A fiber optic temperature sensing probe is described. The probe includes a probe shaft comprising a first portion comprising a first projection, and a cavity for having a fiber optic cable positioned therein. The probe includes a ferrule comprising a second projection, the second projecting cooperating with the first projection to prevent the ferrule and probe shaft from uncoupling from an assembled configuration. The probe includes a biasing member connected to, and encouraging displacement between, the ferrule and the first portion, The probe includes a sensing element positioned at a distal end of the ferrule and proximate to a surface to be measured, the sensing element configured to interact with light received from the fiber optic cable to measure a temperature of the surface to be measured.
G01K 11/3213 - Mesure de la température basée sur les variations physiques ou chimiques, n'entrant pas dans les groupes , , ou utilisant des changements dans la transmittance, la diffusion ou la luminescence dans les fibres optiques en des endroits distincts de la fibre, p. ex. utilisant la diffusion de Bragg utilisant des changements dans la luminescence, p. ex. à l’extrémité distale de fibres
G01K 1/143 - SupportsDispositifs de fixationDispositions pour le montage de thermomètres en des endroits particuliers pour la mesure de la température de surfaces
G01K 1/16 - Dispositions particulières pour conduire la chaleur de l'objet à l'élément sensible
Various embodiments of an optical sensor system are disclosed herein. In one embodiment, the optical sensor system includes an optical probe assembly having a probe assembly optical connector, an optical pathway, and an optical probe having a sensing element in thermal communication with an object to be measured. The optical probe is configured to emit an optical response signal in response to an optical excitation signal. The optical probe assembly further includes a data element including information representative of the optical probe assembly. A communication mechanism is provided that is configured to convey information representative of the optical probe assembly from the data element to a converter. The converter is configured to determine a characteristic of the object to be measured based on the information representative of the optical probe assembly conveyed from the data element and at least a portion of the optical response signal.
G01D 5/26 - Moyens mécaniques pour le transfert de la grandeur de sortie d'un organe sensibleMoyens pour convertir la grandeur de sortie d'un organe sensible en une autre variable, lorsque la forme ou la nature de l'organe sensible n'imposent pas un moyen de conversion déterminéTransducteurs non spécialement adaptés à une variable particulière utilisant des moyens optiques, c.-à-d. utilisant de la lumière infrarouge, visible ou ultraviolette
G01D 5/353 - Moyens mécaniques pour le transfert de la grandeur de sortie d'un organe sensibleMoyens pour convertir la grandeur de sortie d'un organe sensible en une autre variable, lorsque la forme ou la nature de l'organe sensible n'imposent pas un moyen de conversion déterminéTransducteurs non spécialement adaptés à une variable particulière utilisant des moyens optiques, c.-à-d. utilisant de la lumière infrarouge, visible ou ultraviolette avec atténuation ou obturation complète ou partielle des rayons lumineux les rayons lumineux étant détectés par des cellules photo-électriques en modifiant les caractéristiques de transmission d'une fibre optique
G01K 11/00 - Mesure de la température basée sur les variations physiques ou chimiques, n'entrant pas dans les groupes , , ou
G06K 7/10 - Méthodes ou dispositions pour la lecture de supports d'enregistrement par radiation électromagnétique, p. ex. lecture optiqueMéthodes ou dispositions pour la lecture de supports d'enregistrement par radiation corpusculaire
H04W 4/80 - Services utilisant la communication de courte portée, p. ex. la communication en champ proche, l'identification par radiofréquence ou la communication à faible consommation d’énergie
3.
MULTIPLE CHARACTERISTIC OPTICAL TEMPERATURE SENSOR
The present application discloses embodiments of a temperature sensor system that uses multiple characteristics of optical radiation signals to determine a temperature of an object. The temperature sensor system includes a light source configured to emit an optical excitation signal propagating to a temperature probe having a phosphor sensing element that emits an optical excitation response signal having a characteristic of phosphorescent radiation proportional to the temperature of the object. The temperature probe emits an optical-excitation-independent signal having a characteristic of black-body radiation emitted by components of the temperature probe. The optical excitation response signal and the optical-excitation-independent signal form a combined signal propagating to a detector that provides a signal representative of the combined signal to a controller configured to separate the signal representative of the combined signal into signals representative of the optical excitation response signal and the optical-excitation-independent signal and calculate the temperature of the object.
