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2025
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Invention
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Systems for cleaning a portion of a lithography apparatus.
A cleaning tool configured to be inse... |
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2024
|
Invention
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Apparatus for and method of lithography support cleaning.
Apparatus for and method of removing a... |
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Invention
|
Method to manufacture nano ridges in hard ceramic coatings.
A method for reducing sticking of an... |
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Invention
|
On chip sensor for wafer overlay measurement.
A sensor apparatus includes a sensor chip, an illu... |
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2023
|
Invention
|
Apparatus and method for determining a condition associated with a pellicle.
An apparatus for de... |
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Invention
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Mode control of photonic crystal fiber based broadband radiation sources.
A mode control system ... |
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2022
|
Invention
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Improved broadband radiation generation in photonic crystal or highly non-linear fibres. Radiatio... |
|
|
Invention
|
Lithographic apparatus, locking device, and method.
A lithographic apparatus includes an illumin... |
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Invention
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Metrology systems with phased arrays for contaminant detection and microscopy.
A metrology syste... |
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|
Invention
|
Systems, methods, and devices for thermal conditioning of reticles in lithographic apparatuses.
... |
|
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Invention
|
Metrology systems, temporal and spatial coherence scrambler and methods thereof.
A system includ... |
|
|
Invention
|
Modular wafer table and methods of manufacturing thereof.
The present disclosure is directed to ... |
|
|
Invention
|
Metrology systems, measurement of wear systems and methods thereof.
A method includes irradiatin... |
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|
Invention
|
Lithographic apparatus, temperature sensor, and fiber bragg grating sensor.
A lithographic appar... |
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|
Invention
|
Digital holographic microscope and associated metrology method.
A method of correcting a hologra... |
|
|
Invention
|
Operating a metrology system, lithographic apparatus, and methods thereof.
A method includes det... |
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|
Invention
|
Fast uniformity drift correction.
Systems, apparatuses, and methods are provided for adjusting i... |
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|
Invention
|
Methods and apparatuses for spatially filtering optical pulses.
An optical filter apparatus incl... |
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|
Invention
|
Systems and methods for measuring intensity in a lithographic alignment apparatus.
A metrology s... |
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2021
|
Invention
|
Multi-channel light source for projection optics heating.
Systems, apparatuses, and methods are ... |
|
|
Invention
|
Intensity order difference based metrology system, lithographic apparatus, and methods thereof.
... |
|
|
Invention
|
Metrology system and coherence adjusters.
A metrology system (400) includes a multi-source radia... |
|
|
Invention
|
Vacuum sheet bond fixturing and flexible burl applications for substrate tables.
Systems, appara... |
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|
Invention
|
Multiple objectives metrology system, lithographic apparatus, and methods thereof.
A metrology o... |
|
|
Invention
|
Polarization selection metrology system, lithographic apparatus, and methods thereof. An inspecti... |
|
|
Invention
|
Metrology tool with position control of projection system. A metrology tool that includes a subst... |
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|
Invention
|
Pod handling systems and methods for a lithographic device.
Systems, apparatuses, and methods ar... |
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|
Invention
|
Radiation source arrangement and metrology device.
A radiation source arrangement including: a r... |
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|
Invention
|
Lithographic apparatus, metrology system, and intensity imbalance measurement for error correctio... |
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|
Invention
|
Double-scanning opto-mechanical configurations to improve throughput of particle inspection syste... |
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|
Invention
|
Lithographic apparatus and methods for multi-exposure of a substrate.
A lithographic system and ... |
|
|
Invention
|
Spectrometric metrology systems based on multimode interference and lithographic apparatus. A met... |
|
|
Invention
|
Self-referencing integrated alignment sensor. Systems, apparatuses, and methods are provided for ... |
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|
Invention
|
Lithographic apparatus, metrology systems, and methods thereof.
A system includes an illuminatio... |
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|
Invention
|
Sub micron particle detection on burl tops by applying a variable voltage to an oxidized wafer.
... |
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|
Invention
|
Lithographic pre-alignment imaging sensor with build-in coaxial illumination.
A patterning devic... |
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|
Invention
|
Lithographic apparatus, multi-wavelength phase-modulated scanning metrology system and method.
A... |
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Invention
|
Generating an alignment signal based on local alignment mark distortions.
A method for generatin... |
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Invention
|
Contaminant identification metrology system, lithographic apparatus, and methods thereof.
An ins... |
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|
Invention
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Contaminant analyzing metrology system, lithographic apparatus, and methods thereof.
An inspecti... |
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|
Invention
|
Systems and methods for forming structures on a surface.
Systems and methods for forming structu... |
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|
Invention
|
Optical apparatus and lithographic apparatus using the optical apparatus.
An optical apparatus a... |
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Invention
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Reticle gripper damper and isolation system for lithographic apparatuses. Embodiments herein desc... |
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|
Invention
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Apparatus for and method of sensing alignment marks. An apparatus for and method of sensing multi... |
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|
Invention
|
Improved alignment of scatterometer based particle inspection system.
A pattering device inspect... |
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|
Invention
|
Method for region of interest processing for reticle particle detection.
An inspection system in... |
|
|
Invention
|
Optical designs of miniaturized overlay measurement system. A compact sensor apparatus having an ... |
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2020
|
Invention
|
Lithographic system provided with a deflection apparatus for changing a trajectory of particulate... |
|
|
Invention
|
Contaminant detection metrology system, lithographic apparatus, and methods thereof. A system (40... |
|
|
Invention
|
Invariable magnification multilevel optical device with telecentric converter. A pre-alignment sy... |
