A shaft sealing device sealing a sealed fluid includes a mating ring having a sliding surface and attached to a casing into which a rotating shaft is inserted, a commonly used seal ring having a sliding surface that slides against the sliding surface of the mating ring, and attached to the rotating shaft, and the sliding surfaces, and a backup seal ring attached to the rotating shaft on a counter-sealed fluid side in an axial direction with respect to the sliding surface of the mating ring and the sliding surface of the commonly used seal ring, and having a sliding surface facing the sealed fluid in the axial direction. The backup seal ring is movable toward the sealed fluid in the axial direction.
F16J 15/34 - Joints d'étanchéité entre deux surfaces mobiles l'une par rapport à l'autre par bague glissante pressée contre la face plus ou moins radiale d'une des deux parties
Provided is a mechanical seal capable of ensuring sliding capability between sliding surfaces irrespective of the remaining amount of liquid between the sliding surfaces. A seal surface 11 of at least one sliding ring 10 is composed of a ring-shaped base material 12 that is attached to a housing 4-side member 5 or to a rotation shaft 1–side member 2A, and a resin material 13 that is attached to the base material 12. The resin material 13 is formed in a ring shape.
F16J 15/34 - Joints d'étanchéité entre deux surfaces mobiles l'une par rapport à l'autre par bague glissante pressée contre la face plus ou moins radiale d'une des deux parties
Provided is a segment seal capable of exhibiting a sealing function by suppressing a change in an annular gap within a wide temperature zone. This segment seal 1A is disposed in a state where the rotation thereof is restricted between a housing 2 and a rotary shaft 3 inserted through the housing 2, and seals the gap between the housing 2 and the rotary shaft 3, the segment seal 1A comprising: a base material ring 10 which is externally fitted onto the rotary shaft 3 and is constituted by a plurality of circumferentially split bodies 12; and a resin ring 11 disposed side by side in the axial direction together with the base material ring 10, wherein at least a portion of the base material ring 10 is disposed in an axial high-pressure side of the resin ring 11, and the resin ring 11 has a greater thermal expansion coefficient than the base material ring 10.
F16J 15/34 - Joints d'étanchéité entre deux surfaces mobiles l'une par rapport à l'autre par bague glissante pressée contre la face plus ou moins radiale d'une des deux parties
A mechanical seal includes rotating seal ring which rotate with a rotary shaft, stationary seal rings, and an adaptor which holds the stationary seal rings, the adaptor being fixed to a seal cover by bolts. The mechanical seal further includes a plurality of holders brought into contact with the adapter and provided with through holes. A body part of each of the bolts passes through each of the through holes and is screwed into each of threaded holes formed in the seal cover. The plurality of holders being arranged so as to surround the rotary shaft.
F16J 15/34 - Joints d'étanchéité entre deux surfaces mobiles l'une par rapport à l'autre par bague glissante pressée contre la face plus ou moins radiale d'une des deux parties
The present invention provides a shaft sealing device in which leaks into a leak-side space of a sealed fluid can easily be repaired. The present invention pertains to a shaft sealing device 1 having: a mating ring 5 which has a sliding surface 51 and is attached to a case 4 through which a rotary shaft 3 passes; and an ordinary seal ring 6 which is attached to the rotary shaft 3 and has a sliding surface 62a which slides with the sliding surface 51 of the mating ring 5, a sealed fluid being sealed by the sliding surfaces 51, 62a, wherein a spare seal ring 7 is provided that has a sliding surface 72a which faces the sealed fluid in the axial direction, the spare seal ring being attached to the rotary shaft 3 on the axial-direction side opposite the sealed fluid with respect to the sliding surface 51 of the mating ring 5 and the sliding surface 62a of the ordinary seal ring 6, and the spare seal ring 7 can move towards the sealed fluid in the axial direction.
F16J 15/16 - Joints d'étanchéité entre deux surfaces mobiles l'une par rapport à l'autre
F16J 15/34 - Joints d'étanchéité entre deux surfaces mobiles l'une par rapport à l'autre par bague glissante pressée contre la face plus ou moins radiale d'une des deux parties
A mechanical seal includes a pair of seal rings that rotate relative to each other; and a retainer that holds the seal ring. The retainer includes an annular base portion, an annular holding portion that is externally fitted to an outer periphery of the seal ring, and an annular connection portion that connects the base portion and the annular holding portion in an axial direction, and an annular space partially surrounded by the base portion, the annular connection portion, and the annular holding portion is formed between the outer periphery of the seal ring and an inner periphery of the retainer. The retainer has a plurality of beams which are disposed in the annular space to connect the annular base portion and the annular holding portion.
F16J 15/34 - Joints d'étanchéité entre deux surfaces mobiles l'une par rapport à l'autre par bague glissante pressée contre la face plus ou moins radiale d'une des deux parties
B33Y 80/00 - Produits obtenus par fabrication additive
Provided is a mechanical seal in which a sliding surface of a sealing ring is not deformed and a retainer is not easily damaged. A mechanical seal 1 comprises a pair of sealing rings 10 and 20 that rotate relative to each other and a retainer 11 that holds the sealing ring 10, the retainer 11 including an annular base portion 11a, an annular holding portion 11c that fits around the outer periphery of the sealing ring 10, and an annular connecting portion 11b for axially connecting the base portion 11a and the annular holding portion 11c, and an annular space S surrounded by the base portion 11a, the annular connecting portion 11b, and the annular holding portion 11c being formed between the outer circumference of the sealing ring 10 and the inner circumference of the retainer 11, wherein a beam 110 that connects the base portion 11a and the annular holding portion 11c is formed in the retainer 11 in the annular space S.
B33Y 30/00 - Appareils pour la fabrication additiveLeurs parties constitutives ou accessoires à cet effet
B33Y 80/00 - Produits obtenus par fabrication additive
F16J 15/34 - Joints d'étanchéité entre deux surfaces mobiles l'une par rapport à l'autre par bague glissante pressée contre la face plus ou moins radiale d'une des deux parties
F16J 15/52 - Joints d'étanchéité entre organes mobiles l'un par rapport à l'autre, par étanchéité sans surfaces mobiles l'une par rapport à l'autre, p. ex. des garnitures étanches aux fluides pour transmettre un mouvement au travers d'une paroi par soufflets ou diaphragmes d'étanchéité
A mechanical seal which can provide stable sealing performance over a long period of time. A rotating ring unit 100 includes an annular elastic seal 130 having a first annular part 131 to which a rotating ring 110 is fitted and thus fixed on an inner circumferential surface side thereof, a second annular part 133 provided in close contact with an outer circumferential surface of a rotating shaft, and a curved part 132 which connects the first and second annular parts 131 and 133 and follows a positional change of the second annular part 133 with respect to the first annular part 131, an annular tightening member 140 which tightens an outer circumferential surface of the second annular part 133 on the rotating shaft, and a metal case 120 including an annular fitting part 121 to which the first annular part 131 is fitted and thus fixed on the inner circumferential surface side thereof.
