A connector for use in a vacuum pumping system, the connector comprising: a conduit comprising: a first conduit portion comprising a first opening and a second opening; a second conduit portion extending from the first conduit portion at a branching point between the first opening and the second opening, the second conduit portion comprising: a third opening at an end distal from the branching point; a first valve disposed along the first conduit portion between the branching point and the second opening; and a second valve disposed along the second conduit portion between the branching point and the third opening.
F04B 39/12 - Carcasses d'enveloppeCylindresCulassesConnexions des tubulures pour fluide
F04B 37/14 - Pompes spécialement adaptées aux fluides compressibles et ayant des caractéristiques pertinentes non prévues dans les groupes ou présentant un intérêt autre que celui visé par ces groupes pour utilisation particulière pour obtenir un vide élevé
F04B 39/10 - Adaptation ou aménagement des organes de distribution
F04B 49/22 - Commande des "machines", pompes ou installations de pompage ou mesures de sécurité les concernant non prévues dans les groupes ou présentant un intérêt autre que celui visé par ces groupes par clapets
2.
NANOOBJECT TRAP AND METHOD OF CONFINING A NANOOBJECT
A method of confining a nanoobject and a nanoobject trap for an optically levitated elongated nanoobject are disclosed. The nanoobject has an aspect ratio greater than two and said nanoobject trap comprises: a chamber for containing said nanoobject; means for generating a harmonic potential for confining said nanoobject in said nanoobject trap; and a feedback signal generator. The feedback signal generator comprises an optical detector for detecting oscillation of said nanoobject, said feedback signal generator being configured to generate a feedback signal in dependence upon said detected oscillation; and an all-pass filter for generating a phase change of in said feedback signal such that said feedback signal is substantially ninety degrees out of phase with a first harmonic of said detected oscillation. A modifier modifies said harmonic potential in dependence upon said feedback signal.
B82B 3/00 - Fabrication ou traitement des nanostructures par manipulation d’atomes ou de molécules, ou d’ensembles limités d’atomes ou de molécules un à un comme des unités individuelles
G01L 11/00 - Mesure de la pression permanente, ou quasi permanente d'un fluide ou d'un matériau solide fluent par des moyens non prévus dans les groupes ou
To provide a vacuum pump including a plurality of stages of Siegbahn exhaust mechanisms, and a stator disc of each of the Siegbahn exhaust mechanisms used in the vacuum pump enabling an exhaust process to be efficiently performed by connecting the plurality of stages of Siegbahn exhaust mechanisms in parallel without providing a communication port in a rotor disc In the vacuum pump including a Siegbahn exhaust mechanism according to an embodiment, a partition wall divides a flow channel to the Siegbahn exhaust mechanism into a plurality of channel systems, and gas divided by the partition wall is sent in parallel to the plurality of stages of exhaust mechanisms stacked on each other. This gas flows as indicated by the arrows in Fig. 6. In this manner, the Siegbahn exhaust mechanisms can be connected in parallel so that an exhaust speed can be improved without providing the communication port in the rotor disc.
An abatement system (104) for treatment of exhaust gases of a vacuum processing system (100), the abatement system (104) comprising: an inlet manifold (200), the inlet manifold (200) comprising: a single fluid inlet (224) for receiving an exhaust gas stream from the vacuum processing system (102); and a plurality of fluid outlets (226) coupled to the fluid inlet (224); and a plurality of abatement devices (202) arranged to, in use, receive the exhaust gas stream from the inlet manifold (200); wherein each abatement device (202) of the plurality of abatement devices (202) is coupled to a respective fluid outlet (226) of the inlet manifold (200).
B01D 53/32 - Séparation de gaz ou de vapeursRécupération de vapeurs de solvants volatils dans les gazÉpuration chimique ou biologique des gaz résiduaires, p. ex. gaz d'échappement des moteurs à combustion, fumées, vapeurs, gaz de combustion ou aérosols par effets électriques autres que ceux prévus au groupe
B01D 46/00 - Filtres ou procédés spécialement modifiés pour la séparation de particules dispersées dans des gaz ou des vapeurs
[Problem] To suppress an influence of noise from a motor on a sensor. [Means of Solution] A magnetic bearing device includes: a rotating body; a motor including poles whose number is an even number and is not a multiple of 4; a radial electromagnet; a radial displacement sensor; a first oscillator; a second oscillator; and a demodulation circuit, in which the radial displacement sensor includes a first sensor magnetic pole pair and a second sensor magnetic pole pair, each coil of the sensor magnetic pole pair is connected such that polarities of respective magnetic poles are different from each other, one end of the first sensor magnetic pole pair is connected to one end of the second sensor magnetic pole pair such that polarities of a pair of sensor magnetic poles radially facing each other, among the sensor magnetic poles of the first sensor magnetic pole pair and the second sensor magnetic pole pair, are opposite to each other, the other end of the first sensor magnetic pole pair is connected to the first oscillator, and the other end of the second sensor magnetic pole pair is connected to the second oscillator, and a midpoint voltage of the two sensor magnetic pole pairs is input to the demodulation circuit.
To reduce noise due to switching of a motor. A vacuum pump includes: a rotating body; a motor that rotatably drives the rotating body; a radial electromagnet that generates an electromagnetic force in a radial direction on the rotating body; displacement sensors, each of which has a plurality of sensor magnetic poles made of coils and measures a displacement of the rotating body based on a change in inductances of the coils; a power converter that converts an input DC voltage into an AC voltage which is applied to the motor; a motor driver that performs PWM control in cooperation with the power converter; an oscillator that outputs an AC voltage as a modulated input signal to the displacement sensor; and a demodulation circuit that demodulates an output signal from the displacement sensor by a synchronous detection technique. A carrier frequency in the PWM control is four times a modulation frequency of the displacement sensor.
A centrifugal oil pump device preferably for a vacuum pump, comprising an oil reservoir extending radially around a vacuum pump driving shaft, the oil reservoir comprising at least one opening, an oil pump inlet arranged below the at least one opening, wherein the oil level in the oil reservoir is arranged to be above an oil pump impeller and the oil is fed downwards to the oil pump inlet, an oil pump driving shaft to be connected to the vacuum pump driving shaft, an oil pump impeller connected to the oil pump driving shaft, the oil pump impeller centrifuging oil to a volute such that oil exits the volute under pressure, and a non-rotating shield member surrounding the oil pump driving shaft, the shield member preventing the oil from being rotated by the rotation of the oil pump driving shaft.
F04C 29/02 - LubrificationSéparation du lubrifiant
F04C 18/08 - Pompes à piston rotatif spécialement adaptées pour les fluides compressibles du type à engrènement extérieur, c.-à-d. avec un engagement des organes coopérants semblable à celui d'engrenages dentés
F04C 25/02 - Adaptations de pompes pour utilisation spéciale pour les fluides compressibles pour produire un vide élevé
F04D 1/00 - Pompes à flux radial, p. ex. pompes centrifugesPompes hélicocentrifuges
A scroll pump (10) is disclosed. The scroll pump comprises: two scroll members (20, 30) comprising interleaving scrolls mounted such that rotation of a motor (60) imparts an orbital motion to one scroll member with respect to the other scroll member, each of the two scroll members comprising a base wall from which involute walls (22, 32) forming the interleaving scrolls extend, the involute and base walls from respective scroll members defining a plurality of pumping channels for pumping fluid from a scroll inlet (81) to a scroll outlet (82). For each of the two scroll members, the base wall of the scroll member comprises a channel seal (24, 34) between adjacent wraps of the involute walls, such that an end surface of the involute wall of the other scroll member contacts and seals with the channel seal mounted on the base wall of the scroll member. The involute walls (22, 32) of the two scroll members (20, 30) have a portion with a first height towards the scroll inlet (81) and a portion with a second shorter height towards the scroll outlet (82).
F04C 18/02 - Pompes à piston rotatif spécialement adaptées pour les fluides compressibles du type à engrènement, c.-à-d. avec un mouvement de translation circulaire des organes coopérants, chaque organe possédant le même nombre de dents ou de parties équivalentes de prise
F04C 27/00 - Systèmes d'étanchéité dans les pompes à piston rotatif spécialement adaptées pour les fluides compressibles
F04C 29/00 - Parties constitutives, détails ou accessoires de pompes ou d'installations de pompage spécialement adaptées pour les fluides compressibles non couverts dans les groupes
9.
A VACUUM PUMP SYSTEM, A VACUUM SYSTEM, AND A METHOD FOR GENERATING A VACUUM
The invention relates to a vacuum pump system (10), comprising a plurality of pump stages (12) arranged in parallel, wherein an inlet (14) of each pump stage (12) of the plurality of pump stages (12) is connectable to a recipient (102); and an exhaust pump (30), wherein an outlet (26) of each pump stage (12) of the plurality of pump stages (12) is connected via a manifold (28) to an inlet (32) of the exhaust pump (30). Furthermore, the invention relates to a vacuum system and a method for generating a vacuum.
F04C 18/12 - Pompes à piston rotatif spécialement adaptées pour les fluides compressibles du type à engrènement extérieur, c.-à-d. avec un engagement des organes coopérants semblable à celui d'engrenages dentés d'un autre type qu'à axe interne
F04C 19/00 - Pompes à piston rotatif avec anneau fluide ou dispositif analogue spécialement adaptés pour les fluides compressibles
F04C 23/00 - Combinaisons de plusieurs pompes, chacune étant du type à piston rotatif ou oscillant spécialement adaptées pour les fluides compressiblesInstallations de pompage spécialement adaptées pour les fluides compressiblesPompes multiétagées spécialement adaptées pour les fluides compressibles
F04C 25/02 - Adaptations de pompes pour utilisation spéciale pour les fluides compressibles pour produire un vide élevé
F04C 28/02 - Commande, surveillance ou dispositions de sécurité pour les pompes ou les installations de pompage spécialement adaptées pour les fluides compressibles spécialement adaptées pour plusieurs pompes connectées en série ou en parallèle
F04D 19/04 - Pompes multiétagées spécialement adaptées pour réaliser un vide poussé, p. ex. pompes moléculaires
The present invention provides an inlet head assembly for capping a combustion chamber of an abatement apparatus. The inlet head assembly comprises a head plate; a plurality of inlet nozzles extending through the head plate, each inlet nozzle being configured to convey an effluent gas stream into the combustion chamber; an ignition nozzle extending through the head plate; wherein the inlet head assembly further comprises a burner element arranged within the head plate between the inlet nozzles and configured to convey a fuel gas composition into the combustion chamber, and wherein the ignition nozzle is configured to ignite the fuel gas composition exiting the burner element to provide a standing flame, and said standing flame is configured to initiate combustion of the effluent gas stream exiting the inlet nozzles. The present invention also comprises an abatement apparatus, and a method for abating an effluent gas stream.
F23G 7/06 - Procédés ou appareils, p. ex. incinérateurs, spécialement adaptés à la combustion de déchets particuliers ou de combustibles pauvres, p. ex. des produits chimiques de gaz d'évacuation ou de gaz nocifs, p. ex. de gaz d'échappement
To provide a vacuum pump that reduces the number of pins used for data transmission and has high extendability, the vacuum pump includes a pump main body (100) that sucks and exhausts gas; a plurality of physical sensors (21 to 23) provided in the pump main body; and a connector (10) used for connection with an external device (200). The vacuum pump further includes: a detection circuit (56) that detects detection data from an analog signal output from each of the plurality of physical sensors (21 to 23); a signal conversion circuit (54) that converts the detection data into digital detection data as a digital signal; and a serial communication bus (33) that performs data communication with the external device (200) via the connector (10). The serial communication bus (33) outputs a serial signal including the digital detection data.
A scroll pump inlet valve and scroll pump are disclosed. The scroll pump inlet valve comprises: a valve seat formed by at least one of a stator and an inlet cover of the scroll pump; and a sealing mechanism, mounted to the stator or the inlet cover. The sealing mechanism comprises an actuator configured to move the sealing mechanism between an open position in which a scroll mechanism and an inlet port of the scroll pump are fluidly connected and a closed position in which the sealing mechanism engages the valve seat to seal the scroll mechanism from the inlet port.
F04C 29/12 - Dispositions pour l'admission ou l'échappement du fluide de travail, p. ex. caractéristiques de structure de l'admission ou de l'échappement
F04C 18/02 - Pompes à piston rotatif spécialement adaptées pour les fluides compressibles du type à engrènement, c.-à-d. avec un mouvement de translation circulaire des organes coopérants, chaque organe possédant le même nombre de dents ou de parties équivalentes de prise
F04C 25/02 - Adaptations de pompes pour utilisation spéciale pour les fluides compressibles pour produire un vide élevé
F04C 28/06 - Commande, surveillance ou dispositions de sécurité pour les pompes ou les installations de pompage spécialement adaptées pour les fluides compressibles spécialement adaptées pour arrêter, pour démarrer, pour le ralenti ou pour un fonctionnement à charge nulle
A support structure for a rotor shaft of a turbomolecular pump, comprising a central section for coupling to the rotor shaft of the turbomolecular pump, the central section having a centre point through which a rotation axis of the rotor shaft passes when the rotor shaft is coupled to the central section, and a leg extending from the central section, wherein the leg is for coupling the central section to a housing of the turbomolecular pump, wherein the leg extends tangentially relative to the central section.
