be significantly improved.
The present invention provides a multimass MEMS gyroscope featuring an orthogonal arrangement, which comprises an anchor point unit, a sensing unit and a driving unit; the anchor point unit comprises a central anchor point subunit located at the center of a rectangle and four corner anchor points located at the four corners of the rectangle respectively; the sensing unit comprises four detection mass blocks each of which has a frame structure and is elastically connected between the central anchor point subunit and the corresponding corner anchor point, receding spaces being formed between the detection mass blocks, and four detection decoupling parts; and the driving unit comprises four driving mass blocks, and driving decoupling parts. The gyroscope can improve the arrangement area of transducers and reduce the mass of the detection mass blocks to improve the Coriolis gain, thereby improving the mechanical sensitivity of the gyroscope.
An orthogonally arranged multi-mass MEMS gyroscope, comprising an anchor unit (1), a sensing unit (2), and a driving unit (3). The anchor unit (1) comprises a central anchor sub-unit (11) located at the center of a rectangle, and four corner anchors (12) respectively located at four corners of the rectangle; the sensing unit (2) comprises four detection mass blocks (21) that are of a frame structure, are respectively elastically connected between the central anchor sub-unit (11) and the corner anchors (12), and mutually form relief spaces, and comprises four detection decoupling members (22) that are respectively located in the detection mass blocks (21); the driving unit (3) comprises four driving mass blocks (31) respectively located in the relief spaces, and driving decoupling members (32) respectively elastically connected to the driving mass blocks (31). The orthogonally arranged multi-mass MEMS gyroscope can increase the arrangement area of a transducer and reduce the mass of the detection mass blocks to improve the Coriolis gain, thereby improving the mechanical sensitivity of the MEMS gyroscope.
G01C 19/56 - Dispositifs sensibles à la rotation utilisant des masses vibrantes, p. ex. capteurs vibratoires de vitesse angulaire basés sur les forces de Coriolis
Provided in the present application is an earphone, comprising a housing having a cavity, and a first loudspeaker for generating low-frequency sounds, a second loudspeaker for generating medium- and high-frequency sounds, and a sound damping mesh layer, which are accommodated in the cavity, wherein the housing is penetrated by a sound outlet, and the cavity is in communication with the outside by means of the sound outlet; the second loudspeaker is located between the first loudspeaker and the sound outlet; the sound damping mesh layer is arranged between the first loudspeaker and the second loudspeaker, and the second loudspeaker is fixed to the sound damping mesh layer; and the sound damping mesh layer completely separates the first loudspeaker from the second loudspeaker, such that the low-frequency sounds produced by the first loudspeaker are transmitted to the sound outlet by means of the sound damping mesh layer, and the medium- and high-frequency sounds produced by the second loudspeaker are filtered out and reduced. Compared with relevant technology, the use of the earphone of the present application provides a good acoustic performance.
An embodiment of the present disclosure provides an earphone, which includes a housing with a cavity, a first speaker housed in the cavity for producing low-frequency sounds, a second speaker, and a sound damping mesh for producing mid to high frequency sounds. The housing includes a sound outlet penetrating therethrough, and the cavity is connected with the outside through the sound outlet. The second speaker is fixed to the sound damping mesh. The sound damping mesh completely separates the first speaker from the second speaker. The low-frequency sound emitted by the first speaker is to transmitted to the sound outlet through the sound damping mesh. Compared with the related art, the acoustic performance of the earphone of the present disclosure is good.
H04R 1/28 - Supports de transducteurs ou enceintes conçus pour réponse de fréquence spécifiqueEnceintes de transducteurs modifiées au moyen d'impédances mécaniques ou acoustiques, p. ex. résonateur, moyen d'amortissement
The present invention provides a capacitive micromechanical acceleromete. The capacitive micromechanical acceleromete includes a base with anchor points, at least one detection structure pair arranged on one side of the base and elastically connected to the anchor points, and a detection electrode spaced apart from each detection structure pair. Each detection structure pair includes two seesaw structures elastically connected to the base respectively. The seesaw structures are asymmetric about a rotation axis where the anchor points are located; asymmetric portions of the two seesaw structures are reversed and parallel. In a detection modality, changing directions of spacings formed between the two seesaw structures and the detection electrode are opposite. The capacitive micromechanical acceleromete can reduce the impact of the noise of the angular acceleration of the external rotation or the stress and other external factors on the detection of the accelerometer, and improving the detection accuracy.
G01P 15/125 - Mesure de l'accélérationMesure de la décélérationMesure des chocs, c.-à-d. d'une variation brusque de l'accélération en ayant recours aux forces d'inertie avec conversion en valeurs électriques ou magnétiques au moyen de capteurs à capacité
The present invention provides a micro electromechanical system (MEMS), which includes: a base with a cavity, a vibration structure includes a structural layer, a piezoelectric composite layer and a flexible layer; the structural layer includes a structural slab, a structural fixing portion and a plurality of structural springs; the piezoelectric composite layer includes a piezoelectric film, a first electrode layer and a second electrode layer; the stress of the piezoelectric composite layer can be released through the elastic actions of the structural springs. In addition, the rigidity of the overall structure is ensured and will not be too low. Therefore, the sound pressure level of the MEMS piezoelectric loudspeaker is improved, and the THD is reduced to improve the performance of the MEMS piezoelectric loudspeaker.