F16J 15/36 - Joints d'étanchéité entre deux surfaces mobiles l'une par rapport à l'autre par bague glissante pressée contre la face plus ou moins radiale d'une des deux parties reliée par un diaphragme à l'autre partie
F16J 15/34 - Joints d'étanchéité entre deux surfaces mobiles l'une par rapport à l'autre par bague glissante pressée contre la face plus ou moins radiale d'une des deux parties
Provided is a rotary joint which can be configured to be axially compact. This rotary joint is provided with a cylindrical housing 2 in which housing flow passages 11-17 are formed, and also with a rotating body 3 provided in the housing 2 in a relatively rotatable manner and having formed therein rotating body flow passages 111-117 communicating with the housing flow passages 11-17. The rotary joint has rotating elements 33, 34, 35, 36 rotating with the rotating body 3. Rotation-side communication passages 133, 134, 135, 136 are formed to extend radially through the rotating elements 33, 34, 35, 36 and reach the rotating body flow passages 111, 113, 115, 117 from a rotation element-side space 120 located between the housing 2 and the rotating elements 33, 34, 35, 36. The rotary joint has stationary elements 41, 42, 43 affixed to the housing 2. Stationary-side communication passages 141, 142, 143 are formed to extend radially through the stationary elements 41, 42, 43 and reach the rotating body fluid passages 112, 114, 116 from a stationary element-side space 121 located between the rotating body 3 and the stationary elements 41, 42, 43.
F16J 15/34 - Joints d'étanchéité entre deux surfaces mobiles l'une par rapport à l'autre par bague glissante pressée contre la face plus ou moins radiale d'une des deux parties
F16L 27/093 - Raccords avec passages de fluides orientés radialement du type "banjo", c.-à-d. accouplements pivotants à angle droit
Provided is a vertical sealing device capable of preventing foreign matter from entering a seal from outside a machine. A vertical sealing device 1 includes a seal section S for sealing a rotating shaft 2 extending in the up-down direction, wherein an annular flange section 5a, which extends farther in the outer diameter direction than a radial gap G2 between a rotation-side element 3 and a stationary-side element 6, is provided to the rotation-side element 3, farther outward of the machine than the seal section S.
F16J 15/34 - Joints d'étanchéité entre deux surfaces mobiles l'une par rapport à l'autre par bague glissante pressée contre la face plus ou moins radiale d'une des deux parties
Provided is a mechanical seal in which a rotational force is unlikely to be transmitted to a bolt and in which the bolt can be prevented from loosening. This mechanical seal 1 is provided with: rotating sealing rings 20, 21 which rotate with a rotating shaft 2; stationary sealing rings 30, 31; and an adaptor 5 which holds the stationary sealing rings 30, 31, the adaptor 5 being affixed to a seal cover 3 by bolts 11. The mechanical seal 1 is further provided with a plurality of holders 9 which are in axial contact with the adapter 5, and which are provided with through-holes 9d into which the bodies 11a of the bolts 11 engaged with threaded holes 3f in the seal cover 3 are inserted. The plurality of holders 9 are arranged to surround the rotating shaft 2.
F16J 15/34 - Joints d'étanchéité entre deux surfaces mobiles l'une par rapport à l'autre par bague glissante pressée contre la face plus ou moins radiale d'une des deux parties
F16B 5/02 - Jonction de feuilles ou de plaques soit entre elles soit à des bandes ou barres parallèles à elles par organes de fixation utilisant un filetage
F16B 39/24 - Blocage des vis, boulons ou écrous dans lequel le verrouillage se fait en même temps que le vissage ou le serrage par rondelles, rondelles à ressort ou plaques élastiques qui bloquent contre l'objet
F16B 43/00 - Rondelles ou dispositifs équivalentsAutres dispositifs de support pour têtes de boulons ou d'écrous
Provided is a sealing device having stable sealing properties. This sealing device is provided with a seal member 4, and a spring 5 which extends in the outer circumferential direction of the seal member 4 and which comprises a plurality of wires 50 arranged in an axial direction and compressing the seal member 4.
F16J 15/3212 - Joints d'étanchéité entre deux surfaces mobiles l'une par rapport à l'autre par joints élastiques, p. ex. joints toriques avec au moins une lèvre pourvue d’éléments de tension, p. ex. de bagues élastiques avec des ressorts métalliques
F16F 1/06 - Ressorts enroulés dont les enroulements constituent une surface cylindrique
F16J 15/3204 - Joints d'étanchéité entre deux surfaces mobiles l'une par rapport à l'autre par joints élastiques, p. ex. joints toriques avec au moins une lèvre
In a bellows mechanical seal, a collar attached to a seal ring through a bellows has a restriction piece extending toward at least one of an inner diameter side or an outer diameter side. The bellows mechanical seal includes an adaptor which is attached to the collar, whose axial movement is restricted by the restriction piece, and which extends to the inner diameter side or the outer diameter side over the restriction piece. The collar and the adaptor form at least part of a housing space (S), (S′) having the secondary seal housed therein.
F16J 15/34 - Joints d'étanchéité entre deux surfaces mobiles l'une par rapport à l'autre par bague glissante pressée contre la face plus ou moins radiale d'une des deux parties
F16J 15/36 - Joints d'étanchéité entre deux surfaces mobiles l'une par rapport à l'autre par bague glissante pressée contre la face plus ou moins radiale d'une des deux parties reliée par un diaphragme à l'autre partie
F16J 15/38 - Joints d'étanchéité entre deux surfaces mobiles l'une par rapport à l'autre par bague glissante pressée contre la face plus ou moins radiale d'une des deux parties rendue étanche par une garniture
A magnetic fluid seal includes an outer cylinder member that houses therein a rotating shaft extending from a housing of a fluid machine, magnetic pole members housed in the outer cylinder member, disposed around the rotating shaft and forming a magnetic circuit, and sealing films to be formed from magnetic fluids, in an axial direction, in magnetic connection with the magnetic circuit, and between the magnetic pole members and the rotating shaft. The magnetic fluid seal further includes a gas supply passage that allows a gas to flow from an outside toward the magnetic pole members.
F16J 15/43 - Joints d'étanchéité entre deux surfaces mobiles l'une par rapport à l'autre par un fluide maintenu en position d'étanchéité par la force magnétique
Provided is a mechanical seal which enables sealing performance to be stabilized over an extended period of time. A rotating ring unit 100 is characterized by being provided with: an annular resilient body seal 130 which includes a first annular portion 131 secured on an inner circumferential surface side thereof through the engagement of a rotating ring 110, a second annular portion 133 in close contact with an outer circumferential surface of a rotating shaft, and a curved portion 132 which joins the first annular portion 131 and the second annular portion 133 and follows changes in the position of the second annular portion 133 relative to the first annular portion 131; an annular tightening member 140 which tightens an outer circumferential surface of the second annular portion 133 relative to the rotating shaft; and a metal case 120 provided with an annular engaged portion 121 on an inner circumferential surface of which the first annular portion 131 is secured by engaging therewith; wherein a slip preventer which suppresses relative rotation of the first annular portion 131 in the circumferential direction is formed on an inner circumferential surface of the engaged portion 121.
