The present invention relates to a confocal Raman micro-spectrometry device (100) comprising a laser source (1), a microscope objective (3) arranged so as to focus the excitation laser beam (10) towards a sample (5), and a focusing system for adjusting the focus on the sample. According to the invention, the focusing system comprises an optical beam splitter (11), an image detector (13), an astigmatic optical system (12), a processor comprising an image processing system (15) and a feedback device (16), wherein the optical beam splitter (11) is suitable for extracting a fraction (21) of the reflected beam, the astigmatic optical system (12) is suitable for projecting the fraction (21) of the reflected beam as a spot onto the image detector (13), and the image processing system (15) is suitable for calculating a focusing error signal on the basis of the image of the spot.
The invention relates to a system (100) for measuring the concentration of at least one chemical component of a flowing fluid (200), comprising: - a light source (10) configured to emit an excitation light beam (11), - a measurement cell (20) comprising a fluid duct suitable for a fluid flow, comprising portholes (23, 24) arranged, respectively, to receive the excitation light beam and to transmit a first light beam (12) formed by scattering and/or transmission of the excitation light beam through the fluid, - an optical device (30) positioned to reflect the first light beam and form a light beam (13) reflected in the direction of the fluid, a second light beam (14) being formed by scattering and/or transmission of the reflected light beam through the fluid, - a Raman spectrometer (45) configured to receive the second light beam and to generate a spectrometry measurement, - a pressure sensor (50) suitable for measuring the pressure of the fluid, - a computing unit (60) programmed to determine the concentration of the at least one chemical component on the basis of the spectrometry measurement and the pressure of the fluid.
The invention relates to an optical microscope comprising an optical system (1) and a confocal diaphragm (2), the confocal diaphragm (2) being arranged in a Fourier plane (12) of the microscope, the confocal diaphragm (2) being fixed relative to the body of the microscope, the microscope being able to collect a light beam (20) from the object plane, the optical system (1) being suitable for focusing the light beam (20) in the Fourier plane (12) and for feeding at least a portion of the light beam (20) through the confocal diaphragm (2). According to the invention, the optical microscope comprises a refractive optical component (3) placed between the optical system (1) and the confocal diaphragm (2), the refractive optical component (3) being mounted so as to be rotatable transverse to the optical axis (10) of the microscope in order to adjust a lateral position of the focused light beam relative to the confocal diaphragm (2).
The invention relates to a system (100) for measuring at least one chemical component of a flowing fluid for an electrochemical-generator system, the measuring system comprising: - a light source (111) generating a light beam, - a double-pass measurement cell (120) comprising an inlet opening (121) configured to let the fluid enter, an outlet opening configured to let the fluid exit, and two portholes placed on a path of the fluid, said portholes being positioned facing each other on a main optical axis transverse to the flow of the fluid and being configured to transmit the light beam, - a reflective optical device (130) positioned to reflect the light beam in the direction of the flowing fluid through the portholes, and - a Raman spectrometer (112) configured to receive the light beam, with a view to detecting a Raman signal emitted by the flowing fluid and to deducing therefrom a measurement of at least one chemical component of the flowing fluid.
The invention relates to an optical spectrometer (10) comprising: an aperture (13) configured to receive a source light beam, a first optical system being configured to receive the source light beam and form a collimated light beam directed towards a diffraction grating, the diffraction grating being configured to receive the collimated light beam and form a diffracted light beam, and a second optical system being configured to form an image of the diffracted light beam on an image sensor. According to the invention, the image sensor is a CMOS sensor comprising pixels (34) arranged in N rows which are oriented in a direction that is inclined at an angle alpha with respect to the spectral diffraction direction of the image of the diffracted light beam, where alpha is less than 10 degrees, N is at least 3, and each pixel has a height and width defining a pixel aspect ratio that is greater than two.
09 - Appareils et instruments scientifiques et électriques
Produits et services
Scientific apparatus and instruments for optical analysis;
photoluminescence or fluorescence Raman spectrographs,
spectrometers and microscopes; software (recorded programs)
in the field of scientific apparatus and instruments for
optical analysis and for analysis of semiconductors.
09 - Appareils et instruments scientifiques et électriques
Produits et services
Scientific apparatus and instruments for optical analysis; photoluminescence or fluorescence Raman spectrographs, spectrometers and microscopes; software (recorded programs) in the field of scientific apparatus and instruments for optical analysis and for analysis of semiconductors.
10.
A TRANSPORT AND TESTING TROLLEY FOR MOVING AND CONDITIONING AND/OR TESTING STACKED ASSEMBLIES OF ELECTROLYSER AND/OR FUEL CELL COMPONENTS, AN ASSOCIATED STATION
The invention relates to a transport and testing trolley (1) for moving and conditioning and/or testing stacked assemblies of electrolyser and/or fuel cell components. The trolley allows to take stacks immediately at the end of an in-zone production, for example an in-line production, to transport them directly to a conditioning and/or testing station and to implement conditioning and/or testing step(s) of said stacks directly on the trolley, without having to manipulate them before said steps. Figure 1.
H01M 8/248 - Moyens pour comprimer les empilements d’éléments à combustible
H01M 8/043 - Procédés de commande des éléments à combustible ou des systèmes d’éléments à combustible appliqués pendant des périodes spécifiques
H01M 8/2404 - Procédés ou appareillages pour le groupement d’éléments à combustible
H01M 8/124 - Éléments à combustible avec électrolytes solides fonctionnant à haute température, p. ex. avec un électrolyte en ZrO2 stabilisé caractérisés par le procédé de fabrication ou par le matériau de l’électrolyte
The invention relates to an apparatus (100) and method for Raman, photoluminescence or fluorescence spectroscopy. According to the invention, the apparatus comprises an optical device (16) for polarisation splitting and modification, comprising a polarisation splitter (18) and a compensator (17), the optical device (16) being configured and oriented to split the incident light beam (20) emitted onto the diffraction grating (12) into a first part (21) of the emitted light beam that is polarised according to a first polarisation state and a second part (22) of the emitted light beam that is polarised according to a second polarisation state, and the detection system (13) being suitable for receiving, in a first detection zone (14), a spectrum of the first part (21) of the emitted light beam and, simultaneously, in a second detection zone (15), a spectrum of the second part (22) of the emitted light beam.