G01K 11/20 - Mesure de la température basée sur les variations physiques ou chimiques, n'entrant pas dans les groupes , , ou utilisant des matériaux thermo-luminescents
G01J 5/00 - Pyrométrie des radiations, p. ex. thermométrie infrarouge ou optique
The present application discloses embodiments of a temperature sensor system that uses multiple characteristics of optical radiation signals to determine a temperature of an object. The temperature sensor system includes a light source configured to emit an optical excitation signal propagating to a temperature probe having a phosphor sensing element that emits an optical excitation response signal having a characteristic of phosphorescent radiation proportional to the temperature of the object. The temperature probe emits an optical-excitation-independent signal having a characteristic of black-body radiation emitted by components of the temperature probe. The optical excitation response signal and the optical-excitation-independent signal form a combined signal propagating to a detector that provides a signal representative of the combined signal to a controller configured to separate the signal representative of the combined signal into signals representative of the optical excitation response signal and the optical-excitation-independent signal and calculate the temperature of the object.
Various embodiments of a flexible fiber optic temperature probe are disclosed. In one embodiment, the flexible fiber optic temperature probe includes a plurality of fiber optic elements in optical communication with a temperature sensing sub- assembly, and a flexible jacket surrounding the plurality of fiber optic elements. The flexible jacket is secured to the sensing sub-assembly to prevent relative movement between the flexible jacket and the sensing sub-assembly. The sensing sub- assembly, the flexible jacket and the plurality of fiber optic elements are sized to be inserted into a channel formed in a body (e.g., a semiconductor chamber showerhead) having one or more bends formed therein. The temperature sensing sub-assembly includes at least one sensing element such as a thermographic phosphor element placed in thermal communication with at least one surface or region to be measured.
G01K 11/3206 - Mesure de la température basée sur les variations physiques ou chimiques, n'entrant pas dans les groupes , , ou utilisant des changements dans la transmittance, la diffusion ou la luminescence dans les fibres optiques en des endroits distincts de la fibre, p. ex. utilisant la diffusion de Bragg
The present application discloses embodiments of optical assemblies used in optical sensor systems where access to the equipment components or areas to be sensed is difficult. In one embodiment, an optical assembly may include a housing having an optical waveguide operative to guide an optical signal to an optical element configured to change the direction of propagation of the optical signal orthogonal to the original direction of propagation. The optical element may have a refractive surface and a reflective surface. Use of two such optical assemblies arranged optically in series enables the user to route an optical signal to propagate along an optical axis parallel to but laterally offset from the original axis of propagation. Such optical assemblies may allow optical access to regions of semiconductor manufacturing equipment such as process chambers, wafer supports, electrostatic chucks, showerheads, edge rings, or end effectors of wafer handling robots.
G01D 5/353 - Moyens mécaniques pour le transfert de la grandeur de sortie d'un organe sensibleMoyens pour convertir la grandeur de sortie d'un organe sensible en une autre variable, lorsque la forme ou la nature de l'organe sensible n'imposent pas un moyen de conversion déterminéTransducteurs non spécialement adaptés à une variable particulière utilisant des moyens optiques, c.-à-d. utilisant de la lumière infrarouge, visible ou ultraviolette avec atténuation ou obturation complète ou partielle des rayons lumineux les rayons lumineux étant détectés par des cellules photo-électriques en modifiant les caractéristiques de transmission d'une fibre optique
The present application discloses embodiments of optical assemblies used in optical sensor systems where access to the equipment components or areas to be sensed is difficult. In one embodiment, an optical assembly may include a housing having an optical waveguide operative to guide an optical signal to an optical element configured to change the direction of propagation of the optical signal orthogonal to the original direction of propagation. The optical element may have a refractive surface and a reflective surface. Use of two such optical assemblies arranged optically in series enables the user to route an optical signal to propagate along an optical axis parallel to but laterally offset from the original axis of propagation. Such optical assemblies may allow optical access to regions of semiconductor manufacturing equipment such as process chambers, wafer supports, electrostatic chucks, showerheads, edge rings, or end effectors of wafer handling robots.
G02B 17/00 - Systèmes avec surfaces réfléchissantes, avec ou sans éléments de réfraction
G01D 5/28 - Moyens mécaniques pour le transfert de la grandeur de sortie d'un organe sensibleMoyens pour convertir la grandeur de sortie d'un organe sensible en une autre variable, lorsque la forme ou la nature de l'organe sensible n'imposent pas un moyen de conversion déterminéTransducteurs non spécialement adaptés à une variable particulière utilisant des moyens optiques, c.-à-d. utilisant de la lumière infrarouge, visible ou ultraviolette avec déviation des rayons lumineux, p. ex. pour une indication optique directe
G01K 11/00 - Mesure de la température basée sur les variations physiques ou chimiques, n'entrant pas dans les groupes , , ou
G02B 7/00 - Montures, moyens de réglage ou raccords étanches à la lumière pour éléments optiques
A multi-band fiber optic temperature sensor is described that is configured to provide an independence of temperature measurement from variation in the optical path, among other things. A system and apparatus described herein includes a phosphorescent time constant temperature sensor using one or more portions of the emission spectrum to measure more than one time-dependent parameter from the emission spectrum of one or more phosphors (e.g., time-constant(s)). Measuring the time dependent parameter, for example time decay or time constant of the intensity of the phosphorescence emission) in a portion of the emission spectrum or in more than one different portion of the emission spectrum may result in improved accuracy and repeatability. Constraining the measurement of the time-dependent parameter to a portion of the emission spectrum may reduce the dependence of the time-dependent value on the attenuation spectrum (or frequency response) of the optical pathway between the phosphor and the detector and/or the attenuation spectrum of the matrix in which the phosphor is disposed.