F16J 15/34 - Joints d'étanchéité entre deux surfaces mobiles l'une par rapport à l'autre par bague glissante pressée contre la face plus ou moins radiale d'une des deux parties
A magnetic fluid seal includes an outer cylinder member with a heat barrier that internally houses a rotating shaft extending from a housing of a fluid machine and includes an attachment portion to be attached to the housing, magnetic pole members that are disposed around the rotating shaft housed in the outer cylinder member and form a magnetic circuit, and sealing films that are magnetically connected to the magnetic circuit, are respectively disposed between the magnetic pole members and the rotating shaft, are made of magnetic fluids, and are formed in an axial direction.
F16C 19/04 - Paliers à contact de roulement pour mouvement de rotation exclusivement avec roulements à billes essentiellement du même calibre, en une ou plusieurs rangées circulaires pour charges radiales principalement
F16C 33/76 - Dispositifs d'étanchéité pour roulements à billes ou à rouleaux
F16J 15/43 - Joints d'étanchéité entre deux surfaces mobiles l'une par rapport à l'autre par un fluide maintenu en position d'étanchéité par la force magnétique
F16C 35/12 - Supports rigides de paliersCorps de paliers, p. ex. calottes, couvercles pour broches avec roulements à billes ou à rouleaux
F16C 33/74 - Dispositifs d'étanchéité pour paliers à contact lisse
F16C 19/08 - Paliers à contact de roulement pour mouvement de rotation exclusivement avec roulements à billes essentiellement du même calibre, en une ou plusieurs rangées circulaires pour charges radiales principalement avec plusieurs rangées de billes
The present invention provides a mechanical seal provided with a cooling jacket that is manufactured at low cost and that has a simple structure. A mechanical seal 1 forms a seal between a housing 2 and a seal cover 4 fixed to the housing 2, and a rotating shaft 3 by means of stationary seal rings 6a, 6b and a rotary seal ring 9, and has a first space M formed between: the housing and the seal cover 4; and the stationary seal rings 6a, 6b and the rotary seal ring 9. The mechanical seal 1 is provided with: a cylindrical member 10 that has a larger inner diameter than the stationary seal rings 6a, 6b and the rotary seal ring 9; secondary seals 101b, 102b that are interposed between the cylindrical member 10 and at least one of the housing 2 and the seal cover 4; and communication passages 28a, 28b that communicate with the outside. The first space M is divided into a second space C that is located on an outer-diameter side of the cylindrical member 11 and a third space R that is located on an inner-diameter side of the cylindrical member 10. The communication passages 28a, 28b communicate with the second space C.
F16J 15/34 - Joints d'étanchéité entre deux surfaces mobiles l'une par rapport à l'autre par bague glissante pressée contre la face plus ou moins radiale d'une des deux parties
Provided is a bellows-type mechanical seal having high degree of freedom of the arrangement of a collar and a secondary seal. A bellows-type mechanical seal (1) is configured such that a collar (3) mounted to a seal ring (15) with bellows (13) provided therebetween has restriction sections (4, 8) extending to the inner diameter side and/or the outer diameter side. The bellows-type mechanical seal (1) is provided with an adaptor (50, 70) mounted to the collar (3), the adaptor (50, 70) being prevented by the restriction sections (4, 8) from moving in the axial direction, the adaptor (50, 70) extending to the inner diameter side or the outer diameter side beyond the restriction sections (4, 8). The collar (3) and the adaptor (50, 70) define at least a part of a space (S, S') in which a secondary seal (60, 80) is accommodated.
F16J 15/36 - Joints d'étanchéité entre deux surfaces mobiles l'une par rapport à l'autre par bague glissante pressée contre la face plus ou moins radiale d'une des deux parties reliée par un diaphragme à l'autre partie
F16J 15/38 - Joints d'étanchéité entre deux surfaces mobiles l'une par rapport à l'autre par bague glissante pressée contre la face plus ou moins radiale d'une des deux parties rendue étanche par une garniture
In an embodiment, a mechanical seal device has a mating ring (131) that rotates with a rotating shaft (101), as well as an opposing seal ring (133) that slidably contacts the mating ring (131), so as to seal between the rotating shaft (101) and a seal cover (105) fixed to an equipment main body (102); wherein the seal cover (105) is a split structure comprising at least a first seal cover (107, 108) and second seal cover (106), the first seal cover (107, 108) is detachably connected in the axial direction by leaving the second seal cover (106) free from it, and the seal ring (133) is connected to the first seal cover (107, 108) in a securely following manner.
F16J 15/34 - Joints d'étanchéité entre deux surfaces mobiles l'une par rapport à l'autre par bague glissante pressée contre la face plus ou moins radiale d'une des deux parties
A mechanical seal device has a mating ring that rotates with a rotating shaft, as well as a seal ring that slidably contacts the mating right, so as to seal between the rotating shaft and a seal cover fixed to an equipment main body, wherein the seal cover is a split structure comprising at least an inner-diameter-side seal cover and an outer-diameter-side seal cover, the inner-diameter-side seal cover is detachably connected to the outer-diameter-side seal cover, and the seal ring is connected to the inner-diameter-side seal cover in a securely following manner.
F16J 15/34 - Joints d'étanchéité entre deux surfaces mobiles l'une par rapport à l'autre par bague glissante pressée contre la face plus ou moins radiale d'une des deux parties
Provided is a magnetic fluid seal that cools a seal film via a magnetic pole member even when heat is transmitted from a rotating shaft to the seal film, and in which the seal film has a long service life. The magnetic fluid seal 1 comprises: an outer cylinder member 3 in which a rotating shaft 2 that extends from a housing for a fluid machine is accommodated; magnetic pole members 6A, 6B that are accommodated in the outer cylinder member 3, that are arranged around the rotating shaft 2, and that form a magnetic circuit; and a seal film M that is magnetically connected on the magnetic circuit, that is arranged between the magnetic pole members 6A, 6B and the rotating shaft 2, that comprises magnetic fluids 10A, 10B, and that is formed in the axial direction. The magnetic fluid seal 1 additionally comprises an air supply path 19 that causes a gas from the exterior to flow out toward the magnetic pole members 6A, 6B.
F16J 15/43 - Joints d'étanchéité entre deux surfaces mobiles l'une par rapport à l'autre par un fluide maintenu en position d'étanchéité par la force magnétique
F16J 15/16 - Joints d'étanchéité entre deux surfaces mobiles l'une par rapport à l'autre
Provided is a magnetic fluid seal in which a seal film formed in the axial direction serves as a structure that makes it possible to easily set a temperature environment, and in which said seal film has a long service life. The magnetic fluid seal 1 comprises: an outer cylinder member 3 in which a rotating shaft 2 extending from a housing for a fluid machine is accommodated, said outer cylinder member 3 comprising an attachment section 3a for attachment to the housing; magnetic pole members 6A, 6B that are arranged around the rotating shaft 2 accommodated in the outer cylinder member 3 and that form a magnetic circuit; and a seal film M that is magnetically connected on the magnet circuit, that is arranged between the magnetic pole members 6A, 6B and the rotating shaft 2, that comprises magnetic fluids 10A, 10B, and that is formed in the axial direction. The outer cylinder member 3 comprises a heat blocking means 3c for blocking heat transmitted in the axial direction thereof and a cooling means 3d for cooling the outer cylinder member 3. The attachment section 3a, the heat blocking means 3c, the seal film M, and the cooling means 3d are arranged in this order in the outer cylinder member 3 in the axial direction thereof.