H10N 30/20 - Dispositifs piézo-électriques ou électrostrictifs à entrée électrique et sortie mécanique, p. ex. fonctionnant comme actionneurs ou comme vibrateurs
B81B 7/02 - Systèmes à microstructure comportant des dispositifs électriques ou optiques distincts dont la fonction a une importance particulière, p. ex. systèmes micro-électromécaniques [SMEM, MEMS]
H10N 30/00 - Dispositifs piézo-électriques ou électrostrictifs
H10N 30/057 - Fabrication de dispositifs piézo-électriques ou électrostrictifs multicouches ou de leurs parties constitutives, p. ex. en empilant des corps piézo-électriques et des électrodes par empilement de corps massifs piézo-électriques ou électrostrictifs et d’électrodes
The present invention provides a piezoelectric MEMS loudspeaker. The loudspeaker comprises: a substrate, which has a cavity; a vibration structure, comprising a structural layer, a piezoelectric composite layer, and a flexible layer; the structural layer comprises a structural plate, a structure securing portion, and a plurality of structural springs having slits; the piezoelectric composite layer comprises a piezoelectric film, a first electrode layer, and a second electrode layer; wherein a region where the piezoelectric film, the first electrode layer, and the second electrode layer respectively overlap one another in an orthographic projection onto the substrate acts as a piezoelectric driving functional area; the flexible layer is spaced apart from the structural layer in the direction in which each of the layers of the vibration structure are stacked, and the orthographic projection of the flexible layer completely covers the slits of the plurality of structural springs. In the present invention, stress in the piezoelectric composite layer can be released through the elasticity of the structural springs, while simultaneously ensuring the rigidity of the overall structure without causing the rigidity of the overall structure to be too low, thereby improving the sound pressure level of the piezoelectric MEMS loudspeaker and reducing harmonic distortion, so as to improve the performance of the piezoelectric MEMS loudspeaker.
A fully-decoupled MEMS gyroscope, comprising an anchor point unit (1), a sensing unit (2) elastically connected to the anchor point unit (1), and a driving unit (3) driving the sensing unit (2) to move. The anchor point unit (1) comprises a central anchor point sub-unit (11) located at the central position of a rectangle and four side anchor points (12) respectively located between the central anchor point sub-unit (11) and the four corners of the rectangle. The driving unit (3) comprises four driving members (31) respectively located at four sides of the rectangle, an avoidance interval being formed between each two adjacent driving members (31), and each side anchor point (12) being respectively located in an avoidance interval. The sensing unit (2) comprises two X mass blocks (21) symmetrically arranged in two opposite avoidance intervals, two Y mass blocks (22) symmetrically arranged in the other two opposite avoidance intervals, four Z mass blocks (23) respectively located outside the driving members, and four Z measurement decoupling members (24) respectively located outside the Z mass blocks (23), wherein the X mass blocks (21) and the Y mass blocks (22) are respectively connected to the side anchor points (12). The fully-decoupled MEMS gyroscope uses differential driving, and thus can achieve differential measurement, thereby reducing orthogonal errors.
G01C 19/56 - Dispositifs sensibles à la rotation utilisant des masses vibrantes, p. ex. capteurs vibratoires de vitesse angulaire basés sur les forces de Coriolis
A capacitive micromechanical accelerometer, comprising: a substrate (1) having anchors (4), at least one measurement structure pair, which is arranged at one side of the substrate (1) and is elastically connected to the anchors (4), and a measurement electrode (3), which is spaced apart from the measurement structure pair, wherein the measurement structure pair comprises two seesaw structures (2) separately and elastically connected to the substrate (1); the seesaw structures (2) are asymmetric with respect to rotating axes where the anchors (4) are located; asymmetric parts (5) of the two seesaw structures (2) are opposite and parallel; and when in a measurement mode, the sizes of spaces formed between the two seesaw structures (2) and the measurement electrode (3) change in opposite directions. When the accelerometer is affected by rotational angular acceleration noise, the two seesaw structures (2) may rotate and tilt in the same direction by taking the corresponding anchors (4) as rotating axes, such that a common-mode change of differential capacitance is caused to cancel out the impact, thereby reducing the impact, on the measurement of the accelerometer, of external factors such as external rotational angular acceleration noise or stress, and improving the measurement accuracy.
G01P 15/125 - Mesure de l'accélérationMesure de la décélérationMesure des chocs, c.-à-d. d'une variation brusque de l'accélération en ayant recours aux forces d'inertie avec conversion en valeurs électriques ou magnétiques au moyen de capteurs à capacité
G01P 15/08 - Mesure de l'accélérationMesure de la décélérationMesure des chocs, c.-à-d. d'une variation brusque de l'accélération en ayant recours aux forces d'inertie avec conversion en valeurs électriques ou magnétiques
B81B 7/02 - Systèmes à microstructure comportant des dispositifs électriques ou optiques distincts dont la fonction a une importance particulière, p. ex. systèmes micro-électromécaniques [SMEM, MEMS]
Provided is a fully decoupled MEMS gyroscope, including an anchor point unit, a sensing unit elastically connected to the anchor point unit, and a driving unit configured to drive the sensing unit to move. The anchor point unit includes a center anchor point subunit located at a center of a rectangle and four side anchor points. The driving unit includes four driving members located on four sides of the rectangle. The sensing unit includes two X mass blocks symmetrically arranged in two avoiding intervals, two Y mass blocks symmetrically arranged in the other two avoiding intervals, four Z mass blocks respectively located at an outer side of each driving member, and four Z detection decoupling members respectively located at an outer side of each Z mass block. The X mass blocks and the Y mass blocks are respectively connected to each side anchor point.
G01C 19/5712 - Dispositifs sensibles à la rotation utilisant des masses vibrantes, p. ex. capteurs vibratoires de vitesse angulaire basés sur les forces de Coriolis utilisant des masses entraînées dans un mouvement de rotation alternatif autour d'un axe les dispositifs comportant une structure micromécanique
An accelerometer, comprising a base, anchors (1) arranged on the base, seesaw structures (2) elastically connected to the anchors (1), and a differential measurement assembly (3) used to measure the acceleration of the seesaw structures (2), wherein each seesaw structure (2) comprises a first seesaw structure (21) and a second seesaw structure (22), which are parallel to each other and are reversely placed; each anchor (1) comprises a first anchor (11) elastically connected to the first seesaw structure (21), and a second anchor (12) elastically connected to the second seesaw structure (22); the first seesaw structure (21) comprises a first elastic member (211) connected to the first anchor (11), and a first mass block (212) connected to the first elastic member (211); the first mass block (212) is driven from the first anchor (11) by means of a forward-phase carrier driving signal; the second seesaw structure (22) comprises a second elastic member (221) connected to the corresponding second anchor (12), and a second mass block (222) connected to the second elastic member (221); and the second mass block (222) is driven from the second anchor (12) by means of a reverse-phase carrier driving signal. The impact of rotational angular acceleration noise can be effectively suppressed.
