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2025
|
Invention
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Gas purge systems for a laser source.
A laser source includes a laser chamber configured to gene... |
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2024
|
Invention
|
System for controlling gas flow in a laser discharge chamber. A discharge chamber for use in a de... |
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Invention
|
Series of stacked confocal pulse stretchers for speckle reduction.
An extended optical pulse str... |
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Invention
|
Gas discharge chamber blower fan with a textured surface. A gas discharge apparatus of an ultravi... |
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Invention
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Compensation for a disturbance in a light source. An apparatus includes an offload processing sys... |
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Invention
|
Laser chamber with discharge system having acoustic scattering surfaces. An apparatus for generat... |
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Invention
|
Spectral feature control apparatus.
A spectral feature selection apparatus includes a dispersive... |
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Invention
|
Electrode in discharge chamber of radiation source. A system for use in a deep ultraviolet radiat... |
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Invention
|
System for and method of calibrating measurement of laser beam spectral linewidth. A system for a... |
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Invention
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System for and method of calibrating measurement of duv laser beam spectral properties. A system ... |
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Invention
|
Methods for predicting states of light sources. A method for predicting states of light sources, ... |
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Invention
|
Forming multiple aerial images in a single lithography exposure pass.
A set of the pulses of lig... |
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Invention
|
Laser chamber preionizer having acoustic scattering surface. An apparatus for generating laser ra... |
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Invention
|
Dust management for a gas discharge chamber. A dust collector for a gas discharge chamber of a li... |
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Invention
|
Laser chamber having discharge gap with acoustic control. An apparatus for generating laser radia... |
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Invention
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Method and apparatus for replacing gas mixture in a gas discharge chamber. A method of replacing ... |
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Invention
|
Processes for maintenance of modules of light sources in semiconductor photolithography. A comput... |
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2023
|
Invention
|
Cold start conditioning in a light source. A method for controlling a light source includes: oper... |
|
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Invention
|
Laser maintenance apparatus and method. Disclosed is an apparatus and method in which one or more... |
|
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Invention
|
Conduit system, radiation source, lithographic apparatus, and methods thereof. A radiation source... |
|
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Invention
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Method of compensating wavelength error induced by repetition rate deviation.
A radiation system... |
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Invention
|
Reducing energy consumption of a gas discharge chamber blower. A control apparatus for a light so... |
|
|
Invention
|
Adjuster using torsionally stiff coupler and actuator system using same. Disclosed is an apparatu... |
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Invention
|
Apparatus for and method of optical component alignment. Apparatus for and method of aligning opt... |
|
|
Invention
|
Spectral feature control apparatus. A deep ultraviolet laser system includes a line narrowing mod... |
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|
Invention
|
Apparatus for and method of control for multifocal imaging. Apparatus for and methods of rapidly ... |
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|
Invention
|
Method for radiation spectrum aware souce mask optimization for lithography. Photolithography. Pe... |
|
|
Invention
|
Apparatus for and method of controlling cold start conditioning in a light source. A method of an... |
|
|
Invention
|
Apparatus for and method of aligning a laser system. Disclosed is an apparatus for and method of ... |
|
|
Invention
|
Passive dust trap, illumination system, and lithography system. A system includes first and secon... |
|
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Invention
|
Apparatus for and method of vibration cancellation for laser wavelength and bandwidth stability. ... |
|
|
Invention
|
Status monitoring and reporting for ultraviolet light sources.
A computing device including a di... |
|
|
Invention
|
Optical pulse stretcher apparatus. An optical pulse stretcher apparatus includes: a hermetically-... |
|
|
Invention
|
Status monitoring and reporting for ultraviolet light sources. A computing device including a dis... |
|
2022
|
Invention
|
Apparatus for and method of conditioning laser electrodes.
Disclosed are apparatus for and metho... |
|
|
Invention
|
Electrode with engineered surface for improved energy performance.
