Disclosed is a method and corresponding apparatus for determining an absolute optical distance between two reflecting surfaces that make up an interferometric cavity, the method comprising: moving an illumination spot in a back focal plane of an interferometer along a trajectory that has a nonzero radial component relative to an optical axis to cause different radial positions for the illumination spot along the trajectory while synchronously acquiring images of interferograms of the interferometric cavity; and using one or more electronic processors to analyze the images to determine a functional dependence of an optical path difference (OPD) for the interferometric cavity versus radial position for the illumination spot and extract the absolute optical distance between the two reflecting surfaces based on the determined functional dependence.
Disclosed is an illumination system for an interferometer including: a source of system light; a steering-mirror assembly to receive and reflect the system-light in at least two orthogonal directions; a tracking mechanism to track an angular orientation of the steering-mirror assembly in the two orthogonal directions and provide electronic signals representative of the angular orientation; a focus lens assembly to focus the system light reflected off the steering mirror assembly onto a focused spot on a 2-dimensional plane corresponding to a source plane of the interferometer; and an electronic controller operatively coupled to the steering-mirror assembly and configured to cause the focused spot on the source plane to follow a predetermined motion trajectory.
G02B 7/182 - Montures, moyens de réglage ou raccords étanches à la lumière pour éléments optiques pour prismesMontures, moyens de réglage ou raccords étanches à la lumière pour éléments optiques pour miroirs pour miroirs
3.
INTERFEROMETRIC METHOD FOR MEASURING OPTICAL DISTANCE
Disclosed is a method and corresponding apparatus for determining an absolute optical distance between two reflecting surfaces that make up an interferometric cavity, the method comprising: moving an illumination spot in a back focal plane of an interferometer along a trajectory that has a nonzero radial component relative to an optical axis to cause different radial positions for the illumination spot along the trajectory while synchronously acquiring images of interferograms of the interferometric cavity; and using one or more electronic processors to analyze the images to determine a functional dependence of an optical path difference (OPD) for the interferometric cavity versus radial position for the illumination spot and extract the absolute optical distance between the two reflecting surfaces based on the determined functional dependence.
G01B 11/14 - Dispositions pour la mesure caractérisées par l'utilisation de techniques optiques pour mesurer la distance ou la marge entre des objets ou des ouvertures espacés
Disclosed is an illumination system for an interferometer including: a source of system light; a steering-mirror assembly to receive and reflect the system-light in at least two orthogonal directions; a tracking mechanism to track an angular orientation of the steering-mirror assembly in the two orthogonal directions and provide electronic signals representative of the angular orientation; a focus lens assembly to focus the system light reflected off the steering mirror assembly onto a focused spot on a 2-dimensional plane corresponding to a source plane of the interferometer; and an electronic controller operatively coupled to the steering-mirror assembly and configured to cause the focused spot on the source plane to follow a predetermined motion trajectory.
09 - Appareils et instruments scientifiques et électriques
42 - Services scientifiques, technologiques et industriels, recherche et conception
Produits et services
Gas sample detector; portable gas analysers; gas sample
probes; dewpoint temperature monitor; data acquisition and
analysis software for portable gas analysers; devices for
monitoring, measuring and analysing gas, dust, temperature
and heat flow; apparatus, devices and instruments for
measuring surface temperature; apparatus, devices and
instruments for detecting radiation; infrared thermometers,
temperature scanners; data and signal processing devices;
lenses and eyepieces; infrared line scanning equipment;
radiation thermometers; gas samplers; condensing temperature
control devices; software for portable gas analysers;
radiation temperature measuring devices; radiation
pyrometers; devices for thermography; measuring devices and
in particular temperature measuring devices and radiation
detection devices; apparatus and instruments for monitoring,
measuring and analysing gas, dust, temperature and heat
flux; apparatus and instruments for measuring surface
temperature; apparatus and instruments for radiation
detection; infrared thermometers; temperature scanners; data
processors and signal processors; radiation-detection
temperature measurement devices; measuring apparatus and
instruments (not being apparatus and instruments for
measuring land), and apparatus responsive to change in
physical, electrical and chemical conditions for
automatically controlling such conditions; scientific,
surveying, optical, measuring, signalling, checking
(inspection) apparatus and instruments; apparatus and
instruments for checking, measuring and analysing gases,
dust, temperatures and heat flows; apparatus and instruments
for detecting radiation; infrared thermometers, temperature
analysers; data processing devices and signal processing
devices; contactless temperature measuring devices; infrared
radiation thermometers and thermal imaging cameras for
temperature measurements in industrial plants as well as on
machines, buildings and electrical installations; measuring
devices for measuring the radiant heat flux in boilers and
furnaces; flame monitors; gas analysers; dust measuring
devices; measuring devices for measuring the oxygen
concentration and / or the carbon monoxide concentration in
flue gases; temperature sensing and measuring devices;
portable infrared thermometers; thermal imaging cameras;
measuring or testing machines and instruments; infrared line
scanners; combustion efficiency monitors for use in power
generation applications; pollutant monitors for use in power
generation applications; dust and particulate monitors for
use in power generation applications; gas turbine blade
condition monitors for use in power generation applications;
fire protection systems used for fire detection and
comprising thermal imaging cameras and/or carbon monoxide
monitors to give early warning of the onset of combustion;
apparatus for the measurement of temperature by thermal
radiation, but not including any such goods being computers
or computer programs or any goods of the same description as
computers or computer programs; infrared radiation
thermometer; temperature indicators; temperature sensors;
temperature monitoring cameras; thermal imaging systems;
remote controlled thermal imaging systems; apparatus for
monitoring, measuring and analysing gas, dust, temperature
and heat flux; software for receiving and analysing the data
received from the (flue) gas analyser; combustion efficiency
monitors; pollutant monitors; dust and particulate monitors;
fire detectors; gas turbine blade condition monitors; data
processing devices and signal processing devices. Calibration and certification of apparatus and instruments
for monitoring, measuring and analysing gas, dust,
temperature and heat flux; calibration and certification
services of devices and instruments for the control,
measurement and analysis of gases, dust; scientific and
technological services and research and design relating
thereto; industrial analysis and research services; design
and development of computers and computer programs;
calibration and certification services for devices and
instruments for the control, measurement and analysis of
gases, dust, temperatures and heat flows; technological
consultancy services relating to the installation,
adjustment and suitability of devices for the measurement,
analysis and display of gas and/or dust, for the measurement
and display of temperatures in industrial plants, on
machines, buildings and electrical installations and for
measurement of heat flows in boiler systems.