[Problem] To provide a turbo molecular pump that can improve exhaust performance. [Solving Means] A turbo molecular pump includes: a rotor shaft (113); and 5 a rotor blade (102) that is fixed to the rotor shaft (113), is rotatable integrally, and includes a plurality of stages of blade rows. The turbo molecular pump sucks in and exhausts exhaust gas through rotation of the rotor blade (102). Among the plurality of stages of blade rows, blade rows (102a and 102b) at first and second stages from the top are made of 10 a magnesium alloy, which is a first material, while remaining blade rows (102c, 102d, ・・・) at third and subsequent stages are made of an aluminum alloy, which is a second material. Specific strength of the first material is higher than that of the second material.
A method (500) of sealing a vacuum pump, comprising: providing (510) a stator having a first end face and a second end face, the stator comprising first and second stator components for attaching together to define at least one pumping chamber; providing (520) first and second end plates for attaching respectively to the first and second end faces of the stator; arranging (530) at least one rotor arranged at least partially within the at least one pumping chamber of the stator; arranging (540) a one-piece sealing gasket between the first stator component and the second stator component, between the first end plate and the first end face, and between the second end plate and the second end face; arranging (550) at least one spacer to provide a gap between the first end plate and the first end face and/or between the second end plate and the second end face, wherein the gap extends at least partially across the first end face and/or the second end face; and fastening (560) the first stator component to the second stator component, the first end plate to the first end face, and the second end plate to the second end face. Also relates to a vacuum pump.
F16J 15/10 - Joints d'étanchéité entre surfaces immobiles entre elles avec garniture solide comprimée entre les surfaces à joindre par garniture non métallique
F04C 18/12 - Pompes à piston rotatif spécialement adaptées pour les fluides compressibles du type à engrènement extérieur, c.-à-d. avec un engagement des organes coopérants semblable à celui d'engrenages dentés d'un autre type qu'à axe interne
F04C 23/00 - Combinaisons de plusieurs pompes, chacune étant du type à piston rotatif ou oscillant spécialement adaptées pour les fluides compressiblesInstallations de pompage spécialement adaptées pour les fluides compressiblesPompes multiétagées spécialement adaptées pour les fluides compressibles
The present invention provides a burner for treating an effluent gas stream from a process tool. The burner comprises a burner liner comprising a porous sleeve at least partially defining a treatment chamber. The porous sleeve is configured to allow a first gaseous composition to flow through towards the treatment chamber. The burner further comprises an array of inlets arranged about the porous sleeve and configured to convey a second gaseous composition through the porous sleeve towards the treatment chamber. The porous sleeve comprises a plurality of interconnected substantially concentric layers, each layer comprising an openwork mesh. A plurality of layers immediately adjacent to at least one inlet of the array are arranged to define a substantially unobstructed flow path for the second gaseous composition to flow through towards the treatment chamber. The substantially unobstructed flow path is aligned with the main direction of flow of second gaseous composition exiting the inlet. At least one layer between the substantially unobstructed flow path and the treatment chamber is arranged to provide a baffle at least partially obstructing the flow path of the second gaseous composition. The present invention also provides an abatement apparatus, and a method for treating an effluent gas stream.
F23C 99/00 - Matière non prévue dans les autres groupes de la présente sous-classe
F23D 14/14 - Brûleurs à rayonnement utilisant des écrans ou des plaques perforées
F23D 14/16 - Brûleurs à rayonnement utilisant des blocs perméables
F23D 14/70 - Chicanes ou dispositifs analogues pour créer des turbulences
F23G 7/06 - Procédés ou appareils, p. ex. incinérateurs, spécialement adaptés à la combustion de déchets particuliers ou de combustibles pauvres, p. ex. des produits chimiques de gaz d'évacuation ou de gaz nocifs, p. ex. de gaz d'échappement
17.
FOREIGN MATTER ACCUMULATION SENSOR AND VACUUM PUMP
A foreign matter accumulation sensor includes: a stator disc 219 and an electrode 252 that are capable of constituting a gas flow path 227 inside a turbo molecular pump in a non-rotating state; a rotating disc 229 that is opposed to the stator disc 219 and the electrode 252 and is capable of constituting the gas flow path 227 in a rotating state; a first conducting wire 254 connected to the electrode 252; and a second conducting wire 256 connected to the stator disc 219, wherein estimation of an amount of foreign matter accumulation is made possible on a basis of a change in electrostatic capacitance between the stator disc 219, the rotating disc 229, and the electrode 252.
G01N 27/22 - Recherche ou analyse des matériaux par l'emploi de moyens électriques, électrochimiques ou magnétiques en recherchant l'impédance en recherchant la capacité
F04D 19/04 - Pompes multiétagées spécialement adaptées pour réaliser un vide poussé, p. ex. pompes moléculaires
F04D 27/00 - Commande, p. ex. régulation, des pompes, des installations ou des systèmes de pompage spécialement adaptés aux fluides compressibles
The present invention provides a wet scrubber for gas abatement, comprising a scrubbing vessel defining a chamber, a gas inlet for supplying a gas to be scrubbed, and a gas outlet for allowing the egress of a scrubbed gas; the inlet and outlet being in fluid communication with one another; one or more scrubbing fluid supply ports; the wet scrubber comprising at least one distribution element connected to a scrubbing fluid supply port for distributing a scrubbing fluid inside the chamber; wherein at least one said distribution element is a distribution plate comprising a cavity and a plurality of apertures arranged to allow scrubbing fluid to flow from the cavity
Non-evaporable getter (NEG) element and NEG pump comprising a substrate, wherein the substrate is an electrical insulator, and an NEG material layer on the substrate, wherein the NEG material layer is applied to the substrate by thermal spray coating.
A controller (14) for a mechanical vacuum pump, a vacuum pump (10) and a method are disclosed. The vacuum pump controller (14) comprises: control circuitry configured, in response to receipt of an instruction to shutdown the vacuum pump (10), to activate a shutdown mode, whereby the shutdown mode comprises: monitoring an operational property associated with the vacuum pump while continuing to drive a pumping mechanism (33) of the vacuum pump (10), the operational property being indicative of an amount of vapour within the pump; and in response to the monitoring indicating residual vapour within the pump being reduced to below a predetermined amount, shutting down the vacuum pump.
F04C 25/02 - Adaptations de pompes pour utilisation spéciale pour les fluides compressibles pour produire un vide élevé
F04C 28/06 - Commande, surveillance ou dispositions de sécurité pour les pompes ou les installations de pompage spécialement adaptées pour les fluides compressibles spécialement adaptées pour arrêter, pour démarrer, pour le ralenti ou pour un fonctionnement à charge nulle
F04B 37/14 - Pompes spécialement adaptées aux fluides compressibles et ayant des caractéristiques pertinentes non prévues dans les groupes ou présentant un intérêt autre que celui visé par ces groupes pour utilisation particulière pour obtenir un vide élevé
F04D 19/04 - Pompes multiétagées spécialement adaptées pour réaliser un vide poussé, p. ex. pompes moléculaires
F04C 18/12 - Pompes à piston rotatif spécialement adaptées pour les fluides compressibles du type à engrènement extérieur, c.-à-d. avec un engagement des organes coopérants semblable à celui d'engrenages dentés d'un autre type qu'à axe interne
A vacuum exhaust system is provided which can reduce consumption of a ClF gas for use in cleaning, and can shorten a cleaning time. An exhaust pipe from a dry pump to an abatement device is provided with a heater, thereby to be heated, so that the temperature of the exhaust pipe is set at a temperature exceeding 180° C. For the exhaust pipe, the pipe and a gasket of a sealing member are also made of a metal. Then, a ClF3 gas for cleaning is introduced. The ClF3 gas is activated at a temperature exceeding 180° C., and cleaning efficiency is remarkably enhanced. On the other hand, the gasket made of a metal is used. For this reason, even when the ClF3 gas is activated, a problem in sealing performance is less likely to be caused. For this reason, it is not necessary to wait until the temperature of the exhaust pipe becomes 180° C. or less, which enables shortening of the cleaning time.
C23C 16/44 - Revêtement chimique par décomposition de composés gazeux, ne laissant pas de produits de réaction du matériau de la surface dans le revêtement, c.-à-d. procédés de dépôt chimique en phase vapeur [CVD] caractérisé par le procédé de revêtement
B08B 9/032 - Nettoyage des surfaces intérieuresÉlimination des bouchons par l'action mécanique d'un fluide en mouvement, p. ex. par effet de chasse d'eau
22.
VACUUM PUMP, VACUUM PUMP COMPONENT, AND METHOD FOR MANUFACTURING SAME
Provided are a vacuum pump, a vacuum pump component, and a method for manufacturing the same, enabling effectively to heat a portion, formed of a material having low heating efficiency, in electromagnetic induction heating by electromagnetic induction heating. A vacuum pump 300 includes a casing 310, a rotor shaft 113 disposed in the casing 310, a rotor blade 102 rotatable together with the rotor shaft 113, and a heating means 340 for performing heating by electromagnetic induction by causing an alternating current to flow through a coil 342, wherein the vacuum pump 300 exhausts a gas by rotation of the rotor blade 102, and a heated portion 350 heated by the heating means 340 includes a metal plating layer 351 having magnetism.
NEG element and NEG cartridge, in particular for an NEG pump, comprising a lattice structure, wherein the lattice structure is made from an NEG material.
F04B 37/02 - Pompes spécialement adaptées aux fluides compressibles et ayant des caractéristiques pertinentes non prévues dans les groupes ou présentant un intérêt autre que celui visé par ces groupes pour l'évacuation, par absorption ou adsorption
H01J 7/18 - Moyens d'absorption ou d'adsorption du gaz, p. ex. par getter
Aspects of the present invention relate to a vacuum pressure gauge for measuring a vacuum pressure in a vacuum system component. The vacuum pressure gauge has a base for mounting the vacuum pressure gauge to the vacuum system component. A vacuum pressure sensor is fastened to the base. A control unit is provided to control the vacuum pressure sensor. A power supply unit is provided for supplying power to the vacuum pressure sensor. The power supply unit and the vacuum pressure sensor have complementary electrical connectors for connecting the power supply unit to the vacuum pressure sensor. The power supply unit is removably mounted to the vacuum pressure sensor.
G01L 19/00 - Détails ou accessoires des appareils pour la mesure de la pression permanente ou quasi permanente d'un milieu fluent dans la mesure où ces détails ou accessoires ne sont pas particuliers à des types particuliers de manomètres
A lubricant cartridge for use in a vacuum pump containing reservoir; at least one lubricant receiving and/or retaining medium located within the lubricant reservoir; wherein said at least one lubricant receiving and/or retaining medium contains an embedded electrode arrangement; and wherein said electrode arrangement is connectable to a controller for detecting changes in an electrical parameter of lubricant within the lubricant reservoir.
F04C 29/02 - LubrificationSéparation du lubrifiant
F04D 19/04 - Pompes multiétagées spécialement adaptées pour réaliser un vide poussé, p. ex. pompes moléculaires
F16N 29/00 - Dispositifs particuliers dans les installations ou les systèmes de lubrification indiquant ou détectant des conditions indésirablesUtilisation des dispositifs sensibles à ces conditions dans les installations ou les systèmes de lubrification
F04B 37/14 - Pompes spécialement adaptées aux fluides compressibles et ayant des caractéristiques pertinentes non prévues dans les groupes ou présentant un intérêt autre que celui visé par ces groupes pour utilisation particulière pour obtenir un vide élevé
26.
FOREIGN MATTER DEPOSITION AMOUNT ESTIMATION DEVICE AND VACUUM PUMP
] Provided is a foreign matter deposition amount estimation device capable of estimating a deposition amount of foreign matter. A foreign matter deposition amount estimation device 210 used in a turbo molecular pump 100 including an inlet port and an outlet port includes: an exhaust member 212 connectable to the outlet port 133; a conductor member 214 which is disposed at an inner side of the exhaust member 212, at least a part of the conductor being provided with a gap t with respect to an inner peripheral surface 213 of the exhaust member 212, and to which a voltage for detecting electrostatic capacitance is applied between the conductor member and the exhaust member 212; a measurement device 216 that measures electrostatic capacitance between the exhaust member 212 and the conductor member 214; and an arithmetic device 218 that estimates from a change in electrostatic capacitance a deposition amount of foreign matter inside the turbo molecular pump 100.