Disclosed is an optical device for deflecting a light beam, including: —a first flat reflective element arranged so as to reflect an incoming light beam into a reflected light beam, extending in a first plane, the incoming light beam and the reflected light beam defining an incidence plane; and —a second flat reflective element, arranged to reflect the reflected light beam into an outgoing light beam, extending in a second plane that is transverse to the plane of incidence. The first plane and the second plane are secant along a line of intersection and form between them a dihedral angle. The first reflective element and the second reflective element can be rotated together about an axis of rotation substantially coincident with the line of intersection.
G02B 26/08 - Dispositifs ou dispositions optiques pour la commande de la lumière utilisant des éléments optiques mobiles ou déformables pour commander la direction de la lumière
G01J 3/44 - Spectrométrie RamanSpectrométrie par diffusion
G01J 3/02 - SpectrométrieSpectrophotométrieMonochromateursMesure de la couleur Parties constitutives
Disclosed is a glow discharge spectrometry device including a glow discharge lamp and an optical emission spectrometer adapted to receive a light beam emitted by a glow discharge plasma. The optical emission spectrometer includes a dispersive optical component and an echelle grating arranged and configured in such a way as to form a two-dimensional spectrum of the light beam, the two-dimensional spectrum being dispersed in a plurality of diffraction orders, the plurality of diffraction orders extending along a first direction and each diffraction order extending spectrally according to a second direction transverse to the first direction and a pixel-array CMOS sensor arranged and configured to acquire the two-dimensional spectrum as a function of time.
G01N 21/68 - Systèmes dans lesquels le matériau analysé est excité de façon à ce qu'il émette de la lumière ou qu'il produise un changement de la longueur d'onde de la lumière incidente excité électriquement, p. ex. par électroluminescence en utilisant des champs électriques à haute fréquence
G01B 11/22 - Dispositions pour la mesure caractérisées par l'utilisation de techniques optiques pour mesurer la profondeur
G01N 21/67 - Systèmes dans lesquels le matériau analysé est excité de façon à ce qu'il émette de la lumière ou qu'il produise un changement de la longueur d'onde de la lumière incidente excité électriquement, p. ex. par électroluminescence en utilisant des arcs électriques ou des décharges électriques
14.
OPTICAL MICROSCOPE COMPRISING AN OPTOMECHANICAL FINE-ADJUSTMENT DEVICE AND OPTOMECHANICAL ADJUSTMENT METHOD
The invention relates to an optical microscope comprising an optical system (1) and a confocal diaphragm (2), the confocal diaphragm (2) being arranged in a Fourier plane (12) of the microscope, the confocal diaphragm (2) being fixed relative to the body of the microscope, the microscope being able to collect a light beam (20) from the object plane, the optical system (1) being suitable for focusing the light beam (20) in the Fourier plane (12) and for feeding at least a portion of the light beam (20) through the confocal diaphragm (2). According to the invention, the optical microscope comprises a refractive optical component (3) arranged between the optical system (1) and the confocal diaphragm (2), the refractive optical component (3) being mounted so as to be rotatable transverse to the optical axis (10) of the microscope in order to adjust a lateral position of the focused light beam relative to the confocal diaphragm (2).
Disclosed is a method of acquiring and forming a spectrometry image of a sample including the following steps: e1) acquisition of an initial image, composed of pixels, of an area of the sample and definition of a maximum set of N, 2≤N, measurement positions of spectrometry, each measurement position including a coordinate and an intensity determined on the basis of the pixels; e2) assignment of a classification value to each of the N measurement positions on the basis of deviations, calculated based on an intensity difference and a coordinate difference, between the measurement positions; e3) determination of a group of P, 1≤P≤N, measurement positions as a function of the classification values; e4) successively, for each measurement position of the group, positioning of an excitation beam in the measurement position on the area of the sample, acquisition of a spectrometry measurement and formation of the spectrometry image.
Disclosed is a reflective diffraction grating including at least one intermediate metal layer arranged between the external reflective layer and a surface of the substrate including the grating lines, the external reflective layer being consisted of a first metal and the intermediate metal layer being consisted of another metal, the other metal having a higher electron-phonon coupling coefficient than the electron-phonon coupling coefficient of the first metal or metal alloy, the external reflective layer having a thickness in a range having a lower limit determined by a reflection coefficient of the first metal and an upper limit determined by a thermal diffusion length of the first metal, and the intermediate metal layer having another thickness greater than a minimum value in such a way as to increase the high peak power ultrashort pulse light flux resistance of the reflective diffraction grating.
Disclosed is a polarization separation device to receive an incident light beam. The device includes first and second geometric-phase lenses, having respective first optical centers, first optical axes and first focal lengths. The first and second geometric-phase lenses are separated from one another by a first distance according to the first optical axis, the first geometric-phase lens and the second geometric-phase lens being disposed to have an optical power with the same sign for a first circular polarization state and an optical power with an opposite sign for another circular polarization state orthogonal to the first circular polarization state. The device is configured and directed so a projection of the first optical center according to the first optical axis on the second geometric-phase optical lens is located at a non-zero second distance from the second optical center.
G02B 27/28 - Systèmes ou appareils optiques non prévus dans aucun des groupes , pour polariser
G02B 7/02 - Montures, moyens de réglage ou raccords étanches à la lumière pour éléments optiques pour lentilles
G02B 26/06 - Dispositifs ou dispositions optiques pour la commande de la lumière utilisant des éléments optiques mobiles ou déformables pour commander la phase de la lumière
18.
OPTICAL DEVICE FOR DEFLECTING A LIGHT BEAM AND INELASTIC DIFFUSION SPECTROMETER COMPRISING SUCH A DEVICE
The invention relates to an optical device for deflecting a light beam (1), comprising: - a first flat reflective element (4), arranged so as to reflect an incoming light beam (2) into a reflected light beam (5), extending in a first plane (11), the incoming light beam and the reflected light beam defining an incidence plane; and - a second flat reflective element (6), arranged to reflect the reflected light beam into an outgoing light beam (3), extending in a second plane (12) that is transverse to the plane of incidence; the first plane and the second plane being secant along a line of intersection (D) and forming between them a dihedral angle (BETA); the first reflective element and the second reflective element can be rotated together about an axis of rotation (10) substantially coincident with the line of intersection.