G01K 11/3213 - Mesure de la température basée sur les variations physiques ou chimiques, n'entrant pas dans les groupes , , ou utilisant des changements dans la transmittance, la diffusion ou la luminescence dans les fibres optiques en des endroits distincts de la fibre, p. ex. utilisant la diffusion de Bragg utilisant des changements dans la luminescence, p. ex. à l’extrémité distale de fibres
A temperature sensing system, where an illustrative system includes an electrostatic chuck or ceramic plate including a capillary in the shape of a pattern associated with a surface of the electrostatic chuck or ceramic plate, and an optical fiber. The optical fiber has a capillary passed therethrough. The optical fiber includes a Fiber Bragg Grating (FBG) sensing point along its length, wherein at least one optical property of the FBG sensing point changes depending on temperatures operating thereon.
G01K 11/3206 - Mesure de la température basée sur les variations physiques ou chimiques, n'entrant pas dans les groupes , , ou utilisant des changements dans la transmittance, la diffusion ou la luminescence dans les fibres optiques en des endroits distincts de la fibre, p. ex. utilisant la diffusion de Bragg
10.
FIBER OPTIC TEMPERATURE SENSOR HAVING ENCAPSULATED SENSING ELEMENT
There is provided a temperature sensor including an optical fiber, and a sensing element spaced from the optical fiber. The sensing element is encapsulated in an optically transparent, non-porous material, isolating the sensing element from a surrounding environment. The optical fiber is aligned with the sensing element to deliver a source beam to interact with the sensing element and detect a return beam, where the return beam exhibits a temperature dependent property that is measured to determine a temperature of a measured object thermally coupled to the sensing element.
A fiber optic temperature sensing probe is described. The probe includes a probe shaft comprising a first portion comprising a first projection, and a cavity for having a fiber optic cable positioned therein. The probe includes a ferrule comprising a second projection, the second projecting cooperating with the first projection to prevent the ferrule and probe shaft from uncoupling from an assembled configuration. The probe includes a biasing member connected to, and encouraging displacement between, the ferrule and the first portion, The probe includes a sensing element positioned at a distal end of the ferrule and proximate to a surface to be measured, the sensing element configured to interact with light received from the fiber optic cable to measure a temperature of the surface to be measured.
G01K 11/32 - Mesure de la température basée sur les variations physiques ou chimiques, n'entrant pas dans les groupes , , ou utilisant des changements dans la transmittance, la diffusion ou la luminescence dans les fibres optiques
12.
MOVEABLE TIP AND INSTALLATION CONFIGURATION FOR FIBER OPTIC TEMPERATURE SENSING PROBE
A fiber optic temperature sensing probe is described. The probe includes a probe shaft comprising a first portion comprising a first projection, and a cavity for having a fiber optic cable positioned therein. The probe includes a ferrule comprising a second projection, the second projecting cooperating with the first projection to prevent the ferrule and probe shaft from uncoupling from an assembled configuration. The probe includes a biasing member connected to, and encouraging displacement between, the ferrule and the first portion, The probe includes a sensing element positioned at a distal end of the ferrule and proximate to a surface to be measured, the sensing element configured to interact with light received from the fiber optic cable to measure a temperature of the surface to be measured.
G01K 11/32 - Mesure de la température basée sur les variations physiques ou chimiques, n'entrant pas dans les groupes , , ou utilisant des changements dans la transmittance, la diffusion ou la luminescence dans les fibres optiques
13.
Fiber Optic Temperature Probe for Temperature Limiting Applications
An optical temperature sensing system is disclosed which includes a fiber optic sensor as a primary temperature sensor for reading a temperature of a measured object or a measured environment. The temperature probe is coupled to a converter which generates using solid-state electronic components without software, a temperature output. A temperature sensing system is also disclosed that includes a temperature sensor for reading a temperature of a measured object, and a dual converter module comprising a first converter to provide a primary temperature sensor signal, and a second converter to generate a secondary temperature sensor signal from a signal provided by the first converter. An optical temperature sensor is also described, with a conversion module that generates an output that mimics the output of a thermistor or a thermocouple.