F04D 19/04 - Pompes multiétagées spécialement adaptées pour réaliser un vide poussé, p. ex. pompes moléculaires
F04B 37/14 - Pompes spécialement adaptées aux fluides compressibles et ayant des caractéristiques pertinentes non prévues dans les groupes ou présentant un intérêt autre que celui visé par ces groupes pour utilisation particulière pour obtenir un vide élevé
F04C 25/02 - Adaptations de pompes pour utilisation spéciale pour les fluides compressibles pour produire un vide élevé
F04D 27/00 - Commande, p. ex. régulation, des pompes, des installations ou des systèmes de pompage spécialement adaptés aux fluides compressibles
G01N 27/22 - Recherche ou analyse des matériaux par l'emploi de moyens électriques, électrochimiques ou magnétiques en recherchant l'impédance en recherchant la capacité
27.
FOREIGN MATTER DEPOSITION AMOUNT ESTIMATION DEVICE AND PIPING COMPONENT
Provided is a foreign matter deposition amount estimation device capable of estimating a deposition amount of foreign matter. Provided are a conductive casing 212 having an inlet 225A and an outlet 225B, a conductor member 214 disposed at an inner side of the casing 212 with a gap t from the casing 212, a measurement device 216 that measures electrostatic capacitance between the casing 212 and the conductor member 214, and an arithmetic device 218 that estimates, from a change in electrostatic capacitance, a foreign matter deposition amount in the casing 212. The conductor member 214 includes a communication port 236.
G01N 27/22 - Recherche ou analyse des matériaux par l'emploi de moyens électriques, électrochimiques ou magnétiques en recherchant l'impédance en recherchant la capacité
G01F 23/26 - Indication ou mesure du niveau des liquides ou des matériaux solides fluents, p. ex. indication en fonction du volume ou indication au moyen d'un signal d'alarme en mesurant des variables physiques autres que les dimensions linéaires, la pression ou le poids, selon le niveau à mesurer, p. ex. par la différence de transfert de chaleur de vapeur ou d'eau en mesurant les variations de capacité ou l'inductance de condensateurs ou de bobines produites par la présence d'un liquide ou d'un matériau solide fluent dans des champs électriques ou électromagnétiques
G01B 7/06 - Dispositions pour la mesure caractérisées par l'utilisation de techniques électriques ou magnétiques pour mesurer la longueur, la largeur ou l'épaisseur pour mesurer l'épaisseur
28.
DYNAMIC DISPLAY OF INFORMATION FOR A VACUUM OR ABATEMENT SYSTEM
A dynamic display is disclosed that is configured to be linked to an apparatus, such as a vacuum pump, vacuum pressure gauge or gas abatement system. The dynamic display comprises: an input configured to receive signals from the apparatus, at least one of the signals being indicative of a current state of the apparatus; processing circuitry configured to generate a representation of information relating to the apparatus. The information includes: data relevant to the apparatus including operational data derived from the received signal. The processing circuitry is configured to periodically update the generated representation and the display comprises an output means configured to display the representation. The output means comprises an electronic paper display f configured to provide the display when powered and when not powered.
F04D 19/04 - Pompes multiétagées spécialement adaptées pour réaliser un vide poussé, p. ex. pompes moléculaires
F04B 37/14 - Pompes spécialement adaptées aux fluides compressibles et ayant des caractéristiques pertinentes non prévues dans les groupes ou présentant un intérêt autre que celui visé par ces groupes pour utilisation particulière pour obtenir un vide élevé
F04B 51/00 - Tests des "machines", pompes ou installations de pompage
F04C 25/02 - Adaptations de pompes pour utilisation spéciale pour les fluides compressibles pour produire un vide élevé
F04D 27/00 - Commande, p. ex. régulation, des pompes, des installations ou des systèmes de pompage spécialement adaptés aux fluides compressibles
G02F 1/167 - Dispositifs ou dispositions pour la commande de l'intensité, de la couleur, de la phase, de la polarisation ou de la direction de la lumière arrivant d'une source lumineuse indépendante, p. ex. commutation, ouverture de porte ou modulationOptique non linéaire pour la commande de l'intensité, de la phase, de la polarisation ou de la couleur basés sur le mouvement de translation des particules dans un fluide sous l’influence de l’application d’un champ caractérisés par l’effet électro-optique ou magnéto-optique par électrophorèse
G09G 3/34 - Dispositions ou circuits de commande présentant un intérêt uniquement pour l'affichage utilisant des moyens de visualisation autres que les tubes à rayons cathodiques pour la présentation d'un ensemble de plusieurs caractères, p. ex. d'une page, en composant l'ensemble par combinaison d'éléments individuels disposés en matrice en commandant la lumière provenant d'une source indépendante
Vacuum pump housing (100), in particular for a multistage 2-shaft vacuum pump, comprising: a housing element (10) having an upper side (11) and an opposite lower side (13), a plurality of pump chambers (20) defined by the housing element separated by respective chamber walls (31) configured to receive rotor elements connected to one of the pump shafts, wherein the chamber walls extend at least partially between the upper side (11) and the lower side (13) of the housing element, wherein at least one chamber wall comprises openings (16, 18) extending from one pump chamber (20) to a directly adjacent pump chamber (20), wherein the openings are separated by an intermediate section (26) of the chamber wall (31), wherein at least one heat spreading element (34) extends from the intermediate section (26) towards the upper side (11) and/or lower side (13).
F04C 18/12 - Pompes à piston rotatif spécialement adaptées pour les fluides compressibles du type à engrènement extérieur, c.-à-d. avec un engagement des organes coopérants semblable à celui d'engrenages dentés d'un autre type qu'à axe interne
F04C 23/00 - Combinaisons de plusieurs pompes, chacune étant du type à piston rotatif ou oscillant spécialement adaptées pour les fluides compressiblesInstallations de pompage spécialement adaptées pour les fluides compressiblesPompes multiétagées spécialement adaptées pour les fluides compressibles
F04C 25/02 - Adaptations de pompes pour utilisation spéciale pour les fluides compressibles pour produire un vide élevé
A mechanical vacuum pump and method of adapting a mechanical vacuum pump are disclosed. The mechanical vacuum pump may be a screw pump (5) and comprises: a pumping mechanism (40) for pumping a gas from an inlet (32) to an outlet (10); a motor (70) for driving the pumping mechanism; a non-return exhaust valve (12); a tank (50) providing a volume in fluid communication with gas within the pumping mechanism; and a controller (60) for controlling operation of the vacuum pump. The controller is configured to: determine that the pump is to enter a standby mode in which the exhaust valve is closed; and boost a speed of the pumping mechanism for a predetermined time prior to the exhaust valve closing to reduce an amount of gas within the pump and the tank.
F04C 25/02 - Adaptations de pompes pour utilisation spéciale pour les fluides compressibles pour produire un vide élevé
F04C 28/08 - Commande, surveillance ou dispositions de sécurité pour les pompes ou les installations de pompage spécialement adaptées pour les fluides compressibles caractérisées par une variation de la vitesse de rotation
F04C 18/12 - Pompes à piston rotatif spécialement adaptées pour les fluides compressibles du type à engrènement extérieur, c.-à-d. avec un engagement des organes coopérants semblable à celui d'engrenages dentés d'un autre type qu'à axe interne
F04C 28/06 - Commande, surveillance ou dispositions de sécurité pour les pompes ou les installations de pompage spécialement adaptées pour les fluides compressibles spécialement adaptées pour arrêter, pour démarrer, pour le ralenti ou pour un fonctionnement à charge nulle
F04C 28/24 - Commande, surveillance ou dispositions de sécurité pour les pompes ou les installations de pompage spécialement adaptées pour les fluides compressibles caractérisées par l'utilisation des soupapes pour commander la pression ou le débit, p. ex. soupapes de décharge
Provided is a structure for mitigating an impact in a radial direction of a flange axis when an impact is applied to a flange. A vacuum pump includes: a casing having an inlet port flange with a bolt hole formed therein; a rotor shaft disposed within the casing; and a rotor blade that is able to rotate together with the rotor shaft; wherein the inlet port flange includes a recessed portion that is formed continuously adjacent to the bolt hole in a radial direction of the rotor shaft and has a depth smaller than a thickness of the inlet port flange to leave a first thin portion, and a through hole formed adjacent to the bolt hole in a direction opposite to a rotational direction of the rotor shaft with a second thin portion interposed therebetween.
A non-contacting scroll pump, the non-contacting scroll pump comprising a housing, an orbiting scroll located within the housing, and a thrust bearing assembly located within the housing for axially supporting the orbiting scroll. The thrust bearing assembly comprises a first plate fixed to the orbiting scroll, a second plate spaced apart from the first plate, a ball bearing located between the first plate and the second plate, the ball bearing being configured to roll against the first and second plates during orbiting of the orbiting scroll. The thrust bearing assembly further comprises a coupling structure extending between the housing and the second plate to couple the housing to the second plate, wherein the coupling structure comprises a thermal break for reducing heat transfer from the second plate to the coupling structure during operation of the non-contacting scroll pump.
F04C 18/02 - Pompes à piston rotatif spécialement adaptées pour les fluides compressibles du type à engrènement, c.-à-d. avec un mouvement de translation circulaire des organes coopérants, chaque organe possédant le même nombre de dents ou de parties équivalentes de prise
F04C 23/00 - Combinaisons de plusieurs pompes, chacune étant du type à piston rotatif ou oscillant spécialement adaptées pour les fluides compressiblesInstallations de pompage spécialement adaptées pour les fluides compressiblesPompes multiétagées spécialement adaptées pour les fluides compressibles
F04C 29/00 - Parties constitutives, détails ou accessoires de pompes ou d'installations de pompage spécialement adaptées pour les fluides compressibles non couverts dans les groupes
A vacuum pump (100) comprising: a first chamber (112); a second chamber (106); a rotatable shaft (110) extending from the first chamber (112) into the second chamber (106); one or more sealing members (208) extending around the shaft (110) and positioned between the first chamber (112) and the second chamber (106); and a dynamic sealing element (206) extending around the shaft (110), the dynamic sealing element (206) having a first side (220) facing towards the first chamber (112) and an opposing second side (222) facing towards the second chamber (106); wherein the dynamic sealing element (206) is configured to, responsive to a positive pressure differential between the first side (220) and the second side (222) being at or above a threshold value, axially deform such that the second side (222) contacts a first surface of the one or more sealing members (208), thereby restricting and/or preventing flow of fluid between the first chamber (112) and the second chamber (106).
F04C 18/12 - Pompes à piston rotatif spécialement adaptées pour les fluides compressibles du type à engrènement extérieur, c.-à-d. avec un engagement des organes coopérants semblable à celui d'engrenages dentés d'un autre type qu'à axe interne
A vacuum pump is disclosed that provides both a drag and regenerative pumping effect. The vacuum pump comprises: one or more pumping channels; a stator and a rotor mounted on a rotatable shaft. The rotor comprises a plurality of blades extending from a surface of the rotor and into the pumping channel, the surface forming a first wall of the pumping channel, a second wall of the pumping channel facing the first wall comprises a surface of the stator. A distance between the first and second walls provides a depth of the pumping channel and is between 3 and 12mm. A surface area of the pumping channel provided by the rotor is between 30 and 70% of a total surface area of the pumping channel.
[Problem] To provide a vacuum evacuation device having excellent characteristics related to cleaning of deposits. [Solution] The vacuum evacuation device comprises: a pressure vessel 100B; a rotor lower-cylinder part 103b rotatably held in the pressure vessel 100B; and a screw stator 131 disposed to face the rotor lower-cylinder part 103b in the pressure vessel 100B with an outer discharge gap part 264 interposed therebetween. A voltage can be applied to the screw stator 131. Projected parts 131b that are continuous at a prescribed angle in the circumferential direction are disposed at at least a part of the surface where the screw stator 131 and the rotor lower-cylinder part 103b face each other, thereby a drag pump part is constituted. The projected parts 131b are each formed into a tapered shape narrowing to the tip side thereof.
An abatement apparatus includes: an abatement chamber configured to receive aneffluent stream and to provide an abated effluent stream; a wet scrubber located downstream of the abatement chamber, the wet scrubber being configured to receive the abated effluent stream and provide a scrubbed effluent stream; and a catalyst bed located downstream of the wet scrubber, the catalyst bed being configured to receive the scrubbed effluent stream and provide a remediated effluent stream. In this way, undesirable compounds present in the abated effluent stream, which are there because they were either already present in the effluent stream and were insufficiently abated by the abatement chamber or because they are abatement by-products generated within the abatement chamber, can be remediated, removed or reduced by the catalyst bed prior to being vented by the abatement apparatus.
