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2025
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Invention
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Plasma strip tool with movable insert.
Plasma processing apparatus for processing a workpiece ar... |
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Invention
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Hybrid plasma source array.
A plasma source array is provided. The plasma source array includes ... |
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Invention
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Electrostatic chuck assembly for plasma processing apparatus.
An electrostatic chuck including a... |
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2024
|
Invention
|
Thermal processing system for processing workpieces.
A thermal processing system for performing ... |
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|
Invention
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Plasma source cooling system. Cooling systems and methods for plasma sources used in semiconducto... |
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|
Invention
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Plasma source cooling system.
Cooling systems and methods for plasma sources used in semiconduct... |
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Invention
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Thermal processing system for processing workpieces. A thermal processing system for performing t... |
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Invention
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Control system for adaptive control of a thermal processing system.
A control system operable to... |
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Invention
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Support structure for thermal processing systems.
Support plates and support structures for ther... |
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|
Invention
|
Gas delivery system for a thermal processing apparatus.
A gas delivery system for a thermal proc... |
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|
Invention
|
Atomic layer etch process using plasma in conjunction with a rapid thermal activation process.
A... |
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Invention
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Cooled shield for icp source.
Provided is a plasma processing apparatus or system including a pl... |
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|
Invention
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Gas delivery system for a thermal processing apparatus. A gas delivery system for a thermal proce... |
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Invention
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Plasma processing apparatus.
Disclosed is a plasma processing apparatus including a processing c... |
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Invention
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Plasma processing apparatus. Disclosed is a plasma processing apparatus including a processing ch... |
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|
Invention
|
Transfer apparatus and processing system.
The present disclosure provides a transfer apparatus a... |
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Invention
|
Support plate for localized heating in thermal processing systems.
Support plates for localized ... |
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Invention
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Rapid thermal processing system with cooling system.
Apparatus, systems, and methods for process... |
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Invention
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Airflow control method for air flotation cyclone operation of low-pressure heat treatment device.... |
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Invention
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Temperature control method for semiconductor process.
Provided is a temperature control method f... |
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Invention
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Process platform.
Provided is a process platform, relating to the field of semiconductor technol... |
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|
Invention
|
Workpiece processing apparatus with thermal processing systems.
A processing apparatus for a the... |
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|
Invention
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Gas distribution element and heat treatment device containing the same.
Provided is a gas distri... |
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|
Invention
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Low-pressure oxidation treatment method and device for semiconductor workpieces.
Provided is a l... |
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Invention
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Dual frequency matching circuit for inductively coupled plasma (icp) loads.
Matching circuitry i... |
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Invention
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Heat treatment apparatus and accurate temperature measurement method for semiconductor workpiece.... |
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|
Invention
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Heat treatment apparatus and temperature regulating method for semiconductor workpiece.
A heat t... |
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Invention
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Reaction chamber and oxidation device.
Provided is a reaction chamber and an oxidation device. T... |
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|
Invention
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Workpiece processing apparatus and methods for the treatment of workpieces.
Systems and methods ... |
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Invention
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Preheat processes for millisecond anneal system.
Preheat processes for a millisecond anneal syst... |
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|
Invention
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Workpiece processing apparatus and methods for the treatment of workpieces. Systems and methods f... |
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|
Invention
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Electrostatic chuck assembly for plasma processing apparatus. An electrostatic chuck including a ... |
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|
Invention
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Method for processing workpiece, plasma processing apparatus and semiconductor device.
A method ... |
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|
Invention
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Variable mode plasma chamber utilizing tunable plasma potential.
Plasma processing apparatus and... |
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|
Invention
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Transmission-based temperature measurement of a workpiece in a thermal processing system.
A ther... |
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|
Invention
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Workpiece processing apparatus with plasma and thermal processing systems. A processing apparatus... |
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2023
|
Invention
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Workpiece processing apparatus with contact temperature sensor.
A semiconductor fabrication appa... |
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|
Invention
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Workpiece processing apparatus with contact temperature sensor. A semiconductor fabrication appar... |
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|
Invention
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Methods of processing workpieces using organic radicals.
Processes treating a workpiece are prov... |
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|
Invention
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Reaction chamber and wafer etching device. The present disclosure relates to the technical field ... |
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|
Invention
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Gas conveying device and system, and plasma processing device. The present disclosure relates to ... |
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|
Invention
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Reaction chamber and wafer etching apparatus. The present disclosure relates to the technical fie... |
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|
Invention
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Heat treatment apparatus, control method and apparatus, electronic device, storage medium, and pr... |
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|
Invention
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Wafer stage, reaction chamber and wafer etching device. Provided in the present disclosure are a ... |
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Invention
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Radio frequency probe, radio frequency matcher, radio frequency power supply, and radio frequency... |
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Invention
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Covering structure, covering method, and semiconductor device. The present disclosure relates to ... |
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Invention
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Enhanced ignition in inductively coupled plasmas for workpiece processing. Plasma processing appa... |