G01K 11/32 - Mesure de la température basée sur les variations physiques ou chimiques, n'entrant pas dans les groupes , , ou utilisant des changements dans la transmittance, la diffusion ou la luminescence dans les fibres optiques
G01K 1/143 - SupportsDispositifs de fixationDispositions pour le montage de thermomètres en des endroits particuliers pour la mesure de la température de surfaces
H05B 1/02 - Dispositions de commutation automatique spécialement adaptées aux appareils de chauffage
Single board multi-channel programmable detection sensor is disclosed. The sensor has a processor operatively connected to the emitter driver, and a photodetector for controlling one or more operational parameters of the sensor in response to a program. Sensor outputs the TTL signal when desired level of light attenuated or transmitted through the system of fiber optics sensors. The processor sets triggering levels of the signal detected by the sensor in analog fast comparator circuit to threshold based on the signal difference pre-set and actual values.
A flexible fiber optic temperature probe is disclosed. The probe includes a plurality of fiber optic elements, a sensing member having a first and a second end, the first end connected to distal portions of the plurality of fiber optic elements, and a flexible jacket surrounding the plurality of fiber optic elements. The flexible jacket is engaged with the sensing member to prevent relative movement between the flexible jacket and the sensing member.
G01K 11/32 - Mesure de la température basée sur les variations physiques ou chimiques, n'entrant pas dans les groupes , , ou utilisant des changements dans la transmittance, la diffusion ou la luminescence dans les fibres optiques
A flexible fiber optic temperature probe is disclosed. The probe includes a plurality of fiber optic elements, a sensing member having a first and a second end, the first end connected to distal portions of the plurality of fiber optic elements, and a flexible jacket surrounding the plurality of fiber optic elements. The flexible jacket is engaged with the sensing member to prevent relative movement between the flexible jacket and the sensing member.
G01K 11/3206 - Mesure de la température basée sur les variations physiques ou chimiques, n'entrant pas dans les groupes , , ou utilisant des changements dans la transmittance, la diffusion ou la luminescence dans les fibres optiques en des endroits distincts de la fibre, p. ex. utilisant la diffusion de Bragg
A flexible fiber optic temperature probe is disclosed. The probe includes a plurality of fiber optic elements, a sensing member having a first and a second end, the first end connected to distal portions of the plurality of fiber optic elements, and a flexible jacket surrounding the plurality of fiber optic elements. The flexible jacket is engaged with the sensing member to prevent relative movement between the flexible jacket and the sensing member.
G01K 11/3206 - Mesure de la température basée sur les variations physiques ou chimiques, n'entrant pas dans les groupes , , ou utilisant des changements dans la transmittance, la diffusion ou la luminescence dans les fibres optiques en des endroits distincts de la fibre, p. ex. utilisant la diffusion de Bragg
18.
Fiber Optic Temperature Sensor Having Encapsulated Sensing Element
There is provided a temperature sensor including an optical fiber, and a sensing element spaced from the optical fiber. The sensing element is encapsulated in a optically transparent, non-porous material, isolating the sensing element from a surrounding environment. The optical fiber is aligned with the sensing element to deliver a source beam to interact with the sensing element and detect a return beam, where the return beam exhibits a temperature dependent property that is measured to determine a temperature of a measured object thermally coupled to the sensing element.
G01K 11/20 - Mesure de la température basée sur les variations physiques ou chimiques, n'entrant pas dans les groupes , , ou utilisant des matériaux thermo-luminescents
G01K 13/00 - Thermomètres spécialement adaptés à des fins spécifiques
G01K 3/14 - Thermomètres donnant une indication autre que la valeur instantanée de la température fournissant des différences de valeursThermomètres donnant une indication autre que la valeur instantanée de la température fournissant des valeurs différenciées par rapport à l'espace
G01K 1/14 - SupportsDispositifs de fixationDispositions pour le montage de thermomètres en des endroits particuliers
H01L 21/67 - Appareils spécialement adaptés pour la manipulation des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide pendant leur fabrication ou leur traitementAppareils spécialement adaptés pour la manipulation des plaquettes pendant la fabrication ou le traitement des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide ou de leurs composants
19.
Phosphor Thermometry Imaging System and Control System
The following provides a system and method for 2-D thermal imaging of phosphor coated surfaces. The system and method enable increased temperature measurement accuracy and speed of data analysis by implementing a control system that controls simultaneously an illumination system and an image capture device including a high speed camera. More particularly, the control system can control the illumination system and the camera to acquire images when emitted light intensity ranges are in a desired range to improve temperature measurement accuracy, and to increase the speed of data processing.