09 - Appareils et instruments scientifiques et électriques
42 - Services scientifiques, technologiques et industriels, recherche et conception
Produits et services
Gas sample detector; portable gas analysers; gas sample
probes; dewpoint temperature monitor; data acquisition and
analysis software for portable gas analysers; devices for
monitoring, measuring and analysing gas, dust, temperature
and heat flow; apparatus, devices and instruments for
measuring surface temperature; apparatus, devices and
instruments for detecting radiation; infrared thermometers,
temperature scanners; data and signal processing devices;
lenses and eyepieces; infrared line scanning equipment;
radiation thermometers; gas samplers; condensing temperature
control devices; software for portable gas analysers;
radiation temperature measuring devices; radiation
pyrometers; devices for thermography; measuring devices and
in particular temperature measuring devices and radiation
detection devices; apparatus and instruments for monitoring,
measuring and analysing gas, dust, temperature and heat
flux; apparatus and instruments for measuring surface
temperature; apparatus and instruments for radiation
detection; infrared thermometers; temperature scanners; data
processors and signal processors; radiation-detection
temperature measurement devices; measuring apparatus and
instruments (not being apparatus and instruments for
measuring land), and apparatus responsive to change in
physical, electrical and chemical conditions for
automatically controlling such conditions; scientific,
surveying, optical, measuring, signalling, checking
(inspection) apparatus and instruments; apparatus and
instruments for checking, measuring and analysing gases,
dust, temperatures and heat flows; apparatus and instruments
for detecting radiation; infrared thermometers, temperature
analysers; data processing devices and signal processing
devices; contactless temperature measuring devices; infrared
radiation thermometers and thermal imaging cameras for
temperature measurements in industrial plants as well as on
machines, buildings and electrical installations; measuring
devices for measuring the radiant heat flux in boilers and
furnaces; flame monitors; gas analysers; dust measuring
devices; measuring devices for measuring the oxygen
concentration and / or the carbon monoxide concentration in
flue gases; temperature sensing and measuring devices;
portable infrared thermometers; thermal imaging cameras;
measuring or testing machines and instruments; infrared line
scanners; combustion efficiency monitors for use in power
generation applications; pollutant monitors for use in power
generation applications; dust and particulate monitors for
use in power generation applications; gas turbine blade
condition monitors for use in power generation applications;
fire protection systems used for fire detection and
comprising thermal imaging cameras and/or carbon monoxide
monitors to give early warning of the onset of combustion;
apparatus for the measurement of temperature by thermal
radiation, but not including any such goods being computers
or computer programs or any goods of the same description as
computers or computer programs; infrared radiation
thermometer; temperature indicators; temperature sensors;
temperature monitoring cameras; thermal imaging systems;
remote controlled thermal imaging systems; apparatus for
monitoring, measuring and analysing gas, dust, temperature
and heat flux; software for receiving and analysing the data
received from the (flue) gas analyser; combustion efficiency
monitors; pollutant monitors; dust and particulate monitors;
fire detectors; gas turbine blade condition monitors; data
processing devices and signal processing devices. Calibration and certification of apparatus and instruments
for monitoring, measuring and analysing gas, dust,
temperature and heat flux; calibration and certification
services of devices and instruments for the control,
measurement and analysis of gases, dust; scientific and
technological services and research and design relating
thereto; industrial analysis and research services; design
and development of computers and computer programs;
calibration and certification services for devices and
instruments for the control, measurement and analysis of
gases, dust, temperatures and heat flows; technological
consultancy services relating to the installation,
adjustment and suitability of devices for the measurement,
analysis and display of gas and/or dust, for the measurement
and display of temperatures in industrial plants, on
machines, buildings and electrical installations and for
measurement of heat flows in boiler systems.
09 - Appareils et instruments scientifiques et électriques
42 - Services scientifiques, technologiques et industriels, recherche et conception
Produits et services
Gas sample detector; portable gas analysers; gas sample probes; dewpoint temperature monitor; data acquisition and analysis software for portable gas analysers; devices for monitoring, measuring and analysing gas, dust, temperature and heat flow; apparatus, devices and instruments for measuring surface temperature; apparatus, devices and instruments for detecting radiation; infrared thermometers, temperature scanners; data and signal processing devices; lenses and eyepieces; infrared line scanning equipment; radiation thermometers; gas samplers; condensing temperature control devices; software for portable gas analysers; radiation temperature measuring devices; radiation pyrometers; devices for thermography; measuring devices and in particular temperature measuring devices and radiation detection devices; apparatus and instruments for monitoring, measuring and analysing gas, dust, temperature and heat flux; apparatus and instruments for measuring surface temperature; apparatus and instruments for radiation detection; infrared thermometers; temperature scanners; data processors and signal processors; radiation-detection temperature measurement devices; measuring apparatus and instruments (not being apparatus and instruments for measuring land), and apparatus responsive to change in physical, electrical and chemical conditions for automatically controlling such conditions; scientific, surveying, optical, measuring, signalling, checking (inspection) apparatus and instruments; apparatus and instruments for checking, measuring and analysing gases, dust, temperatures and heat flows; apparatus and instruments for detecting radiation; infrared thermometers, temperature analysers; data processing devices and signal processing devices; contactless temperature measuring devices; infrared radiation thermometers and thermal imaging cameras for temperature measurements in industrial plants as well as on machines, buildings and electrical installations; measuring devices for measuring the radiant heat flux in boilers and furnaces; flame monitors; gas analysers; dust measuring devices; measuring devices for measuring the oxygen concentration and / or the carbon monoxide concentration in flue gases; temperature sensing and measuring devices; portable infrared thermometers; thermal imaging cameras; measuring or testing machines and instruments; infrared line scanners; combustion efficiency monitors for use in power generation applications; pollutant monitors for use in power generation applications; dust and particulate monitors for use in power generation applications; gas turbine blade condition monitors for use in power generation applications; fire protection systems used for fire detection and comprising thermal imaging cameras and/or carbon monoxide monitors to give early warning of the onset of combustion; apparatus for the measurement of temperature by thermal radiation, but not including any such goods being computers or computer programs or any goods of the same description as computers or computer programs; infrared radiation thermometer; temperature indicators; temperature sensors; temperature monitoring cameras; thermal imaging systems; remote controlled thermal imaging systems; apparatus for monitoring, measuring and analysing gas, dust, temperature and heat flux; software for receiving and analysing the data received from the (flue) gas analyser; combustion efficiency monitors; pollutant monitors; dust and particulate monitors; fire detectors; gas turbine blade condition monitors; data processing devices and signal processing devices. Calibration and certification of apparatus and instruments for monitoring, measuring and analysing gas, dust, temperature and heat flux; calibration and certification services of devices and instruments for the control, measurement and analysis of gases, dust; scientific and technological services and research and design relating thereto; industrial analysis and research services; design and development of computers and computer programs; calibration and certification services for devices and instruments for the control, measurement and analysis of gases, dust, temperatures and heat flows; technological consultancy services relating to the installation, adjustment and suitability of devices for the measurement, analysis and display of gas and/or dust, for the measurement and display of temperatures in industrial plants, on machines, buildings and electrical installations and for measurement of heat flows in boiler systems.
09 - Appareils et instruments scientifiques et électriques
42 - Services scientifiques, technologiques et industriels, recherche et conception
Produits et services
Gas sample detector; portable gas analysers; gas sample probes; dewpoint temperature monitor; data acquisition and analysis software for portable gas analysers; devices for monitoring, measuring and analysing gas, dust, temperature and heat flow; apparatus, devices and instruments for measuring surface temperature; apparatus, devices and instruments for detecting radiation; infrared thermometers, temperature scanners; data and signal processing devices; lenses and eyepieces; infrared line scanning equipment; radiation thermometers; gas samplers; condensing temperature control devices; software for portable gas analysers; radiation temperature measuring devices; radiation pyrometers; devices for thermography; measuring devices and in particular temperature measuring devices and radiation detection devices; apparatus and instruments for monitoring, measuring and analysing gas, dust, temperature and heat flux; apparatus and instruments for measuring surface temperature; apparatus and instruments for radiation detection; infrared thermometers; temperature scanners; data processors and signal processors; radiation-detection temperature measurement devices; measuring apparatus and instruments (not being apparatus and instruments for measuring land), and apparatus responsive to change in physical, electrical and chemical conditions for automatically controlling such conditions; scientific, surveying, optical, measuring, signalling, checking (inspection) apparatus and instruments; apparatus and instruments for checking, measuring and analysing gases, dust, temperatures and heat flows; apparatus and instruments for detecting radiation; infrared thermometers, temperature analysers; data processing devices and signal processing devices; contactless temperature measuring devices; infrared radiation thermometers and thermal imaging cameras for temperature measurements in industrial plants as well as on machines, buildings and electrical installations; measuring devices for measuring the radiant heat flux in boilers and furnaces; flame monitors; gas analysers; dust measuring devices; measuring devices for measuring the oxygen concentration and / or the carbon monoxide concentration in flue gases; temperature sensing and measuring devices; portable infrared thermometers; thermal imaging cameras; measuring or testing machines and instruments; infrared line scanners; combustion efficiency monitors for use in power generation applications; pollutant monitors for use in power generation applications; dust and particulate monitors for use in power generation applications; gas turbine blade condition monitors for use in power generation applications; fire protection systems used for fire detection and comprising thermal imaging cameras and/or carbon monoxide monitors to give early warning of the onset of combustion; apparatus for the measurement of temperature by thermal radiation, but not including any such goods being computers or computer programs or any goods of the same description as computers or computer programs; infrared radiation thermometer; temperature indicators; temperature sensors; temperature monitoring cameras; thermal imaging systems; remote controlled thermal imaging systems; apparatus for monitoring, measuring and analysing gas, dust, temperature and heat flux; software for receiving and analysing the data received from the (flue) gas analyser; combustion efficiency monitors; pollutant monitors; dust and particulate monitors; fire detectors; gas turbine blade condition monitors; data processing devices and signal processing devices. Calibration and certification of apparatus and instruments for monitoring, measuring and analysing gas, dust, temperature and heat flux; calibration and certification services of devices and instruments for the control, measurement and analysis of gases, dust; scientific and technological services and research and design relating thereto; industrial analysis and research services; design and development of computers and computer programs; calibration and certification services for devices and instruments for the control, measurement and analysis of gases, dust, temperatures and heat flows; technological consultancy services relating to the installation, adjustment and suitability of devices for the measurement, analysis and display of gas and/or dust, for the measurement and display of temperatures in industrial plants, on machines, buildings and electrical installations and for measurement of heat flows in boiler systems.