G01N 21/63 - Systèmes dans lesquels le matériau analysé est excité de façon à ce qu'il émette de la lumière ou qu'il produise un changement de la longueur d'onde de la lumière incidente excité optiquement
G02B 7/182 - Montures, moyens de réglage ou raccords étanches à la lumière pour éléments optiques pour prismesMontures, moyens de réglage ou raccords étanches à la lumière pour éléments optiques pour miroirs pour miroirs
G02B 26/08 - Dispositifs ou dispositions optiques pour la commande de la lumière utilisant des éléments optiques mobiles ou déformables pour commander la direction de la lumière
09 - Appareils et instruments scientifiques et électriques
42 - Services scientifiques, technologiques et industriels, recherche et conception
Produits et services
Scientific apparatus and instruments; optical apparatus and
instruments; microscopes; scientific software related to the
field of microscopy; computer platforms in the form of
recorded or downloadable scientific software related to the
field of microscopy. Development, elaboration, programming and implementation of
scientific software related to the field of microscopy;
rental of scientific software related to the field of
microscopy; advice with respect to scientific software
related to the field of microscopy; updating of scientific
software for data processing; scientific and technological
services; research with respect to scientific software
related to the field of microscopy; electronic storage
services for archiving databases, images and other
electronic data.
09 - Appareils et instruments scientifiques et électriques
42 - Services scientifiques, technologiques et industriels, recherche et conception
Produits et services
Scientific apparatus and instruments; optical apparatus and
instruments; microscopes; scientific software related to the
field of microscopy; computer platforms in the form of
recorded or downloadable scientific software related to the
field of microscopy. Development, drafting, programming and implementation of
scientific software related to the field of microscopy;
rental of scientific software related to the field of
microscopy; advice with respect to scientific software
related to the field of microscopy; updating of scientific
software for data processing; scientific and technological
services; research with respect to scientific software
related to the field of microscopy; electronic storage
services for archiving databases, images and other
electronic data.
09 - Appareils et instruments scientifiques et électriques
42 - Services scientifiques, technologiques et industriels, recherche et conception
Produits et services
Scientific and optical apparatus and instruments; software;
software and software applications for image processing and
analysis; databases; computer platforms in the form of
recorded or downloadable software. Data storage; development, design, programming and
implementation of software and software applications
particularly for image processing and analysis; rental of
software and software applications; advice with respect to
software; updating of software for data processing; data
migration services; scientific and technological services;
research with respect to software; electronic storage
services for archiving databases, images and other
electronic data.
22.
Apparatus and method for light-beam scanning microspectrometry
An apparatus for light-beam scanning microscopy includes a microscope objective and a movement system for moving an excitation light beam. The movement system for moving the excitation light beam includes a first focusing optical component suitable for focusing the excitation light beam in an intermediate focal plane, another focusing optical component suitable for forming an image of the intermediate focal in a focal plane of the microscope objective and a single scanning mirror arranged between the first optical component and the intermediate focal plane, the scanning mirror being mounted on a stage, the orientation of which can be adjusted, so as to move the image of the focusing point in two transverse directions in the object focal plane or in the image focal plane of the microscope objective.
09 - Appareils et instruments scientifiques et électriques
Produits et services
scientific apparatus namely analyzers and optical apparatus and instruments namely spectrometers, microscopes; downloadable software for enhancing displays, superimposing layers, image processing and analysis, sharing and publishing images, and generating reports; downloadable electronic databases in the field of spectrometry and microscopy
09 - Appareils et instruments scientifiques et électriques
Produits et services
Scientific apparatus, namely, analyzers and optical apparatus and instruments, namely, spectrometers, microscopes; downloadable software for enhancing displays, superimposing layers, image processing and analysis, sharing and publishing images, and generating reports in the fields of microscopy and spectrometry; downloadable software and software applications for image processing and analysis in the fields of microscopy
09 - Appareils et instruments scientifiques et électriques
38 - Services de télécommunications
42 - Services scientifiques, technologiques et industriels, recherche et conception
Produits et services
Scientific apparatus and instruments; optical apparatus and
instruments; microscopes; software; software in the field
of microscopy studies; databases; computer platforms in the
nature of recorded or downloadable software. Electronic transmission of software via local and global
communication networks; providing access to online
multimedia content, websites and portals on the Internet;
providing access to platforms and portals on the Internet. Electronic data storage; hosting of platforms on the
Internet; developing, designing, programming and
implementing software, especially image processing software;
software rental; management of computer projects; advice
on software; updating of software for data processing;
data migration services; scientific and technological
services; research relating to software; electronic storage
services for archiving databases, images and other
electronic data.
09 - Appareils et instruments scientifiques et électriques
38 - Services de télécommunications
42 - Services scientifiques, technologiques et industriels, recherche et conception
Produits et services
(1) Appareils et instruments scientifiques; appareils et instruments optiques; microscopes; logiciels; logiciels dans le domaine de l'étude de la microscopie; bases de données; plateformes informatiques sous forme de logiciels enregistrées ou téléchargeables. (1) Transmission électronique de logiciels via des réseaux locaux et mondiaux de communications; fourniture d'accès à des contenus multimédias en ligne, à des sites web et des portails sur Internet; fourniture d'accès à des plateformes et des portails sur internet.
(2) Stockage électronique de données; hébergement de plateformes sur Internet; développement, élaboration, programmation et implémentation de logiciels notamment de logiciels de traitement d'images; location de logiciels; services de gestion de projets informatiques; conseils en matière de logiciels; mise à jour de logiciels pour le traitement de données; services de migration de données; services scientifiques et technologiques; recherche en matière de logiciels; services de stockage électronique pour l'archivage de bases de données, d'images et d'autres données électroniques.
09 - Appareils et instruments scientifiques et électriques
Produits et services
Electronic transmission of software data via local and global communication networks; providing access to online databases and electronic sites to view multimedia content on the internet Scientific apparatus, namely, analyzers and optical apparatus and instruments, namely, spectrometers, microscopes; downloadable software for enhancing displays, superimposing layers, image processing and analysis, sharing and publishing images, and generating reports; downloadable software and software applications for image processing and analysis; downloadable electronic databases in the field of spectrometry and microscopy
28.