F16J 15/43 - Joints d'étanchéité entre deux surfaces mobiles l'une par rapport à l'autre par un fluide maintenu en position d'étanchéité par la force magnétique
F16C 19/16 - Paliers à contact de roulement pour mouvement de rotation exclusivement avec roulements à billes essentiellement du même calibre, en une ou plusieurs rangées circulaires pour charges à la fois radiales et axiales avec une seule rangée de billes
F16C 19/54 - Systèmes formés d'une pluralité de paliers à frottement de roulement
F16C 33/78 - Dispositifs d'étanchéité pour roulements à billes ou à rouleaux avec diaphragme, disque ou bague, avec ou sans parties élastiques
F16C 35/12 - Supports rigides de paliersCorps de paliers, p. ex. calottes, couvercles pour broches avec roulements à billes ou à rouleaux
Provided are a set screw, a fixing structure, a fixing method and a sealing structure that can reduce an exposed amount of a set screw and prevent the set screw from coming off a female thread. A fixing structure for fixing a first member 20 in which a female thread 21 is formed and a second member 30 which is provided to be slidable with respect to the first member 20, and in which a through-hole 31 is formed that has a diameter smaller than an inner diameter of the female thread 21, wherein the second member 30 is positioned with respect to the first member 20 in a state in which center axes of the female thread 21 and the through-hole 31 coincide with each other, the set screw 10 is engaged in the female thread 21, and the small diameter portion 13 is inserted into the through-hole 31, whereby the first member 20 and the second member 30 are fixed to each other.
F16B 35/00 - Boulons filetésBoulons d'ancrageGoujons filetésVisVis de pression
F16B 5/02 - Jonction de feuilles ou de plaques soit entre elles soit à des bandes ou barres parallèles à elles par organes de fixation utilisant un filetage
F16B 7/18 - Assemblages de barres ou assemblages de tubes, p. ex. de section non circulaire, y compris les assemblages élastiques utilisant des éléments filetés
F16J 15/34 - Joints d'étanchéité entre deux surfaces mobiles l'une par rapport à l'autre par bague glissante pressée contre la face plus ou moins radiale d'une des deux parties
F16B 41/00 - Dispositions contre la perte des boulons, écrous, broches ou goupillesDispositions empêchant toute action non autorisée sur les boulons, écrous, broches ou goupilles
24.
Assembly method of magnetic fluid seal and magnetic fluid seal
In an assembly method of a magnetic fluid seal (100) that includes a magnetic field forming member (130) divided in a circumferential direction, a magnetic pole member (120) including a pair of magnetic fluid retaining portions (121, 122) and a coupling portion (123) that couples them, a first bearing (160) and a second bearing (170), a step of fixing the first bearing (160) to a shaft (400) in a state in which the shaft (400) is directed in a vertical direction, a step of attaching the magnetic pole member (120) from above the first bearing (160), a step of fixing the second bearing (170) to the shaft (400) from above the magnetic pole member (120) to thereby fix the magnetic pole member (120) in a state in which the magnetic pole member (120) is positioned with respect to the shaft (400); and a step of attaching the magnetic field forming member (130) between the pair of magnetic fluid retaining portions (121, 122) are performed in order.
F16J 15/43 - Joints d'étanchéité entre deux surfaces mobiles l'une par rapport à l'autre par un fluide maintenu en position d'étanchéité par la force magnétique
F16C 33/78 - Dispositifs d'étanchéité pour roulements à billes ou à rouleaux avec diaphragme, disque ou bague, avec ou sans parties élastiques
F16C 35/07 - Leur fixation sur l'arbre ou dans la carcasse d'enveloppe avec interposition d'un organe
F16C 33/76 - Dispositifs d'étanchéité pour roulements à billes ou à rouleaux
Provided is a diaphragm-shaped split mechanical seal in which leakage from the splitting surfaces of a stationary sealing ring and a rotating sealing ring is prevented. The diaphragm-shaped split mechanical seal is an outside-type mechanical seal that receives liquid pressure on the inner circumference of the stationary sealing ring (4) and the rotating sealing ring (7) and in which the stationary sealing ring (4) is held by a diaphragm (3) and the stationary sealing ring (4) and the rotating sealing ring (7) are split in the circumferential direction. The mechanical seal is characterized in that the leading end (3c) of the diaphragm (3) is fitted together with the inner circumference of the stationary sealing ring (4) so as to form a seal and a packing (21) is fitted together with the inner circumference of the rotating sealing ring (7) so as to form a seal.
F16J 15/36 - Joints d'étanchéité entre deux surfaces mobiles l'une par rapport à l'autre par bague glissante pressée contre la face plus ou moins radiale d'une des deux parties reliée par un diaphragme à l'autre partie
F16J 15/34 - Joints d'étanchéité entre deux surfaces mobiles l'une par rapport à l'autre par bague glissante pressée contre la face plus ou moins radiale d'une des deux parties
Provided is a mechanical seal device having an improved seal cover structure and exceptional handling in maintenance of seal elements such as seal rings. The mechanical seal device provides a seal between a rotary shaft (101) and a seal cover (105) affixed to a machine chassis (102), and is equipped with a mating ring (131) that rotates together with the rotary shaft (101), and a seal ring (133) that faces and slides against the mating ring (131), wherein the mechanical seal device is characterized in that: the seal cover (105) is a split structure comprising at least first seal covers (107, 108) and a second seal cover (106); the first seal covers (107, 108) are connected detachably in the axial direction, leaving the second seal cover (106); and the seal ring (133) is connected so as to be able to follow the first seal covers (107, 108).
F16J 15/34 - Joints d'étanchéité entre deux surfaces mobiles l'une par rapport à l'autre par bague glissante pressée contre la face plus ou moins radiale d'une des deux parties
Provided is a mechanical sealing device that affords excellent ease of handling for maintenance of the sealing elements, such as the seal ring. This mechanical sealing device is equipped with a mating ring (31) that rotates together with a rotating shaft (1), and a seal ring (33) that faces and slides against the mating ring (31), and is adapted to provide a seal between the rotating shaft (1) and a seal cover (5) fastened to a machine body (2), wherein the seal cover (5) is a block structure comprising at least an inside diameter-side seal cover (8) and an outside diameter-side seal cover (7), the inside diameter-side seal cover (8) being detachably connected to the outside diameter-side seal cover (7), and the seal ring (33) being connected to the inside diameter-side seal cover (33) in such a way as to be conformable thereto.
