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2014
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Invention
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Method of forming metal oxide hardmask. y wherein M represents at least one metal element, x is l... |
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2012
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Invention
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Method of depositing dielectric film by ald using precursor containing silicon, hydrocarbon, and ... |
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Invention
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Method of depositing dielectric film by modified peald method. A method of forming a film on a se... |
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2011
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Invention
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Method for forming single-phase multi-element film by peald. A method for forming a single-phase ... |
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Invention
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Uv irradiation apparatus having uv lamp-shared multiple process stations.
A UV irradiation appar... |
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Invention
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Method for reducing dielectric constant of film using direct plasma of hydrogen. A method for red... |
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Invention
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Container having multiple compartments containing liquid material for multiple wafer-processing c... |
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Invention
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Method for positioning wafers in multiple wafer transport. A method for positioning wafers in dua... |
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Invention
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High-throughput semiconductor-processing apparatus equipped with multiple dual-chamber modules. A... |
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Invention
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Atomic layer deposition for controlling vertical film growth. A method for forming a film by atom... |
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Invention
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Footing reduction using etch-selective layer. A method of forming side spacers upwardly extending... |
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Invention
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Calibration method of uv sensor for uv curing. A method for managing UV irradiation for treating ... |
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Invention
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Method of depositing film by atomic layer deposition with pulse-time-modulated plasma. A thin fil... |
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2010
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Invention
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Method for sealing pores at surface of dielectric layer by uv light-assisted cvd.
A method for s... |
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Invention
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Method of depositing film with tailored comformality. A method of depositing a film with a target... |
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Invention
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Shower plate having different aperture dimensions and/or distributions. A shower plate is adapted... |
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Invention
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Method of depositing dielectric film having si-n bonds by modified peald method. A method of form... |
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Invention
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Method of forming conformal film having si-n bonds on high-aspect ratio pattern. A method of form... |
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Invention
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Method of tailoring conformality of si-containing film. A method of tailoring conformality of a f... |
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Invention
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Method of forming stress-tuned dielectric film having si-n bonds by modified peald. A method of f... |
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Invention
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Method of forming conformal dielectric film having si-n bonds by pecvd. A method of forming a con... |
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Invention
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Method for forming interconnect structure having airgap. A method for forming an interconnect str... |
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2009
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Invention
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Method of forming insulation film using plasma treatment cycles. A film forming cycle based on pu... |
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Invention
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Method for depositing flowable material using alkoxysilane or aminosilane precursor. A method of ... |
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Invention
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Method of forming highly conformal amorphous carbon layer. A method of forming a conformal amorph... |
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Invention
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Method of depositing silicon oxide film by plasma enhanced atomic layer deposition at low tempera... |
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Invention
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Method of forming hardmask by plasma cvd.
A method of forming a transparent hardmask by plasma C... |
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Invention
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Method for controlling flow and concentration of liquid precursor. A method for controlling flow ... |
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2008
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Invention
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Semiconductor-processing apparatus equipped with robot diagnostic module. A semiconductor wafer m... |
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Invention
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Multiple-substrate transfer apparatus and multiple-substrate processing apparatus.
A multiple-su... |
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Invention
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Method of forming low-k film having chemical resistance.
A method of forming a low-k film contai... |
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Invention
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Method for forming low-carbon cvd film for filling trenches. A method of forming a low-carbon sil... |
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Invention
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Process for forming high resistivity thin metallic film.
A process for forming metallic nitride ... |
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Invention
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Wafer lift pins suspended and supported at underside of susceptor.
A wafer lift pin structure fo... |
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Invention
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Two-step formation of hydrocarbon-based polymer film.
A method of forming a surface-treated hydr... |
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Invention
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Method for forming metal film by ald using beta-diketone metal complex. A method of forming a sin... |
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Invention
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Purge step-controlled sequence of processing semiconductor wafers. A method of processing semicon... |
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Invention
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Impedance matching apparatus for plasma-enhanced reaction reactor.
An impedance matching apparat... |
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Invention
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Heater block for use in a semiconductor processing tool |
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Invention
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Atomic composition controlled ruthenium alloy film formed by plasma-enhanced atomic layer deposit... |
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Invention
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Semiconductor manufacturing apparatus equipped with wafer inspection device and inspection techni... |
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Invention
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Semiconductor manufacturing apparatus. A semiconductor manufacturing apparatus includes a first p... |
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Invention
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Semiconductor processing apparatus having all-round type wafer handling chamber.
A semiconductor... |
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Invention
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Exhaust gas trap for semiconductor processes.
An exhaust gas trap for semiconductor processes in... |
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Invention
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Wafer-positioning mechanism.
A wafer-positioning mechanism includes a susceptor having an upper ... |
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Invention
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Method of forming fluorine-containing dielectric film.
A method of forming a fluorine-containing... |