METHOD FOR ACQUIRING AND FORMING A SPECTROMETRY IMAGE AND SPECTROSCOPIC MEASURING DEVICE
The invention relates to a method for acquiring and forming a spectrometry image (IS) of a sample (1) comprising the following steps: e1) acquiring an initial image (II), composed of pixels, of a region of the sample and defining a maximum set of N, 2≤ N, spectrometry measurement positions (PM), each measurement position comprising a coordinate (CX; CY) and an intensity (IR1; IR2; IG1; IG2; IB1; IB2) that is determined on the basis of the pixels; e2) assigning a classification value to each of the N measurement positions on the basis of deviations, which is calculated on the basis of a difference in intensity and of a difference in coordinates, between the measurement positions; e3) determining a group of P, 1≤P≤N, measurement positions according to the classification values; e4) successively, for each measurement position of the group, positioning an excitation beam (2) at said measurement position in the region of the sample, acquiring a spectrometry measurement and forming the spectrometry image.
Disclosed is an ellipsometer or scatterometer including a light source, a polarizer, an optical illumination system suitable for directing an incident polarized light beam towards a sample, a wavefront-division optical beam splitter arranged to receive a secondary light beam produced by reflection, transmission or diffraction, the wavefront-division optical beam splitter being oriented to form three collimated split beams, an optical polarization modification device and an optical polarization splitting device to form six angularly split beams, a detection system suitable for detecting the six split beams, and a processing system suitable for deducing therefrom an ellipsometric or scatterometric measurement.
The invention concerns a reflective diffraction grating comprising at least one intermediate metal layer (14) arranged between an outer reflective layer (13) and a surface (10) of the substrate comprising the grating lines (11), the outer reflective layer (13) being formed of a first metal and a metal alloy and the intermediate metal layer (14) being formed of another metal, the other metal having an electron-phonon coupling coefficient greater than the electron-phonon coupling coefficient of the first metal or metal alloy, the outer reflective layer (13) having a thickness in a range having a lower limit determined by a reflection coefficient of the first metal and an upper limit determined by a thermal diffusion length of the first metal, and the intermediate metal layer (14) having another thickness greater than a minimum value so as to increase the resistance of the reflective diffraction grating to an ultra-short-pulse light flux with high peak power.
The invention concerns an apparatus for light-beam scanning microspectrometry comprising a microscope objective (5) and a movement system (100) for moving an excitation light beam (10). According to the invention, the movement system (100) for moving the excitation light beam (10) comprises a first focusing optical component (M1, L1) suitable for focusing the excitation light beam (10) in an intermediate focal plane (20), another focusing optical component (MB, L3) suitable for forming an image of the intermediate focal plane (20) in a focal plane (51, 52) of the microscope objective (5) and a single scanning mirror (M2) arranged between the first optical component (M1, L1) and the intermediate focal plane (20), the scanning mirror (M2) being mounted on a plate, the orientation of which can be adjusted, so as to move the image of the focusing point (61, 62) in two transverse directions in the object focal plane (51) or in the image focal plane (52) of the microscope objective.
Method and instrument for measuring etch depth by differential polarimetric interferometry and glow discharge spectrometry apparatus comprising such a measuring instrument
Disclosed is a method for measuring etch depth including the following steps: splitting a light beam into a first, and respectively second, incident beam directed towards a first, respectively second, area of a sample exposed to an etching treatment to form a first, and respectively second, reflected beam, recombining the first reflected beam and the second reflected beam to form an interferometric beam; detecting a first, and respectively second, interferometric intensity signal relative to a first, respectively second, polarisation component; calculating a lower envelope function and an upper envelope function of a differential polarimetric interferometry signal; determining an offset function and a normalisation function from the first lower envelope function and the first upper envelope function; and calculating a differential polarimetric interferometry function normalised locally at each time instant.
Disclosed is an optical micro-spectrometry system including an optical microscope, a spectrometry system and an optical system adapted to direct an excitation light beam on the sample through the at least one microscope objective and to collect a Raman or PL light beam from a sample. The optical micro-spectrometry system includes an imaging system configured for acquiring a first image and a second image of the sample, by reflection or transmission of an illumination beam from a sample surface, the first image having a large field of view and the second image having a small field of view, a processing system configured for determining an area in the first image corresponding to the second image, a display system configured for displaying the first image, the second image, and a third image representing the area in overlay on the first image.
G01J 3/44 - Spectrométrie RamanSpectrométrie par diffusion
G02B 7/38 - Systèmes pour la génération automatique de signaux de mise au point utilisant des techniques liées à la netteté de l'image mesurée en différents points de l'axe optique
The invention relates to an ellipsometer or scatterometer comprising a light source (1), a polarizer (5), an optical illumination system (2, 4) suitable for directing an incident polarized light beam (11) towards a sample (6), a wavefront-division optical beam splitter (20) arranged to receive a secondary light beam (12) produced by reflection, transmission or diffraction, the wavefront-division optical beam splitter (20) being oriented to form three collimated split beams, an optical polarization modification device (25) and an optical polarization splitting device (26) to form six angularly split beams, a detection system suitable for detecting the six split beams, and a processing system suitable for deducing therefrom an ellipsometric or scatterometric measurement.
09 - Appareils et instruments scientifiques et électriques
Produits et services
Scientific apparatus and instruments for optical analysis;
photoluminescent or fluorescent Raman spectrometers and
spectrographs; components of the aforementioned goods;
software (recorded programs) in the field of scientific
apparatus and instruments for optical analysis.
37.
PASSIVATED EMITTER AND REAR CONTACT PHOTOVOLTAIC OR PHOTODETECTOR DEVICE AND METHOD FOR MANUFACTURING SUCH A DEVICE
CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE (France)
ECOLE POLYTECHNIQUE (France)
INSTITUT PHOTOVOLTAIQUE D'ILE DE FRANCE - IPVF (France)
Inventeur(s)
Drahi, Etienne
Grand, Pierre-Philippe
Fischer, Guillaume
Abrégé
The invention relates to a passivated emitter and rear contact photovoltaic or photodetector device, comprising a crystalline silicon substrate (1). According to the invention, the rear face (12) of the device includes a porous layer (4) of silicon having a textured surface, the textured surface comprising pores (41, 42, 43, 44, 4n) with dimensions between approximately 20 nm and 1000 nm, said pores forming openings (51, 52, 53, 54, 5n) oriented towards the rear face (12) of the device, and the device also includes a thin passivation layer (5) matching at least one portion of the textured surface, and at least one metal electrode (2, 21, 22) formed on the rear face (12) of the device, the metal electrode (2, 21, 22) being adapted to form at least one electrical contact on the rear face (12) of the device.