F16J 15/34 - Joints d'étanchéité entre deux surfaces mobiles l'une par rapport à l'autre par bague glissante pressée contre la face plus ou moins radiale d'une des deux parties
Provided is an easily mountable sealing device. A sealing device (100) seals the annular gap between a relatively rotating shaft (300) and a housing (200). The sealing device (100) is characterized by comprising: a sleeve (110) affixed to the shaft (300); a case (130) affixed to the housing (200); an end surface seal (140) affixed to the sleeve (110) and having a lip section (141) slidable relative to an end surface of the case (130); and a set plate (150) for temporarily affixing the sleeve (110) and the case (130) and removed after the case (130) is affixed to the housing (200) and the sleeve (110) is affixed to the shaft (300).
The present invention improves sealing between a floating ring (130) and a rotating ring (110). A mechanical seal (100) for sealing a ring-shaped gap between a rotating shaft (200) and a housing (300), the mechanical seal being characterized in: comprising a rotating ring (110) that rotates together with the rotating shaft (200), a fixed ring (120) that is fixed with respect to the housing (300), and a floating ring (130), which is provided between the rotating ring (110) and the fixed ring (120) in the axial direction of the rotating shaft (200) and has a sliding section (131) that moves in sliding contact with the rotating ring (110); the fluid to be sealed being sealed by the sliding section (131) of the floating ring (130) that moves in sliding contact with a sliding section (111) of the rotating ring (110); and the sliding section (131) having multiple carbon fibers and silicon carbide provided between the multiple carbon fibers.
F16J 15/34 - Joints d'étanchéité entre deux surfaces mobiles l'une par rapport à l'autre par bague glissante pressée contre la face plus ou moins radiale d'une des deux parties
Provided is a mechanical seal having improved sealing properties obtained without providing a seal member between a floating ring and a stationary ring. A mechanical seal (100) has: a rotatable ring (110); a stationary ring (120); and a floating ring having a ring-shaped sliding section (131) which protrudes relative to the rotatable ring (110) in the axial direction and which has a sliding surface (131a) sliding on the rotatable ring (120), the sliding surface (131a) being the front end surface of the sliding section (131), which faces in the direction in which the sliding section (131) protrudes, the floating ring also having a ring-shaped section (132) to be pressed, the ring-shaped section (132) protruding relative to the stationary ring (120) in the axial direction and having a surface (132a) to be pressed which is in contact with the stationary ring (120), the surface (132a) to be pressed being the front end surface of the section (132) to be pressed, which faces in the direction in which the surface (132a) protrudes, the floating ring being adapted so that, by means of the sliding surface (131a) of the sliding section (131) and the surface (132a) to be pressed of the section (132) to be pressed, the floating ring seals fluid to be sealed. The mechanical seal (100) is characterized in that the area of the axial end surface of the floating ring (130), which faces the fluid side (L) and which is subjected to the pressure of the fluid to be sealed, the pressure acting toward the rotatable ring (110), and the area of the axial end surface of the floating ring (130), which faces the fluid side (L) and which is subjected to the pressure of the fluid to be sealed, the pressure acting toward the stationary ring (120), are different.
F16J 15/34 - Joints d'étanchéité entre deux surfaces mobiles l'une par rapport à l'autre par bague glissante pressée contre la face plus ou moins radiale d'une des deux parties
31.
METHOD FOR ASSEMBLING FERROFLUID SEAL, AND FERROFLUID SEAL
Provided is an assembly method in which movement of a magnetic pole member can be suppressed by magnetic force from an attached magnetic-field-forming member when a ferrofluid seal is assembled in which holding parts for a ferrofluid are provided on both sides of a magnetic-field-forming member. A method for assembling a ferrofluid seal (100) provided with a magnetic-field-forming member (130) divided in a circumferential direction, a magnetic pole member (120) having a pair of ferrofluid holding parts (121, 122) and a linking part (123) for linking the holding parts, a first bearing (160), and a second bearing (170), wherein the following steps are performed in sequence: a step for securing the first bearing (160) to a shaft (400) such that the shaft (400) faces toward a vertical direction; a step for attaching the magnetic pole member (120) from above the first bearing (160); a step for securing the second bearing (170) on the shaft (400) from above the magnetic pole member (120), thereby securing the magnetic pole member (120) in a state of being positioned relative to the shaft (400); and a step for attaching the magnetic-field-forming member (130) between the pair of ferrofluid holding parts (121, 122).
F16J 15/43 - Joints d'étanchéité entre deux surfaces mobiles l'une par rapport à l'autre par un fluide maintenu en position d'étanchéité par la force magnétique
F16C 33/78 - Dispositifs d'étanchéité pour roulements à billes ou à rouleaux avec diaphragme, disque ou bague, avec ou sans parties élastiques
F16C 35/07 - Leur fixation sur l'arbre ou dans la carcasse d'enveloppe avec interposition d'un organe
32.
SETSCREW, AFFIXATION STRUCTURE, AFFIXATION METHOD, AND SEALING STRUCTURE
Provided are a setscrew, an affixation structure, an affixation method, and a sealing structure, in which the amount of exposure of the setscrew is reduced and the setscrew is prevented from coming out of a female thread. An affixation structure affixes a first member (20), in which a female thread (21) is formed, and a second member (30), which is provided slidable relative to the first member (20) and in which a through-hole (31) having a diameter smaller than the inner diameter of the female thread (21) is formed. The affixation structure is characterized in that the first member (20) and the second member (30) are affixed by positioning the second member (30) relative to the first member (20) while the center axes of the female thread (21) and of the through-hole (31) are aligned with each other, engaging the male thread of the setscrew (10) with the female thread (21), and inserting a small-diameter section (13) into the through-hole (31).
F16B 35/00 - Boulons filetésBoulons d'ancrageGoujons filetésVisVis de pression
F16B 5/02 - Jonction de feuilles ou de plaques soit entre elles soit à des bandes ou barres parallèles à elles par organes de fixation utilisant un filetage
F16B 7/18 - Assemblages de barres ou assemblages de tubes, p. ex. de section non circulaire, y compris les assemblages élastiques utilisant des éléments filetés
F16B 41/00 - Dispositions contre la perte des boulons, écrous, broches ou goupillesDispositions empêchant toute action non autorisée sur les boulons, écrous, broches ou goupilles
F16J 15/34 - Joints d'étanchéité entre deux surfaces mobiles l'une par rapport à l'autre par bague glissante pressée contre la face plus ou moins radiale d'une des deux parties
A first annular member (210) attached to a housing (600) and a second annular member (310) attached to the outer periphery of a rotating shaft (500) sandwich a stationary ring (220) and rotating ring (320), which are each configured in a ring shape by combining a plurality of split bodies, in the axial direction in the state of forming a sliding tool surface, and are configured in a manner able to be affixed to each other by means of a linking member (400) in a manner so as to maintain the state of the positioning in the axial direction of the first annular member (210), stationary ring (220), rotating ring (320), and second annular member (310) and the positioning in the peripheral direction of the first annular member (210) and second annular member (310).
