Tokyo Electron Limited
Japan
New patents and trademarks in the last week
Last updated : 2026-08-01
Summary
Patents |
Trademarks |
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15 | 0 |
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18 | 0 |
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Viewing 1 - 33 of 33
trademarks
patents
| # | ID | Jurisdiction | Title |
|---|---|---|---|
| 1 | 19142984 |
|
COMBINED SUBSTRATE, SUBSTRATE PROCESSING METHOD, AND SUBSTRATE PROCESSING SYSTEM |
| 2 | 19573121 |
|
FILM FORMING METHOD AND SEMICONDUCTOR MANUFACTURING APPARATUS |
| 3 | 19456155 |
|
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD |
| 4 | 19040281 |
|
METHODS FOR IMPROVING ETCH PROFILES OF SEMICONDUCTOR DEVICES |
| 5 | 19629506 |
|
METHOD FOR PROCESSING SUBSTRATE AND APPARATUS FOR PROCESSING SUBSTRATE |
| 6 | 19638952 |
|
INTEGRATED METROLOGY FOR PROCESS CONTROLS IN WAFER BONDING SYSTEM |
| 7 | 19355326 |
|
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD |
| 8 | 19572934 |
|
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD |
| 9 | JP2025001741 |
|
PROCESSING SYSTEM AND METHOD FOR CONTROLLING PROCESSING SYSTEM |
| 10 | JP2025039958 |
|
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS |
| 11 | JP2026000693 |
|
PLASMA PROCESSING APPARATUS, POWER SUPPLY SYSTEM, AND SOURCE FREQUENCY CONTROL METHOD |
| 12 | JP2026000665 |
|
PLASMA PROCESSING DEVICE, POWER SUPPLY SYSTEM, AND CONTROL METHOD |
| 13 | JP2025045560 |
|
MAINTENANCE DEVICE, PROCESSING SYSTEM, AND CONTROL METHOD FOR MAINTENANCE DEVICE |
| 14 | JP2026000633 |
|
SUBSTRATE PROCESSING APPARATUS |
| 15 | JP2026000829 |
|
SUBSTRATE PROCESSING DEVICE, AND SUBSTRATE PROCESSING METHOD |
| 16 | JP2026000587 |
|
SUBSTRATE PROCESSING SYSTEM |
| 17 | US2025047446 |
|
PHOSPHORUS-BASED FILM COMPOSITIONS AND PATTERNING METHODS |
| 18 | JP2026000529 |
|
SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING DEVICE, AND SUBSTRATE PROCESSING SYSTEM |
| 19 | JP2026000500 |
|
COMPUTER PROGRAM, INFORMATION PROCESSING METHOD, AND INFORMATION PROCESSING DEVICE |
| 20 | 19578606 |
|
SUBSTRATE SUPPORT ASSEMBLY, SUBSTRATE PROCESSING APPARATUS, AND SUBSTRATE PROCESSING METHOD |
| 21 | 19578544 |
|
UPPER ASSEMBLY AND SUBSTRATE PROCESSING APPARATUS |
| 22 | 19629337 |
|
SUBSTRATE SUPPORT ASSEMBLY, SUBSTRATE PROCESSING APPARATUS, AND SUBSTRATE PROCESSING METHOD |
| 23 | 19037976 |
|
PHOSPHORUS-BASED FILM COMPOSITIONS AND PATTERNING METHODS |
| 24 | 19629394 |
|
TRANSPORTER AND CONNECTION METHOD |
| 25 | 19039448 |
|
Mitigation of Capillary Pattern Collapse in Supercritical Dry |
| 26 | 19039215 |
|
METHOD FOR PLASMA ETCHING PROCESS |
| 27 | US2025059764 |
|
METHOD FOR FORMING NON-ORTHOGONAL VIA OPENINGS USING DIRECTIONAL ETCHING |
| 28 | JP2026000379 |
|
SUBSTRATE PROCESSING SYSTEM AND TRANSPORT METHOD |
| 29 | JP2026000478 |
|
PLASMA PROCESSING DEVICE, POWER SUPPLY SYSTEM, AND FREQUENCY CONTROL METHOD |
| 30 | JP2026000780 |
|
BONDING DEVICE AND BONDING METHOD |
| 31 | JP2026000783 |
|
BONDING APPARATUS AND BONDING METHOD |
| 32 | JP2026000319 |
|
SUBSTRATE PROCESSING DEVICE AND SUBSTRATE PROCESSING METHOD |
| 33 | US2026010107 |
|
IMPROVED SIGNAL PATH ROUTING IN DIE-TO-DIE BONDED CIRCUITS |
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