H01L 31/056 - Dispositifs à semi-conducteurs sensibles aux rayons infrarouges, à la lumière, au rayonnement électromagnétique d'ondes plus courtes, ou au rayonnement corpusculaire, et spécialement adaptés, soit comme convertisseurs de l'énergie dudit rayonnement e; Procédés ou appareils spécialement adaptés à la fabrication ou au traitement de ces dispositifs ou de leurs parties constitutives; Leurs détails adaptés comme dispositifs de conversion photovoltaïque [PV] Éléments optiques directement associés ou intégrés à la cellule PV, p.ex. moyens réflecteurs ou concentrateurs de lumière les moyens réflecteurs de lumière étant du type réflecteur en face arrière
H01L 31/068 - Dispositifs à semi-conducteurs sensibles aux rayons infrarouges, à la lumière, au rayonnement électromagnétique d'ondes plus courtes, ou au rayonnement corpusculaire, et spécialement adaptés, soit comme convertisseurs de l'énergie dudit rayonnement e; Procédés ou appareils spécialement adaptés à la fabrication ou au traitement de ces dispositifs ou de leurs parties constitutives; Leurs détails adaptés comme dispositifs de conversion photovoltaïque [PV] caractérisés par au moins une barrière de potentiel ou une barrière de surface les barrières de potentiel étant uniquement du type homojonction PN, p.ex. cellules solaires à homojonction PN en silicium massif ou cellules solaires à homojonction PN en couches minces de silicium polycristallin
H01L 31/0232 - Dispositifs à semi-conducteurs sensibles aux rayons infrarouges, à la lumière, au rayonnement électromagnétique d'ondes plus courtes, ou au rayonnement corpusculaire, et spécialement adaptés, soit comme convertisseurs de l'énergie dudit rayonnement e; Procédés ou appareils spécialement adaptés à la fabrication ou au traitement de ces dispositifs ou de leurs parties constitutives; Leurs détails - Détails Éléments ou dispositions optiques associés au dispositif
H01L 31/18 - Procédés ou appareils spécialement adaptés à la fabrication ou au traitement de ces dispositifs ou de leurs parties constitutives
H01L 31/103 - Dispositifs sensibles au rayonnement infrarouge, visible ou ultraviolet caractérisés par une seule barrière de potentiel ou de surface la barrière de potentiel étant du type PN à homojonction
09 - Appareils et instruments scientifiques et électriques
Produits et services
Scientific apparatus and instruments for optical analysis; photoluminescent and fluorescent Raman spectrometers and spectrographs; replacements parts therefor of the aforementioned goods; recorded software programs in the field of scientific apparatus and instruments for optical analysis
39.
Micro-localisation method and device for an imaging instrument and a measuring apparatus
Disclosed is a micro-localisation device defining a system of spatial coordinates for an imaging instrument. The micro-localisation device includes at least one first zone and a second zone, adjacent to each other, each zone extending spatially over an area of macroscopic size, each zone including an elementary cell or a tiling of a plurality of elementary cells extending over the respective area of the zone, each elementary cell of the first, respectively second, zone including an orientation pattern, a positioning pattern and a periodic spatial pattern, configured to be imaged by an imaging instrument and to determine a position and, respectively an orientation of the imaging instrument in the system of spatial coordinates of the micro-localisation device.
G06K 9/00 - Méthodes ou dispositions pour la lecture ou la reconnaissance de caractères imprimés ou écrits ou pour la reconnaissance de formes, p.ex. d'empreintes digitales
G01Q 30/04 - Dispositifs d'affichage ou de traitement de données
G01Q 30/20 - Dispositifs ou procédés de manipulation d'échantillons
H04N 5/232 - Dispositifs pour la commande des caméras de télévision, p.ex. commande à distance
40.
Method for acquiring and forming a spectrometry image by adapted spatial sampling
Disclosed is a method for acquiring and forming a spectrometry image, including the following steps: a) acquiring an initial structural image of an area of a sample; b) breaking down the initial structural image so as to determine a multi-scale spatial sample of the area of the sample; c) determining a plurality of spectrometry measurement positions in the area of the sample, as a function of the multi-scale spatial sampling determined in step b); d) consecutively, for each spectrometry measurement position determined in step c), positioning the excitation beam and acquiring a spectrometry measurement; and e) reconstructing a spectrometry image point-by-point from the spectrometry measurements acquired in step d).
The invention concerns an optical micro-spectrometry system comprising an optical microscope (10), a spectrometry system (50) and an optical system (14) adapted to direct an excitation light beam on the sample through said at least one microscope objective (11, 12) and to collect a Raman or PL light beam from a sample. According to the invention, the optical micro-spectrometry system comprises an imaging system (16, 41) configured for acquiring a first image (71) and a second image (72) of the sample, by reflection or transmission of an illumination beam from a sample surface, the first image (71) having a large field of view and the second image (72) having a small field of view, a processing system (40) configured for determining an area in the first image (71) corresponding to the second image (72), a display system (44) configured for displaying the first image (71), the second image (72), and a third image (73) representing said area in overlay on the first image (71).
G02B 7/38 - Systèmes pour la génération automatique de signaux de mise au point utilisant des techniques liées à la netteté de l'image mesurée en différents points de l'axe optique
42.
METHOD AND INSTRUMENT FOR MEASURING ETCH DEPTH BY DIFFERENTIAL POLARIMETRIC INTERFEROMETRY AND GLOW DISCHARGE SPECTROMETRY APPARATUS COMPRISING SUCH A MEASURING INSTRUMENT
The invention relates to a method for measuring etch depth comprising the following steps: - separating a light beam (2) into a first, and respectively second, incident beam (21, 22) directed towards a first, respectively second, area (11, 12) of a sample (10) exposed to an etching treatment to form a first, and respectively second, reflected beam (31, 32), - recombining the first reflected beam and the second reflected beam to form an interferometric beam; detecting a first, and respectively second, interferometric intensity signal relative to a first, respectively second, polarisation component (35, 37); calculating a lower envelope function and an upper envelope function of a differential polarimetric interferometry signal; determinating an offset function and a normalisation function from the first lower envelope function and the first upper envelope function; and calculating a differential polarimetric interferometry function normalised locally at each instant (t).