The invention relates to a system and method for calibrating a temperature sensor. The invention comprises a receptacle comprising a tubular wall closed at a lower end by a bottom thereby defining an open ended cavity configured to hold a liquid and to receive a thermos element. A controllable energy source is provided to add to or remove heat from the cavity, together with an elongate fluid directing element having an upper end and a lower end.
G01K 7/02 - Mesure de la température basée sur l'utilisation d'éléments électriques ou magnétiques directement sensibles à la chaleur utilisant des éléments thermo-électriques, p. ex. des thermocouples
G01K 7/22 - Mesure de la température basée sur l'utilisation d'éléments électriques ou magnétiques directement sensibles à la chaleur utilisant des éléments résistifs l'élément étant une résistance non linéaire, p. ex. une thermistance
A positioner for analytical instruments (e.g., atom probe microscopes or other nanoscale microscopes) includes a major carriage translatable with respect to a vacuum chamber wall, and a minor carriage connected to the major carriage by multiple spaced actuators allowing the minor carriage to translate and/or tilt with respect to the major carriage. Arms then extend from the minor carriage through the vacuum chamber wall to connect to an instrument. The instrument may be rapidly extended or retracted within the vacuum chamber via its connection to the major carriage, and may be more finely translated and/or tilted via its connection to the minor carriage. A damping arrangement isolates the instrument from vibration.
An interferometric optical system for measuring a test object, including: i) a reference object comprising a partially reflective reference surface; ii) a light source module configured to direct first and second input beams through the reference surface to the test object at an angle to one another; iii) a detector positioned to detect light reflected from the reference surface and one or more surfaces of the test object; and iv) an aperture positioned to selectively block light from reaching the detector, wherein the angle between the first and second input beams causes the aperture to block light from the first input beam reflected by the reference surface and pass light from second input beam reflected by the reference surface, wherein the two input beams have a mutual coherence length smaller than twice an optical distance between the reference surface and the test object.
G01B 11/30 - Dispositions pour la mesure caractérisées par l'utilisation de techniques optiques pour mesurer la rugosité ou l'irrégularité des surfaces
G01B 9/02055 - Réduction ou prévention d’erreursTestÉtalonnage
Disclosed are method and electronic components for: i) electronically extracting a sequence of values from a measurement signal corresponding to a position of a moving object, wherein the sequence of values indicates the position of the moving object at corresponding time increments; ii) electronically determining at least one of an estimate for a velocity of the moving object and an estimate for an acceleration of the moving the object based on a plurality of the values in the sequence of values; and iii) electronically correcting a value in the sequence of values to substantially reduce the effect of processing and signal delays based on one or both of the velocity and acceleration estimates.
Disclosed are method and electronic components for: i) electronically extracting a sequence of values from a measurement signal corresponding to a position of a moving object, wherein the sequence of values indicates the position of the moving object at corresponding time increments; ii) electronically determining at least one of an estimate for a velocity of the moving object and an estimate for an acceleration of the moving the object based on a plurality of the values in the sequence of values; and iii) electronically correcting a value in the sequence of values to substantially reduce the effect of processing and signal delays based on one or both of the velocity and acceleration estimates.
G01D 3/02 - Dispositions pour la mesure prévues pour les objets particuliers indiqués dans les sous-groupes du présent groupe avec dispositions pour changer ou corriger la fonction de transfert
G01D 5/244 - Moyens mécaniques pour le transfert de la grandeur de sortie d'un organe sensibleMoyens pour convertir la grandeur de sortie d'un organe sensible en une autre variable, lorsque la forme ou la nature de l'organe sensible n'imposent pas un moyen de conversion déterminéTransducteurs non spécialement adaptés à une variable particulière utilisant des moyens électriques ou magnétiques influençant les caractéristiques d'impulsionsMoyens mécaniques pour le transfert de la grandeur de sortie d'un organe sensibleMoyens pour convertir la grandeur de sortie d'un organe sensible en une autre variable, lorsque la forme ou la nature de l'organe sensible n'imposent pas un moyen de conversion déterminéTransducteurs non spécialement adaptés à une variable particulière utilisant des moyens électriques ou magnétiques produisant des impulsions ou des trains d'impulsions
G01D 5/26 - Moyens mécaniques pour le transfert de la grandeur de sortie d'un organe sensibleMoyens pour convertir la grandeur de sortie d'un organe sensible en une autre variable, lorsque la forme ou la nature de l'organe sensible n'imposent pas un moyen de conversion déterminéTransducteurs non spécialement adaptés à une variable particulière utilisant des moyens optiques, c.-à-d. utilisant de la lumière infrarouge, visible ou ultraviolette
A method for measuring a bond gap includes receiving a light beam at a first interferometer cavity and a reference interferometer cavity, in which the first interferometer cavity is defined by a first surface and a contact interface, and the contact interface is defined by a contact gap less than 1 μm. The method includes determining a first interference amplitude of the first interferometer cavity and a second interference amplitude of the reference interferometer cavity by applying wavelength tuning and spectral analysis to measured intensities of light from the first interferometer cavity and the reference interferometer cavity. The contact gap is determined based on a ratio of the first interference amplitude and the second interference amplitude and information about a mapping between various interference amplitude ratios and expected contact gap values.
G01B 11/14 - Dispositions pour la mesure caractérisées par l'utilisation de techniques optiques pour mesurer la distance ou la marge entre des objets ou des ouvertures espacés
The invention relates to a system and method for calibrating a temperature sensor. The invention comprises a receptacle comprising a tubular wall closed at a lower end by a bottom thereby defining an open ended cavity configured to hold a liquid and to receive a thermos element. A controllable energy source is provided to add to or remove heat from the cavity, together with an elongate fluid directing element having an upper end and a lower end.
Disclosed is a method and apparatus for determining information about an alignment of one or more optical components of a multi-component assembly involving: detecting an optical interference pattern produced from a combination of at least three optical wave fronts including at least two optical wave fronts caused by reflections from at least two surfaces of the one or more optical components; and computationally processing information derived from the detected optical interference pattern with at least one simulated optical wave front derived from a model of at least one selected optical surface of the at least two surfaces to computationally isolate information corresponding to an alignment of the selected optical surface.
Disclosed is a method and apparatus for determining information about an alignment of one or more optical components of a multi-component assembly involving: detecting an optical interference pattern produced from a combination of at least three optical wave fronts including at least two optical wave fronts caused by reflections from at least two surfaces of the one or more optical components; and computationally processing information derived from the detected optical interference pattern with at least one simulated optical wave front derived from a model of at least one selected optical surface of the at least two surfaces to computationally isolate information corresponding to an alignment of the selected optical surface.