G01P 15/08 - Mesure de l'accélérationMesure de la décélérationMesure des chocs, c.-à-d. d'une variation brusque de l'accélération en ayant recours aux forces d'inertie avec conversion en valeurs électriques ou magnétiques
G01P 15/18 - Mesure de l'accélérationMesure de la décélérationMesure des chocs, c.-à-d. d'une variation brusque de l'accélération dans plusieurs dimensions
B81B 7/02 - Systèmes à microstructure comportant des dispositifs électriques ou optiques distincts dont la fonction a une importance particulière, p. ex. systèmes micro-électromécaniques [SMEM, MEMS]
G01P 15/125 - Mesure de l'accélérationMesure de la décélérationMesure des chocs, c.-à-d. d'une variation brusque de l'accélération en ayant recours aux forces d'inertie avec conversion en valeurs électriques ou magnétiques au moyen de capteurs à capacité
The present invention provides an accelerometer, including base, anchor points, seesaw structures elastically, and a differential detection assembly; the seesaw structures includes a first seesaw structure and a second seesaw structure which are parallel to each other and placed in reverse; the anchor points includes a first anchor point and a second anchor point; the first seesaw structure includes a first elastic member and a first mass block connected to the first elastic member; the first mass block is driven by a normal phase carrier drive signal from the first anchor point; the second seesaw structure includes a second elastic member and a second mass block connected to the second elastic member; and the second mass block is driven by a reversed phase carrier drive signal from the second anchor point. The accelerometer can effectively suppress the impact of noise of an angular acceleration of rotation.
G01P 15/125 - Mesure de l'accélérationMesure de la décélérationMesure des chocs, c.-à-d. d'une variation brusque de l'accélération en ayant recours aux forces d'inertie avec conversion en valeurs électriques ou magnétiques au moyen de capteurs à capacité
G01P 15/18 - Mesure de l'accélérationMesure de la décélérationMesure des chocs, c.-à-d. d'une variation brusque de l'accélération dans plusieurs dimensions
The present invention provides a three-axis gyroscope and electronic products, including a drive structure used for driving the three-axis gyroscope, a first sensitive structure used for sensing an angular velocity in a first direction, a second sensitive structure used for sensing an angular velocity in the second direction, a third sensitive structure used for sensing an angular velocity in a third direction. The first sensitive structure, the second sensitive structure and the third sensitive structure can be mutually coupled in the first detection modality, the second detection modality and the third detection modality, which can effectively avoid the coupling error, achieve electrical orthogonal suppression and capacitance modality matching in the first detection modality, the second detection modality or the third detection modality, so that the structural performance loss can be compensated, thus reducing an orthogonal error and improving the detection accuracy and overall performance of the three-axis gyroscope.
G01C 19/5712 - Dispositifs sensibles à la rotation utilisant des masses vibrantes, p. ex. capteurs vibratoires de vitesse angulaire basés sur les forces de Coriolis utilisant des masses entraînées dans un mouvement de rotation alternatif autour d'un axe les dispositifs comportant une structure micromécanique
Provided in the present application is a three-axis gyroscope. The three-axis gyroscope comprises a driving structure, a first sensitive structure, a second sensitive structure, a third sensitive structure and a plurality of anchoring structures, wherein the driving structure is used for driving the three-axis gyroscope, the first sensitive structure is configured to be sensitive to an angular velocity in a first direction, the second sensitive structure is configured to be sensitive to an angular velocity in a second direction, and the third sensitive structure is configured to be sensitive to an angular velocity in a third direction. A first sensitive structure, a second sensitive structure and a third sensitive structure are independent of each other, and can be decoupled from each other in a first detection mode, a second detection mode and a third detection mode, such that a coupling error can be effectively prevented; and in the first detection mode, the second detection mode or the third detection mode, electrical orthogonal suppression and capacitive mode matching are both taken into consideration, such that a structural performance loss caused by asymmetric machining can be compensated for, and orthogonal errors are reduced, thereby improving the measurement precision and the overall performance of the three-axis gyroscope.
G01C 19/5712 - Dispositifs sensibles à la rotation utilisant des masses vibrantes, p. ex. capteurs vibratoires de vitesse angulaire basés sur les forces de Coriolis utilisant des masses entraînées dans un mouvement de rotation alternatif autour d'un axe les dispositifs comportant une structure micromécanique
G01C 19/5656 - Dispositifs sensibles à la rotation utilisant des masses vibrantes, p. ex. capteurs vibratoires de vitesse angulaire basés sur les forces de Coriolis utilisant des barres ou des poutres vibrantes les dispositifs comportant une structure micromécanique
An accelerometer, comprising a substrate and a detection structure (1) connected to the substrate. The detection structure (1) comprises anchor points (11) fixed on the substrate, seesaw structures (12) elastically connected to the anchor points (11), an inner-side coupling structure (13) coupled with the inner sides of the seesaw structures (12), an outer-side coupling structure (14) coupled with the outer sides of the seesaw structures (12), and a displacement detection assembly (15) arranged on the outer-side coupling structure (14) and the inner-side coupling structure (13); the two seesaw structures (12) are oppositely arranged; the outer-side coupling structure (14) comprises an outer-side coupling structure inner ring (141) coupled with the outer sides of the two seesaw structures (12) and an outer-side coupling structure outer ring (142) surrounding the outer-side coupling structure inner ring (141). The detection structure (1) further comprises first elastic members (16) connecting the outer-side coupling structure inner ring (141) and the seesaw structures (12) and a second elastic member (17) connecting the outer-side coupling structure inner ring (141) and the outer-side coupling structure outer ring (142). The accelerometer increases the rigidity of a rotation mode of the outer-side coupling structure (14), increases a resonant frequency corresponding to the rotation mode, and reduces the cross coupling of the accelerometer.
