In a coolant system, the interior of a reservoir frame storing the coolant discharged from a machine tool is partitioned by a partition member into an outer peripheral coolant tub and a central coolant tub. The partition member is formed with a silt that extends in the depth direction to make the outer peripheral coolant tub communicate with the central coolant tub. A suction port of a pump that feeds the coolant in the central coolant tub to a filtering device is arranged in the central coolant tub. The coolant discharged from the machine tool is supplied to the central coolant tub without passing through the outer peripheral coolant tub. At least a part of the coolant filtered by the filtering device is supplied to the outer peripheral coolant tub without passing through the central coolant tub.
Plural spline shafts are arranged around columnar plasma, and plural spline shafts are coaxially aligned in a direction that the columnar plasma extends within a vacuum chamber. The plural coaxially aligned spline shafts are positioned so that axial gap is formed between the respective male spline sections. The axial gap of the plural male spline sections is positioned at a center of the columnar plasma in the direction that the columnar plasma extends.
C23C 16/458 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber
C23C 16/50 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
F16D 3/06 - Yielding couplings, i.e. with means permitting movement between the connected parts during the drive adapted to specific functions specially adapted to allow axial displacement
A highly corrosion-resistant member which comprises a stainless steel substrate, an inner layer covering at least part of the surface of the substrate, and an amorphous carbon film covering at least part of the surface of the inner layer and which is produced by forming the inner layer and the amorphous carbon film at least at a surface temperature of the substrate of as low as 450°C or below; and a highly corrosion-resistant member which comprises a stainless steel substrate whose surface is nitrided and an amorphous carbon film covering at least part of the surface of the substrate and which is produced by conducting the nitriding and the formation of the amorphous carbon film at least at a surface temperature of the substrate of as low as 450°C or below. In the step of producing the above corrosion-resistant members, the surface of the stainless steel substrate is not exposed to high temperature (> 450°C), so that the members exhibit corrosion resistance equivalent to that of original stainless steel.
C23C 28/00 - Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of main groups , or by combinations of methods provided for in subclasses and
C23C 28/04 - Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of main groups , or by combinations of methods provided for in subclasses and only coatings of inorganic non-metallic material
F16C 33/24 - BrassesBushesLinings with different areas of the sliding surface consisting of different materials
patents