G01B 11/27 - Dispositions pour la mesure caractérisées par l'utilisation de techniques optiques pour mesurer des angles ou des cônesDispositions pour la mesure caractérisées par l'utilisation de techniques optiques pour tester l'alignement des axes pour tester l'alignement des axes
G02B 27/62 - Appareils optiques spécialement adaptés pour régler des éléments optiques pendant l'assemblage de systèmes optiques
G01B 11/24 - Dispositions pour la mesure caractérisées par l'utilisation de techniques optiques pour mesurer des contours ou des courbes
Disclosed is a variable-zoom imaging apparatus that includes: i) imaging optics configured to form an image in an imaging area of an object positioned in an object area; ii) an adjustable aperture stop to adjustably set a numerical aperture NA for the image formed by the imaging optics; iii) an electronic detector comprising an array of detector elements positioned in the imaging area to detect the image; and iv) image processing circuitry coupled to the electronic detector to produce a digital representation of the image based on signals from at least some of the detector elements. The image processing circuitry produces the digital representation with a different magnification of the object m for each of a plurality of different numerical apertures for the image set by the adjustable aperture stop.
G02B 7/28 - Systèmes pour la génération automatique de signaux de mise au point
G02B 15/14 - Objectifs optiques avec moyens de faire varier le grossissement par déplacement axial d'au moins une lentille ou de groupes de lentilles relativement au plan de l'image afin de faire varier de façon continue la distance focale équivalente de l'objectif
H04N 23/80 - Chaînes de traitement de la caméraLeurs composants
An atom probe directs two or more pulsed laser beams onto a specimen, with each laser beam being on a different side of the specimen, and with each laser beam supplying pulses at a time different from the other laser beams. The laser beams are preferably generated by splitting a single beam provided by a laser source. The laser beams are preferably successively aligned incident with the specimen by one or more beam steering mirrors, which may also scan each laser beam over the specimen to achieve a desired degree of specimen ionization.
H01J 37/285 - Microscopes à émission, p. ex. microscopes à émission de champ
G01Q 60/30 - Microscopie à mesure de potentiel à balayage
G01N 27/626 - Recherche ou analyse des matériaux par l'emploi de moyens électriques, électrochimiques ou magnétiques en recherchant l'ionisation des gaz, p. ex. des aérosolsRecherche ou analyse des matériaux par l'emploi de moyens électriques, électrochimiques ou magnétiques en recherchant les décharges électriques, p. ex. l'émission cathodique utilisant la chaleur pour ioniser un gaz
G01N 27/66 - Utilisation de l'onde ou de la radiation des particules pour ioniser un gaz, p. ex. dans une chambre d'ionisation et mesure de l'intensité ou de la tension électriques
G01Q 60/38 - Sondes, leur fabrication ou leur instrumentation correspondante, p. ex. supports
34.
Method of reducing roughness and/or defects on an optical surface and mirror formed by same
A method of making a mirror for use with extreme ultraviolet or x-ray radiation includes: i) providing a base substrate having a curved surface, wherein the curved surface deviates from a curvature of a target mirror surface at high spatial frequencies corresponding to spatial periods less than 2 mm; and ii) securing a first side of a thin plate to the curved surface of the base substrate to cover the curved surface, wherein the plate has a thickness thin enough to conform to the curvature of the target mirror surface and thick enough to attenuate deviations at the high spatial frequencies on a second side of the thin plate opposite the first side that are caused by the deviations on the curved surface of the base substrate. A mirror made by the method is also disclosed.
G21K 1/06 - Dispositions pour manipuler des particules ou des rayonnements ionisants, p. ex. pour focaliser ou pour modérer utilisant la diffraction, la réfraction ou la réflexion, p. ex. monochromateurs
A method of making a mirror for use with extreme ultraviolet or x-ray radiation includes: i) providing a base substrate having a curved surface, wherein the curved surface deviates from a curvature of a target mirror surface at high spatial frequencies corresponding to spatial periods less than 2 mm; and ii) securing a first side of a thin plate to the curved surface of the base substrate to cover the curved surface, wherein the plate has a thickness thin enough to conform to the curvature of the target mirror surface and thick enough to attenuate deviations at the high spatial frequencies on a second side of the thin plate opposite the first side that are caused by the deviations on the curved surface of the base substrate. A mirror made by the method is also disclosed.
G21K 1/06 - Dispositions pour manipuler des particules ou des rayonnements ionisants, p. ex. pour focaliser ou pour modérer utilisant la diffraction, la réfraction ou la réflexion, p. ex. monochromateurs
A method of making a mirror for use with extreme ultraviolet (EUV) or X-ray radiation is disclosed. The method includes: a) providing an optical element having a curved mirror surface, wherein the curved mirror surface comprises localized defects that degrade performance of the curved mirror surface; b) spin-coating the curved mirror surface with a material to cover at least some of the defects; and c) curing the spin-coated material on the curved mirror surface to reduce the number of defects and improve the performance of the curved mirror surface. Also disclosed is a mirror made by the method.
G21K 1/06 - Dispositions pour manipuler des particules ou des rayonnements ionisants, p. ex. pour focaliser ou pour modérer utilisant la diffraction, la réfraction ou la réflexion, p. ex. monochromateurs
B05D 1/00 - Procédés pour appliquer des liquides ou d'autres matériaux fluides aux surfaces
38.
Method of mitigating defects on an optical surface and mirror formed by same
A method of making a mirror for use with extreme ultraviolet (EUV) or X-ray radiation is disclosed. The method includes: a) providing an optical element having a curved mirror surface, wherein the curved mirror surface comprises localized defects that degrade performance of the curved mirror surface; b) spin-coating the curved mirror surface with a material to cover at least some of the defects; and c) curing the spin-coated material on the curved mirror surface to reduce the number of defects and improve the performance of the curved mirror surface. Also disclosed is a mirror made by the method.
09 - Appareils et instruments scientifiques et électriques
Produits et services
Temperature indicators; temperature sensors; infra-red thermometers; temperature monitoring cameras; thermal imaging cameras; thermal imaging systems; remote controlled thermal imaging systems; none of the aforesaid for medical use
A method for figuring an optical surface of an optical element to achieve a target profile for the optical surface includes: applying a removal process to an extended region of the optical surface extending along a first direction to remove material from the extended region of the optical surface; adjusting a position of the optical surface relative to the removal process along a second direction perpendicular to the first direction to remove material from additional extended regions of the optical surface extending along the first direction at each of different positions of the optical surface along the second direction; and repeating the applying of the removal process and the adjusting of the optical surface relative to the removal process for each of multiple rotational orientations of the optical surface about a third direction perpendicular to the first and second directions to achieve the target profile of the optical surface.
G02B 13/18 - Objectifs optiques spécialement conçus pour les emplois spécifiés ci-dessous avec des lentilles ayant une ou plusieurs surfaces non sphériques, p. ex. pour réduire l'aberration géométrique
G02B 13/14 - Objectifs optiques spécialement conçus pour les emplois spécifiés ci-dessous à utiliser avec des radiations infrarouges ou ultraviolettes
A method for figuring an optical surface of an optical element to achieve a target profile for the optical surface includes: applying a removal process to an extended region of the optical surface extending along a first direction to remove material from the extended region of the optical surface; adjusting a position of the optical surface relative to the removal process along a second direction perpendicular to the first direction to remove material from additional extended regions of the optical surface extending along the first direction at each of different positions of the optical surface along the second direction; and repeating the applying of the removal process and the adjusting of the optical surface relative to the removal process for each of multiple rotational orientations of the optical surface about a third direction perpendicular to the first and second directions to achieve the target profile of the optical surface.