One or both of the confrontin... |
|
|
Invention
|
Prediction apparatus and method for optical source.
A prediction apparatus is in communication w... |
|
|
Invention
|
Pulsed power systems with controlled reactor reset.
A pulsed power circuit including one or more... |
|
|
Invention
|
Gas control apparatus for gas discharge stage.
A gas control apparatus includes a control system... |
|
|
Invention
|
System for actively controlling a cavity length of an optical assembly.
A system includes: an op... |
|
|
Invention
|
Electronic module for a magnetic switching network to produce a pulse of the pulsed output light ... |
|
|
Invention
|
Maintenance of modules for light sources used in semiconductor photolithography.
Systems for mai... |
|
2021
|
Invention
|
Optimization of lithographic process based on bandwidth and speckle.
A method for improving a li... |
|
|
Invention
|
Reducing energy consumption of a gas discharge chamber blower.
In some general aspects, an appar... |
|
|
Invention
|
Pulsed power circuits using hybrid non-linear magnetic materials and inductors incorporating the ... |
|
|
Invention
|
Magnetic switch with impedance control for an optical system.
One or more properties of an elect... |
|
|
Invention
|
Apparatus for and method of optical component alignment.
Apparatus for and method of aligning op... |
|
|
Invention
|
Apparatus for and method of modulating a wavelength of an excimer laser as a function of its repe... |
|
|
Invention
|
Optical component for deep ultraviolet light source.
An optical component includes: a calcium fl... |
|
|
Invention
|
Electromagnetic shield for a sealing mechanism of a laser chamber. An apparatus for a light sourc... |
|
2020
|
G/S
|
Lasers and wave meters, and components thereof, including light measuring instrumentation, not fo... |
|
2017
|
G/S
|
Scientific, nautical, optical, electro-optical, weighing, measuring, signaling, checking (supervi... |
|
2014
|
G/S
|
Laser-controlled optical assembly modules for use in
enhancing the performance of photolithograp... |
|
|
G/S
|
Optical assemblies for use in controlling lasers for enhancing the performance of photolithograph... |
|
|
G/S
|
Computer software for use in enhancing the operational performance of laser-based photolithograph... |
|
2011
|
G/S
|
Computer hardware and software for data mining, data
monitoring, data analysis, and control of t... |
|
|
G/S
|
Computer hardware and software for data mining, data
monitoring, and data analysis of performanc... |
|
|
G/S
|
computer hardware and software for data mining, data monitoring, and data analysis of performance... |
|
|
G/S
|
computer hardware and software for data mining, data monitoring, data analysis, and control of th... |
|
|
G/S
|
Light source equipment for non-medical use (terms too vague
in the opinion of the International ... |
|
|
G/S
|
Laser light sources for use in semiconductor manufacturing |
|
2007
|
G/S
|
Maintenance, repair, and servicing of light sources used in
industrial applications. |
|
|
G/S
|
Computer and technical consultation services, namely
monitoring, testing, and diagnosis of light... |
|
|
G/S
|
maintenance, repair, and servicing of light sources used in industrial applications |
|
|
G/S
|
computer and technical consultation services, namely, monitoring, testing, and diagnosis of light... |
|
2006
|
G/S
|
Scientific, nautical, optical, electro-optical, weighing, measuring, regulating, signaling, check... |
|
|
G/S
|
Lasers and parts and fittings therefor including measuring instruments for waves and other light. |
|
2001
|
G/S
|
Information services in the field of industrial applications for excimer lasers, particulary semi... |
|
|
G/S
|
Providing information via information networks, namely, the internet and intranets, in the field ... |
|
1999
|
G/S
|
Lasers and wave meters, and components thereof, namely, light measuring instrumentation, not for ... |
|
1990
|
G/S
|
Excimer lasers.
Excimer lasers for industrial use. |
|
1989
|
G/S
|
EXCIMER LASERS FOR INDUSTRIAL USE |