There is provided a method (400) of manufacturing a clamshell stator for a vacuum pump comprising providing (410) a first half-shell stator component and a second half-shell stator component, wherein the first half-shell stator component and the second half-shell stator component comprise respective first and second internal walls for defining a plurality of pump chambers having gas transfer passages arranged therebetween; boring (420) a first bore extending through one or more of the first internal walls and defining first portholes; boring (430) a second bore extending through one or more of the second internal walls and defining second portholes; arranging (440) a first sealing means and a second sealing means respectively to seal one or more of the first portholes and second portholes such that a fluid connection is provided between the outlet and inlet of adjacent pump chambers.
F04C 18/08 - Pompes à piston rotatif spécialement adaptées pour les fluides compressibles du type à engrènement extérieur, c.-à-d. avec un engagement des organes coopérants semblable à celui d'engrenages dentés
F04C 18/12 - Pompes à piston rotatif spécialement adaptées pour les fluides compressibles du type à engrènement extérieur, c.-à-d. avec un engagement des organes coopérants semblable à celui d'engrenages dentés d'un autre type qu'à axe interne
F04C 23/00 - Combinaisons de plusieurs pompes, chacune étant du type à piston rotatif ou oscillant spécialement adaptées pour les fluides compressiblesInstallations de pompage spécialement adaptées pour les fluides compressiblesPompes multiétagées spécialement adaptées pour les fluides compressibles
F04C 25/02 - Adaptations de pompes pour utilisation spéciale pour les fluides compressibles pour produire un vide élevé
F04C 27/00 - Systèmes d'étanchéité dans les pompes à piston rotatif spécialement adaptées pour les fluides compressibles
38.
Sealing gasket with one or more positioning protrusions
F04C 27/00 - Systèmes d'étanchéité dans les pompes à piston rotatif spécialement adaptées pour les fluides compressibles
F04C 18/12 - Pompes à piston rotatif spécialement adaptées pour les fluides compressibles du type à engrènement extérieur, c.-à-d. avec un engagement des organes coopérants semblable à celui d'engrenages dentés d'un autre type qu'à axe interne
F04C 25/02 - Adaptations de pompes pour utilisation spéciale pour les fluides compressibles pour produire un vide élevé
F16J 15/06 - Joints d'étanchéité entre surfaces immobiles entre elles avec garniture solide comprimée entre les surfaces à joindre
F16J 15/10 - Joints d'étanchéité entre surfaces immobiles entre elles avec garniture solide comprimée entre les surfaces à joindre par garniture non métallique
A shell stator (12, 14) for a vacuum pump, the shell stator (12, 14) comprising: a seal groove (50, 52) formed in a surface of the shell stator (12, 14), the seal groove (50, 52) being defined by a first side wall (60), a second side wall (62) opposite to the first side wall (60), and a bottom surface (64) disposed between the first side wall (60) and the second side wall (62), the bottom surface (64) being opposite to an opening of the seal groove (50, 52); wherein the seal groove (50, 52) comprises: a protrusion (68) formed in the first side wall (60) and extending towards the second side wall (62); and an indentation (69) formed in the second side wall (62) opposite to the protrusion (68).
[Problem] To provide a vacuum pump comprising a Siegbahn exhaust mechanism wherein the exhaust quantity is stable and the exhaust performance (P-Q characteristic) is improved, even when a large exhaust quantity of gas has been made to flow, as well as to provide a stator disc that is used in a Siegbahn exhaust mechanism. [Solution] In a vacuum pump according to the present embodiment, said vacuum pump including a Siegbahn exhaust mechanism, an inner diameter-side turnaround location is provided before the minimum diameter of a rotor disc 9. In other words, the inner diameter-side turnaround is performed partway along a flow path. Additionally, an annular rib part 250 for maintaining an exhaust gas sealing property and a communication port 260 serving as a passage for the exhaust gas to a lower level are positioned respectively on and in the stator disc 50 in this section. Due to the rib part 250 and the communication port 260 being thus positioned, the use of a section where the exhaust speed decreases in the exhaust flow path is avoided, and as a result, it is more difficult for the flow speed of the exhaust gas to decrease. In other words, a decrease in the gas exhaust speed near the rotational center of the rotor disc 9, which is a problem in Siegbahn exhaust mechanisms, can be prevented.
A sealing gasket (20) for a vacuum pump comprising: a first sealing member (22) defining a closed shape (preferably a rounded square or rounded rectangle) and comprising: a first surface (30); a second surface (32) opposite the first surface (30); a first inner surface (34); and a first outer surface (36) opposite to the first inner surface (34), wherein the first inner surface (34) and the first outer surface (36) are disposed between the first surface (30) and the second surface (32); a second sealing member (24) defining a closed shape (preferably a rounded square) and comprising: a third surface (40); a fourth surface (42) opposite the third surface (40); a second inner surface (44); and a second outer surface (46) opposite to the second inner surface (44), wherein the second inner surface (44) and the second outer surface (46) are disposed between the third surface (40) and the fourth surface (42); a first longitudinal sealing member (26) connected between the first outer surface (36) and the second outer surface (46); and a second longitudinal sealing member (28) connected between the first outer surface (36) and the second outer surface (46).
F16J 15/10 - Joints d'étanchéité entre surfaces immobiles entre elles avec garniture solide comprimée entre les surfaces à joindre par garniture non métallique
F04C 25/02 - Adaptations de pompes pour utilisation spéciale pour les fluides compressibles pour produire un vide élevé
F04C 27/00 - Systèmes d'étanchéité dans les pompes à piston rotatif spécialement adaptées pour les fluides compressibles
A vacuum pump having multiple pumping mechanisms mounted on at least two shafts is disclosed. The vacuum pump comprises a combined electric machine and magnetic gearing mechanism comprising a first magnetic gear member and a second magnetic gear member for rotating the at least two shafts at two different speeds; wherein at least one component of the magnetic gearing mechanism comprises a rotor of the electric machine or a stator of the electric machine.
H02K 7/14 - Association structurelle à des charges mécaniques, p. ex. à des machines-outils portatives ou des ventilateurs
F04C 25/02 - Adaptations de pompes pour utilisation spéciale pour les fluides compressibles pour produire un vide élevé
F04C 29/00 - Parties constitutives, détails ou accessoires de pompes ou d'installations de pompage spécialement adaptées pour les fluides compressibles non couverts dans les groupes
F04D 19/04 - Pompes multiétagées spécialement adaptées pour réaliser un vide poussé, p. ex. pompes moléculaires
F04D 25/06 - Ensembles comprenant des pompes et leurs moyens d'entraînement la pompe étant entraînée par l'électricité
H02K 16/02 - Machines avec un stator et deux rotors
H02K 21/14 - Moteurs synchrones à aimants permanentsGénératrices synchrones à aimants permanents avec des induits fixes et des aimants tournants avec des aimants tournant à l'intérieur des induits
H02K 49/10 - Embrayages dynamo-électriquesFreins dynamo-électriques du type à aimant permanent
A vacuum pump (100) comprising: a housing (104) in which a pumping chamber (131) is formed; a shaft (107) arranged for rotation within the housing (104) about its lengthwise axis, the lengthwise axis extending in an axial direction (110); a rotor (141a) located in the pumping chamber (131), the rotor (141a) being fixedly attached to the shaft (107); and a disc (161a) located in the pumping chamber (131), the disc being fixedly attached to the shaft (107) at a first side of the rotor (141a); wherein a first end of the shaft (107) is substantially immovable relative to the housing (104) in the axial direction (110); a second end of the shaft (107) is movable relative to the housing (104) in the axial direction (110), the second end being opposite to the first end; a wall (181) of the pumping chamber (131) comprises a recess (201) formed therein; and at least a part of the disc (161a) is located in the recess (201).
F01C 21/10 - Organes externes coopérant avec des pistons rotatifsCarcasses d'enveloppes
F04C 18/12 - Pompes à piston rotatif spécialement adaptées pour les fluides compressibles du type à engrènement extérieur, c.-à-d. avec un engagement des organes coopérants semblable à celui d'engrenages dentés d'un autre type qu'à axe interne
F04C 23/00 - Combinaisons de plusieurs pompes, chacune étant du type à piston rotatif ou oscillant spécialement adaptées pour les fluides compressiblesInstallations de pompage spécialement adaptées pour les fluides compressiblesPompes multiétagées spécialement adaptées pour les fluides compressibles
F04C 25/02 - Adaptations de pompes pour utilisation spéciale pour les fluides compressibles pour produire un vide élevé
F04C 27/00 - Systèmes d'étanchéité dans les pompes à piston rotatif spécialement adaptées pour les fluides compressibles
A pressure sensor is disclosed that uses an ion-trap device; a coherence detector configured to detect a coherence decay of qubits within the ion-trap device; and circuitry to determine a pressure from the detected decay of coherence. (Figure 1)
G01L 11/02 - Mesure de la pression permanente, ou quasi permanente d'un fluide ou d'un matériau solide fluent par des moyens non prévus dans les groupes ou par des moyens optiques
G01L 21/30 - Indicateurs de vide en faisant usage des effets d'ionisation
G06N 10/40 - Réalisations ou architectures physiques de processeurs ou de composants quantiques pour la manipulation de qubits, p. ex. couplage ou commande de qubit
A vacuum pump and a vacuum exhaust system are provided that can improve the cleaning efficiency of a radical generator, effectively clear reaction products accumulating in the vacuum pump with fewer radical generators, and also reduce operating costs. A radical supply port 134A is disposed adjacent to an exhaust side outlet of an exhaust mechanism 132 and provided to extend through a housing 110A, and a radical supply means 135 supplies radicals 136 into the housing 110A through the radical supply port 134A and causes the supplied radicals 136 to flow to an area in which reaction products accumulate in the exhaust mechanism 132.
A vacuum pumping system and method for evacuating at least one vacuum chamber in a semiconductor processing tool are disclosed. The vacuum pumping system comprises: a plurality of vacuum pumps for evacuating the at least one vacuum chamber; and a water vapour inlet configured to receive a flow of water and to admit a flow of water vapour into the vacuum pumping system upstream of at least one of the vacuum pumps, to purge a flow of process gas evacuated from the semiconductor processing tool.
F04C 23/00 - Combinaisons de plusieurs pompes, chacune étant du type à piston rotatif ou oscillant spécialement adaptées pour les fluides compressiblesInstallations de pompage spécialement adaptées pour les fluides compressiblesPompes multiétagées spécialement adaptées pour les fluides compressibles
F04C 25/02 - Adaptations de pompes pour utilisation spéciale pour les fluides compressibles pour produire un vide élevé
F04C 29/00 - Parties constitutives, détails ou accessoires de pompes ou d'installations de pompage spécialement adaptées pour les fluides compressibles non couverts dans les groupes
A pressure sensor and method for sensing pressures in the sub-atmospheric pressure region are discussed. The pressure sensor comprises :a substrate having a surface in contact with a gas whose pressure is to be measured. A driving means for generating a surface acoustic wave in the surface of the substrate. A detecting means for detecting a change in at least one property of the surface acoustic wave caused by a damping effect due to momentum transfer or drag force from gas molecules interacting with the sensing surface, the detecting means being configured to determine a pressure of the gas from the detected at least one property change.
G01L 9/00 - Mesure de la pression permanente, ou quasi permanente d’un fluide ou d’un matériau solide fluent par des éléments électriques ou magnétiques sensibles à la pressionTransmission ou indication par des moyens électriques ou magnétiques du déplacement des éléments mécaniques sensibles à la pression, utilisés pour mesurer la pression permanente ou quasi permanente d’un fluide ou d’un matériau solide fluent
A flux estimator for estimating an air-gap flux in an electric motor includes a resistance compensation stage having a first multiplying digital-to-analogue converter, and an inductance compensation stage having a second multiplying digital-to-analogue converter. The flux estimator determines a first gain (Ku) for compensating for a stator resistance (Ra); and a second gain (KLa) for compensating a stator inductance (La). The first gain (Ku) is supplied to the first multiplying digital-to-analogue converter to generate a first output signal (VIAR) providing a scaled representation of the voltage drop across the stator resistance (Ra) per phase. The second gain (KLa) is supplied to the second multiplying digital-to-analogue converter to generate a second output signal (IA_LA) providing a scaled representation of the stator inductance (La) per phase. An air-gap flux estimation signal (PSI_MON) is generated in dependence on the first output (VIAR) and the second output (IA_LA).
There is provided a sealing gasket (100) for a vacuum pump, comprising a first annular sealing member (110), a second annular sealing member (120), a first longitudinal sealing member (130) and a second longitudinal sealing member (140). The first and second longitudinal sealing members (130, 140) are each connected between the first annular sealing member (110) and the second annular sealing member. (120) The first annular sealing member (110), second annular sealing member (120), first longitudinal sealing member (130) and second longitudinal sealing member (140) comprise metal.
