Abrégé

A method of rotor dynamic balancing for magnetic levitation molecular pump, including the steps of: activating an force free control module after activating a motor of the magnetic levitation molecular pump; if the maximum radial vibration amplitude does not exceed ½ of a protective clearance during the acceleration of the rotor under the control of the force free control module, indicating that the force free control module is able to inhibit the co-frequency vibration of the rotor, so as to allow the rotational speed of said rotor to exceed its rigid critical rotational speed; performing rotor dynamic balancing operation at a high speed by an influence coefficient method. The method of rotor dynamic balancing can directly perform rotor dynamic balancing operation with respect to the rotor at a high-speed, which facilitates the rotor dynamic balancing operation so as to perform the rotor dynamic balancing operation more quickly and efficiently.

Classes IPC  ?

• G01R 31/28 - Test de circuits électroniques, p. ex. à l'aide d'un traceur de signaux
• H02K 15/16 - Centrage des rotors dans les stators
• F04D 29/058 - Paliers magnétiquesPaliers électromagnétiques
• F04D 29/66 - Lutte contre la cavitation, les tourbillons, le bruit, les vibrations ou phénomènes analoguesÉquilibrage
• F04D 19/04 - Pompes multiétagées spécialement adaptées pour réaliser un vide poussé, p. ex. pompes moléculaires
• G01M 1/20 - Détermination du balourd en donnant à l'objet à tester un mouvement d'oscillation ou de rotation et en lui appliquant des forces extérieures compensant celles dues au balourd
• H02K 7/09 - Association structurelle avec des paliers avec des paliers magnétiques
• F16C 32/04 - Paliers non prévus ailleurs faisant usage de moyens de support magnétiques ou électriques

Abrégé

A method for synchronously inhibiting subcritical vibrations of magnetic levitation molecular pump rotor, by use of synchronously sampling signals of subcritical vibrations of the rotor generated after the rotor of the magnetic levitation molecular pump touches down so as to obtain the amplitude and the phase of subcritical vibrations of the rotor, based on which a compensation force is output for inhibiting subcritical vibrations of the rotor. Through using the present method, an accurate synchronous for signals of subcritical vibrations and fast inhibition for subcritical vibrations of the rotor is achieved.

Classes IPC  ?

• F04D 27/00 - Commande, p. ex. régulation, des pompes, des installations ou des systèmes de pompage spécialement adaptés aux fluides compressibles
• F04D 29/66 - Lutte contre la cavitation, les tourbillons, le bruit, les vibrations ou phénomènes analoguesÉquilibrage
• F04D 19/04 - Pompes multiétagées spécialement adaptées pour réaliser un vide poussé, p. ex. pompes moléculaires
• F04D 29/58 - RefroidissementChauffageRéduction du transfert de chaleur
• F04D 29/058 - Paliers magnétiquesPaliers électromagnétiques

Abrégé

A rotor dynamic balancing method for a magnetic levitation molecular pump, which includes the steps of activating an open loop feed forward control module after activating a motor of the magnetic levitation molecular pump; if the maximum radial vibration amplitude does not exceed ½ of a protective clearance during the acceleration of the rotor under the control of the open loop feed forward control module, indicating that the open loop feed forward control module is able to inhibit the co-frequency vibration of the rotor, so as to allow the rotational speed of the rotor to exceed its rigid critical rotational speed; and performing a rotor dynamic balancing operation at a high speed by an influence coefficient method. This method directly performs the rotor dynamic balancing operation with respect to the rotor at a high-speed, which facilitates the rotor dynamic balancing operation so as to perform the rotor dynamic balancing operation more quickly and efficiently.

Classes IPC  ?

• H02K 15/00 - Procédés ou appareils spécialement adaptés à la fabrication, l'assemblage, l'entretien ou la réparation des machines dynamo-électriques
• F04D 19/04 - Pompes multiétagées spécialement adaptées pour réaliser un vide poussé, p. ex. pompes moléculaires
• F04D 29/058 - Paliers magnétiquesPaliers électromagnétiques
• F04D 29/66 - Lutte contre la cavitation, les tourbillons, le bruit, les vibrations ou phénomènes analoguesÉquilibrage
• F04D 27/00 - Commande, p. ex. régulation, des pompes, des installations ou des systèmes de pompage spécialement adaptés aux fluides compressibles

Abrégé

A method for synchronously suppressing the subcritical vibration of a magnetic suspension molecular pump rotor. The amplitude, frequency and phase of rotor subcritical vibration is obtained by synchronously sampling a rotor subcritical vibration signal generated after a magnetic suspension molecular pump rotor falls off, and a compensation force is output based on this to suppress the rotor subcritical vibration. The method realizes accurate synchronization of subcritical vibration signals, and can rapidly realize suppression of rotor subcritical vibration.

