Latest Inventions, Goods, Services
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2024
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Invention
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Substrate with conductive film, substrate with multilayer reflective film, reflective mask blank,... |
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Invention
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Conductive film-equipped substrate, multilayer reflective film-equipped substrate, reflective mas... |
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2021
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Invention
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Mask blank, transfer mask, and method for manufacturing semiconductor device.
An object is to pr... |
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Invention
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Mask blank, transfer mask, and method for manufacturing semiconductor device. A purpose of the pr... |
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2018
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Invention
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Mask blank, phase shift mask, and method of manufacturing semiconductor device.
In a mask blank,... |
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Invention
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Mask blank, phase shift mask, and method for manufacturing semiconductor device. 3434abab34abb bo... |
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Invention
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Mask blank, method of manufacturing transfer mask, and method for manufacturing semiconductor dev... |
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Invention
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Mask blank, method for manufacturing transfer mask, and method for manufacturing semiconductor de... |
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Invention
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Sputtering target and production method therefor. This sputtering target has a molybdenum content... |
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2017
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Invention
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Mask blank, transfer mask, method of manufacturing a transfer mask, and method of manufacturing a... |
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Invention
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Mask blank, mask for transfer, method for manufacturing mask for transfer, and method for manufac... |
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