F16J 15/06 - Joints d'étanchéité entre surfaces immobiles entre elles avec garniture solide comprimée entre les surfaces à joindre
F16J 15/10 - Joints d'étanchéité entre surfaces immobiles entre elles avec garniture solide comprimée entre les surfaces à joindre par garniture non métallique
F01C 19/00 - Dispositions relatives à l'étanchéité dans les "machines" ou machines motrices à piston rotatif
F04C 25/02 - Adaptations de pompes pour utilisation spéciale pour les fluides compressibles pour produire un vide élevé
50.
VACUUM EXHAUST SYSTEM, VACUUM PUMP CLEANING METHOD, AND CLEANING UNIT
[Problem] To provide a vacuum exhaust system, a vacuum pump cleaning method, and a cleaning unit that are capable of returning a vacuum pump to a state where, even if the vacuum pump is stopped in a state where a deposit constituting a byproduct is fixed to a rotor or the like, the vacuum pump can be easily restarted. [Solution] The present invention comprises: a vacuum pump 15 for discharging a process gas containing a condensable gas or oxidized dust; a cleaning solution storage tank 36 for storing a cleaning solution for removing a process gas deposit that has accumulated in a gas flow passage of the vacuum pump 15; a cleaning solution introduction pump 37 for introducing the cleaning solution in the cleaning solution storage tank 36 into the gas flow passage from an exhaust side of the gas flow passage; and a vacuum pump 39 for drawing in and discharging the cleaning solution in the gas flow passage from the exhaust side of the gas flow passage.
F04B 37/16 - Moyens pour éliminer les espaces morts
B08B 3/08 - Nettoyage impliquant le contact avec un liquide le liquide ayant un effet chimique ou dissolvant
F04C 25/02 - Adaptations de pompes pour utilisation spéciale pour les fluides compressibles pour produire un vide élevé
H01L 21/31 - Traitement des corps semi-conducteurs en utilisant des procédés ou des appareils non couverts par les groupes pour former des couches isolantes en surface, p. ex. pour masquer ou en utilisant des techniques photolithographiquesPost-traitement de ces couchesEmploi de matériaux spécifiés pour ces couches
H01L 21/205 - Dépôt de matériaux semi-conducteurs sur un substrat, p. ex. croissance épitaxiale en utilisant la réduction ou la décomposition d'un composé gazeux donnant un condensat solide, c.-à-d. un dépôt chimique
H01L 21/3065 - Gravure par plasmaGravure au moyen d'ions réactifs
A separator for separating contaminants suspended within an effluent stream includes an inlet conduit configured to receive from an effluent stream containing contaminants flowing in a first major direction from a lower portion of said separator towards an upper portion of said separator; a spray nozzle configured to spray an entraining fluid within the inlet conduit in the first major direction to entrain the contaminants within the effluent stream; a first flow redirection structure located downstream of the inlet conduit; and a first separation conduit located downstream of the first flow redirection structure, wherein the first flow redirection structure is configured to redirect flow of the effluent stream and the entraining fluid from an axial flow from the inlet conduit to a circumferential flow in a second major direction opposing the first major direction within the first separation conduit.
B01D 50/40 - Combinaisons de dispositifs couverts par les groupes et
B01D 45/16 - Séparation de particules dispersées dans des gaz ou des vapeurs par gravité, inertie ou force centrifuge en utilisant la force centrifuge produite par le mouvement hélicoïdal du courant gazeux
A vacuum pumping or abatement system (400) for respectively evacuating or abating process gas from a process chamber, the system comprising: a frame (402) having a first end, a second end opposite to the first end, and a plurality of frame members (448) disposed therebetween, the frame (402) defining an interior space (401); a vacuum pumping or abatement apparatus positioned within the interior space and comprising a plurality of inlets (418); and a valve module (404) comprising a plurality of valves (426), each valve of the plurality of valves (426) configured to control a flow of a respective portion of the process gas to a corresponding inlet of the plurality of inlets (418); wherein each valve (426) of the valve module (404) is positioned in a common plane (450) substantially parallel to a boundary of the interior space defined by the first end; and the valve module (404) is positioned within the interior space (401) such that the valve module (404) is at or proximate to the boundary.
F04B 37/14 - Pompes spécialement adaptées aux fluides compressibles et ayant des caractéristiques pertinentes non prévues dans les groupes ou présentant un intérêt autre que celui visé par ces groupes pour utilisation particulière pour obtenir un vide élevé
F04B 39/10 - Adaptation ou aménagement des organes de distribution
H01L 21/67 - Appareils spécialement adaptés pour la manipulation des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide pendant leur fabrication ou leur traitementAppareils spécialement adaptés pour la manipulation des plaquettes pendant la fabrication ou le traitement des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide ou de leurs composants
Provided is a vacuum exhaust system (10) that can send exhaust gas and diluent gas to a predetermined location while maintaining a constant temperature without lowering a temperature of the exhaust gas and the diluent gas as much as possible. The vacuum exhaust system (10) includes: a gas exhaust pipe (14) that is connected to a subsequent stage of a vacuum pump (12) and has a vacuum heat insulating pipe structure with a vacuum layer (21) between an inner pipe (19), through which used gas (G1) discharged from the vacuum pump (12) passes, and an outer pipe (20) surrounding the inner pipe (19); and a diluent gas introduction pipe (24) that introduces diluent gas (G2) for heating the used gas (G1) into the inner pipe (19) so that the used gas (G1) is maintained in a gaseous state in the gas exhaust pipe (14).
F04B 37/14 - Pompes spécialement adaptées aux fluides compressibles et ayant des caractéristiques pertinentes non prévues dans les groupes ou présentant un intérêt autre que celui visé par ces groupes pour utilisation particulière pour obtenir un vide élevé
F04B 39/06 - RefroidissementChauffagePrévention du gel
F04B 39/12 - Carcasses d'enveloppeCylindresCulassesConnexions des tubulures pour fluide
F04B 41/02 - Installations ou systèmes de pompage spécialement adaptés aux fluides compressibles comportant des réservoirs
H01L 21/02 - Fabrication ou traitement des dispositifs à semi-conducteurs ou de leurs parties constitutives
H01L 21/67 - Appareils spécialement adaptés pour la manipulation des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide pendant leur fabrication ou leur traitementAppareils spécialement adaptés pour la manipulation des plaquettes pendant la fabrication ou le traitement des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide ou de leurs composants
[Problem] Provided is a vacuum pump system and an interface circuit in which one interface circuit can monitor and control a plurality of vacuum pumps when the plurality of vacuum pumps are monitored and controlled from a customer supervisory control tool via the interface circuit [Solving Means] Turbomolecular pumps 100 and control devices 300 are provided in pairs. An interface circuit 23 and AC/DC power supply circuits 15A, 15B, and 15C are not included in the control devices 300 but are configured in a separate integration unit 400. Conventional interface circuits 13A, 13B, and 13C are provided for respective turbomolecular pumps 100 in order to monitor and control respective control devices 200A, 200B, and 200C. In contrast, the interface circuit 23 integrally monitor and control the control devices 300A, 300B, and 300C. Thus, one interface circuit 23 is configured for three turbomolecular pumps 100.
[Problem] To provide a vacuum evacuation device that is low-cost and excellent in cleaning effect. [Solution] This vacuum evacuation device includes a plasma generation device 210. The plasma generation device 210 is configured to, for example, include: a plasma generation chamber 230 formed in a cathode electrode part 216; a fuel gas supply port part 214 arranged in an annular flow passage; a second insulation part 220 arranged in the plasma generation chamber 230; a connector 222 arranged in the plasma generation chamber 230; and a first insulation part 218 for electrically insulating the plasma generation chamber 230. Radicals can be supplied from the second insulation part 220 to an inside of a case composed of an outer cylinder and the like.
The present disclosure relates to a rotor blade for a turbomolecular vacuum pump. The rotor blade has a blade angle of 0° at the root, which increases continuously along substantially the entire span of the rotor blade. The rotor blade tapers from a maximum thickness at the root to a point of minimum thickness over a portion of its span, and is made of a polymer material reinforced with short fibres. This provides a rotor blade with a more complex geometry that has reduced weight and improved performance and cost-effectiveness. The present disclosure also relates to a rotor comprising the rotor blade, a mould for injection moulding the rotor blade or rotor, and a method of injection moulding the rotor blade or rotor.
A vacuum pump having more excellent mechanical characteristics is provided. Provided is a turbomolecular pump having' a rotor blade 114 which is disposed, on a rotor shaft and rotates with the rotor shaft, and exhausting process gas by rotation of the rotor shaft and by an exhaust element ( rotor turbine blade, rotating-body main body 103a or the like ) provided on the rotor blade, wherein the rotor blade 114 is made of a first metal material and a second metal material, and at least some of parts to be constituted are made by a 3D printer and a. reinforcing material 118, which is the second metal material having strength higher than that of the f irst metal material constituting a main shape of the rotor blade 114 is disposed in an integral disposition structure.
A vacuum pump which can suppress precipitation of by-products in a pump is provided. A vacuum pump (300) is provided, which includes a casing (310), a. rotor shaft (113) disposed, in the casing (310), and a rotor blade (102) rotatable together with the rotor shaft (113), with gas being exhausted by rotation of the rotor blade (102) the vacuum pump (300) further including heating means (340) for heating a gas flow passage in the vacuum pump (300), wherein the heating means (340) has a coil (342), a heated, portion (343), which is a magnetic body heated, by electromagnetic induction by causing an. AC current to flow through the coil (342), and a high-permeability magnetic body (341) covering an opposite side to a front surface (344) side, on which the heated portion (343) is disposed, of the coil (342).
The present invention provides a burner element for treating an effluent gas stream from a manufacturing process tool. The burner element comprises a porous sleeve at least partially defining a treatment chamber, said porous sleeve being configured to allow a first gaseous composition to pass through towards said treatment chamber, an array of inlets arranged about the porous sleeve such that each inlet is embedded in said porous sleeve, and wherein each inlet is configured to inject a second gaseous composition towards the treatment chamber. The present invention also provides an abatement apparatus, and a method for treating an effluent gas stream from a manufacturing process tool.
F23D 14/16 - Brûleurs à rayonnement utilisant des blocs perméables
F23G 7/06 - Procédés ou appareils, p. ex. incinérateurs, spécialement adaptés à la combustion de déchets particuliers ou de combustibles pauvres, p. ex. des produits chimiques de gaz d'évacuation ou de gaz nocifs, p. ex. de gaz d'échappement
60.
MAGNETIC BEARING DEVICE, TURBOMOLECULAR PUMP, AND CONTROL METHOD FOR
A magnetic bearing device including a rotating body, a magnetic bearing portion which levitates the rotating body in air and supports the rotating body by a magnetic force, and a control portion which controls drive of the magnetic bearing portion, in which the control portion includes a tuning portion which tunes the magnetic bearing portion, a power-source detecting portion which detects a state of a power source of the magnetic bearing device, and a stationary-levitated detecting portion which detects whether the rotating body is in a stationary-levitated state or not, and the tuning portion is configured to perform tuning of the magnetic bearing portion at least in either one of (A) a case where the power-source detecting portion detects that a power source of the magnetic bearing device has been switched from OFF to ON, and (B) a case where the stationary-levitated detecting portion detects that the rotating body is in the stationary-levitated state.
The present invention provides a dry absorber canister for an exhaust gas abatement system. The canister comprises a hollow chamber configured to retain particulate absorption media. The chamber having a cross-sectional area defined by a longitudinally extending wall, and the chamber having a gas inlet at a first end and a gas outlet at a second end. The cross-sectional area of the chamber varies between the first end and the second end. The cross-sectional area of the chamber increases from the gas inlet to a maximum cross-sectional area.
B01D 53/04 - Séparation de gaz ou de vapeursRécupération de vapeurs de solvants volatils dans les gazÉpuration chimique ou biologique des gaz résiduaires, p. ex. gaz d'échappement des moteurs à combustion, fumées, vapeurs, gaz de combustion ou aérosols par adsorption, p. ex. chromatographie préparatoire en phase gazeuse avec adsorbants fixes
An inlet assembly for an abatement apparatus for treating an effluent stream from a semiconductor processing tool is disclosed. The inlet assembly comprises: an effluent stream inlet configured to convey the effluent stream to a nozzle conduit for delivery to an abatement chamber; a nozzle conduit scraper assembly having a nozzle conduit scraper housed within the nozzle conduit and configured to reciprocate within the nozzle conduit to reduce effluent stream deposits within the nozzle conduit; a reagent plenum configured to receive a reagent and having a wall through which at least a portion of the nozzle scraper assembly extends, the wall defining at least one reagent aperture configured to convey the reagent from the plenum and into the nozzle conduit.