Classes IPC  ?

• F04D 27/02 - Contrôle de l'emballement
• F04D 19/04 - Pompes multiétagées spécialement adaptées pour réaliser un vide poussé, p. ex. pompes moléculaires

Abrégé

Disclosed is a method of dynamic balance for a magnetic levitation molecular pump involving starting a force controlled imbalance vibration control module after actuating a magnetic levitation molecular pump electric motor (8). If under the control of the force controlled imbalance vibration control module, an unbalance mass on a rotor makes the maximum radial vibration amplitude of the rotor when accelerating not exceed 1/2 of a protective clearance, the force controlled imbalance vibration control module can inhibit the co-frequency vibration of the rotor, meaning that the rotational speed of the rotor can very quickly exceed the critical rotational speed for the rigidity thereof. As a result, at a relatively high speed, an influence coefficient method is used to perform a dynamic balancing operation on the rotor of the magnetic levitation molecular pump. The method of dynamic balancing can directly perform a dynamic balancing operation on the rotor of the magnetic levitation molecular pump at high speed, the steps are simple and the efficiency is high.

Classes IPC  ?

• F04D 27/02 - Contrôle de l'emballement
• F04D 19/04 - Pompes multiétagées spécialement adaptées pour réaliser un vide poussé, p. ex. pompes moléculaires

Abrégé

Disclosed is a method of dynamic balance for a magnetic levitation molecular pump involving starting a force-unrestrained imbalance vibration control module after actuating the magnetic levitation molecular pump motor (8). If under the control of the force-unrestrained imbalance vibration control module, an unbalance mass on a rotor makes the maximum radial vibration amplitude of the rotor when accelerating not exceed 1/2 of a protective clearance, the force-unrestrained imbalance vibration control module can inhibit the co-frequency vibration of the rotor, meaning that the rotational speed of the rotor can very quickly exceed the critical rotational speed for the rigidity thereof. As a result, at a relatively high speed, an influence coefficient method is used to perform a dynamic balancing operation on the rotor of the magnetic levitation molecular pump. The method of dynamic balancing can directly perform a dynamic balancing operation on the magnetic levitation molecular pump at high speed, the steps are simple and the efficiency is high.

Classes IPC  ?

• F04D 27/02 - Contrôle de l'emballement
• F04D 19/04 - Pompes multiétagées spécialement adaptées pour réaliser un vide poussé, p. ex. pompes moléculaires

Produits et services

Vacuum pumps (machines); reciprocating vacuum pumps (machines); gyration pumps (machines); kinetic vacuum pumps; turbo pumps (machines); valves (parts of machines); pressure valves (parts of machines); aerocondensers; pneumatic components; hydraulic presses. Calibration of vacuum technology equipment; technical project studies; scientific project studies; quality control; quality checking and testing; industrial design.

Produits et services

Scanning electron microscope; mass spectrograph; molecular pumps; measuring instruments for surface roughness; ion pump; fitting for vacuum acquired equipment.

Produits et services

Vacuum pumps, namely, vacuum pumps for transferring gas; adsorption vacuum pumps; getter vacuum pumps; roots vacuum pumps; kinetic vacuum pumps; turbomolecular vacuum pumps; cryopumps in the nature of vacuum pumps; molecular drag pumps in the nature of vacuum pumps; vacuum pump accessories, namely, vacuum valves, vacuum pump structural parts; vacuum pump stands for holding several vacuum pumps of the aforementioned types

Produits et services

Measuring apparatus, namely, scientific measuring instruments, namely, conductivity meters; controlling apparatus, namely, automatic pressure control machines and instruments; electrical controlling devices; checking apparatus, namely, apparatus for testing gas; vacuum chambers and controlled atmosphere chambers for testing equipment; gauges and instruments, namely, vacuum gauges; electrical conductors; integrated circuits; voltage regulators; mass spectrograph

Produits et services

Measuring, namely, calibration; technical consultancy in the field of vacuum technology; technical project studies, namely, scientific research; quality control for others; industrial design