A heat treatment apparatus for high-quality graphene synthesis comprises an upper roll chamber, a deposition chamber connected to the upper roll chamber to deposit graphene on a catalytic metal film, and a lower roll chamber mounted on a lower portion of the deposition chamber. The upper roll chamber includes a supply roller and the lower roll chamber includes a lower direction shifting roller shifting a direction of the catalytic metal film supplied from the supply roller. In the deposition chamber, a catalytic metal film at a supply side transferred from the supply roller to the lower direction shifting roller and a catalytic metal film at a discharge side transferred from the lower direction shifting roller to a winding roller are passed, and a heater portion is mounted around the catalytic metal film at the supply side and the catalytic metal film at the discharge side.
C23C 16/46 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for heating the substrate
B65H 23/26 - Registering, tensioning, smoothing, or guiding webs longitudinally by transverse stationary or adjustable bars or rollers
The present invention relates to a heat treatment apparatus for high-quality graphene synthesis and, more specifically, a heat treatment apparatus, for high-quality graphene synthesis, enabling more effective deposition of graphene on a catalytic metal film. The heat treatment apparatus for high-quality graphene synthesis has: an upper roll chamber; a deposition chamber which is connected to the upper roll chamber and in which graphene is deposited on a catalytic metal film; and a lower roll chamber mounted below the deposition chamber. The upper roll chamber has a supply roller, to which the catalytic metal film is supplied, and a winding roller which is for winding the catalytic metal film having graphene deposited thereon. The lower roll chamber has a lower direction conversion roller for converting the direction of the catalytic metal film such that the catalytic metal film is supplied from the supply roller, has graphene deposited thereon in the deposition chamber, and is wound by means of the winding roller. The supplied catalytic metal film, which is transferred from the supply roller to the lower direction conversion roller, and the discharged catalytic metal film, which is transferred from the lower direction conversion roller to the winding roller, pass through the deposition chamber, and a heater unit is mounted around the supplied catalytic metal film and the discharged catalytic metal film.
C23C 16/46 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for heating the substrate
According to one embodiment of the present invention, a method for transferring graphene comprises the steps of: transferring graphene of a metal sheet to a thermal release film in each vacuum chamber; and transferring graphene of the thermal release film to a parent substrate. The method for transferring graphene can increase adhesion by removing bubbles or foreign material during graphene transferring, thereby enabling the separation of graphene to be prevented during etching of a metal substrate and enabling an adhesive quality state of graphene for a target substrate to increase.
B65H 37/04 - Article or web delivery apparatus incorporating devices for performing specified auxiliary operations for securing together articles or webs, e.g. by adhesive, stitching, or stapling
B65H 41/00 - Machines for separating superposed webs
H01L 29/16 - Semiconductor bodies characterised by the materials of which they are formed including, apart from doping materials or other impurities, only elements of Group IV of the Periodic System in uncombined form
The present invention relates to an apparatus for manufacturing a graphene film and, more particularly, to an apparatus for manufacturing a graphene film which deposits graphene while transferring a catalytic metal film in a roll-to-roll manner, comprising: an upper roll chamber for supplying a catalytic metal film rolled onto an unloading bobbin to a deposition chamber; a deposition chamber connected to the upper roll chamber to deposit graphene on the catalytic metal film; a lower roll chamber connected to the deposition chamber to roll the graphene-deposited catalytic metal film onto a loading bobbin; and a frame to which each of the chambers are fixed.
B65H 23/06 - Registering, tensioning, smoothing, or guiding webs longitudinally by retarding devices, e.g. acting on web-roll spindle
B65H 23/188 - Registering, tensioning, smoothing, or guiding webs longitudinally by controlling or regulating the web-advancing mechanism, e.g. mechanism acting on the running web in connection with running-web
B65H 23/26 - Registering, tensioning, smoothing, or guiding webs longitudinally by transverse stationary or adjustable bars or rollers
C23C 16/455 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into the reaction chamber or for modifying gas flows in the reaction chamber
H01B 1/04 - Conductors or conductive bodies characterised by the conductive materialsSelection of materials as conductors mainly consisting of carbon-silicon compounds, carbon, or silicon
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