F23G 7/06 - Procédés ou appareils, p. ex. incinérateurs, spécialement adaptés à la combustion de déchets particuliers ou de combustibles pauvres, p. ex. des produits chimiques de gaz d'évacuation ou de gaz nocifs, p. ex. de gaz d'échappement
F23J 3/02 - Nettoyage des tubes de foyerNettoyage des carneaux ou cheminées
A fluid routing module (104) for a vacuum pumping system (100), the fluid routing module (104) comprising: a first fluid inlet (110a); a first fluid outlet (114a); a first fluid line (200) coupled between the first fluid inlet (110a) and the fluid outlet (114a); and a restrictor module (212) disposed along the first fluid line (200) between the first fluid inlet (110a) and the first fluid outlet (114a), the restrictor module (212) being configured to variably restrict a flow of fluid between the first fluid inlet (110a) and the first fluid outlet (114a).
H01L 21/67 - Appareils spécialement adaptés pour la manipulation des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide pendant leur fabrication ou leur traitementAppareils spécialement adaptés pour la manipulation des plaquettes pendant la fabrication ou le traitement des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide ou de leurs composants
F04D 19/04 - Pompes multiétagées spécialement adaptées pour réaliser un vide poussé, p. ex. pompes moléculaires
Aspects of the present invention relate to a scroll pump (1) The scroll pump (1) includes a first scroll (3, 5) having a first scroll wall (7, 11) extending from a first scroll base (9, 13); and a second scroll (3, 5) having a second scroll wall (7, 11) extending from a second scroll base (9, 13) towards the first scroll base (9, 13). A seal (20, 40) disposed on the second scroll (3, 5) for cooperating with the first scroll (3, 5) to form a seal. At least one target (37A) is associated with the seal (20, 40), the at least one target (37A) being movable towards the first scroll (3, 5) along a longitudinal axis (X) as the seal (20, 40) is abraded. The scroll pump (1) includes at least one sensor (35A, 35B) for detecting the at least one target (37A), the at least one sensor (35A, 35B) being configured to output a sensor signal (SG1) providing an indication of a separation distance (ΔX1) between the at least one target (37A) and the at least one sensor (35A, 35B). Aspects of the present invention also relate to a method of monitoring a seal (20, 40) in a scroll pump (1); and a seal (20, 40).
F04C 18/02 - Pompes à piston rotatif spécialement adaptées pour les fluides compressibles du type à engrènement, c.-à-d. avec un mouvement de translation circulaire des organes coopérants, chaque organe possédant le même nombre de dents ou de parties équivalentes de prise
F04C 27/00 - Systèmes d'étanchéité dans les pompes à piston rotatif spécialement adaptées pour les fluides compressibles
The present invention provides an electrostatic precipitator for treating a gas stream carrying particulate matter. The electrostatic precipitator comprises a housing defining a chamber, the housing comprising an inlet configured to enable the gas stream carrying particulate matter to enter the chamber, and an outlet configured to enable the treated gas stream to exit the chamber. The electrostatic precipitator further comprises a charging electrode arranged within the chamber towards the inlet, a filter element arranged within the chamber towards the outlet such that to reach the outlet the gas stream passes through the filter element, an insulator element arranged between the charging electrode and the filter element, and a collection electrode configured to be held at electrical earth. The charging electrode is configured to be held at a first high voltage potential such that particulate matter in the gas stream becomes charged as it passes the charging electrode, and the filter element is configured to be held at a second high voltage potential that is greater than the first high voltage potential, such that when the gas stream is conveyed through the filter element to the outlet, charged particulate matter is repelled from the filter element towards the collection electrode. The invention further provides a method for removing particulate matter from a gas stream.
B03C 3/06 - Installations alimentées en électricité de l'extérieur du type par voie sèche caractérisées par la présence d'électrodes tubulaires fixes
B03C 3/155 - Installations alimentées en électricité de l'extérieur du type par voie sèche caractérisées par l'utilisation additionnelle d'effets mécaniques, p. ex. de la pesanteur de la filtration
B03C 3/16 - Installations alimentées en électricité de l'extérieur du type par voie humide
[Problem] To provide a trap device capable of efficiently capturing a product contained in an exhaust gas while preserving the conductance of the gas flow. [Solution] The present invention pertains to a trap device 10 installed between a vacuum pump 2 for sucking in and discharging an exhaust gas, and a detoxifying device 3 for detoxifying the exhaust gas discharged from the vacuum pump 2. The trap device 10 comprises: a tubular body 11 having a flow path through which the exhaust gas flows; and a first trap member 12A and second trap member 12B that are disposed inside the tubular body 11 and comprise a mesh pattern. The first trap member 12A and the second trap member 12B are disposed so as to be spaced apart from each other in the central axis direction of the tubular body 11 and so as to shield the entire flow path of the tubular body 11 in a planar manner.
B01D 45/08 - Séparation de particules dispersées dans des gaz ou des vapeurs par gravité, inertie ou force centrifuge par inertie par projection contre les diaphragmes séparateurs
C23C 16/44 - Revêtement chimique par décomposition de composés gazeux, ne laissant pas de produits de réaction du matériau de la surface dans le revêtement, c.-à-d. procédés de dépôt chimique en phase vapeur [CVD] caractérisé par le procédé de revêtement
H01L 21/31 - Traitement des corps semi-conducteurs en utilisant des procédés ou des appareils non couverts par les groupes pour former des couches isolantes en surface, p. ex. pour masquer ou en utilisant des techniques photolithographiquesPost-traitement de ces couchesEmploi de matériaux spécifiés pour ces couches
H01L 21/3065 - Gravure par plasmaGravure au moyen d'ions réactifs
[Problem] To provide a vacuum pump having superior mechanical characteristics. [Solution] Provided is a turbo-molecular pump that includes a rotor blade 114 disposed on a rotor shaft and rotating together with the rotor shaft, and that exhausts a process gas by the rotation of the rotor shaft with exhaust elements (such as a rotary turbine blade 102 and a rotor body 103a) provided on the rotor blade. The rotor blade 114 is made from a first metal material and a second metal material, and at least some of constituent parts are produced using a 3D printer. A portion to be a joint 212 of the first metal material and the second metal material has an inclusion coupling structure in which one of the first metal material and the second metal material contains at least a portion of the other.
[Problem] To provide a vacuum pump and a magnetic bearing device in which an abnormal state can be detected even when a failure occurs simultaneously in an input circuit and an output circuit. [Solution] A magnetic bearing device 110 included in a vacuum pump 100 is characterized by comprising opposing electromagnets 104 positioned in relation to a rotating body 103, a current supply means 201 that supplies currents to the opposing electromagnets 104, a measuring means 202 that measures displacement of the rotating body 103 in relation to the opposing electromagnets 104, and a control means 203 that controls the currents on the basis of the displacement measured by the measuring means 202, the currents supplied to the opposing electromagnets 104 including a bias current Ib, and the control means 203 determining abnormality when the sum Is of the currents supplied to the opposing electromagnets 104 is less than a predetermined current value If.
Aspects of the present disclosure relate to a pump control unit for controlling a pump. The pump has a pump drive motor, a pump type identifier, and a pump speed rating identifier. A pump type identification circuit is configured to communicate with the pump type identifier and to output a pump type identification signal for identifying the pump type. A pump speed rating identification circuit is configured to communicate with the pump speed rating identifier and to output a pump speed rating identification signal for identifying the pump speed rating. The pump control unit has a cross-check circuit for receiving the pump type identification signal and the pump speed rating identification signal. The cross-check circuit is configured to output a mismatch signal to inhibit operation of the pump in dependence on identification of a mismatch between the identified pump type and the identified pump speed rating.
A vacuum pump is provided in which a balance correction member can be reduced in size and is easily attachable. The vacuum pump includes a main body casing, a rotating body, and a motor. The rotating body and the motor are provided in the main body casing. A groove portion is provided in an inner circumference surface of the rotating body. A weight that is plate shaped is placed in the groove portion. The weight has elastic displacement portions and is held and fixed in the groove portion. The elastic displacement portions are formed by opening displacement permitting holes each having one open end in the weight.
F04D 29/66 - Lutte contre la cavitation, les tourbillons, le bruit, les vibrations ou phénomènes analoguesÉquilibrage
F04D 19/04 - Pompes multiétagées spécialement adaptées pour réaliser un vide poussé, p. ex. pompes moléculaires
F16F 1/373 - Ressorts en matière plastique, p. ex. en caoutchoucRessorts faits d'un matériau à friction intérieure élevée caractérisés par une forme particulière
A vacuum pump which can sufficiently prevent flow-in of a gas into an accommodating portion of an electric component portion which makes a rotating shaft rotatable is provided. The vacuum pump includes a casing, a rotating shaft enclosed in the casing and rotatably supported, the accommodating portion accommodating the electric component portion making the rotating shaft rotatable, a rotor disposed on an outer side of the accommodating portion and constituted integrally with the rotating shaft, a partition portion disposed on an outer peripheral side of the rotor and constituting a part of a stator, and a rotor disc extended in a radial direction from an outer peripheral surface of the rotor. An exhausted gas flows on the outer side of the rotor by rotation of the rotor. At least a part of opposed surfaces of the rotor disc and the partition portion opposed in an axial direction constitutes a non-contact seal structure which prevents the flow-in of the gas into the accommodating portion.
[Problem] To provide a cooling system capable of efficiently cooling an electrostatic chuck while saving power and space when processing a semiconductor wafer. [Solution] One end of a gas pipe 15A is attached to a base 11A1, and a chiller 13A is attached to the other end of the gas pipe 15A. Refrigerant gas is supplied from the chiller 13A and passes through a gas passage inside the base 11A1, thereby cooling the base 11A1. As the base 11A1 is cooled, an electrostatic chuck 3 is cooled so that a wafer can be cooled. One end of a gas branch pipe 17A is attached to a base 11A2, and the other end of the gas branch pipe 17A is connected to a chiller 23 serving as a common chiller, via a gas merging pipe 21. A valve 19A is disposed along the gas branch pipe 17A. By lowering the temperature of the electrostatic chuck 3, the temperature of the wafer can be lowered while power consumption is suppressed.
H01L 21/02 - Fabrication ou traitement des dispositifs à semi-conducteurs ou de leurs parties constitutives
H01L 21/205 - Dépôt de matériaux semi-conducteurs sur un substrat, p. ex. croissance épitaxiale en utilisant la réduction ou la décomposition d'un composé gazeux donnant un condensat solide, c.-à-d. un dépôt chimique
H01L 21/683 - Appareils spécialement adaptés pour la manipulation des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide pendant leur fabrication ou leur traitementAppareils spécialement adaptés pour la manipulation des plaquettes pendant la fabrication ou le traitement des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide ou de leurs composants pour le maintien ou la préhension
H01L 21/3065 - Gravure par plasmaGravure au moyen d'ions réactifs
b) extending around the drive shaft for supporting and facilitating rotation of the drive shaft, and a diaphragm (180) attached to the annular bearing to support the annular bearing, wherein the diaphragm is flexible in the axial direction to allow the annular bearing to move in the axial direction, thereby facilitating the movability of the drive shaft relative to the fixed scroll in the axial direction.
F04C 18/02 - Pompes à piston rotatif spécialement adaptées pour les fluides compressibles du type à engrènement, c.-à-d. avec un mouvement de translation circulaire des organes coopérants, chaque organe possédant le même nombre de dents ou de parties équivalentes de prise
F04C 29/00 - Parties constitutives, détails ou accessoires de pompes ou d'installations de pompage spécialement adaptées pour les fluides compressibles non couverts dans les groupes
A liquid ring pump operating liquid additive comprising: a hygroscopic material; and a carrier liquid in which the hygroscopic material is dispersed, the carrier liquid being non-hydrating.
Vacuum feedthrough in particular to provide an electrical connection from ambient pressure into a vacuum chamber, comprising a first wall to be at least partially connected to or part of the vacuum chamber, a second wall, wherein the first wall and the second wall are connected by one or more sidewalls, wherein by the first wall, the second wall and the one or more sidewalls an internal volume is created, a first electrical feedthrough arranged in the first wall providing one or more electrical connection through the first wall in a vacuum tight manner, a second electrical feedthrough arranged in the second wall providing one or more electrical connection through the second wall in a vacuum tight manner, wherein one or more of the electrical connections of the first electrical feedthrough are connected with respective electrical connections of the second electrical feedthrough, wherein, in use, the internal volume is maintained at a pressure below ambient pressure.
This application relates to a mist-trap for a wet-scrubber abatement system. The mist trap comprises a demisting chamber having a gas inlet for receiving mist-laden exhaust gas from the wet-scrubber abatement system, a liquid capture surface on which the mist droplets may coalesce to form a liquid, and a gas outlet through which relatively dry gas may exit the chamber. The mist trap is configured such that at least a first portion of the captured liquid exits the chamber via the gas inlet to return to the wet-scrubber abatement system. The application also relates to a water-collecting baffle, an abatement system, and a method of moderating particulate build-up in a primary flow channel of an exhaust draw amplification device.