G01P 15/125 - Mesure de l'accélérationMesure de la décélérationMesure des chocs, c.-à-d. d'une variation brusque de l'accélération en ayant recours aux forces d'inertie avec conversion en valeurs électriques ou magnétiques au moyen de capteurs à capacité
A fully decoupled MEMS gyroscope, comprising a substrate (1), a sensing unit (2) elastically connected to the substrate (1), and a driving unit (3) coupled to the sensing unit (2) and used for driving the sensing unit (2) to move. The substrate (1) comprises a coupling anchor point (11) located at the center of a rectangle and a coupling structure (12) elastically connected to the coupling anchor point (11); the driving unit (3) comprises four driving members (31) respectively located inside four corners of the rectangle; the sensing unit (2) comprises two X mass blocks (21) symmetrically arranged in two receiving intervals, two Y mass blocks (22) symmetrically arranged in the other two receiving intervals, four Z mass blocks (23) respectively and elastically connected to adjacent driving members (31) and located at the four corners of the rectangle, and four Z detection decoupling members (4) respectively and elastically connected to adjacent Z mass blocks (23) and respectively and elastically connected around the rectangle. The fully decoupled MEMS gyroscope is differentially driven, such that differential detection can be achieved, and orthogonal errors can be reduced.
G01C 19/5656 - Dispositifs sensibles à la rotation utilisant des masses vibrantes, p. ex. capteurs vibratoires de vitesse angulaire basés sur les forces de Coriolis utilisant des barres ou des poutres vibrantes les dispositifs comportant une structure micromécanique
The present utility model provides a piezoelectric MEMS speaker, comprising a substrate having a back cavity, a diaphragm, a capacitor system, and a flexible film. The diaphragm comprises a fixed end and suspended ends, every two adjacent suspended ends are at least partially arranged at an interval to form a slit, and each suspended end comprises a supporting section and a piezoelectric section; the capacitor system comprises a plurality of piezoelectric structures corresponding to the suspended ends, and each piezoelectric structure comprises a first electrode layer, a piezoelectric layer, and a second electrode layer; the projection of the second electrode layer in the thickness direction of the piezoelectric MEMS speaker only covers piezoelectric sections of the diaphragm; the overlapped portions of the first electrode layer, the piezoelectric layer, and the second electrode layer in the thickness direction of the piezoelectric MEMS speaker jointly form a piezoelectric functional area; the flexible film and the diaphragm are located on different planes; in the thickness direction of the piezoelectric MEMS speaker, the flexible film is at least partially spaced apart from the diaphragm, and the flexible film is spaced apart from the substrate. The present utility model can improve the acoustic pressure level of the piezoelectric MEMS speaker at medium/high frequency, and can improve the acoustic performance of the piezoelectric MEMS speaker.
Provided in the present utility model is an MEMS loudspeaker, comprising a substrate defining a cavity and provided with openings at two ends, a cantilever extending from one end of the substrate to the cavity and at least partially suspended above the cavity, a piezoelectric actuator fixed to the side of the cantilever distant from the cavity, and a polymer layer provided on the side of the piezoelectric actuator distant from the cavity. The cantilever comprises a first section fixed to the substrate, a second section extending from the first section to the cavity and suspended above the cavity, and a third section extending from the second section to a direction distant from the first section. The piezoelectric actuator is only fixed to the third section, and one end of the third section distant from the second section is suspended. The polymer layer completely covers the cantilever, the piezoelectric actuator and the cavity and is attached to the cantilever beam and the piezoelectric actuator. The polymer layer, the cantilever and the piezoelectric actuator jointly form a piezoelectric composite diaphragm structure for sound production by vibration. Compared with the related art, medium and high frequency bands of the MEMS loudspeaker according to the utility model have a high sound pressure level.
B81B 7/02 - Systèmes à microstructure comportant des dispositifs électriques ou optiques distincts dont la fonction a une importance particulière, p. ex. systèmes micro-électromécaniques [SMEM, MEMS]
The invention provides a MEMS speaker including a substrate enclosing a cavity, a cantilever beam at least partially suspended above the cavity, a piezoelectric actuator away from the cavity, a polymer layer away from the cavity and attached to the cantilever beam and the piezoelectric actuator for completely covering the cantilever beam, the piezoelectric actuator and the cavity, and a piezoelectric composite vibration structure formed by the polymer layer. The cantilever beam includes a first section fixed to the substrate, a second section extending from the first section to the cavity and suspended above the cavity, and a third section extending from the second section away from the first section, an end of the third section away from the second section being suspended; and the piezoelectric actuator is only fixed with the third section.
Provided is a MEMS microphone, including a base which forms a back cavity, and a capacitor system arranged on the base and connected to the base. The capacitor system includes a diaphragm located above the base and a backplate spaced from the diaphragm; and the MEMS microphone further includes a barrier structure, and the barrier structure is spaced from the capacitor system in a vibration direction. The barrier structure spaced from the capacitor system in the vibration direction can ensure that the movement of the diaphragm and the backplate is not affected under low sound pressure, so as not to affect the performance of the microphone, and can hinder the deformation of the diaphragm and the backplate under large sound pressure, thereby inhibiting failure of the microphone caused by fracture due to large deformation of the diaphragm and the backplate.
A MEMS single-axis gyroscope includes an anchor point structure, a sensing unit elastically connected with the anchor point structure, and a driving decoupling structure elastically connected with the anchor point structure and the sensing unit. The sensing unit includes a plurality of mass blocks arranged side by side and rocker connecting pieces. Each of the rocker connecting pieces is connected between corresponding two adjacent mass blocks. Connecting positions between each of the rocker connecting pieces and the corresponding two adjacent mass blocks are located on a same side of the line connecting the centers of the plurality of mass blocks. The MEMS single-axis gyroscope is able to perform differential detection, which resists interference of external electrical and mechanical noise, and improves a signal-to-noise ratio. By adjusting the rocker connecting pieces arranged between each two adjacent mass blocks, a total vector displacement of the plurality of mass blocks is zero.