F16J 15/34 - Joints d'étanchéité entre deux surfaces mobiles l'une par rapport à l'autre par bague glissante pressée contre la face plus ou moins radiale d'une des deux parties
A mechanical seal has a seal ring and a mating ring that faces and slides against the seal ring and either the seal ring or mating ring is supported via a bellows on the equipment interior side of a seal cover installed on a housing, while the other rotates together with a rotational shaft; and a baffle sleeve with a roughly L-shaped cross-section is fixed on the equipment exterior side of the seal cover to guide quenching liquid to the sliding surfaces of the seal ring and mating ring, where the baffle sleeve is structurally split into a flange part and cylinder part. The mechanical seal allows for preassembly of its seal members on the stationary side, baffle sleeve, damper, and other related parts at a factory, service center, etc., in a reliable and controlled manner, requiring fewer assembly steps during onsite engineering works.
F16J 15/34 - Joints d'étanchéité entre deux surfaces mobiles l'une par rapport à l'autre par bague glissante pressée contre la face plus ou moins radiale d'une des deux parties
F16J 15/36 - Joints d'étanchéité entre deux surfaces mobiles l'une par rapport à l'autre par bague glissante pressée contre la face plus ou moins radiale d'une des deux parties reliée par un diaphragme à l'autre partie
Provided is a sealing device equipped with a pumping ring, which increases the flow of self-circulating fluid and makes increased lift possible. The pumping ring (160) is equipped with: through holes (161), which are provided so as to penetrate from the inner circumferential surface to the outer circumferential surface and serve as fluid passages; and inlet grooves (162), which are provided so as to run from the side surface of the inner circumferential surface on the side where a mechanical seal (M) is disposed to a through hole (161) and which guide the fluid to the through holes (161). The sealing device is characterized in that the outer circumferential surface of a sleeve (110) is provided with auxiliary inlet grooves (111) for guiding the fluid to the through holes (161) at positions that face the inlet grooves (162) and the through holes (161).
F16J 15/34 - Joints d'étanchéité entre deux surfaces mobiles l'une par rapport à l'autre par bague glissante pressée contre la face plus ou moins radiale d'une des deux parties
Provided is a mechanical seal in which divided bodies which composes a seal ring are positioned with improved accuracy. A mechanical seal (100) which seals the annular gap between a rotating shaft (500) and a housing (600) is provided with an annular divided seal ring which is configured by combining divided bodies. The mechanical seal (100) is characterized by comprising metallic bands (231, 331) which affix the divided bodies by tightening around the outer peripheral surfaces thereof.
F16J 15/34 - Joints d'étanchéité entre deux surfaces mobiles l'une par rapport à l'autre par bague glissante pressée contre la face plus ou moins radiale d'une des deux parties
F16B 2/08 - Brides ou colliers, c.-à-d. dispositifs de fixation dont le serrage est effectué par des forces effectives autres que la résistance à la déformation inhérente au matériau dont est fait le dispositif externes c.-à-d. agissant par contraction utilisant des frettes ou des bandes
[Problem] To provide a sliding seal member that is provided with the characteristics of silicon carbide, which are hardness and low wear, and is provided with suitable sealing and lubricating properties. [Solution] A sliding seal member that has a sliding face that slides with respect to other members and that seals a fluid via the sliding face is characterized by having carbon fibers with the lengthwise direction of the fibers arranged to be substantially parallel with respect to the sliding face, and silicon carbide that is provided between the plurality of carbon fibers.
F16J 15/34 - Joints d'étanchéité entre deux surfaces mobiles l'une par rapport à l'autre par bague glissante pressée contre la face plus ou moins radiale d'une des deux parties
C04B 35/80 - Fibres, filaments, "whiskers", paillettes ou analogues
A mechanical seal device (1) has a seal case (30) which is mounted to a device body, a rotary seal ring (60) which is mounted to a rotating shaft (100), a stationary seal ring (50) which is disposed facing the rotary seal ring (60) in the axial direction, and a bellows (40) which is mounted between the stationary seal ring (50) and the seal case (30) in an axially extendable and retractable manner. The seal case (30) has formed therein a hydrostatic fluid supply hole (56) which supplies hydrostatic fluid to a hydrostatic fluid chamber (C) located on the inner peripheral surface side of the bellows (40). The stationary seal ring (50) has formed therein a communication hole which conducts the hydrostatic fluid within the hydrostatic fluid chamber (C) to the gap between the sealing surfaces of both the stationary seal ring (50) and the rotary seal ring (60). Sealed fluid is disposed on the outer peripheral surface side of the bellows (40).
F16J 15/34 - Joints d'étanchéité entre deux surfaces mobiles l'une par rapport à l'autre par bague glissante pressée contre la face plus ou moins radiale d'une des deux parties
F16J 15/52 - Joints d'étanchéité entre organes mobiles l'un par rapport à l'autre, par étanchéité sans surfaces mobiles l'une par rapport à l'autre, p. ex. des garnitures étanches aux fluides pour transmettre un mouvement au travers d'une paroi par soufflets ou diaphragmes d'étanchéité
A pumping ring 46 producing an axial flow of sealed flow is secured to a rotary shaft 6 at an axial position different from a rotary ring 56 so that the sealed fluid positioned in the sealed space 33 flows along the axial direction of the rotary shaft 6. A discharge hole 14 is formed on an inner circumferential surface of a seal cover 8 positioned in the downstream side of the axial flow of the sealed fluid resulting from a rotation of the pumping ring 46. An inflow hole 15 is formed in the upstream side of the axial flow of the sealed fluid resulting from the rotation of the pumping ring 46, so that the sealed fluid discharged from the discharge hole 14 returns to the inside of the sealed space from the inflow hole 15. On the inner circumferential surface of the seal cover 8 provided with the discharge hole 14, a baffle member 18 is provided so that it protrudes radially inward in order to block the flow of the sealed fluid along the rotating direction of a retainer 52 and orient the sealed fluid toward the discharge hole 14.
F16J 15/34 - Joints d'étanchéité entre deux surfaces mobiles l'une par rapport à l'autre par bague glissante pressée contre la face plus ou moins radiale d'une des deux parties
F16J 15/40 - Joints d'étanchéité entre deux surfaces mobiles l'une par rapport à l'autre par un fluide
A mechanical seal device for sealing a fluid inside a machine in a gap between a stuffing box and a rotary shaft, wherein the mechanical seal device is characterized in having a seal cover attached to the stuffing box, a fixing seal ring attached to the seal cover and provided with a first seal surface, a rotating seal ring attached to the rotary shaft and provided with a second seal surface capable of sliding against the first seal surface, and a collar which rotates integrally with the rotary shaft, the seal surface of one of the fixing seal ring or the rotating seal ring being formed so as to be narrower in the radial direction than the seal surface of the other of the fixing seal ring or the rotating seal ring, a gap being formed between the collar and the back surface, which is opposite the second seal surface, of the rotating seal ring, and the rotating seal ring being elastically held in the axial direction of the rotary shaft and rotating integrally with the collar.