H01L 21/302 - Traitement des corps semi-conducteurs en utilisant des procédés ou des appareils non couverts par les groupes pour changer leurs caractéristiques physiques de surface ou leur forme, p. ex. gravure, polissage, découpage
C03C 15/00 - Traitement de surface du verre, autre que sous forme de fibres ou de filaments, par attaque chimique
C03C 15/02 - Traitement de surface du verre, autre que sous forme de fibres ou de filaments, par attaque chimique pour l'obtention d'une surface unie
C03C 25/68 - Traitement chimique, p. ex. lixiviation, traitement acide ou alcalin par attaque chimique
H01L 21/68 - Appareils spécialement adaptés pour la manipulation des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide pendant leur fabrication ou leur traitementAppareils spécialement adaptés pour la manipulation des plaquettes pendant la fabrication ou le traitement des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide ou de leurs composants pour le positionnement, l'orientation ou l'alignement
09 - Appareils et instruments scientifiques et électriques
Produits et services
A data measurement feature sold as a component of downloadable software for data acquisition and displaying 3D real-time wavefront data for use in connection with interferometers
A spectrometer may include a radiation source having a spark generator, an entrance slit, a dispersive element and a plurality of detectors, and a rotatable sector shutter having an axis of rotation and a trigger unit optically coupled to the sector diaphragm. The axis of rotation of the sector shutter is non-parallel to a connecting line between the source and the entrance slit.
The invention relates to a method and a spectrometer for wavelength-dependent measurement of radiation in the range of UV light and visible light, with an entry gap, a dispersive element and a number of sensors comprising pixels, wherein a light path runs inside the spectrometer from the entry slot to the sensors and an imaging element is provided, which focusses the radiation on the sensors, in the case of which a means for defocussing the radiation is provided, which is activatable for the purpose of calibration.
Method and apparatus for determining the wavelength of a light beam are provided. An input light beam is received, and light from the input light beam is distributed to multiple channels. At a first pair of interferometer cavities that has a first free spectral range, two of the multiple channels of light are received. The intensity of light reflected from the first pair of cavities is measured, and a first estimate of the wavelength or optical frequency of the input light beam is determined based on measurements of interference signals from the first pair of cavities and an initial estimate of the wavelength or optical frequency. At a second pair of cavities that has a second free spectral range smaller than the first free spectral range, another two of the multiple channels of light are received. The intensity of light from the second pair of cavities is measured, and a second estimate of the wavelength or optical frequency of the input light beam is determined based on the first estimate and measurements of interference signals from the second pair of cavities, in which the second estimate is more accurate than the first estimate.
G01J 1/42 - Photométrie, p. ex. posemètres photographiques en utilisant des détecteurs électriques de radiations
G01J 9/02 - Mesure du déphasage des rayons lumineuxRecherche du degré de cohérenceMesure de la longueur d'onde des rayons lumineux par des méthodes interférométriques
G01J 3/26 - Production du spectreMonochromateurs en utilisant une réflexion multiple, p. ex. interféromètre de Fabry-Perot, filtre à interférences variables
48.
Wavemeter using pairs of interferometric optical cavities
Method and apparatus for determining the wavelength of a light beam are provided. An input light beam is received, and light from the input light beam is distributed to multiple channels. At a first pair of interferometer cavities that has a first free spectral range, two of the multiple channels of light are received. The intensity of light reflected from the first pair of cavities is measured, and a first estimate of the wavelength or optical frequency of the input light beam is determined based on measurements of interference signals from the first pair of cavities and an initial estimate of the wavelength or optical frequency. At a second pair of cavities that has a second free spectral range smaller than the first free spectral range, another two of the multiple channels of light are received. The intensity of light from the second pair of cavities is measured, and a second estimate of the wavelength or optical frequency of the input light beam is determined based on the first estimate and measurements of interference signals from the second pair of cavities, in which the second estimate is more accurate than the first estimate.
G01J 9/02 - Mesure du déphasage des rayons lumineuxRecherche du degré de cohérenceMesure de la longueur d'onde des rayons lumineux par des méthodes interférométriques
G01J 3/453 - Spectrométrie par interférence par corrélation des amplitudes
G01J 3/26 - Production du spectreMonochromateurs en utilisant une réflexion multiple, p. ex. interféromètre de Fabry-Perot, filtre à interférences variables
49.
LONG SPAN LEAD SCREW ASSEMBLY WITH ANTI-BACKLASH NUT AND WEAR COMPENSATED LOAD BEARING ELEMENT
A motion device (10) can include a carriage (20) for traveling along a rail (24). The carriage can have at least one rotatable fixed position roller (62), and at least one rotatable adjustable roller that is movable relative to the at least one fixed position roller for self compensating for play between the rollers and mating surfaces (64, 66) of the rail. Each at least one adjustable roller can be part of a movable roller portion movably mounted to the carriage. The movable roller portion can be adjustably movable by a self adjustment mechanism. The self adjustment mechanism can include a mechanical advantage pushing member (22) capable of movably engaging the movable roller portion. The mechanical advantage pushing member can be resiliently biased against the movable roller portion by a biasing arrangement. The biasing arrangement can be capable of causing movement of the mechanical advantage pushing member and the movable roller portion for moving the at least one adjustable roller for self compensating for said play.
A motion device including a carriage for traveling along a rail. The carriage can have at least one rotatable fixed position roller, and at least one rotatable adjustable roller that is movable relative to the at least one fixed position roller for self compensating for play between the rollers and mating surfaces of the rail. Each adjustable roller can be part of a movable roller portion movably mounted to the carriage. The movable roller portion can be adjustably movable by a self adjustment mechanism. The self adjustment mechanism can include a mechanical advantage pushing member for movably engaging the movable roller portion. The mechanical advantage pushing member can be resiliently biased against the movable roller portion by a biasing arrangement. The biasing arrangement can cause movement of the mechanical advantage pushing member and the movable roller portion for moving the at least one adjustable roller for self compensating for play.
A method for measuring a property of a test object with an interferometer includes: a) providing calibration information relating a focus setting for the interferometer to a position of the test object relative to a reference surface of the interferometer; b) determining the position of the test object relative to the reference surface; and c) using the interferometer to collect interferometric images of the test object for use in measuring the property of the test object.
LAND INSTRUMENTS INTERNATIONAL LIMITED (Royaume‑Uni)
Inventeur(s)
Turner, Susan Fiona
Simpson, Neil George
Bennett, Mark Ashton
Drögmöller, Peter
Abrégé
There is provided a control system for a furnace. The control system comprises a thermal imaging camera and a control unit. The thermal imaging camera is configured to receive thermal radiation from a plurality of positions in a furnace and to generate an image which includes temperature information for the plurality of positions in the furnace. The control unit is configured to receive the image from the thermal imaging camera and to generate control signals for the furnace using the image.
C03B 5/04 - Fusion dans des foursFours, pour autant qu'ils soient spécialement adaptés à la fabrication du verre dans des fours à bassin
C23C 16/44 - Revêtement chimique par décomposition de composés gazeux, ne laissant pas de produits de réaction du matériau de la surface dans le revêtement, c.-à-d. procédés de dépôt chimique en phase vapeur [CVD] caractérisé par le procédé de revêtement
F27D 19/00 - Aménagement des dispositifs de commande
F27D 21/00 - Aménagement des dispositifs de surveillanceAménagement des dispositifs de sécurité
G01F 23/24 - Indication ou mesure du niveau des liquides ou des matériaux solides fluents, p. ex. indication en fonction du volume ou indication au moyen d'un signal d'alarme en mesurant des variables physiques autres que les dimensions linéaires, la pression ou le poids, selon le niveau à mesurer, p. ex. par la différence de transfert de chaleur de vapeur ou d'eau en mesurant les variations de résistance de résistances électriques produites par contact avec des fluides conducteurs
LAND INSTRUMENTS INTERNATIONAL LIMITED (Royaume‑Uni)
Inventeur(s)
Turner, Susan Fiona
Abrégé
An apparatus is disclosed for automatically aligning an infra-red sensor (2) with a hot extruded body. The apparatus includes a scanner (16) such as a motor that can point the infra-red sensor that the axis of the infra-red sensor is pointed in a plurality of directions. A central control unit (14), which is a processor, is configured to analyse the amount of infra-red radiation received in the plurality of positions, to identify a first position in which the axis of the infra-red sensor points at a first extruded body by measuring the amount of radiation received in the first position and in a plurality of positions around the first position, and to instruct the scanner to move the infra-red sensor to the first position so that the temperature of the first extruded body can be measured.
