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2026
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G/S
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Machines for the assembly and packaging of electronic semiconductor chips; machines for manufactu... |
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G/S
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Machines for the assembly and packaging of electronic chips; machines for manufacturing semicondu... |
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G/S
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Software for the control and operation of processing equipment used in the manufacture of semicon... |
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G/S
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Machines for the manufacturing of electronic chips; machines for manufacturing semiconductors; st... |
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G/S
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Development, design and testing of semiconductors, semiconductor machines and apparatus, and semi... |
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2025
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Invention
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Rf impedance matching with continuous wave and pulsing sources.
In one embodiment, a system for ... |
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Invention
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Apparatus and methods for cooling reaction chambers in semiconductor processing systems.
A refle... |
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Invention
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Systems and methods for processing a silicon surface using multiple radical species.
A method of... |
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Invention
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Gas-phase chemical reactor and method of using same.
A gas-phase chemical reactor, a system incl... |
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Invention
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Electric field uniformity on distributed electrode.
In one embodiment, the present disclosure is... |
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Invention
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Reactor manifolds.
Herein disclosed are systems and methods related to semiconductor processing ... |
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Invention
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Method of filling gap with flowable carbon layer.
Methods and systems for forming a structure in... |
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Invention
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Photosensitive material and method of forming patterned structures.
Methods and related systems ... |
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G/S
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Equipment and machinery for plasma generation, namely impedance matching plasma power networks us... |
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Invention
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Methods and systems for deposition to gaps using an inhibitor.
The present disclosure is directe... |
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Invention
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Dual pyrometer systems for substrate temperature control during film deposition.
A method of ope... |
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Invention
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Substrate processing apparatus.
A top lid capable of minimizing thermal deformation when a subst... |
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Invention
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Process chamber with side support.
A process chamber can include a curved upper wall extending l... |
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Invention
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Jigs and methods of teaching substrate handling in semiconductor processing systems using jigs.
... |
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Invention
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Selective passivation and selective deposition.
Methods for selective deposition are provided. M... |
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Invention
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Methods and apparatus for cleaning a vessel.
Various embodiments of the present technology may p... |
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Invention
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Method of forming a thin film using hydrogen treatment.
A substrate processing method for formin... |
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Invention
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Ignition for inductively coupled plasma.
In one embodiment, the present disclosure is directed t... |
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Invention
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Methods for depositing metal nitride layers on a substrate by cyclical deposition processes inclu... |
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Invention
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Reflectors, chamber arrangements and semiconductor processing systems including reflectors, and m... |
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Invention
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Method for forming an epitaxial structure onto a substrate and substrate processing apparatus.
T... |
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Invention
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Compositions for forming a carbon doped silicon containing film and methods for forming said comp... |
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Invention
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Susceptor for processing substrates.
A susceptor with ESC functionality is presented. To provide... |
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Invention
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Exhausted gas channel plate.
A showerhead assembly is provided. The showerhead assembly includes... |
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Invention
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Susceptor heater.
A susceptor heater is presented. To avoid exposing different materials of the ... |
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Invention
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Semiconductor manufacturing apparatus and a method for manufacturing of a semiconductor.
An appa... |
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Invention
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Vertical furnace and a method for operating the same.
A method for operating a vertical furnace ... |
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Invention
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Cyclical deposition method including treatment step and apparatus for same.
A method and apparat... |
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Invention
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Compliant piston pneumatic valve actuator.
A diaphragm valve is provided. The valve body include... |
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Invention
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Methods and apparatus for flow balancing.
Various embodiments of the present technology may prov... |
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Invention
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Sealing system for low temperature reaction chambers.
A reaction chamber may comprise a suscepto... |
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Invention
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System, apparatus, and device for measuring an amount of deposited dielectric material.
Systems,... |
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Invention
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Contaminant trap system for a reactor system.
A contaminant trap system of a reactor system may ... |
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Invention
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Devices and methods for wafer center finding.
The present disclosure generally relates to the fi... |
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Invention
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Method and apparatus for etching a surface.
Methods and related systems for etching. Embodiments... |
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Invention
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Modular ladder systems and methods thereof.
A modular ladder system is provided. The modular lad... |
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Invention
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Substrate handling robot lifting arrangement and method thereof.
A robot lifting arrangement is ... |
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Invention
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Method of forming vanadium nitride-containing layer and structure comprising the same.
The curre... |
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Invention
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Methods and assemblies for depositing a molybdenum chalcogenide.
The disclosure relates to metho... |
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Invention
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Semiconductor processing systems and associated methods for forming super-lattice structures usin... |
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Invention
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Methods of forming a semiconductor stack on a substrate including a semimetal liner.
A semimetal... |
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Invention
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Safety pressure switch.
A safety pressure switch is presented. For avoiding pressure switch malf... |
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Invention
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Selective deposition method.
A selective deposition method is disclosed. The selective depositio... |
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Invention
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Fluid systems, semiconductor processing systems including fluid systems, flow control methods and... |
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Invention
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Dc bias dual cross feed manifold and a reactor using the same.
A manifold structure used in reac... |
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Invention
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Methods for filling recessed features on a substrate with a flowable layer structure.
Methods fo... |
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Invention
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Physical vapor deposition module and system including same.
Physical vapor deposition (PVD) syst... |
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G/S
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Chemical source material for the deposition of thin film layers upon semiconductor wafers and sub... |
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Invention
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Etch process and a processing assembly.
The current disclosure relates to a method of etching et... |
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Invention
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Chemical source vessel with dip tube.
A chemical vessel is disclosed comprising a dip tube and a... |
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Invention
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Methods and system for precursor recycling.
Various embodiments of the present technology may pr... |
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2024
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Invention
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Toposelective vapor deposition using an inhibitor. The current disclosure generally relates to th... |
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G/S
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Machines and machine tools for the assembly and packaging of electronic chips and structural part... |
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G/S
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Machines for manufacturing semiconductors, and structural parts and fittings therefor; semiconduc... |
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G/S
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Machines for the assembly and packaging of electronic
semiconductor chips; machines for manufact... |
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2023
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G/S
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Machines for assembling and packaging of electronic semiconductor chips; machines for manufacturi... |