F16J 15/34 - Joints d'étanchéité entre deux surfaces mobiles l'une par rapport à l'autre par bague glissante pressée contre la face plus ou moins radiale d'une des deux parties
Provided is a bellows seal which is configured so that the prevention of breakage of the bellows seal caused by the shrink fit of a stationary-side sealing ring disposed on the inner peripheral side of a seal cover through a bellows so as to be movable in the axial direction, the prevention of breakage of the bellows caused by stress, and the improvement of the sealing properties are achieved simultaneously. A bellows seal is provided with: a bellows (11) mounted to the inner peripheral side of a seal cover (3) at a position between the seal cover (3) and a first sealing ring (8) so that the bellows (11) can extend and contract in the axial direction; and a spring (13) disposed on the inner peripheral side of the seal cover (3) and pressing the first sealing ring (8) toward a second sealing ring (9). The bellows seal is characterized in that the first sealing ring (8) is connected in a sealing manner by a lap joint to an end surface of a retainer (12) which is affixed to the bellows (11), and in that the first sealing ring (8) and the retainer (12) are affixed to the seal cover (3) side by a knock pin (17) so as not to rotate.
F16J 15/34 - Joints d'étanchéité entre deux surfaces mobiles l'une par rapport à l'autre par bague glissante pressée contre la face plus ou moins radiale d'une des deux parties
An inside-type mechanical seal is mounted between a rotating shaft and a housing, and adapted for preventing leakage of a sealed fluid from an outer circumference of a sliding surface in the direction of an inner circumference thereof, wherein provided are a rotary-side sealing ring mounted on a rotating shaft side, a stationary-side sealing ring mounted on a seal case side, an annular packing for pushing the stationary-side sealing ring toward the rotary-side sealing ring, a holding part on the outer circumferential side being fitted in the seal case, and a seal lip part on the inner circumferential side being in close contact with the stationary-side sealing ring, and wherein provided to the seal case is a ring-shaped projection abutting against a back surface of the packing during assembly of the mechanical seal, and adapted for pushing the packing toward the stationary-side sealing ring.
F16J 15/34 - Joints d'étanchéité entre deux surfaces mobiles l'une par rapport à l'autre par bague glissante pressée contre la face plus ou moins radiale d'une des deux parties
F16J 15/38 - Joints d'étanchéité entre deux surfaces mobiles l'une par rapport à l'autre par bague glissante pressée contre la face plus ou moins radiale d'une des deux parties rendue étanche par une garniture
43.
Welded bellows for semiconductor manufacturing device
An accordion-structured welded bellows for a semiconductor-manufacturing device is characterized in that a plurality of annular bellows plates having curved surfaces in a radial direction are connected in an alternating fashion on the outside-diameter side and the inside-diameter side, wherein the annular bellows plates have a processing-side bellows plate and a non-processing-side bellows plate, a gas layer is interposed between the two bellows plates, the processing-side bellows plate is configured as a thick plate, and the non-processing-side bellows plate is configured as a thin plate. The welded bellows is less likely to be damaged by foreign matter and to be able to use the non-processing-side bellows plate to compensate for any damage to the processing-side bellows plate.
H01L 21/00 - Procédés ou appareils spécialement adaptés à la fabrication ou au traitement de dispositifs à semi-conducteurs ou de dispositifs à l'état solide, ou bien de leurs parties constitutives
Provided is a mechanical seal equipped with a seal cover which is highly versatile and which is, even if affixed to a housing by two bolts, less likely to deform. A mechanical seal (100) is provided with a rotating ring (40), a stationary ring (20), and a seal cover (10) which mounts the stationary ring (20) to a housing (300). The mechanical seal is characterized in that the seal cover (10) has two U-shaped grooves (11) and two long holes (12), the U-shaped grooves (11) and the long holes (12) being used to fasten bolts and being arranged alternately at equal intervals in the circumferential direction of a shaft hole, in that the long holes (12) are long in the radial direction of the shaft hole, and in that the innermost positions of the long holes (12), the innermost positions being those through which the shanks of the bolts can be inserted, are located on the inner side of the innermost positions of the U-shaped grooves (11), the innermost positions being those through which the shanks of the bolts can be inserted.
F16J 15/34 - Joints d'étanchéité entre deux surfaces mobiles l'une par rapport à l'autre par bague glissante pressée contre la face plus ou moins radiale d'une des deux parties
Provided is a mechanical seal with which the associated components, such as a stationary-side seal member and the like, a baffle sleeve, and a damper, can be preassembled reliably and in a controlled state at a work site, a service center or the like, thereby reducing the number of assembly steps during on-site work. This mechanical seal is equipped with a seal ring (9), and a mating ring (10) that opposes and makes sliding contact with the seal ring (9), with either the seal ring (9) or the mating ring (10) being supported via a bellows (7) on the device-interior side of a seal cover (2) mounted in a housing (1), and the other, that is, the mating ring or the seal ring, rotating together with a rotary shaft (3). This mechanical seal is characterized by being equipped with a baffle sleeve (17, 37), which has an approximately L-shaped cross section and is affixed to the device-exterior side of the seal cover (2), and which introduces a quenching liquid to the sliding surface between the seal ring (9) and the mating ring (10), and the baffle sleeve (17, 37) is constructed such that a flange part (21, 38) and a tubular part (22, 39) are separate from each other.
F16J 15/34 - Joints d'étanchéité entre deux surfaces mobiles l'une par rapport à l'autre par bague glissante pressée contre la face plus ou moins radiale d'une des deux parties
F16J 15/36 - Joints d'étanchéité entre deux surfaces mobiles l'une par rapport à l'autre par bague glissante pressée contre la face plus ou moins radiale d'une des deux parties reliée par un diaphragme à l'autre partie
A semiconductor fabrication device welded bellows of an accordion structure is characterized in that a plurality of annular bellows plates having faces curving in a radial direction are connected alternatingly at the outside diameter side and inside diameter side, wherein the annular bellows plates are provided with a treatment-side bellows plate and a non-treatment-side bellows plate, a gas layer disposed between the two bellows plates, the treatment-side bellows plate being of lesser thickness, and the non-treatment-side bellows plate being of greater thickness. The bellows are highly resistant to damage caused by foreign matter; or, in the unlikely case that the treatment-side bellows plate becomes damaged, the damage can be compensated for by the non-treatment side bellows plate.
F16J 15/52 - Joints d'étanchéité entre organes mobiles l'un par rapport à l'autre, par étanchéité sans surfaces mobiles l'une par rapport à l'autre, p. ex. des garnitures étanches aux fluides pour transmettre un mouvement au travers d'une paroi par soufflets ou diaphragmes d'étanchéité
Provided is a breakdown-predicting mechanical seal system that can detect abnormalities in sliding surfaces of a rotation-side sealing element and a static-side sealing element without influence from the area surrounding the sliding sections of the rotation-side sealing element and the static-side sealing element. The mechanical seal is an outside type, in which is sealed a high-temperature sealed fluid that may leak in the direction of the outer periphery from the inner periphery of the sliding surfaces of the rotation-side sealing element and the static-side sealing element, and is characterized in that the rotation-side sealing element and the static-side sealing element are disposed on the outside of a stuffing box, a cooling jacket is provided between the inner periphery of a housing and the outer periphery of a rotating shaft so as to prevent circulation of the high-temperature sealed fluid to the sliding surfaces, and a temperature detection means is provided for detecting the temperature of the sliding surfaces and the temperature of the sealed fluid at the inner periphery of the sliding surfaces.