A temperature sensing system is provided, including an optical temperature sensing probe; a cable coupled to the probe for interfacing the probe with a converter via a connector; an optical fiber carried through the cable from the probe; and a calibration module positioned in the probe or connector, wherein the connector comprises at least two electrical conductors to enable the calibration module to communicate with the converter via the connector. A connector is also provided for connecting an optical temperature sensing probe to a converter via a cable coupled to the connector, the connector including a bore for carrying an optical fiber from the cable to the converter; at least two contact points; and at least two electrical connections via the at least two contact points. An extension cable is also provided for connecting an optical temperature sensing probe to a converter, the extension cable comprising a first end and a second end, and at least two electrical conductors extending between the first end and the second end to carry a signal from the probe to the converter via the extension cable.
G01K 11/32 - Mesure de la température basée sur les variations physiques ou chimiques, n'entrant pas dans les groupes , , ou utilisant des changements dans la transmittance, la diffusion ou la luminescence dans les fibres optiques
An optical temperature sensing system is disclosed which includes a fiber optic sensor as a primary temperature sensor for reading a temperature of a measured object or a measured environment. The temperature probe is coupled to a converter which generates using solid-state electronic components without software, a temperature output. A temperature sensing system is also disclosed that includes a temperature sensor for reading a temperature of a measured object, and a dual converter module comprising a first converter to provide a primary temperature sensor signal, and a second converter to generate a secondary temperature sensor signal from a signal provided by the first converter. An optical temperature sensor is also described, with a conversion module that generates an output that mimics the output of a thermistor or a thermocouple.
G01K 11/32 - Mesure de la température basée sur les variations physiques ou chimiques, n'entrant pas dans les groupes , , ou utilisant des changements dans la transmittance, la diffusion ou la luminescence dans les fibres optiques
H05B 1/02 - Dispositions de commutation automatique spécialement adaptées aux appareils de chauffage
G01K 7/22 - Mesure de la température basée sur l'utilisation d'éléments électriques ou magnétiques directement sensibles à la chaleur utilisant des éléments résistifs l'élément étant une résistance non linéaire, p. ex. une thermistance
G01K 7/02 - Mesure de la température basée sur l'utilisation d'éléments électriques ou magnétiques directement sensibles à la chaleur utilisant des éléments thermo-électriques, p. ex. des thermocouples
The invention pertains to a low-profile, optical sensor to measure distance having a light emitter and a light sensor. More particularly, the optical sensor includes a focusing film having a series of blinds to filter diffused reflected light without the need for a focusing lens. The optical sensors can be used in a variety of applications, including using two sensors to measure thickness of an object or the use of 3 sensors to determine the angle between two surfaces. The invention further pertains to a calibration sensor and method of calibration using 3 or more optical sensors to level a showerhead and a chuck in a semi-conductor deposition apparatus.
Single board multi-channel programmable detection sensor is disclosed. The sensor has a processor operatively connected to the, emitter driver, and a photodetector for controlling one or more operational parameters of the sensor in response to a program. Sensor outputs the TTL signal when desired level of light attenuated or transmitted through the system of fiber optics sensors. The processor sets triggering levels of the signal detected by the sensor in analog fast comparator circuit to threshold based on the signal difference pre-set and actual values.
G01D 5/32 - Moyens mécaniques pour le transfert de la grandeur de sortie d'un organe sensibleMoyens pour convertir la grandeur de sortie d'un organe sensible en une autre variable, lorsque la forme ou la nature de l'organe sensible n'imposent pas un moyen de conversion déterminéTransducteurs non spécialement adaptés à une variable particulière utilisant des moyens optiques, c.-à-d. utilisant de la lumière infrarouge, visible ou ultraviolette avec atténuation ou obturation complète ou partielle des rayons lumineux
G01D 5/34 - Moyens mécaniques pour le transfert de la grandeur de sortie d'un organe sensibleMoyens pour convertir la grandeur de sortie d'un organe sensible en une autre variable, lorsque la forme ou la nature de l'organe sensible n'imposent pas un moyen de conversion déterminéTransducteurs non spécialement adaptés à une variable particulière utilisant des moyens optiques, c.-à-d. utilisant de la lumière infrarouge, visible ou ultraviolette avec atténuation ou obturation complète ou partielle des rayons lumineux les rayons lumineux étant détectés par des cellules photo-électriques
Single board multi-channel programmable detection sensor is disclosed. The sensor has a processor operatively connected to the, emitter driver, and a photodetector for controlling one or more operational parameters of the sensor in response to a program. Sensor outputs the TTL signal when desired level of light attenuated or transmitted through the system of fiber optics sensors. The processor sets triggering levels of the signal detected by the sensor in analog fast comparator circuit to threshold based on the signal difference pre-set and actual values.
