Patent holdings for IPC class H01J 61/84

Total number of patents in this class: 2

10-year publication summary

0
0
0
0
0
0
0
0
0
0
2016 2017 2018 2019 2020 2021 2022 2023 2024 2025

Principal owners for this class

Owner
All patents
This class
Mattson Technology, Inc.
234
1
Beijing E-town Semiconductor Technology, Co., Ltd
284
1
Other owners 0