Techniques for removing interferometry signal phase variations caused by distortion and other effects in a multi-layer stack include: providing an electronic processor sample interferometry data acquired for the stack using a low coherence imaging interferometry system; transforming, by the electronic processor, the sample interferometry data to a frequency domain; identifying a non-linear phase variation from the sample interferometry data in the frequency domain, in which the non-linear phase variation is a result of dispersion introduced into a measurement beam by the test sample; and removing the non-linear phase variation from the sample interferometry data thereby producing compensated interferometry data.
Techniques for removing interferometry signal phase variations caused by distortion and other effects in a multi-layer stack include: providing an electronic processor sample interferometry data acquired for the stack using a low coherence imaging interferometry system; transforming, by the electronic processor, the sample interferometry data to a frequency domain; identifying a non-linear phase variation from the sample interferometry data in the frequency domain, in which the non-linear phase variation is a result of dispersion introduced into a measurement beam by the test sample; and removing the non-linear phase variation from the sample interferometry data thereby producing compensated interferometry data.
G01B 11/24 - Dispositions pour la mesure caractérisées par l'utilisation de techniques optiques pour mesurer des contours ou des courbes
G01B 11/06 - Dispositions pour la mesure caractérisées par l'utilisation de techniques optiques pour mesurer la longueur, la largeur ou l'épaisseur pour mesurer l'épaisseur
G01B 11/02 - Dispositions pour la mesure caractérisées par l'utilisation de techniques optiques pour mesurer la longueur, la largeur ou l'épaisseur
57.
ENERGY BEAM INPUT TO ATOM PROBE SPECIMENS FROM MULTIPLE ANGLES
An atom probe directs two or more pulsed laser beams onto a specimen, with each laser beam being on a different side of the specimen, and with each laser beam supplying pulses at a time different from the other laser beams. The laser beams are preferably generated by splitting a single beam provided by a laser source. The laser beams are preferably successively aligned incident with the specimen by one or more beam steering mirrors, which may also scan each laser beam over the specimen to achieve a desired degree of specimen ionization.
An optical method for determining an orientation of surface texture of a mechanical part includes: i) acquiring data for a first areal surface topography image using a surface topography measurement instrument, wherein the first image corresponds to a first field of view of the mechanical part for the surface topography measurement instrument; ii) rotating the mechanical part with respect to a rotation axis provided by a rotatable mount used to secure the mechanical part to provide a second field of view of the mechanical part for the surface topography measurement instrument, wherein the first and second fields of view overlap to provide image information about a common region of the mechanical part; iii) acquiring data for a second areal surface topography image using the surface topography measurement instrument, wherein the second image corresponds to the second field of view; and iv) processing the data from the images.
G01B 11/30 - Dispositions pour la mesure caractérisées par l'utilisation de techniques optiques pour mesurer la rugosité ou l'irrégularité des surfaces
G01N 21/956 - Inspection de motifs sur la surface d'objets
G06T 7/49 - Analyse de la texture basée sur la description de texture structurelle, p. ex. en utilisant des primitives ou des règles de placement
LAND INSTRUMENTS INTERNATIONAL LIMITED (Royaume‑Uni)
Inventeur(s)
Drogmoller, Peter
Turner, Susan Fiona
Abrégé
A metal strip production line measurement system is disclosed comprising a thermal imaging camera (8) configured to receive thermal radiation from a plurality of positions on a metal strip being conveyed along a production line and to generate an image based on the thermal radiation received. A temperature or emissivity calculation unit (34) is also provided within a processor (36) to determine temperature and/or emissivity for the plurality of positions which includes identifying and subtracting a reflected component in the radiation received at the thermal imaging camera from a position on the metal strip.
An optical method for determining an orientation of surface texture of a mechanical part includes: i) acquiring data for a first areal surface topography image using a surface topography measurement instrument, wherein the first image corresponds to a first field of view of the mechanical part for the surface topography measurement instrument; ii) rotating the mechanical part with respect to a rotation axis provided by a rotatable mount used to secure the mechanical part to provide a second field of view of the mechanical part for the surface topography measurement instrument, wherein the first and second fields of view overlap to provide image information about a common region of the mechanical part; iii) acquiring data for a second areal surface topography image using the surface topography measurement instrument, wherein the second image corresponds to the second field of view; and iv) processing the data from the images.
G01B 11/30 - Dispositions pour la mesure caractérisées par l'utilisation de techniques optiques pour mesurer la rugosité ou l'irrégularité des surfaces
LAND INSTRUMENTS INTERNATIONAL LIMITED (Royaume‑Uni)
Inventeur(s)
Turner, Susan Fiona
Simpson, Neil George
Bennett, Mark Ashton
Drögmöller, Peter
Abrégé
There is provided a control system for a furnace. The control system comprises a thermal imaging camera and a control unit. The thermal imaging camera is configured to receive thermal radiation from a plurality of positions in a furnace and to generate an image which includes temperature information for the plurality of positions in the furnace. The control unit is configured to receive the image from the thermal imaging camera and to generate control signals for the furnace using the image.
C03B 5/04 - Fusion dans des foursFours, pour autant qu'ils soient spécialement adaptés à la fabrication du verre dans des fours à bassin
F27B 9/10 - Fours dans lesquels la charge est déplacée mécaniquement, p. ex. du type tunnel Fours similaires dans lesquels la charge se déplace par gravité chauffés sans contact entre gaz de combustion et la chargeFours dans lesquels la charge est déplacée mécaniquement, p. ex. du type tunnel Fours similaires dans lesquels la charge se déplace par gravité chauffés électriquement chauffés par air ou gaz chauds
F27B 9/40 - Aménagement des dispositifs de commande ou de surveillance
F27D 19/00 - Aménagement des dispositifs de commande
75.
Interferometric method and apparatus using calibration information relating a focus setting to a test object position
A method for measuring a property of a test object with an interferometer includes: a) providing calibration information relating a focus setting for the interferometer to a position of the test object relative to a reference surface of the interferometer; b) determining the position of the test object relative to the reference surface; and c) using the interferometer to collect interferometric images of the test object for use in measuring the property of the test object.
A method for measuring a property of a test object with an interferometer includes: a) providing calibration information relating a focus setting for the interferometer to a position of the test object relative to a reference surface of the interferometer; b) determining the position of the test object relative to the reference surface; and c) using the interferometer to collect interferometric images of the test object for use in measuring the property of the test object.
G01N 21/45 - RéfringencePropriétés liées à la phase, p. ex. longueur du chemin optique en utilisant des méthodes interférométriquesRéfringencePropriétés liées à la phase, p. ex. longueur du chemin optique en utilisant les méthodes de Schlieren
G01N 21/77 - Systèmes dans lesquels le matériau est soumis à une réaction chimique, le progrès ou le résultat de la réaction étant analysé en observant l'effet sur un réactif chimique
In an atom probe having a specimen mount spaced from a detector, and preferably having a local electrode situated next to the specimen mount, a lens assembly is insertable between the specimen (and any local electrode) and detector. The lens assembly includes a decelerating electrode biased to decelerate ions from the specimen mount and an accelerating mesh biased to accelerate ions from the specimen mount. The decelerating electrode and accelerating mesh cooperate to divert the outermost ions from the specimen mount—which correspond to the peripheral areas of a specimen—so that they reach the detector, whereas they would ordinarily be lost. Because the detector now detects the outermost ions, the peripheral areas of the specimen are now imaged by the detector, providing the detector with a greatly increased field of view of the specimen, as much as 100 degrees (full angle) or more.