09 - Appareils et instruments scientifiques et électriques
38 - Services de télécommunications
41 - Éducation, divertissements, activités sportives et culturelles
42 - Services scientifiques, technologiques et industriels, recherche et conception
Produits et services
Scientific, optical and teaching apparatus and instruments;
apparatus for recording, transmission or reproduction of
sound or images; magnetic recording media, sound recording
disks; compact disks, DVDs and other digital recording
media; data processing equipment, computers; software
(recorded programs); computer programs (downloadable
software); software for management of a computer platform;
interfaces (for computers); spectroscopes. Telecommunications; communications by computer terminals;
provision of on-line forums; provision of access to
databases; provision of user access to global computer
networks; transmission of digital files; videoconferencing
services. Education; training; teaching; organization and
conducting of training workshops; training services by
means of simulators; provision of non-downloadable online
electronic publications; electronic publication of
scientific and technical descriptions. Scientific and technological services as well as research
and design services relating thereto; engineering work;
design and development of computers and software; design,
installation, maintenance and updating of a computer
platform; development, design, installation of software;
updating of software; electronic data storage; conducting
of scientific project studies.
09 - Appareils et instruments scientifiques et électriques
38 - Services de télécommunications
41 - Éducation, divertissements, activités sportives et culturelles
42 - Services scientifiques, technologiques et industriels, recherche et conception
Produits et services
Scientific, optical and teaching apparatus and instruments;
apparatus for recording, transmission or reproduction of
sound or images; magnetic recording media, sound recording
disks; compact disks, DVDs and other digital recording
media; data processing equipment, computers; software
(recorded programs); computer programs (downloadable
software); software for management of a computer platform;
interfaces (for computers); spectroscopes. Telecommunications; communications by computer terminals;
provision of on-line forums; provision of access to
databases; provision of user access to global computer
networks; transmission of digital files; videoconferencing
services. Education; training; teaching; organization and
conducting of training workshops; training services by
means of simulators; provision of non-downloadable online
electronic publications; electronic publication of
scientific and technical descriptions. Scientific and technological services as well as research
and design services relating thereto; engineering work;
design and development of computers and software; design,
installation, maintenance and updating of a computer
platform; development, design, installation of software;
updating of software; electronic data storage; conducting
of scientific project studies.
45.
MICRO-LOCALISATION METHOD AND DEVICE FOR AN IMAGING INSTRUMENT AND A MEASURING APPARATUS
The invention relates to a micro-locatlisation device (100) defining a system of spatial coordinates for an imaging instrument. According to the invention, the micro-locatlisation device (100) includes at least one first zone (1) and one second zone (2) that are adjacent, each zone (1, 2) extending spatially over an area of macroscopic size, each zone (1, 2) comprising an elementary cell (11) or tiling of a plurality of elementary cells (21, 22, 23, 24) extending over the respective area of said zone (1, 2), each elementary cell (11, 21, 22, 23, 24) of the first and second zones (1, 2) respectively comprising an orienting pattern (1111, 2111), a positioning pattern (1112, 2112, 2212, 2312, 2412) and a periodic spatial pattern (112, 113, 212, 213, 222, 223, 232, 233, 242, 243) that are configured to be imaged by an imaging instrument and to allow a position and orientation of the imaging instrument to respectively be determined in the system of spatial coordinates of the micro-locatlisation device.
G06K 7/00 - Méthodes ou dispositions pour la lecture de supports d'enregistrement
G06K 19/06 - Supports d'enregistrement pour utilisation avec des machines et avec au moins une partie prévue pour supporter des marques numériques caractérisés par le genre de marque numérique, p. ex. forme, nature, code
09 - Appareils et instruments scientifiques et électriques
41 - Éducation, divertissements, activités sportives et culturelles
42 - Services scientifiques, technologiques et industriels, recherche et conception
Produits et services
Telecommunications consultation services; communications by computer terminals; provision of on-line forums for transmission of messages among computer users concerning spectroscopy; provision of access to databases; provision of user access to global computer networks; transmission of digital files; videoconferencing services Scientific, optical and teaching apparatus and instruments for optical analysis, namely, spectral imaging systems for spectral imaging and imaging spectroscopy comprised of spectrometers, spectral cameras, hyperspectral cameras, spectrometer scanning and imaging apparatus, and computer software for optical analysis and data acquisition and processing in the area of spectral imaging and imaging spectroscopy; apparatus for recording, transmission or reproduction of sound or images; blank magnetic recording media, blank sound recording disks; compact disks, and DVDs for optical analysis and spectroscopy, namely, imaging CCD spectrometers and spectrographs; data processing equipment, computers; software and recorded programs for optical analysis and data acquisition and processing for use in association with spectrometers; downloadable computer software in the field of spectroscopy for optical analysis and data acquisition and processing in the area of spectral imaging and imaging spectroscopy; software for management of a computer platform in the field of spectroscopy; interfaces for computers; spectroscopes Education services, namely, providing non-downloadable video presentations, video courses, application notes, and tutorials in the field of spectroscopy; educational services, namely, training demonstrations in the field of spectroscopy; teaching in the field of spectroscopy; organization and conducting of training workshops in the field of spectroscopy; training services by means of simulators in the field of spectroscopy; provision of non-downloadable online electronic publications, namely books, pamphlets, magazines, electronic books and journals in the field of spectroscopy; electronic publication of scientific and technical descriptions, namely, providing video presentations, video courses, application notes, and tutorials in the field of spectroscopy Scientific and technological services as well as research and design services, namely, scientific research, analysis, and testing in the field of spectroscopy; engineering work; design and development of computers and software; design, installation, maintenance and updating of a computer platform for use in database management in the field of spectroscopy; development, design, installation of software; updating of software; electronic data storage; conducting of scientific project studies in the field of spectroscopy
47.
A PROBE FOR AN APPARATUS FOR MEASURING INTERACTION BETWEEN A SAMPLE, A TIP OF A NEAR-FIELD DEVICE AND AN EXCITING ELECTROMAGNETIC BEAM AND A MEASURING APPARATUS COMPRISING SUCH A PROBE
CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE (France)
UNIVERSITE DE LILLE 1 (France)
Inventeur(s)
De Bettignies, Philippe
Eschimese, Damien
Schreiber, Joachim
Leveque, Gaëtan
Melin, Thierry
Arscott, Steve
Abrégé
The invention relates to a probe (10) for an analysing instrument comprising a near-field device with a local probe (10) having a tip (1), the near-field device being combined with an exciting electromagnetic beam that is concentrated on the tip (1), the analysing instrument comprising a system for detecting interaction between the sample, the tip and the exciting electromagnetic beam. According to the invention: the tip (1) is metal; the probe (10) includes a holder (3) and an intermediate section (2) that is placed between the tip (1) and the holder (3); the intermediate section (2) is metal or includes a metal external coating; the holder (3) is made of dielectric or of dielectric covered with a metal external coating; and the intermediate section (2) extends laterally on the exterior of a cone (18) defined by a straight generatrix line passing through the apex and through a circumference of the base (12) of the tip (1).