G01C 19/5712 - Dispositifs sensibles à la rotation utilisant des masses vibrantes, p. ex. capteurs vibratoires de vitesse angulaire basés sur les forces de Coriolis utilisant des masses entraînées dans un mouvement de rotation alternatif autour d'un axe les dispositifs comportant une structure micromécanique
A three-axis MEMS gyroscope includes a substrate, a sensing unit connected with the substrate, and a driving unit driving the sensing unit to move. The substrate includes anchor point structures and coupling structures connected with the anchor point structures. The driving unit includes driving pieces. One ends of each of the driving pieces are elastically connected with an adjacent coupling structure. The sensing unit includes X and Y mass blocks and Z mass blocks. Each of the X and Y mass blocks is arranged in a corresponding avoiding space. The X and Y mass blocks are respectively connected with adjacent coupling structures to form a rectangular frame. The Z mass blocks are connected with the driving pieces and separately arranged on one side of each driving piece away from each anchor point structure. The three-axis MEMS gyroscope is differentially driven, which realizes differential detection and reduces quadrature error.
G01C 19/5747 - Details de structure ou topologie les dispositifs ayant deux masses de détection en mouvement en opposition de phase chaque masse de détection étant reliée à une masse d'entraînement, p. ex. cadres d'entraînement
G01C 19/5656 - Dispositifs sensibles à la rotation utilisant des masses vibrantes, p. ex. capteurs vibratoires de vitesse angulaire basés sur les forces de Coriolis utilisant des barres ou des poutres vibrantes les dispositifs comportant une structure micromécanique
The present disclosure discloses a MEMS speaker including a substrate with a cavity and a sounding assembly connected with the substrate, the substrate comprising an outer surface away from the cavity and connected with the sounding assembly, a top surface opposite to the outer surface and a side surface respectively connected with the outer surface and the top surface; a printed circuit board with a through hole and connected with the outer surface of the substrate; a first shell connected with the top surface of the substrate; and a damping mesh covering the through hole and connected with the printed circuit board; wherein sounds emitted by the sounding assembly transmit outward through the through hole and the damping mesh. Compared with the related art, MEMS speaker disclosed by the present disclosure has a better reliability.
A micromachined gyroscope and an electronic product are provided. The micromachined gyroscope includes a driving component, a detecting component, first connecting components, and second connecting components. The driving component includes first driving pieces, second driving pieces, and driving devices driving the first driving pieces and the second driving piece to move. The detecting component includes first detecting pieces arranged along a third direction, second detecting pieces arranged along a fourth direction, and detecting devices for detecting movement distances of the first detecting pieces and/or the second detecting pieces along a fifth direction. Each of the first connecting pieces and the second connecting pieces rotates around a center thereof, so the second detecting pieces and the first detecting pieces respectively reciprocate along the third direction and the fourth direction. The micromachined gyroscope and the electronic product realize differential detection and effectively avoid influence of acceleration shock and quadrature error.
G01C 19/5747 - Details de structure ou topologie les dispositifs ayant deux masses de détection en mouvement en opposition de phase chaque masse de détection étant reliée à une masse d'entraînement, p. ex. cadres d'entraînement
G01C 19/5712 - Dispositifs sensibles à la rotation utilisant des masses vibrantes, p. ex. capteurs vibratoires de vitesse angulaire basés sur les forces de Coriolis utilisant des masses entraînées dans un mouvement de rotation alternatif autour d'un axe les dispositifs comportant une structure micromécanique
The present disclosure discloses a MEMS speaker including a housing with a receiving space; a MEMS speaker chip with an inner cavity, accommodated in the receiving space and connected with the housing, the MEMS speaker chip dividing the receiving space into a first cavity and a second cavity communicating with the inner cavity; a sound hole communicating with the first cavity or the second cavity; and a damping mesh connected to the housing and covering the sound hole; wherein sounds emitted by the MEMS speaker chip transmit outward through the sound hole and the damping mesh. Compared with the related art, MEMS speaker disclosed by the present disclosure has a better reliability.
H04R 1/28 - Supports de transducteurs ou enceintes conçus pour réponse de fréquence spécifiqueEnceintes de transducteurs modifiées au moyen d'impédances mécaniques ou acoustiques, p. ex. résonateur, moyen d'amortissement
H04R 1/02 - BoîtiersMeublesMontages à l'intérieur de ceux-ci
A MEMS gyroscope includes an anchor point unit, a sensing unit elastically connected with the anchor point unit, and a driving unit elastically connected with the anchor point unit and the sensing unit. The anchor point unit includes four corner anchor point structures arranged at four corners of the MEMS gyroscope and four central anchor points. The sensing unit includes four first mass blocks elastically connected with the corner anchor point structures and the central anchor points to form avoiding spaces, four second mass blocks arranged within the avoiding spaces, and four decoupling mass blocks. The driving unit includes four driving pieces respectively connected with outer sides of the second mass blocks. The MEMS gyroscope realizes independent detection of angular velocities of three axes and realizes differential detection and balance of vibration moment, which immune to influence of acceleration shock and quadrature error and improves detection accuracy.
A micromechanical gyroscope and an electronic device are related. The micromechanical gyroscope includes a first movement member, a second movement member, many drive members and a detection member, the first movement member has a first center, with two ends along a second direction oscillating around the first center along a first and a third directions, the second movement member has a second center, with two ends along the first direction oscillating around the second center along the second and third directions. The drive members can drive oscillations of the first and second movement members. The detection member is located above or below the first and second movement members in the third direction, to detect moving distances of the first and second movement members along the third direction. The micromechanical gyroscope can detect angular velocities in two directions simultaneously and perform differential detection to reduce errors, thus expanding application scenarios.
G01C 19/5712 - Dispositifs sensibles à la rotation utilisant des masses vibrantes, p. ex. capteurs vibratoires de vitesse angulaire basés sur les forces de Coriolis utilisant des masses entraînées dans un mouvement de rotation alternatif autour d'un axe les dispositifs comportant une structure micromécanique
A MEMS gyroscope for three-axis detection relates to the technical field of gyroscope and includes a substrate, a sensing unit elastically connected with the substrate, and a driving unit coupled with the sensing unit and driving the sensing unit to move. The substrate includes anchor point structures respectively located at four corners of the substrate and four coupling structures respectively elastically connected with the four anchor point structures. An avoiding space is formed between two adjacent coupling structures. The driving unit includes two driving pieces separately elastically connected with adjacent coupling structures. The two driving pieces are symmetrically arranged and are frame-shaped. The sensing unit includes four X and Y mass blocks, two Z mass blocks elastically connected with the driving pieces, and two decoupling mass blocks. The two decoupling mass blocks are elastically connected. The MEMS gyroscope is differentially driven, which realizes differential detection and reduces quadrature error.