A method for compensating spectrum drift in a spectrometer having a radiation source, optical apparatus to split up a spectrum into spectral lines according to wavelengths of radiation from the radiation source, a number of detectors to receive partial spectra, and which are provided with respective pluralities of pixels to measure radiation intensity, and a catalog of spectral lines of different chemical elements that may be used as correction lines. The method may include generating and recording an emission spectrum of a sample; determining pixels receiving the maximum of the peaks for respective partial spectra and identifying respective peak positions for the peak maxima; for the respective peak positions, determining if there is a correction line within a predetermined maximum distance from the peak position, and if so, calculating a distance between the peak position and the correction line; and calculating a correction function for assignment of peak positions.
09 - Appareils et instruments scientifiques et électriques
42 - Services scientifiques, technologiques et industriels, recherche et conception
Produits et services
Interferometers; optical profilers; metrology systems comprised of one or more cameras and sensors in communication with computer software and hardware, a light source, and replacement parts therefor Engineering design services; Product development; Design and engineering services in the field of metrology and optics
−1 Pa, very little gas diffusion takes place through the aperture, allowing higher vacuum to be maintained in the subchamber despite the aperture opening to the chamber. The higher vacuum in the subchamber about the specimen assists in reducing noise in atom probe image data. The aperture may conveniently be provided by the aperture in a counter electrode, such as a local electrode, as commonly used in atom probes.
A method for determining characteristics of a test cavity, the method includes for each of a plurality of optical frequencies within a bandwidth of a tunable laser, measuring interference signals from the test cavity and a reference cavity having a known characteristic. The method includes determining values for the plurality of optical frequencies from the measured interference signals from the reference cavity and the known characteristic of the reference cavity, and determining the characteristic of the test cavity using the determined values of the plurality of optical frequencies.
H01S 5/06 - Dispositions pour commander les paramètres de sortie du laser, p. ex. en agissant sur le milieu actif
G01B 11/14 - Dispositions pour la mesure caractérisées par l'utilisation de techniques optiques pour mesurer la distance ou la marge entre des objets ou des ouvertures espacés
85.
PRECISION POSITIONING SYSTEM USING A WAVELENGTH TUNABLE LASER
A method for determining characteristics of a test cavity, the method includes for each of a plurality of optical frequencies within a bandwidth of a tunable laser, measuring interference signals from the test cavity and a reference cavity having a known characteristic. The method includes determining values for the plurality of optical frequencies from the measured interference signals from the reference cavity and the known characteristic of the reference cavity, and determining the characteristic of the test cavity using the determined values of the plurality of optical frequencies.
A centralizing bushing assembly includes a bushing housing having axial ends and an opening extending therethrough along an axial axis. The opening can have a pocket extending outwardly from the axial axis within the bushing housing and have internal shoulders axially facing each other. A bushing ring can be positioned within the pocket of the bushing housing between the internal shoulders. The bushing ring can have a split for allowing collapsing of the bushing ring radially inward and have an inner diameter for slidably engaging an axially movable shaft extending through the bushing housing along the axial axis and also have an outer shoulder. A resilient biasing member can be positioned against the outer shoulder of the bushing ring for radially biasing the inner diameter of the bushing ring radially inwardly in a centralizing manner about the axial axis for engaging and centralizing the shaft slidably positioned therethrough.
F16C 27/06 - Paliers ou supports de paliers élastiques ou extensibles pour mouvement de rotation exclusivement par le moyen de parties en caoutchouc ou en un matériau analogue
F16H 57/00 - Parties constitutives générales des transmissions
F16H 25/24 - Éléments essentiels pour ces mécanismes, p. ex. vis, écrous
87.
Optical emission spectroscope with a pivotably mounted inductively coupled plasma source
An optical emission spectrometry instrument may comprise an inductively coupled plasma generator (ICP) with an electromagnetic coil having input and ground connectors. The electromagnetic coil may be mounted to a mounting disk, and the input connector may be coupled to a power output of a radio frequency power source, and the ground connector may be connected to the mounting disk. A spectro-chemical source may be used for sample excitation. The spectro-chemical source and the ICP may have a longitudinal axis. An optical system may be included for viewing the spectro-chemical source with a fixed view axis. The electromagnetic coil may be mounted pivotably around one of its connectors so that the orientation of the ICP can be altered from a first orientation of its longitudinal axis to a second orientation of its longitudinal axis, and vice versa.
G01N 21/68 - Systèmes dans lesquels le matériau analysé est excité de façon à ce qu'il émette de la lumière ou qu'il produise un changement de la longueur d'onde de la lumière incidente excité électriquement, p. ex. par électroluminescence en utilisant des champs électriques à haute fréquence
G01N 21/73 - Systèmes dans lesquels le matériau analysé est excité de façon à ce qu'il émette de la lumière ou qu'il produise un changement de la longueur d'onde de la lumière incidente excité thermiquement en utilisant des brûleurs ou torches à plasma
A spectrometer for examining the spectrum of an optical emission source may include: an optical base body, a light entry aperture connected to the optical base body to couple light into the spectrometer, at least one dispersion element to receive the light as a beam of rays and generate a spectrum, and at least one detector for measuring the generated spectrum. A light path may run from the light entry aperture to the detector. A mirror group with at least two mirrors may be provided in a section of the light path between the light entry aperture and the at least one detector, in which the beam does not run parallel, which may compensate for temperature effects. In the mirror group, at least one mirror or the entire mirror group may be moveable relative to the optical base body and may be coupled to a temperature-controlled drive.
G01J 3/02 - SpectrométrieSpectrophotométrieMonochromateursMesure de la couleur Parties constitutives
G02B 7/18 - Montures, moyens de réglage ou raccords étanches à la lumière pour éléments optiques pour prismesMontures, moyens de réglage ou raccords étanches à la lumière pour éléments optiques pour miroirs
G02B 7/182 - Montures, moyens de réglage ou raccords étanches à la lumière pour éléments optiques pour prismesMontures, moyens de réglage ou raccords étanches à la lumière pour éléments optiques pour miroirs pour miroirs
Methods include: directing test light and reference light along different optical paths, where a test object is in a path of the test light; forming an image of the test object on a multi-element detector by directing test light from the test object to the detector; overlapping the reference light with the test light on the detector; detecting an intensity of the overlapped test and reference light with the detector, the intensity being detected at a frame rate; and modulating an optical path difference (OPD) between the test and reference light at the detector while detecting the light intensity. The OPD is modulated at a rate and amplitude sufficient to reduce a contrast of fringes in a spatial interference pattern formed by the light at the detector over a frame of the detector. Accordingly, fringe-free images may be acquired real-time.
Method include using an apparatus to measure a first surface field, at a first surface of the apparatus, of an artifact having one or more surface features with known topography. The method includes determining a first focus metric at the first surface based on at least a portion of a first surface profile containing the one or more surface features. Methods include digitally transforming, the first surface field into a second surface field at a second surface of the apparatus, deriving, a second surface profile from the second surface field and computing a second focus metric for the second surface profile, and determining, based on two or more focus metric values, an optimum surface for evaluating the instrument transfer function. Method include determining the instrument transfer function of the apparatus based on at least a portion of the surface profile derived from the surface field of the optimum surface.
G01N 21/45 - RéfringencePropriétés liées à la phase, p. ex. longueur du chemin optique en utilisant des méthodes interférométriquesRéfringencePropriétés liées à la phase, p. ex. longueur du chemin optique en utilisant les méthodes de Schlieren
Method include using an apparatus to measure a first surface field, at a first surface of the apparatus, of an artifact having one or more surface features with known topography. The method includes determining a first focus metric at the first surface based on at least a portion of a first surface profile containing the one or more surface features. Methods include digitally transforming, the first surface field into a second surface field at a second surface of the apparatus, deriving, a second surface profile from the second surface field and computing a second focus metric for the second surface profile, and determining, based on two or more focus metric values, an optimum surface for evaluating the instrument transfer function. Method include determining the instrument transfer function of the apparatus based on at least a portion of the surface profile derived from the surface field of the optimum surface.