B01D 45/06 - Séparation de particules dispersées dans des gaz ou des vapeurs par gravité, inertie ou force centrifuge par inertie par inversion du sens de l'écoulement
B01D 45/08 - Séparation de particules dispersées dans des gaz ou des vapeurs par gravité, inertie ou force centrifuge par inertie par projection contre les diaphragmes séparateurs
77.
METHOD FOR PREDICTING A REMAINING LIFETIME OF A VACUUM PUMP
Method for operating a vacuum pump, including acquiring vibration data of the vacuum pump during normal operation, training an anomaly detection model by the acquired vibration data of the vacuum pump during normal operation, and when the anomaly detection model determines a degrading operation of the vacuum pump, predicting by a lifetime prediction model an estimated remaining lifetime of the vacuum pump on the basis of vibration data acquired during degrading operation of the vacuum pump.
F04D 19/04 - Pompes multiétagées spécialement adaptées pour réaliser un vide poussé, p. ex. pompes moléculaires
F04B 37/14 - Pompes spécialement adaptées aux fluides compressibles et ayant des caractéristiques pertinentes non prévues dans les groupes ou présentant un intérêt autre que celui visé par ces groupes pour utilisation particulière pour obtenir un vide élevé
F04B 51/00 - Tests des "machines", pompes ou installations de pompage
F04D 27/00 - Commande, p. ex. régulation, des pompes, des installations ou des systèmes de pompage spécialement adaptés aux fluides compressibles
The present invention provides a system for controlling gas flow into an abatement apparatus The system comprises at least one vacuum pump configured to evacuate process gases from a process tool, an interface controller, a flow measurement device arranged downstream of the at least one vacuum pump and configured to measure the flow rate of the process gas flow and send a flow rate signal to the interface controller, an abatement apparatus arranged downstream of the flow measurement device, and an auto-tuning gas injection block arranged upstream of the abatement apparatus and configured to inject one or more gases into the process gas flow. During use, the process tool is configured to send a signal to the interface controller indicating the process step that is occurring in the tool, and the interface controller is configured to send a process step signal to the auto-tuning gas injection block to control the injection of the one or more gases according to the process step occurring in the tool. The interface controller is configured to send a flow rate signal to the auto-tuning gas injection block to control the injection of the one or more gases according to the gas flow rate measured by the flow measurement device. The present invention also provides a method for controlling gas flow into an abatement apparatus.
F23G 7/06 - Procédés ou appareils, p. ex. incinérateurs, spécialement adaptés à la combustion de déchets particuliers ou de combustibles pauvres, p. ex. des produits chimiques de gaz d'évacuation ou de gaz nocifs, p. ex. de gaz d'échappement
Provided is a vacuum pump in which deformation of a peripheral part fastened to an outer cylinder can be prevented even when a count of bolts increases. A vacuum pump according to the present disclosure includes a rotating body, an outer cylinder that accommodates the rotating body, a peripheral part that is disposed on an outer perimeter side of the rotating body and concentrically with the outer cylinder, a plurality of bolts that fasten the outer cylinder and the peripheral part, and an axial force reducing means for reducing bolt axial force acting on the outer cylinder. The axial force reducing means is provided to at least one of the plurality of bolts.
[Problem] To improve back pressure dependency while suppressing a decrease in exhaust speed in a Siegbahn type exhaust mechanism. [Solution] A vacuum pump that is provided with: a casing having an intake port; a rotor shaft arranged in the casing; one or a plurality of rotary disks rotatable together with the rotor shaft; and one or a plurality of fixed disks arranged axially opposite each of the one or plurality of rotary disks and provided with spiral grooves having valleys and peaks on opposing surfaces, a gas flow passage being formed by the spiral grooves opposing the one or plurality of rotary disks, and gas introduced from the intake port being exhausted through interaction of the one or plurality of rotary disks and the one or plurality of fixed disks. The vacuum pump is characterized by comprising, further to the intake port side than a first rotary disk of the intake port side from among the one or plurality of rotary disks, an inflow guide part that guides inflow of the gas.
The present invention provides an abatement inlet gas injection system for automatically controlling injection of a gas flow into a process gas stream The system comprises a gas supply configured to provide a gas flow; an injection block connected to the gas supply, the injection block being configured to inject the gas flow into an inlet head of an abatement apparatus for mixture with a process gas stream; a flow measurement device configured to substantially continuously measure the gas flow rate upstream of the injection block and send a flow rate signal to a controller; wherein the controller is configured to receive the flow rate signal from the flow measurement device, and to provide a flow control signal to a flow control device in response to a change in the flow rate signal; wherein the flow control device is configured to change the gas flow rate entering the injection block in response to the flow control signal.
F23G 7/06 - Procédés ou appareils, p. ex. incinérateurs, spécialement adaptés à la combustion de déchets particuliers ou de combustibles pauvres, p. ex. des produits chimiques de gaz d'évacuation ou de gaz nocifs, p. ex. de gaz d'échappement
F23N 1/02 - Régulation de l'alimentation en combustible conjointement au réglage de l'amenée d'air
82.
WORK COIL FOR INDUCTION HEATED ABATEMENT APPARATUS
An induction heated abatement apparatus includes a work coil configured to inductively heat a porous susceptor defining an abatement chamber for treating an effluent stream, wherein said work coil is hollow to define a conduit coupled with a source of reaction reagents and wherein at least one surface of said work coil defines a plurality of apertures in fluid communication with said conduit for conveying said reaction reagents from said conduit to said surface of said work coil for supply to said porous susceptor. The work coil is protected from the effects of overheating whilst also reducing wasted heat because the heat obtained by the reaction reagents used as coolant gas is recycled and is used to facilitate abatement in the porous susceptor defining an abatement chamber.
F23G 7/06 - Procédés ou appareils, p. ex. incinérateurs, spécialement adaptés à la combustion de déchets particuliers ou de combustibles pauvres, p. ex. des produits chimiques de gaz d'évacuation ou de gaz nocifs, p. ex. de gaz d'échappement
H05B 6/10 - Appareils de chauffage par induction, autres que des fours, pour des applications spécifiques
A heat exchanger is disclosed. The heat exchanger comprises a first set of first conduits for conveying a first fluid, first conduits having a triangular cross-section portion; and a second set of second conduits for conveying a second fluid, the second conduits having a triangular cross-section portion, wherein adjacent first conduits are interspaced by an intervening second conduit. In this way, the conduits may be located closely together with a space-efficient configuration which helps to improve the exchange of heat between the first and second fluids while also providing a compact arrangement which minimises the amount of material used to construct the heat exchanger.
F28D 7/00 - Appareils échangeurs de chaleur comportant des ensembles de canalisations tubulaires fixes pour les deux sources de potentiel calorifique, ces sources étant en contact chacune avec un côté de la paroi d'une canalisation
F28D 7/16 - Appareils échangeurs de chaleur comportant des ensembles de canalisations tubulaires fixes pour les deux sources de potentiel calorifique, ces sources étant en contact chacune avec un côté de la paroi d'une canalisation les canalisations étant espacées parallèlement
F28F 1/02 - Éléments tubulaires de section transversale non circulaire
F28F 1/04 - Éléments tubulaires de section transversale non circulaire polygonale, p. ex. rectangulaire
F28F 7/02 - Blocs traversés par des passages pour sources de potentiel calorifique
84.
VACUUM PUMP, ROTARY BODY OF VACUUM PUMP, AND ROTARY BLADE ON UPSTREAM SIDE OF VACUUM PUMP
[Problem] To curb the inflow of heat from a downstream-side rotary blade to an upstream-side rotary blade. [Solution] A vacuum pump 100A includes: a first rotary blade 20A; a second rotary blade 30A disposed on a downstream side of the first rotary blade 20A; a rotary shaft 113 for transmitting rotation to the first rotary blade 20A and the second rotary blade 30A; a drive mechanism 121 for the rotary shaft 113; and a casing 127 that contains the rotary shaft 113, the first rotary blade 20A, and the second rotary blade 30A. A clearance n1 is provided between mutually opposing surface parts of the first rotary blade 20A and the second rotary blade 30A, and at least a section of the opposing surface part of the first rotary blade 20A is configured to have a lower emissivity than that of surface parts other than said opposing surface part.
A bearing assembly, method of assembling a bearing assembly and a pump are disclosed. The bearing assembly is for mounting a rotatable shaft of a pump, and comprises an inner ring and an outer ring and a plurality of rollable elements mounted between said inner and outer rings. The bearing assembly has a lubricant directing element extending radially outwards from an outer circumference of the inner ring. The lubricant directing element may comprise a sloped radial surface, at least a portion of the sloped radial surface facing an annular gap between the inner and outer rings, a radially inner portion of the sloped surface being closer to the rollable elements than a radially outer portion of the sloped surface.
F04D 29/063 - Lubrification spécialement adaptée aux pompes pour fluides compressibles
F16C 19/06 - Paliers à contact de roulement pour mouvement de rotation exclusivement avec roulements à billes essentiellement du même calibre, en une ou plusieurs rangées circulaires pour charges radiales principalement avec une seule rangée de billes
F16C 33/58 - Chemins de roulementBagues de roulement
F16C 33/66 - Pièces ou détails particuliers pour la lubrification
F16C 35/077 - Leur fixation sur l'arbre ou dans la carcasse d'enveloppe avec interposition d'un organe entre la carcasse d'enveloppe et la bague extérieure de roulement
The present invention relates to a gaseous flow line section (1) for use in a thermally controlled gaseous flow line, comprising a first generally tubular wall portion (2) defining a gaseous flow conduit (3) configured to convey a gaseous flow, a second generally tubular wall portion (4) substantially surrounding the first generally tubular wall portion (2) to define therebetween a liquid conduit (5) configured to contain a thermally controlled liquid, and a third generally tubular wall portion (6) substantially surrounding the second generally tubular wall portion (4) to define therebetween a vacuum conduit (7) configured to be evacuated.
F16L 9/18 - Tuyaux à double paroiTuyaux à canaux multiples ou assemblages de tuyaux
B01D 53/34 - Épuration chimique ou biologique des gaz résiduaires
C23C 16/44 - Revêtement chimique par décomposition de composés gazeux, ne laissant pas de produits de réaction du matériau de la surface dans le revêtement, c.-à-d. procédés de dépôt chimique en phase vapeur [CVD] caractérisé par le procédé de revêtement
F16L 53/32 - Chauffage des tuyaux ou des systèmes de tuyaux en utilisant des fluides chauds
F16L 59/065 - Dispositions utilisant une couche d'air ou le vide utilisant le vide
H01L 21/00 - Procédés ou appareils spécialement adaptés à la fabrication ou au traitement de dispositifs à semi-conducteurs ou de dispositifs à l'état solide, ou bien de leurs parties constitutives
F16L 39/00 - Raccords ou accessoires de raccordement pour tuyaux à double paroi ou à canaux multiples ou pour assemblages de tuyaux
A non-contacting scroll pump, the non-contacting scroll pump comprising a housing, an orbiting scroll located within the housing, and a thrust bearing assembly located within the housing for axially supporting the orbiting scroll. The thrust bearing assembly comprises a first plate fixed to the orbiting scroll, a second plate spaced apart from the first plate, a ball bearing located between the first plate and the second plate, the ball bearing being configured to roll against the first and second plates during orbiting of the orbiting scroll, and a coupling structure extending axially between the housing and the second plate to couple the housing to the second plate, wherein the coupling structure is engaged with the second plate, and wherein the coupling structure comprises a spring arranged to push the coupling structure against the second plate.
F04C 18/02 - Pompes à piston rotatif spécialement adaptées pour les fluides compressibles du type à engrènement, c.-à-d. avec un mouvement de translation circulaire des organes coopérants, chaque organe possédant le même nombre de dents ou de parties équivalentes de prise
F04C 29/00 - Parties constitutives, détails ou accessoires de pompes ou d'installations de pompage spécialement adaptées pour les fluides compressibles non couverts dans les groupes
A scroll pump (100, 200, 300, 400, 500) comprising an orbiting scroll (130, 230, 330, 430), a fixed scroll (120, 220, 320, 420), and a biasing mechanism (190, 290, 390, 490) arranged to provide a biasing force to axially bias the orbiting scroll and the fixed scroll together.