09 - Appareils et instruments scientifiques et électriques
41 - Éducation, divertissements, activités sportives et culturelles
42 - Services scientifiques, technologiques et industriels, recherche et conception
Produits et services
Telecommunications consultation services; communications by computer terminals; provision of on-line forums for transmission of messages among computer users concerning spectroscopy; provision of access to databases; provision of user access to global computer networks; transmission of digital files; videoconferencing services Scientific, optical and teaching apparatus and instruments for optical analysis, namely, spectral imaging systems for spectral imaging and imaging spectroscopy comprised of spectrometers, spectral cameras, hyperspectral cameras, spectrometer scanning and imaging apparatus, and computer software for optical analysis and data acquisition and processing in the area of spectral imaging and imaging spectroscopy; apparatus for recording, transmission or reproduction of sound or images; blank magnetic recording media, blank sound recording disks; compact disks, and DVDs for optical analysis and spectroscopy, namely, imaging CCD spectrometers and spectrographs; data processing equipment, computers; software and recorded programs for optical analysis and data acquisition and processing for use in association with spectrometers; downloadable computer software in the field of spectroscopy for optical analysis and data acquisition and processing in the area of spectral imaging and imaging spectroscopy; software for management of a computer platform in the field of spectroscopy; interfaces for computers; spectroscopes Education services, namely, providing non-downloadable video presentations, video courses, application notes, and tutorials in the field of spectroscopy; educational services, namely, training demonstrations in the field of spectroscopy; teaching in the field of spectroscopy; organization and conducting of training workshops in the field of spectroscopy; training services by means of simulators in the field of spectroscopy; provision of non-downloadable online electronic publications, namely books, pamphlets, magazines, electronic books and journals in the field of spectroscopy; electronic publication of scientific and technical descriptions, namely, providing video presentations, video courses, application notes, and tutorials in the field of spectroscopy Scientific and technological services as well as research and design services, namely, scientific research, analysis, and testing in the field of spectroscopy; engineering work; design and development of computers and software; design, installation, maintenance and updating of a computer platform for use in database management in the field of spectroscopy; development, design, installation of software; updating of software; electronic data storage; conducting of scientific project studies in the field of spectroscopy
49.
METHOD FOR ACQUIRING AND FORMING A SPECTROMETRY IMAGE BY ADAPTED SPATIAL SAMPLING
The invention relates to a method for acquiring and forming a spectrometry image (Pict), comprising the following steps: a) acquiring an initial structural image (IM0) of an area (4) of a sample (1); b) breaking down the initial structural image (IM0) so as to determine a multi-scale spatial sample of said area (4) of the sample (1); c) determining a plurality of spectrometry measurement positions (Xi, Yj) in said area (4) of the sample, as a function of the multi-scale spatial sampling determined in step b); d) consecutively, for each spectrometry measurement position (Xi, Yj) determined in step c), positioning the excitation beam and acquiring a spectrometry measurement; and e) reconstructing a spectrometry image (Pict) point-by-point from the spectrometry measurements acquired in step d).
Aspects of the present invention include systems and devices useful for surface chemical analysis of solid samples by Tip Enhanced Raman Spectrometry (“TERS”), and particularly it relates to devices useful for chemical analysis of molecular compounds located either on or within thin surface layer of solid samples. Even more particularly, aspects of the present invention relate to systems, and devices for non-destructive analysis combining both high sensitivity and high spatial resolution of analysis of chemical compounds located or distributed on the surface of solid samples with obtaining important information regarding vibration spectra of atoms and molecular groups contained in a thin surface layer of solid samples. These objectives are realized by implementation of computer-assisted systems that use sensors to carefully regulate the motion of, and force applied to, probes of atomic force microscopes.
G01Q 10/00 - Dispositions pour le balayage ou le positionnement, c.-à-d. dispositions pour commander de manière active le mouvement ou la position de la sonde
G01Q 30/02 - Dispositifs d'analyse d’un type autre que la microscopie à sonde à balayage SPM, p. ex. microscope électronique à balayage SEM [Scanning Electron Microscope], spectromètre ou microscope optique
G01Q 20/00 - Contrôle du mouvement ou de la position de la sonde
51.
Systems and methods for non-destructive surface chemical analysis of samples
Aspects of the present invention include systems, devices, and methods of surface chemical analysis of solid samples, and particularly it relates to methods of chemical analysis of molecular compounds located either on or within thin surface layer of solid samples. Even more particularly, aspects of the present invention relate to systems, devices, and non-destructive methods combining both high sensitivity and high spatial resolution of analysis of chemical compounds located or distributed on the surface of solid samples with obtaining most important information regarding vibration spectra of atoms and molecular groups contained in thin surface layer of solid samples. These objectives are realized by implementation of computer-assisted systems that carefully regulate the motion of, and force applied to probes of atomic force microscopes.