G01B 11/30 - Dispositions pour la mesure caractérisées par l'utilisation de techniques optiques pour mesurer la rugosité ou l'irrégularité des surfaces
09 - Appareils et instruments scientifiques et électriques
Produits et services
Instrument control and data analysis software featuring
automatic calculation capabilities to ensure accurate
measurements by reducing the effects of random noise sources
for use with optical profilers and laser interferometers.
A method for measuring a position of an object, the method includes probing a sensing mark arranged in a first plane on a substrate to determine the position of the object, a portion of the substrate connecting the sensing mark to the object. An edge of the object can be sufficiently close to an edge of the sensing mark to reduce measurement errors in the position of the object caused by a deformation of the substrate
A method for measuring a position of an object, the method includes probing a sensing mark arranged in a first plane on a substrate to determine the position of the object, a portion of the substrate connecting the sensing mark to the object. An edge of the object can be sufficiently close to an edge of the sensing mark to reduce measurement errors in the position of the object caused by a deformation of the substrate.
G01B 11/14 - Dispositions pour la mesure caractérisées par l'utilisation de techniques optiques pour mesurer la distance ou la marge entre des objets ou des ouvertures espacés
G01B 11/16 - Dispositions pour la mesure caractérisées par l'utilisation de techniques optiques pour mesurer la déformation dans un solide, p. ex. indicateur optique de déformation
In an atom probe having a specimen mount spaced from a detector, and preferably having a local electrode situated next to the specimen mount, a lens assembly is insertable between the specimen (and any local electrode) and detector. The lens assembly includes a decelerating electrode biased to decelerate ions from the specimen mount and an accelerating mesh biased to accelerate ions from the specimen mount, with the decelerating electrode being situated closer to the specimen mount and the decelerating electrode being situated closer to the detector. The decelerating electrode and accelerating mesh cooperate to divert the outermost ions from the specimen mount - which correspond to the peripheral areas of a specimen - so that they reach the detector, whereas they would ordinarily be lost. Because the detector now detects the outermost ions, the peripheral areas of the specimen are now imaged by the detector, providing the detector with a greatly increased field of view of the specimen, as much as 100 degrees (full angle) or more.
09 - Appareils et instruments scientifiques et électriques
Produits et services
Instrument control and data analysis software featuring automatic calculation capabilities to ensure accurate measurements by reducing the effects of random noise sources for use with optical profilers and laser interferometers
The invention relates to an arrangement for the spectral decomposition of light, comprising a diffraction element (1, 16), comprising a beam (2) incident on the diffraction element (1, 16) at an angle α with respect to the diffraction element normal, which beam contains the wavelengths of the interval λ to λ+Δλ, comprising a first beam (3) of wavelength λ, diffracted at an angle β with respect to the diffraction element normal in the N-th order of diffraction, and comprising a second beam (4) of wavelength λ+Δλ, diffracted at an angle β+Δβ with respect to the diffraction element normal in the N-th order of diffraction, wherein the arrangement contains a return arrangement (5), which deflects the first diffracted beam (3) and directs it back to the diffraction element (1) as a first returned beam (6) at an angle of incidence α' with respect to the diffraction element normal, and which simultaneously deflects the second diffracted beam (4) and directs it back to the diffraction element (1) as a second returned beam (7) at an angle of incidence α'+Δα' with respect to the diffraction element normal, in such a way that the angle differences Δα' and Δβ have different signs.
G01J 3/26 - Production du spectreMonochromateurs en utilisant une réflexion multiple, p. ex. interféromètre de Fabry-Perot, filtre à interférences variables
G01J 3/18 - Production du spectreMonochromateurs en utilisant des éléments diffractants, p. ex. réseaux
The invention relates to an improved spectrometer for the optical emission spectrometry having a radiation-emitting source (11), an entrance slit (2), a grid (1), a long-pass filter (10), and detectors (3, 4, 5, 6), wherein during operation, the radiation falls from the entrance slit (2) at a first angle of incidence (α1) against the grid normal (N) onto the grid (1). The spectrometer is characterized in that a first mirror is provided at a point, on which the radiation reflected in zero-order on the grid falls onto the first mirror; a second mirror is provided at a point, where the radiation reflected in zero-order on the grid falls from the first mirror onto the second mirror. The second mirror is aligned such that the radiation reflected on the second mirror falls onto the grid at a second angle of incidence (α2). At least one aperture (9) is provided that can be switched into the optical path between the grid, the first mirror, the second mirror, and the grid for selectively interrupting said pathway. Controlling means are provided that control the spectrometer such that either the aperture or the filter is switched on.
G01J 3/32 - Mesure de l'intensité des raies spectrales directement sur le spectre lui-même en étudiant des bandes d'un spectre successivement à l'aide d'un détecteur unique
G01J 3/08 - Systèmes pour la commutation de faisceaux
99.
OPTICAL EMISSION SPECTROSCOPE WITH A PIVOTABLY MOUNTED INDUCTIVELY COUPLED PLASMA SOURCE
The present invention provides an optical emission spectrometry (1) instrument comprising an inductively coupled plasma generator (ICP) (2) with an electromagnetic coil (8) having an input connector (9) and a ground connector (12), wherein the electromagnetic coil (8) is mounted to a mounting disk (13) and the input connector (9) is coupled to a power output (10) of a radio frequency power source (11) and the ground connector (12) is connected to the mounting disk (13), and with a spectro-chemical source for sample excitation, wherein the spectro-chemical source and the inductively coupled plasma generator (2) have a longitudinal axis, and with an optical system (3) viewing said spectro-chemical source with a fixed view axis (7), whereas the electromagnetic coil (8) is mounted pivotably around one of its connectors (9, 12) so that the orientation of the inductively coupled plasma generator (2) can be altered from a first orientation of its longitudinal axis, which is parallel to the fixed view axis (7) of the optical system (3) to a second orientation of its longitudinal axis, which is perpendicular to the fixed view axis (7) of the optical system (3) and vice versa.
G01N 21/68 - Systèmes dans lesquels le matériau analysé est excité de façon à ce qu'il émette de la lumière ou qu'il produise un changement de la longueur d'onde de la lumière incidente excité électriquement, p. ex. par électroluminescence en utilisant des champs électriques à haute fréquence
An encoder interferometry system includes an encoder scale arranged to receive and diffract a measurement beam. The system further includes one or more optical elements configured and arranged to receive a first diffracted measurement beam and a second diffracted measurement beam from the encoder scale and to redirect the first diffracted measurement beam and the second diffracted measurement beam toward the encoder scale such that the first diffracted measurement beam and the second diffracted measurement beam propagate along non-parallel beam paths having an angular separation α following a second diffraction at the encoder scale. The system further includes a first detector arranged to receive the first diffracted measurement beam and a second detector arranged to receive the second diffracted measurement beam.
G01D 5/26 - Moyens mécaniques pour le transfert de la grandeur de sortie d'un organe sensibleMoyens pour convertir la grandeur de sortie d'un organe sensible en une autre variable, lorsque la forme ou la nature de l'organe sensible n'imposent pas un moyen de conversion déterminéTransducteurs non spécialement adaptés à une variable particulière utilisant des moyens optiques, c.-à-d. utilisant de la lumière infrarouge, visible ou ultraviolette
G01D 5/353 - Moyens mécaniques pour le transfert de la grandeur de sortie d'un organe sensibleMoyens pour convertir la grandeur de sortie d'un organe sensible en une autre variable, lorsque la forme ou la nature de l'organe sensible n'imposent pas un moyen de conversion déterminéTransducteurs non spécialement adaptés à une variable particulière utilisant des moyens optiques, c.-à-d. utilisant de la lumière infrarouge, visible ou ultraviolette avec atténuation ou obturation complète ou partielle des rayons lumineux les rayons lumineux étant détectés par des cellules photo-électriques en modifiant les caractéristiques de transmission d'une fibre optique
G01B 11/00 - Dispositions pour la mesure caractérisées par l'utilisation de techniques optiques