G01C 19/5747 - Details de structure ou topologie les dispositifs ayant deux masses de détection en mouvement en opposition de phase chaque masse de détection étant reliée à une masse d'entraînement, p. ex. cadres d'entraînement
The present invention provides an e-cigarette including a housing body with a smoking mouth, an atomizer accommodated in the housing body, a smoke chamber disposed between the atomizer and the smoke mouth, a first containment cavity, and a MEMS sensor. The housing body is provided with a first through hole that is connected with the outside world and the MEMS sensor. The MEMS sensor includes a printed circuit board, a first housing, and a MEMS chip and an ASIC chip placed in the second containment cavity. The MEMS sensor further includes a second housing connected to the printed circuit board. The first housing and the second housing are spaced to form a third containment cavity. A gap connecting the first containment cavity and the third containment cavity is provided between the second housing and the printed circuit board. The e-cigarette can protect the MEMS sensor.
A MEMS accelerometer includes a base, proof mass, at least one pair of seesaw structures, and an out-of-plane displacement detection component. The at least one pair of the seesaw structures are oppositely disposed and fixed on the base through anchor points, and the out-of-plane displacement detection component is configured to detect rotation of the at least one pair of the seesaw structures or out-of-plane linear motion of the proof mass. Linear displacement of the MEMS accelerometer is not only beneficial to improve linearity of a capacitive displacement detection, but also to other non-capacitive detection methods, such as optical displacement detection. In addition, a double coupling structure is adopted to jointly couple rotation of seesaws, and remaining translational and rotational modes of the seesaw structures are suppressed.
G01P 15/125 - Mesure de l'accélérationMesure de la décélérationMesure des chocs, c.-à-d. d'une variation brusque de l'accélération en ayant recours aux forces d'inertie avec conversion en valeurs électriques ou magnétiques au moyen de capteurs à capacité
G01P 15/08 - Mesure de l'accélérationMesure de la décélérationMesure des chocs, c.-à-d. d'une variation brusque de l'accélération en ayant recours aux forces d'inertie avec conversion en valeurs électriques ou magnétiques
G01P 15/18 - Mesure de l'accélérationMesure de la décélérationMesure des chocs, c.-à-d. d'une variation brusque de l'accélération dans plusieurs dimensions
The invention discloses a MEMS gyroscope, including a substrate, a first unit and a second unit, and the first unit and the second unit are relatively arranged on the substrate along the first direction. The first unit is connected to the second unit through a coupling spring, and the substrate is also provided with a driving electrode and a detection electrode. The first unit includes a first weight and a second weight. The second unit includes the third weight and the fourth weight set oppositely along the second direction. The second set of coupling structures are connected to the third weight and fourth weight. Compared with the prior art, the beneficial effect of the present invention is that the MEMS gyroscope adopts a symmetrical layout, which facilitates the realization of differential detection and improves the sensitivity.
G01C 19/5712 - Dispositifs sensibles à la rotation utilisant des masses vibrantes, p. ex. capteurs vibratoires de vitesse angulaire basés sur les forces de Coriolis utilisant des masses entraînées dans un mouvement de rotation alternatif autour d'un axe les dispositifs comportant une structure micromécanique
The invention provides an acceleration sensor, including a sensing unit, a sensing unit includes a ring-shaped outer coupling unit; seesaw structures, including at least two and arranged on an inner side of the outer coupling unit; an inner coupling unit, including an inner coupling elastic beam connecting two adjacent seesaw structures; proof mass blocks fixed on the outer coupling unit or the inner coupling unit or the seesaw structures; an in-plane coupling elastic member elastically connecting the seesaw structures to the outer coupling unit; in-plane displacement detection devices arranged on the proof mass blocks and configured to detect movements of the proof mass blocks along the first direction and/or along the second direction; and out-of-plane displacement detection devices arranged on the outer coupling unit and/or the seesaw structures and/or the inner coupling unit configured to detect movements of the seesaw structures along the third direction.
G01P 15/125 - Mesure de l'accélérationMesure de la décélérationMesure des chocs, c.-à-d. d'une variation brusque de l'accélération en ayant recours aux forces d'inertie avec conversion en valeurs électriques ou magnétiques au moyen de capteurs à capacité
G01P 15/093 - Mesure de l'accélérationMesure de la décélérationMesure des chocs, c.-à-d. d'une variation brusque de l'accélération en ayant recours aux forces d'inertie avec conversion en valeurs électriques ou magnétiques au moyen de capteurs photo-électriques
G01P 15/18 - Mesure de l'accélérationMesure de la décélérationMesure des chocs, c.-à-d. d'une variation brusque de l'accélération dans plusieurs dimensions
G01P 15/08 - Mesure de l'accélérationMesure de la décélérationMesure des chocs, c.-à-d. d'une variation brusque de l'accélération en ayant recours aux forces d'inertie avec conversion en valeurs électriques ou magnétiques
The invention discloses a piezoelectric speaker, including a substrate with a cavity therethrough a supporting structure covering the cavity a first drive structure stacked on the supporting structure, including alternately stacked first electrode layers and first piezoelectric layers a transmission structure stacked on the first drive structure, and a separation slot penetrating the supporting structure and the first drive structure to separate the first drive structure into a first piezoelectric driving part and a second piezoelectric driving part. A rigidity of the transmission structure is less than or equal to a rigidity of the first drive structure, and the rigidity of the first drive structure is less than or equal to a rigidity of the supporting structure. Compared with the prior art, the sound pressure level generated at the same moment is higher.
A MEMS gyroscope includes an anchor point, a resonator, and a transducer. The resonator includes eight resonating blocks arranged at equal intervals and a coupling beam connecting each two adjacent resonating blocks. The resonating blocks are connected with the anchor point through anchoring beams. The anchoring beams decouple radial motion and circumferential motion of the resonating blocks. The resonating blocks include first resonating blocks, second resonating blocks, third resonating blocks, and fourth resonating blocks. In a vibration mode, the transducer drives the first and second resonating blocks to vibrate along a first axis and a second axis respectively, so the third and fourth resonating blocks are driven to vibrate along the fourth axis and the third axis respectively. In a detection mode, the transducer detects vibration of the third resonating blocks along the third axis and the vibration of the fourth resonating blocks along the fourth axis.