G01D 5/32 - Moyens mécaniques pour le transfert de la grandeur de sortie d'un organe sensibleMoyens pour convertir la grandeur de sortie d'un organe sensible en une autre variable, lorsque la forme ou la nature de l'organe sensible n'imposent pas un moyen de conversion déterminéTransducteurs non spécialement adaptés à une variable particulière utilisant des moyens optiques, c.-à-d. utilisant de la lumière infrarouge, visible ou ultraviolette avec atténuation ou obturation complète ou partielle des rayons lumineux
G01D 5/34 - Moyens mécaniques pour le transfert de la grandeur de sortie d'un organe sensibleMoyens pour convertir la grandeur de sortie d'un organe sensible en une autre variable, lorsque la forme ou la nature de l'organe sensible n'imposent pas un moyen de conversion déterminéTransducteurs non spécialement adaptés à une variable particulière utilisant des moyens optiques, c.-à-d. utilisant de la lumière infrarouge, visible ou ultraviolette avec atténuation ou obturation complète ou partielle des rayons lumineux les rayons lumineux étant détectés par des cellules photo-électriques
G01V 8/10 - Détection, p. ex. en utilisant des barrières de lumière
25.
SYSTEMS AND METHODS FOR IMPLEMENTING FIBER BRAGG GRATING SENSORS IN SEMICONDUCTOR PROCESSING CHAMBERS
Provided are systems and methods for using Fiber Bragg Grating (FBG) sensors to measure the temperature of many points on surfaces in semiconductor processing chambers with improved accuracy, while minimizing the number of connections/cables required. In one aspect, there is provided a method for relieving strain on and/or increasing thermal response speed of an FBG array, the method comprising inserting the FBG array into a protective capillary and filling the capillary with a thermal exchange fluid. In another aspect, there is provided a system for accessing an FBG array disposed in a protective capillary positioned in a sealed chamber, the system comprising a capillary connector including an expansion joint and an open end removably attachable to a fiber optic connector. In yet another aspect, there is provided a system for relieving strain on FBG sensors using strain relieving blocks.
G01K 11/3206 - Mesure de la température basée sur les variations physiques ou chimiques, n'entrant pas dans les groupes , , ou utilisant des changements dans la transmittance, la diffusion ou la luminescence dans les fibres optiques en des endroits distincts de la fibre, p. ex. utilisant la diffusion de Bragg
H01L 21/67 - Appareils spécialement adaptés pour la manipulation des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide pendant leur fabrication ou leur traitementAppareils spécialement adaptés pour la manipulation des plaquettes pendant la fabrication ou le traitement des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide ou de leurs composants
26.
PHOSPHOR THERMOMETRY IMAGING SYSTEM AND CONTROL SYSTEM
The following provides a system and method for 2-D thermal imaging of phosphor coated surfaces. The system and method enable increased temperature measurement accuracy and speed of data analysis by implementing a control system that controls simultaneously an illumination system and an image capture device including a high speed camera. More particularly, the control system can control the illumination system and the camera to acquire images when emitted light intensity ranges are in a desired range to improve temperature measurement accuracy, and to increase the speed of data processing.
A temperature sensing system comprising: an optical temperature sensing probe; a cable coupled to the probe for interfacing the probe with a converter via a connector; an optical fiber carried through the cable from the probe; and a calibration module positioned in the probe or connector, wherein the connector comprises at least two electrical conductors to enable the calibration module to communicate with the converter via the connector. A connector for connecting the probe to a converter via a cable coupled to the connector, the connector including a bore for carrying an optical fiber from the cable to the converter; at least two contact points; and at least two electrical connections. An extension cable for connecting the probe to a converter, comprising: a first and second end, and at least two electrical conductors extending between the first and second ends to carry a signal from the probe to the converter.
There is provided a fiber optic temperature probe having a base, a first tube connected to the base, a second tube provided coaxially within the first tube, a probe tip extending through an opening in a distal end of the first tube; and an optical fiber extending from within the base through an opening in the proximal end of the first tube and being substantially coaxial with respect to the first tube. There is also provided a fiber optic temperature probe having a base, a first tube connected to the base, a probe tip extending through an opening in a distal end of the first tube, an optical fiber extending from within the base through an opening in the proximal end of the first tube and being substantially coaxial with respect to the first tube, and a first lens positioned between the probe tip and the optical fiber.
G01K 11/32 - Mesure de la température basée sur les variations physiques ou chimiques, n'entrant pas dans les groupes , , ou utilisant des changements dans la transmittance, la diffusion ou la luminescence dans les fibres optiques
29.