G01Q 10/00 - Dispositions pour le balayage ou le positionnement, c.-à-d. dispositions pour commander de manière active le mouvement ou la position de la sonde
G01Q 30/02 - Dispositifs d'analyse d’un type autre que la microscopie à sonde à balayage SPM, p. ex. microscope électronique à balayage SEM [Scanning Electron Microscope], spectromètre ou microscope optique
09 - Appareils et instruments scientifiques et électriques
Produits et services
Scientific equipment, namely, surface plasmon resonance sensors, and instrumentation, namely, instruments for measuring binding affinity and for measuring, identifying and analyzing biomolecular interactions; surface plasmon resonance spectrometers [ ; chips, plates, and glass slides having multi-spot arrays for use in surface plasmon resonance analysis and component and replacement parts for surface plasmon resonance spectrometers; computer programs, computer software and firmware for use in system operation of surface plasmon resonance sensors and spectrometers ]
09 - Appareils et instruments scientifiques et électriques
Produits et services
(1) Appareils scientifiques, nommément capteurs à résonance plasmonique de surface, et instruments scientifiques, nommément multiplexeurs comportant un dispositif optique composé d'une source de lumière diode électroluminescente infrarouge (LED IR), d'une lentille, d'un prisme recouvert d'or sur une face pour générer des plasmons ainsi que d'une caméra CCD (charge coupled device), et des capteurs électroniques, le tout permettant la mesure de l'affinité de liaison ainsi que l'analyse, la mesure et l'identification des interactions biomoléculaires; spectromètres à résonance plasmonique de surface; parties constitutives des produits précités nommément puces, plaques et diapositives destinées à être utilisées dans l'analyse de résonance plasmonique de surface et les composants et pièces de rechange pour spectromètres à résonance plasmonique de surface; programmes informatiques et logiciels et microprogrammes nommément programmes et logiciels d'exploitation informatique, logiciels pour la collecte et l'analyse de données, destinés à être utilisés dans les capteurs et spectromètres à résonances plasmonique de surface
(2) Appareils scientifiques, nommément capteurs à résonance plasmonique de surface, et instruments scientifiques, nommément multiplexeurs comportant un dispositif optique composé d'une source de lumière diode électroluminescente infrarouge (LED IR), d'une lentille, d'un prisme recouvert d'or sur une face pour générer des plasmons ainsi que d'une caméra CCD (charge coupled device), et des capteurs électroniques, le tout permettant la mesure de l'affinité de liaison ainsi que l'analyse, la mesure et l'identification des interactions biomoléculaires; spectromètres à résonance plasmonique de surface; spectromètres de masse; parties constitutives des produits précités nommément puces, plaques et diapositives destinées à être utilisées dans l'analyse de résonance plasmonique de surface et les composants et pièces de rechange pour spectromètres à résonance plasmonique de surface et spectromètres de masse; programmes informatiques et logiciels et microprogrammes nommément programmes et logiciels d'exploitation informatique, logiciels pour la collecte et l'analyse de données, destinés à être utilisés dans les spectromètres de masse ainsi que dans les capteurs et spectromètres à résonances plasmonique de surface
54.
Systems and methods for non-destructive surface chemical analysis of samples
Aspects of the present invention include systems, devices, and methods of surface chemical analysis of solid samples, and particularly it relates to methods of chemical analysis of molecular compounds located either on or within thin surface layer of solid samples. Even more particularly, aspects of the present invention relate to systems, devices, and non-destructive methods combining both high sensitivity and high spatial resolution of analysis of chemical compounds located or distributed on the surface of solid samples with obtaining most important information regarding vibration spectra of atoms and molecular groups contained in thin surface layer of solid samples. These objectives are realized by implementation of computer-assisted systems that carefully regulate the motion of, and force applied to probes of atomic force microscopes.
G01Q 30/02 - Dispositifs d'analyse d’un type autre que la microscopie à sonde à balayage SPM, p. ex. microscope électronique à balayage SEM [Scanning Electron Microscope], spectromètre ou microscope optique
09 - Appareils et instruments scientifiques et électriques
Produits et services
Scientific instruments and apparatus for analysis and
measuring not for medical use; mass spectrometers;
components of the aforesaid goods; software (recorded
programs) in the field of scientific analysis instruments
and apparatus, mass spectrometers.
09 - Appareils et instruments scientifiques et électriques
Produits et services
Optical apparatus and instruments; Microscopes; Scanning apparatus and probes, other than for medical use; Parts and fittings for all the aforesaid goods all included in class 9.
09 - Appareils et instruments scientifiques et électriques
Produits et services
Scientific apparatus and instruments for the purposes of
analyzing and measuring other than for medical purposes;
mass spectrometers; components of the above products;
computer software (recorded programs) in connection with
scientific apparatus and instruments for the purposes of
analyzing, mass spectrometers.
09 - Appareils et instruments scientifiques et électriques
Produits et services
Scientific apparatus and instruments for optical analysis,
namely Raman, photoluminescence or fluorescence
spectrometers and spectrographs, microscopes, scanners;
components of the above products, namely optical networks,
optical lenses, mirrors, optical slits, optical filters;
software (recorded programs) used for operating scientific
apparatus and instruments for optical analysis including
data acquisition and processing.
09 - Appareils et instruments scientifiques et électriques
Produits et services
Instruments for optical analysis, Raman, photoluminescence
or fluorescence spectrometers and spectographs; components
of the above products; optical apparatus for scanning a
surface using a light source for the purpose of
reconstructing the image thereof.
09 - Appareils et instruments scientifiques et électriques
Produits et services
Analytical optical instruments, spectrometers and Raman
spectrographs using photoluminescence or fluorescence;
components of the above products; high speed optical
detection apparatus for analysing events moving in
space-time.
09 - Appareils et instruments scientifiques et électriques
Produits et services
Analytical optical instruments, namely, Raman, photoluminescence and fluorescence spectrographs and spectrometers, and parts and fittings thereof, used for the purpose of chemical and structural characterization of organic and inorganic compounds and molecular interactions, as well as investigating their spatial distribution; optical apparatus, namely, fast detection and sample displacement devices with the purpose of collecting spatially resolved spectroscopic information and reconstructing chemical and structural images
09 - Appareils et instruments scientifiques et électriques
Produits et services
Scientific apparatus and instruments for optical analysis, namely, Raman, photoluminescence and fluorescence spectrometers and spectrographs; [ microscopes; scanners; and related components thereof, namely, diffraction grating, optical lenses, optical mirrors and optical filters; ] software used for optical analysis including data acquisition and processing
09 - Appareils et instruments scientifiques et électriques
Produits et services
Scientific apparatus and instruments for optical analysis;
Raman, photoluminescence or fluorescence spectrometers and
spectographs; components of the above products; software
(recorded programs) for scientific apparatus and instruments
for optical analysis.
09 - Appareils et instruments scientifiques et électriques
Produits et services
Scientific apparatus and instruments for optical analysis, namely, microscopes, scanners, Raman, photoluminescence and fluorescence spectrometers and spectrograph; [ components of the above products, namely, optical gratings, optical lens, mirrors, optical slits, and optical filters; ] software for the operation of scientific apparatus and instruments for optical analysis including data * acquisition * [ inquisition ] and treatment
09 - Appareils et instruments scientifiques et électriques
Produits et services
Spectrometers; glow discharge optical emission spectrometers; radio frequency glow discharge optical emission spectrometers; radio frequency glow discharge optical emission spectrometers for sputtering of samples; radio frequency glow discharge optical emission spectrometers for sputtering of conductive and non-conductive materials; radio frequency glow discharge optical emission spectrometers for depth profile analysis