A sound production device includes a substrate having a cavity and a plurality of cantilever diaphragms fixed on the substrate. Each of the plurality of the cantilever diaphragms includes a fixed end fixed on the substrate and a free end extending from the fixed end to a position suspended above the cavity. The free end includes a first surface and a second surface oppositely arranged. The free end and the substrate or other free ends are spaced to form a gap. The sound production device further includes a first dielectric elastomer actuator, a second dielectric elastomer actuator, and a flexible connector. The sound production device of the present disclosures adopts dielectric elastomer actuators on both of the upper and lower sides of the cantilever diaphragms to together act on the cantilever diaphragms, thereby improving the linearity of the sound production device.
H10N 30/20 - Dispositifs piézo-électriques ou électrostrictifs à entrée électrique et sortie mécanique, p. ex. fonctionnant comme actionneurs ou comme vibrateurs
A MEMS gyroscope includes an anchor point, at least two driving structures connected with the anchor point; a mass group connected with the driving structures, and coupling beams connected with adjacent driving structures. The mass group includes two detecting components arranged on opposite sides of the driving structures and connected with the driving structures. Each of the detecting components includes two mass blocks arranged at intervals and detecting transducers arranged below or above the mass blocks. The mass blocks are connected with the driving structures. At least portions of the mass blocks extend to outsides of the driving structures. The mass blocks and the detecting transducers are symmetrically arranged, which is convenient for realizing differential detection. In an out-plane oscillation mode, most portions of the mass blocks sense an angular velocity. By adopting detecting transducers, electromechanical coupling coefficient of detection is effectively improved, and sensitivity and signal-to-noise ratio are improved.
G01C 19/5712 - Dispositifs sensibles à la rotation utilisant des masses vibrantes, p. ex. capteurs vibratoires de vitesse angulaire basés sur les forces de Coriolis utilisant des masses entraînées dans un mouvement de rotation alternatif autour d'un axe les dispositifs comportant une structure micromécanique
The present invention provides a MEMS microphone, including a substrate and a capacitive structure. The capacitive structure includes a back plate and a vibration diaphragm. The vibration diaphragm includes a main body and a plurality of supporting structures for supporting the main body. Each supporting structure includes a supporting beam and two spring structures. Each spring structure includes at least two beam arms extending along the extension direction of the peripheral edge of the main body, and the beam arm closest to the main body is spaced apart from the main body. The sensitivity of the MEMS microphone in the present invention is higher.
The invention provides a micromachined gyroscope. The micromachined gyroscope includes a driving structure, a detection structure and a connection component. The driving structure includes a first moving component and a driving component. The driving component is used to drive the movement of the first moving component. The detection structure includes a second moving component and a detection component installed in the second moving component. The detection component is used to detect the movement distance of the second moving component along the third or fourth direction. The driving component is installed inside the first moving component, and the detection component is installed inside the second moving component. Greater drive of amplitude can be achieved at the same drive voltage, thereby increasing the sensitivity of the micromachined gyroscope.
G01C 19/5712 - Dispositifs sensibles à la rotation utilisant des masses vibrantes, p. ex. capteurs vibratoires de vitesse angulaire basés sur les forces de Coriolis utilisant des masses entraînées dans un mouvement de rotation alternatif autour d'un axe les dispositifs comportant une structure micromécanique
A MEMS microphone includes a substrate, a base, a capacitance system, and at least one cantilever structure. The substrate includes a back cavity, the base is disposed on one side of the substrate, and the capacitance system is disposed on the base. The capacitance system includes at least one back plate assembly, at least one first vibration diaphragm, and at least one second vibration diaphragm. The at least one first vibration diaphragm includes a first sub-vibration diaphragm, and the at least one second vibration diaphragm includes a second sub-vibration diaphragm. The sub-vibration diaphragm and the second sub-vibration diaphragm form a cantilever beam structure on the base, which increase compliance of the at least one first vibration diaphragm and the at least one second vibration diaphragm and reduce tension of the at least one first vibration diaphragm and the at least one second vibration diaphragm, thereby improving sensitivity of the microphones.
B81B 3/00 - Dispositifs comportant des éléments flexibles ou déformables, p. ex. comportant des membranes ou des lamelles élastiques
B81B 7/02 - Systèmes à microstructure comportant des dispositifs électriques ou optiques distincts dont la fonction a une importance particulière, p. ex. systèmes micro-électromécaniques [SMEM, MEMS]
A MEMS microphone includes a substrate, a connecting base, and a capacitance system. Connecting ports are formed on the connecting base, where the at least two connecting ports are recessed outwards from an inner wall of the connecting base and are disposed at intervals. The capacitance system includes a system main body and connecting pins. A system main body of the capacitance system is fixed to the connecting ports of the connecting base through the connecting pins. In addition, the slit is formed between the outer side of the system main body and the inner wall of the connecting base, the capacitance system is stably and reliably assembled in the connecting base through a connecting structure where the connecting pins are matched with the connecting ports, and compliance of vibration of the system main body of the capacitance system is increased through matching the connecting pins with slit.
A MEMS microphone includes a substrate having a back cavity, a vibration diaphragm system, and a housing. The vibration diaphragm system includes at least two sub-vibration diaphragm assemblies, a slit is formed between adjacent two of the at least two sub-vibration diaphragm assemblies, one end, distal from the housing, of each of the at least two sub-vibration diaphragm assemblies is fixed to a cross beam assembly, and first gaps are formed between the at least two sub-vibration diaphragm assemblies and inner sides of the housing, so that the at least two sub-vibration diaphragm assemblies form a cantilever beam structure, which increases compliance of the vibration diaphragm system and further improves sensitivity of microphones.
The present invention provides a MEMS gyroscope having internal coupling beam, an external coupling beam, a drive structure and a detection structure. The drive structure includes multiple driving weights, and the detection structure includes multiple testing weights. The drive structure further includes a first decoupling structure and a first transducer. The first decoupling structure is arranged on the side of the driving weight far away from the internal coupling beam, and the first transducer excites the driving weight to vibrate. The MEMS gyroscope of the present invention can fully increase the layout area of the first transducer, thereby realizing a larger vibration amplitude under a small driving voltage, thereby increasing the sensitivity.