CALIBRATION SYSTEM FOR FIBER OPTIC TEMPERATURE PROBE
A temperature sensing system comprising: an optical temperature sensing probe; a cable coupled to the probe for interfacing the probe with a converter via a connector; an optical fiber carried through the cable from the probe; and a calibration module positioned in the probe or connector, wherein the connector comprises at least two electrical conductors to enable the calibration module to communicate with the converter via the connector. A connector for connecting the probe to a converter via a cable coupled to the connector, the connector including a bore for carrying an optical fiber from the cable to the converter; at least two contact points; and at least two electrical connections. An extension cable for connecting the probe to a converter, comprising: a first and second end, and at least two electrical conductors extending between the first and second ends to carry a signal from the probe to the converter.
There is provided a fiber optic temperature probe having a base, a first tube connected to the base, a second tube provided coaxially within the first tube, a probe tip extending through an opening in a distal end of the first tube; and an optical fiber extending from within the base through an opening in the proximal end of the first tube and being substantially coaxial with respect to the first tube. There is also provided a fiber optic temperature probe having a base, a first tube connected to the base, a probe tip extending through an opening in a distal end of the first tube, an optical fiber extending from within the base through an opening in the proximal end of the first tube and being substantially coaxial with respect to the first tube, and a first lens positioned between the probe tip and the optical fiber.
G01K 11/32 - Mesure de la température basée sur les variations physiques ou chimiques, n'entrant pas dans les groupes , , ou utilisant des changements dans la transmittance, la diffusion ou la luminescence dans les fibres optiques
G01J 5/0806 - Éléments de focalisation ou collimateurs, p. ex. lentilles ou miroirs concaves
A precision edge detection system and sensor assembly is provided that uses a reflection technique to provide an energy efficient device that can be achieved using a relatively small form factor. There is provided an optical reflective sensor assembly that includes a light source, an optical element positioned to collimate and focus light from the light source to generate a focused beam, and at least one photodetector positioned adjacent the light source. The at least one photodetector is configured to detect light from the focused beam that has been reflected by an object positioned opposite the light source.
There is provided a temperature sensor comprising: an optical fiber; and a sensing element spaced from the optical fiber; wherein the optical fiber is aligned with the sensing element to deliver a source beam to interact with the sensing element and detect a return beam, the return beam exhibiting a temperature dependent property that is measured to determine a temperature of a measured object thermally coupled to the sensing element.
The invention pertains to a low-profile, optical sensor to measure distance having a light emitter and a light sensor. More particularly, the optical sensor includes a focusing film having a series of blinds to filter diffused reflected light without the need for a focusing lens. The optical sensors can be used in a variety of applications, including using two sensors to measure thickness of an object or the use of 3 sensors to determine the angle between two surfaces. The invention further pertains to a calibration sensor and method of calibration using 3 or more optical sensors to level a showerhead and a chuck in a semi-conductor deposition apparatus.
The invention pertains to a low-profile, optical sensor to measure distance having a light emitter and a light sensor. More particularly, the optical sensor includes a focusing film having a series of blinds to filter diffused reflected light without the need for a focusing lens. The optical sensors can be used in a variety of applications, including using two sensors to measure thickness of an object or the use of 3 sensors to determine the angle between two surfaces. The invention further pertains to a calibration sensor and method of calibration using 3 or more optical sensors to level a showerhead and a chuck in a semi-conductor deposition apparatus.