F04C 18/02 - Pompes à piston rotatif spécialement adaptées pour les fluides compressibles du type à engrènement, c.-à-d. avec un mouvement de translation circulaire des organes coopérants, chaque organe possédant le même nombre de dents ou de parties équivalentes de prise
F04C 27/00 - Systèmes d'étanchéité dans les pompes à piston rotatif spécialement adaptées pour les fluides compressibles
F04C 29/00 - Parties constitutives, détails ou accessoires de pompes ou d'installations de pompage spécialement adaptées pour les fluides compressibles non couverts dans les groupes
F01C 21/00 - Parties constitutives, détails ou accessoires non couverts dans les groupes
F16C 25/08 - Roulements à billes ou à rouleaux à autoréglage
A vacuum pumping system and method for evacuating a vacuum system. The vacuum system may be a wafer transfer station and comprises a smaller load lock vacuum chamber (30) operable to cycle between a predetermined pressure that is below atmospheric pressure and atmospheric pressure, and a larger wafer transfer vacuum chamber (40) configured to be maintained at a pressure at or close to the predetermined pressure. The vacuum pumping system comprises: first and second vacuum pumps (10, 20); a valve system (V1, V2, V3, V4, V5) configured to selectively connect and isolate the first and second vacuum pumps with the smaller and larger vacuum chambers; and control circuitry (25). The control circuitry is configured in response to determining that a pressure within the smaller vacuum chambers (30) is to fall to the predetermined pressure within a first time period, to control the valve system (V1, V2, V3, V4, V5) such that the first and second pump (10, 20) are isolated from the larger vacuum chamber (40) and are in fluid communication with the smaller vacuum chamber (30) and both contribute to evacuating the chamber. When the smaller vacuum chamber (30) is at the predetermined pressure the valve system (V1, V2, V3, V4, V5) is controlled so that the second vacuum pump (20) is isolated from the smaller vacuum chamber (30) and pumps the larger vacuum chamber (40).
F04C 25/02 - Adaptations de pompes pour utilisation spéciale pour les fluides compressibles pour produire un vide élevé
F04C 28/02 - Commande, surveillance ou dispositions de sécurité pour les pompes ou les installations de pompage spécialement adaptées pour les fluides compressibles spécialement adaptées pour plusieurs pompes connectées en série ou en parallèle
F04D 19/04 - Pompes multiétagées spécialement adaptées pour réaliser un vide poussé, p. ex. pompes moléculaires
A vacuum pump system and method for evacuating a process chamber comprising is disclosed. The system has two vacuum pumps (20, 30) each having a required pumping performance and being arranged in parallel. There is a valve system comprising respective first and second valves (V1, V2) for controlling a rate of flow of fluid into the respective two vacuum pumps. There is also control circuitry (40) configured: to control the first and second valves (V1, V2) during a first period of operation, such that each of the valves is partially open and a cumulative pumping performance of the two vacuum pumps (20, 30) provides the required pumping performance. In response to determining that one of the two vacuum pumps is to be shut down, the control circuitry (40) closes one of the first and second valves and to fully opens the other of the first and second valves, such that the pumping performance of the pump with the open valve provides the required pumping performance.
F04C 25/02 - Adaptations de pompes pour utilisation spéciale pour les fluides compressibles pour produire un vide élevé
F04B 37/14 - Pompes spécialement adaptées aux fluides compressibles et ayant des caractéristiques pertinentes non prévues dans les groupes ou présentant un intérêt autre que celui visé par ces groupes pour utilisation particulière pour obtenir un vide élevé
F04B 49/02 - Commande d'arrêt, de démarrage, de décharge ou de ralenti
F04C 28/02 - Commande, surveillance ou dispositions de sécurité pour les pompes ou les installations de pompage spécialement adaptées pour les fluides compressibles spécialement adaptées pour plusieurs pompes connectées en série ou en parallèle
F04C 28/06 - Commande, surveillance ou dispositions de sécurité pour les pompes ou les installations de pompage spécialement adaptées pour les fluides compressibles spécialement adaptées pour arrêter, pour démarrer, pour le ralenti ou pour un fonctionnement à charge nulle
F04D 15/00 - Commande, p. ex. régulation de pompes, d'installations ou de systèmes de pompage
The present invention provides an abatement apparatus for treating an effluent gas stream from a manufacturing processing tool. The abatement apparatus comprises a treatment chamber at least partially defined by a first porous wall, and comprising an inlet configured to enable an effluent gas stream from the manufacturing processing tool to enter the treatment chamber; a second porous wall generally surrounding the first porous wall and defining therebetween a second chamber, the second chamber being porous to allow gas flow therethrough; one or more heating elements are arranged within the second chamber and are configured to heat the gas flowing therethrough during use; a third porous wall generally surrounding the second chamber and defining therebetween a third chamber, the third chamber containing a relatively thermally insulating material, said third chamber being porous to allow gas flow; and a gas inlet. Wherein, the apparatus is configured such that, in use, a gas flow is conveyed from the gas inlet through the third chamber and the second chamber to the treatment chamber where it reacts with the effluent gas stream.
B01D 53/00 - Séparation de gaz ou de vapeursRécupération de vapeurs de solvants volatils dans les gazÉpuration chimique ou biologique des gaz résiduaires, p. ex. gaz d'échappement des moteurs à combustion, fumées, vapeurs, gaz de combustion ou aérosols
B01D 53/46 - Élimination des composants de structure définie
B01J 12/00 - Procédés chimiques généraux faisant réagir des milieux gazeux avec des milieux gazeuxAppareillage spécialement adapté à cet effet
F23J 15/00 - Aménagement des dispositifs de traitement de fumées ou de vapeurs
B01D 53/34 - Épuration chimique ou biologique des gaz résiduaires
F23G 7/06 - Procédés ou appareils, p. ex. incinérateurs, spécialement adaptés à la combustion de déchets particuliers ou de combustibles pauvres, p. ex. des produits chimiques de gaz d'évacuation ou de gaz nocifs, p. ex. de gaz d'échappement
92.
VACUUM PUMP, FIXED DISK, AND RETROFITTED COMPONENT
[Problem] To provide a vacuum pump in which exhaust speed is improved while back pressure dependency performance is maintained, and a fixed disk and a retrofitted component used in the vacuum pump. [Solution] A vacuum pump according to the present embodiment is a Siegbahn element. In a fixed disk which is disposed opposing a rotary disk and in which a spiral groove having a valley part and a crest part is provided in an opposing surface, an inflow guide part for guiding inflow of gas is provided in a gas inflow port of the spiral groove. The inflow guide part has a shape in which the fixed disk crest part is extended farther outward than the outer diameter of the opposing rotary disk.
[Problem] To propose a vacuum pump that offers excellent back pressure performance even when the suction gas is hydrogen gas or the like. [Solution] A vacuum pump 100 comprising an exhaust part 114 that includes: a turbine pump section 115 with a plurality of stages of rotary blades 102 and fixed blades 123; and a drag pump section 116 positioned on the exhaust downstream side of the turbine pump section 115. Intake gas sucked in from an intake port 101 by the exhaust part 114 is discharged from an exhaust port 133 via a gas flow passage FP1. The vacuum pump 100 is characterized by comprising an introduction flow passage FP3 for introducing intermediate introduction gas having a higher viscosity than the intake gas. The vacuum pump 100 is also characterized in that the introduction flow passage FP3 is connected to the gas flow passage FP1 on the exhaust downstream side of the rotary blade 102 closest to the intake port 101 among the plurality of stages of rotary blades 102 in the exhaust part 114.
In order to provide an abnormality detection device for a vacuum pump, a vacuum pump system, and a vacuum pump abnormality detection method with which an abnormality in a gap between a rotary blade and a fixed blade or a casing can be detected easily and with high accuracy without disassembling the vacuum pump, an abnormality detection device (320) for a vacuum pump (100) is provided with a casing (311), a rotor shaft (113), a magnetic bearing device (312), a plurality of rotary blades (102), and a plurality of fixed blades (123). The abnormality detection device (320) is also provided with: a vibration detection means (321) for acquiring vibration generated in the vacuum pump (100); and a contact determination means (323) that controls the magnetic bearing device (312) to set the position of the rotor shaft (113) to a reference position set in advance and set the rotor shaft (113) to a designated predetermined operation state set in advance, and while the rotor shaft (113) is in the designated operation state, controls the magnetic bearing device (312) to offset the position of the rotor shaft (113) by a designated amount from a reference position, and determines whether or not there has been contact with the plurality of rotary blades (102) according to a change in the vibration data acquired by the vibration detection means (321) from before the offset to after the offset.
A vacuum pump, comprising a pump assembly (110), an inlet means (120) and an outlet means (130), and an enclosure (140) for containing the pump assembly (110), the enclosure (140) comprising a first-end part (141), a second-end part (142), and sleeve means (143) arranged between the first-end part (141) and the second-end part (142), wherein the sleeve means (143) comprises a bellows means (143a) for accommodating a thermal expansion of the vacuum pump (100).
The present disclosure relates to vacuum pump 10 comprising a substantially hermetically sealed enclosure 40, a core pump assembly located within the enclosure 40, and an inert purge gas inlet 70 fluidly connected to the enclosure 40 for supplying inert purge gas to an interior of the enclosure 40 surrounding the core pump assembly. By providing a sealed enclosure 40 around the core pump assembly and supplying inert purge gas thereto via the inlet 70, an inert positive pressure can be applied to the core pump assembly that reduces leakage of process gas from the core pump assembly such that seals therein can be removed or reduced. In particular, the need for elastomer seals that may be expensive and not be suited to high temperature or corrosive process gas conditions can be removed.
F04C 27/00 - Systèmes d'étanchéité dans les pompes à piston rotatif spécialement adaptées pour les fluides compressibles
F04C 15/00 - Parties constitutives, détails ou accessoires des "machines", des pompes ou installations de pompage non couverts par les groupes
F04C 18/12 - Pompes à piston rotatif spécialement adaptées pour les fluides compressibles du type à engrènement extérieur, c.-à-d. avec un engagement des organes coopérants semblable à celui d'engrenages dentés d'un autre type qu'à axe interne
F04C 25/02 - Adaptations de pompes pour utilisation spéciale pour les fluides compressibles pour produire un vide élevé
A vacuum pump which can prevent wasting of materials and can be manufactured easily is provided.
A vacuum pump which can prevent wasting of materials and can be manufactured easily is provided.
Main-body casings and a rotating body installed rotatably in the main-body casings are provided, and the rotating body has a structure that a second component is caused to cover a periphery of a first component disposed on an inner side. The second component is formed by solidifying a powder. The first component is formed of at least any one of an extruded material, a cast material, and a forged material. The second component is formed of a green pellet.
A turbomolecular pump bladed disc, comprising: a central hub configured to be rotated about an axis, the axis defining an axial direction; and one or more blades radially extending from the central hub; wherein each of the one or more blades has a cross-section that: tapers to a first point in a first direction, the first direction being parallel with the axial direction, tapers to a second point in a second direction, the second direction being parallel with the axial direction and opposite to the first direction; and is substantially a parallelogram in shape.
A vacuum pump that is small in height (length) is configured to bring a rotating body and a protective net as close to each other as possible by causing the rotating body to actively support the protective net. The vacuum pump is provided with a mechanism that causes a rotating body (a shaft or a rotor) to actively support a protective net when the protective net becomes deformed (bent) toward the vacuum pump side due to a change in pressure or temperature of the vacuum pump. Specifically, instead of preventing the protective net from being caught in the rotating body by increasing the distance therebetween, the entanglement of the protective net is prevented by actively supporting the protective net by bringing the protective net and the rotating body closer to each other. Accordingly, the height (length) of the vacuum pump can be reduced more.
F04C 29/12 - Dispositions pour l'admission ou l'échappement du fluide de travail, p. ex. caractéristiques de structure de l'admission ou de l'échappement
F04D 1/00 - Pompes à flux radial, p. ex. pompes centrifugesPompes hélicocentrifuges
F04D 13/06 - Ensembles comprenant les pompes et leurs moyens d'entraînement la pompe étant entraînée par l'électricité
F04D 19/04 - Pompes multiétagées spécialement adaptées pour réaliser un vide poussé, p. ex. pompes moléculaires
F04D 29/70 - Grilles d'aspirationFiltresSéparateurs de poussièreNettoyage
100.
A SCROLL PUMP AND THRUST BEARINGS FOR SCROLL PUMPS
A scroll pump and thrust bearing assembly for providing axial support for a first scroll member with respect to a second scroll member within the scroll pump are disclosed. The thrust bearing assembly comprises: at least one ball bearing and a first and second ball bearing cage for accommodating and constraining movement of the at least one ball bearing. The first and second ball bearing cages each comprise at least one aperture, the at least one aperture of the first ball bearing cage overlaps with the at least one aperture of the second ball bearing cage. The at least one ball bearing is accommodated within the respective overlapping apertures of the ball bearing cages and at least one control aperture of the first ball bearing cage is configured to have a predetermined length in one dimension that is at least 2% greater than a predetermined length in a direction perpendicular to the one dimension, such that a clearance relative to a path traced by the ball bearing in the one dimension is greater than a clearance in the perpendicular direction.