G01C 19/5712 - Dispositifs sensibles à la rotation utilisant des masses vibrantes, p. ex. capteurs vibratoires de vitesse angulaire basés sur les forces de Coriolis utilisant des masses entraînées dans un mouvement de rotation alternatif autour d'un axe les dispositifs comportant une structure micromécanique
The present invention provides a micromachined gyroscope, including: a base; an anchor point fixed to the base; a number of vibration structures; and a drive structure used for driving the vibration structure to vibrate in a x-y plane along a ring direction. The drive structure includes at least four groups arranged at intervals along the ring direction and symmetrical about an x axis and a y axis. The micromachined gyroscope works in two vibration modes interchanging with each other, including a driving mode status working in a first mode status and a testing mode status working in a second mode status. By virtue of the configuration described in the invention, the micromachined gyroscope can realize three-axis detection at the same time, and greatly improves the quality utilization rate of the vibration structure.
G01C 19/5762 - Details de structure ou topologie les dispositifs ayant une seule masse de détection la masse de détection étant reliée à une masse d'entraînement, p. ex. cadres d'entraînement
77.
Speaker having first diaphragm, second diaphragm with different stiffness from first diaphragm, and driver located in through hole of first diaphragm
One of the main objects of the present invention is to provide a speaker with optimized overall acoustic performance. To achieve the above-mentioned object, the present invention provides a speaker including: a base with an accommodation cavity; a vibration sounding assembly accommodated in the accommodation cavity, including a first diaphragm and a second diaphragm, and a driver fixed to the first diaphragm for driving the first diaphragm and the second diaphragm to vibrate and produce sound. The second diaphragm stacks on the first diaphragm, and a stiffness of the second diaphragm is different from a stiffness of the first diaphragm.
The present invention provides a MEMS speaker including a substrate sidewall enclosing a cavity. The substrate sidewall includes a first surface and a second surface, a sounding assembly that is arranged on the first surface of the substrate sidewall and also seals the cavity at the opening of the first surface, and a bracket disposed in the cavity. The sounding assembly includes a first sounding assembly and the second sounding assembly. Each sounding assembly includes a driving part and a flexible diaphragm. The flexible diaphragm closes the gap formed between the free ends of adjacent driving parts and between the free ends of the driving parts and the substrate sidewall. The present invention also provides a manufacturing method of MEMS speaker. The MEMS speakers provided by the present invention have high-quality acoustic performance.
One of the main objects of the present invention is to provide a MEMS speaker with improved high frequency acoustic performance. To achieve the above-mentioned object, the present invention provides a MEMS speaker including a base with a first cavity and two openings opposite to each other; a substrate covering one of the openings; a diaphragm fixed to the base and covers the other opening; and a MEMS driver. The MEMS driver includes a first support part forming a distance from the diaphragm, a second support part extending from an edge of the first support part toward the diaphragm for supporting the diaphragm, and a piezoelectric member attached to the first support part.
One of the main objects of the present invention is to provide a MEMS acoustic sensor with improved acoustic performance and liability. To achieve the above-mentioned objects, the present invention provides a MEMS acoustic sensor, including: a base with a cavity; a number of structural layers fixed on the base, each including a fixed end fixed to the base and a suspension end extending from the fixed end for being suspended above the cavity, the suspension end being spaced from the base for forming a slit; a piezoelectric functional layer on the suspension end; and a flexible connector completely covering the slit; wherein a Young's modulus of the flexible connector is smaller than a Young's modulus of the structural layer.
The present invention is to provide a MEMS wave gyroscope with improved sensitivity. The MEMS wave gyroscope includes a base; an anchor structure fixed to the base; and a volatility structure suspended above the base. The volatility structure includes N horizontal beams and M straight beams for being interlaced to form M nodes. The horizontal beam is divided into M−1 first beam units by the nodes. The straight beam is divided into N−1 second beam units by the nodes. A first in-surface transducer is formed by the second beam unit coupled with a mechanical field and an electric field of the second beam unit on two opposite sides along the second axis. A first out-surface transducer is formed by at least one of two opposite sides of the second beam coupled with the mechanical field and electric field of the second beam unit.
G01C 19/5712 - Dispositifs sensibles à la rotation utilisant des masses vibrantes, p. ex. capteurs vibratoires de vitesse angulaire basés sur les forces de Coriolis utilisant des masses entraînées dans un mouvement de rotation alternatif autour d'un axe les dispositifs comportant une structure micromécanique
One of the objects of the present invention is to provide a three-axis micromachined gyroscope which improves the detection sensitivity for detecting angular velocity. Accordingly, the present invention provides a three-axis micromachined gyroscope, including: a base; a vibration part suspended by the base, including a vibration assembly for receiving Coriolis force and generating a position change; a drive electrode for driving the vibration part; a detection part connected with the vibration part for detecting position change of the weights after receiving Coriolis force, and converting the position change of the weight into an electrical signal for outputting; and a swing center of each weight being outside the corresponding weight. When the three-axis micromachined gyroscope receives an angular velocity, the swinging weight is subjected to Coriolis force and a corresponding position change occurs.
G01C 19/5712 - Dispositifs sensibles à la rotation utilisant des masses vibrantes, p. ex. capteurs vibratoires de vitesse angulaire basés sur les forces de Coriolis utilisant des masses entraînées dans un mouvement de rotation alternatif autour d'un axe les dispositifs comportant une structure micromécanique
83.
Silicon microphone and method for manufacturing same
The present invention provides a vibration motor including a housing with an accommodation space, a vibration member and a fixed member accommodated in the accommodation space, and an elastic support member suspending the vibration member. The elastic support member has an elastic arm, a first fixed part, and a second fixed part. Both the first fixed part and the second fixed part are bent toward the same side of the elastic arm, and the vibration member is located between the first fixed part and the second fixed part. The elastic stress of the elastic support member is effectively improved and the service life of the elastic support member is improved.
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