09 - Appareils et instruments scientifiques et électriques
42 - Services scientifiques, technologiques et industriels, recherche et conception
Produits et services
semiconductor wafer processing equipment fiber optic temperature sensors, not for medical purposes; ultrashort pulse lasers for spectroscopy, not for medical purposes; mass spectrometers; optical semiconductor amplifiers; semiconductors; semiconductor chips; semiconductor wafers; downloadable computer software for use in processing semiconductor wafers; temperature sensors engineering and design in the fields of power and semiconductor industries, and life sciences; creation of control programs for automated measurement in the fields of power and semiconductor industries, and life sciences; calibration of industrial sensors, namely, industrial temperature controllers; research in the area of semiconductor processing technology; technical consultancy in relation to methods and devices in the field of semiconductor processing technology
09 - Appareils et instruments scientifiques et électriques
42 - Services scientifiques, technologiques et industriels, recherche et conception
Produits et services
semiconductor wafer processing equipment fiber optic temperature sensors, not for medical purposes; ultrashort pulse lasers for spectroscopy, not for medical purposes; mass spectrometers; optical semiconductor amplifiers; semiconductors; semiconductor chips; semiconductor wafers; downloadable computer software for use in processing semiconductor wafers; temperature sensors engineering and design in the fields of power and semiconductor industries, and life sciences; creation of control programs for automated measurement in the fields of power and semiconductor industries, and life sciences; calibration of industrial sensors, namely, industrial temperature controllers; research in the area of semiconductor processing technology; technical consultancy in relation to methods and devices in the field of semiconductor processing technology
09 - Appareils et instruments scientifiques et électriques
42 - Services scientifiques, technologiques et industriels, recherche et conception
Produits et services
semiconductor wafer processing equipment fiber optic temperature sensors, not for medical purposes; ultrashort pulse lasers for spectroscopy, not for medical purposes; mass spectrometers; optical semiconductor amplifiers; semiconductors; semiconductor chips; semiconductor wafers; downloadable computer software for use in processing semiconductor wafers; temperature sensors engineering and design in the fields of power and semiconductor industries, and life sciences; creation of control programs for automated measurement in the fields of power and semiconductor industries, and life sciences; calibration of industrial sensors, namely, industrial temperature controllers; research in the area of semiconductor processing technology; technical consultancy in relation to methods and devices in the field of semiconductor processing technology
09 - Appareils et instruments scientifiques et électriques
35 - Publicité; Affaires commerciales
42 - Services scientifiques, technologiques et industriels, recherche et conception
Produits et services
(1) Semiconductor wafer fabrication equipment
(2) Fiber optic temperature sensors; ultrashort pulse lasers for spectroscopy; mass spectrometers; optical semiconductor amplifiers; semiconductors; semiconductor chips; semiconductor wafers; computer software for use in fabricating semiconductor wafers; temperature sensors (1) Engineering, design and distribution of measurement technology in the fields of power and semiconductor industries, and life sciences; creation of control programs for automated measurement in the fields of power and semiconductor industries, and life sciences; calibration of industrial temperature controllers; research in the area of semiconductor processing technology; technical consultancy in relation to the production of semiconductors
09 - Appareils et instruments scientifiques et électriques
35 - Publicité; Affaires commerciales
42 - Services scientifiques, technologiques et industriels, recherche et conception
Produits et services
(1) Semiconductor wafer fabrication equipment
(2) Fiber optic temperature sensors; ultrashort pulse lasers for spectroscopy; mass spectrometers; optical semiconductor amplifiers; semiconductors; semiconductor chips; semiconductor wafers; computer software for use in fabricating semiconductor wafers; temperature sensors (1) Engineering, design and distribution of measurement technology in the fields of power and semiconductor industries, and life sciences; creation of control programs for automated measurement in the fields of power and semiconductor industries, and life sciences; calibration of industrial temperature controllers; research in the area of semiconductor processing technology; technical consultancy in relation to the production of semiconductors
09 - Appareils et instruments scientifiques et électriques
35 - Publicité; Affaires commerciales
42 - Services scientifiques, technologiques et industriels, recherche et conception
Produits et services
(1) Semiconductor wafer fabrication equipment
(2) Fiber optic temperature sensors; ultrashort pulse lasers for spectroscopy; mass spectrometers; optical semiconductor amplifiers; semiconductors; semiconductor chips; semiconductor wafers; computer software for use in fabricating semiconductor wafers; temperature sensors (1) Engineering, design and distribution of measurement technology in the fields of power and semiconductor industries, and life sciences; creation of control programs for automated measurement in the fields of power and semiconductor industries, and life sciences; calibration of industrial temperature controllers; research in the area of semiconductor processing technology; technical consultancy in relation to the production of semiconductors
An L2F velocimeter comprises a probe for insertion into a fluid, the probe having an open area therein to allow the fluid to pass through. The probe comprises an illumination system to direct a pair of light beams, separated by a distance, through the open area, and a collection system to collect forward scattered light scattered from particles in the fluid. The collection system has an optical axis in common with the illumination system. The velocimeter further comprises an electro optical assembly connected to the probe to provide light to the illumination system, to receive light collected from the collection system, to measure a lapse time in fluctuations of the forward scattered light created by particles passing through the pair of light beams and to calculate the velocity of the fluid based on the lapse time and the separation distance.
One embodiment of the invention provides a L2F velocimeter comprising a probe which may be inserted into a flowing fluid. The probe has an optical illumination system and an optical collection system which are coaxial. The illumination system directs light through the fluid, and the collection system collects forward scattered light which passes through the fluid.
G01P 5/20 - Mesure de la vitesse des fluides, p. ex. d'un courant atmosphériqueMesure de la vitesse de corps, p. ex. navires, aéronefs, par rapport à des fluides en mesurant le temps mis par le fluide à parcourir une distance déterminée en utilisant des particules entraînées par un courant de fluide