F16J 15/34 - Joints d'étanchéité entre deux surfaces mobiles l'une par rapport à l'autre par bague glissante pressée contre la face plus ou moins radiale d'une des deux parties
[Problem] To provide a mechanical seal in which the deposition of a slurry fluid is prevented from a sealing/sliding surface to a secondary seal. [Solution] An inside-type mechanical seal for preventing a fluid to be sealed from leaking from the outer circumference to the inner circumference direction of a sealing/sliding surface when being attached to a rotating shaft and a housing. The mechanical seal is provided with a rotating seal ring attached to the side of the rotating shaft and a fixed seal ring attached to the side of a seal cover, wherein a static-type O-ring in which a coil spring is integrated on the side of the fixed seal ring is disposed as a secondary seal between the fixed seal ring and the seal cover, and a cylindrical stirring member is disposed in a raised manner from the side of the rotating seal ring in a space connected to the fluid-to-be-sealed side of the rotating seal ring and the fixed seal ring on the outer circumferential side of the sealing/sliding surface.
F16J 15/34 - Joints d'étanchéité entre deux surfaces mobiles l'une par rapport à l'autre par bague glissante pressée contre la face plus ou moins radiale d'une des deux parties
A pumping ring (46), producing an axial flow of a sealed fluid so that a sealed fluid positioned in a sealed space (33) flows along the central axial direction of a rotating shaft (6), is secured to a rotating shaft (6) in an axial position different than a rotating ring (56). A discharge hole (14) is formed in the inner circumferential surface of a seal cover (8) positioned on the downstream side of the axial flow of the sealed fluid resulting from the rotation of the pumping ring (46). An inflow hole (15) is formed in a position on the upstream side of the axial flow of the sealed fluid resulting from the rotation of the pumping ring (46). The configuration is such that sealed fluid discharged from the discharge hole (14) returns to the interior of the sealed space (33) from the inflow hole (15). A rectifying member (18) is provided so as to protrude toward the inside in a radial direction in the inner circumferential surface of the seal cover (8) where the discharge hole (14) is formed. The rectifying member retains the flow of the sealed fluid along the rotational direction of a retainer (52) and orients the sealed fluid toward the discharge hole (14).
F16J 15/34 - Joints d'étanchéité entre deux surfaces mobiles l'une par rapport à l'autre par bague glissante pressée contre la face plus ou moins radiale d'une des deux parties
Provided is a shaft seal device whereby penetration of foreign matter into a sealed region can be suppressed while the sealed region is in a vacuum state. The present invention is characterized in that: a first seal structure section (100) is a non-contact seal structure comprising a first fixed ring and a first rotating ring, and having a very narrow gap between the atmosphere-side end surface of the first fixed ring and that end surface of the first rotating ring which is located on the side of the sealed region; a second seal structure section (200) is a contact seal structure comprising a second fixed ring and a second rotating ring so that the mating axial-end surfaces of the second fixed ring and the second rotating ring slide relative to each other; a seal cover (300) for forming a close space (R) between the first seal structure section (100) and the second seal structure section (200) is fixed on the outer peripheral side of the first fixed ring and the second fixed ring; and a vacuum-drawing mechanism (700) that allows a vacuum state to be established in the closed space (R) is provided.
F16J 15/34 - Joints d'étanchéité entre deux surfaces mobiles l'une par rapport à l'autre par bague glissante pressée contre la face plus ou moins radiale d'une des deux parties
In order to provide a mechanical seal with which a stable seal with no leaking can be obtained on the inside of a device even when variation occurs in the pressure of a fluid to be sealed, an inside-type mechanical seal which is mounted between a rotary shaft and a housing and prevents leaking in the direction from the outer circumference to the inner circumference of the sliding surface, of a fluid to be sealed, is equipped with a rotary-shaft-side sealing ring mounted on the rotary-shaft side and a stationary-side sealing ring mounted on the seal-case side, and is provided with a ring-shaped packing, having a retaining part on the outer circumferential side that fits into the seal case, and a seal lip part on the inner circumferential side that adheres to the stationary-side sealing ring, pressing the stationary-side sealing ring toward the rotating-side sealing ring. In addition, a ring-shaped protrusion, which makes contact with the back face of the packing and presses the packing toward the stationary-side sealing ring when the mechanical seal is assembled, is provided on the seal case.
F16J 15/34 - Joints d'étanchéité entre deux surfaces mobiles l'une par rapport à l'autre par bague glissante pressée contre la face plus ou moins radiale d'une des deux parties
52.
WELDED BELLOWS FOR SEMICONDUCTOR PRODUCTION DEVICES
The present invention provides a welded bellows unlikely to be damaged by foreign matter, and having redundancy so as to be capable of supplementing by using the bellows plate on the non-treatment side in the unlikely event that the treatment-side bellows plate is damaged. A bellows-shaped welded bellows for semiconductor production devices that is obtained by causing a plurality of circular bellows plates that are curved in the radial direction to connect in an alternating manner toward the outer- and the inner-radial sides, the welding bellows being characterized in that: the circular bellows plates are provided with a treatment-side bellows plate and a non-treatment-side bellows plate; and there is an air layer interposed between the two bellows plates, the plate thickness of the treatment-side bellows plate is thin, and the plate thickness of the non-treatment-side bellows plate is thick.
F16J 15/52 - Joints d'étanchéité entre organes mobiles l'un par rapport à l'autre, par étanchéité sans surfaces mobiles l'une par rapport à l'autre, p. ex. des garnitures étanches aux fluides pour transmettre un mouvement au travers d'une paroi par soufflets ou diaphragmes d'étanchéité
53.
WELDED BELLOWS FOR SEMICONDUCTOR PRODUCTION DEVICES
The present invention provides a welded bellows unlikely to be damaged by foreign matter, and having redundancy so as to be capable of supplementing by using the bellows plate on the non-treatment side in the unlikely event that the treatment-side bellows plate is damaged. A bellows-shaped welded bellows for semiconductor production devices that is obtained by causing a plurality of circular bellows plates that are curved in the radial direction to connect in an alternating manner toward the outer- and the inner-radial sides, the welding bellows being characterized in that: the circular bellows plates are provided with a treatment-side bellows plate and a non-treatment-side bellows plate; and there is an air layer interposed between the two bellows plates, the plate thickness of the treatment-side bellows plate is thick, and the plate thickness of the non-treatment-side bellows plate is thin.
F16J 15/52 - Joints d'étanchéité entre organes mobiles l'un par rapport à l'autre, par étanchéité sans surfaces mobiles l'une par rapport à l'autre, p. ex. des garnitures étanches aux fluides pour transmettre un mouvement au travers d'une paroi par soufflets ou diaphragmes d'étanchéité
brevets
