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2025
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P/S
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Machines and apparatus for use in manufacturing and
processing of semiconductor wafers; machines... |
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Invention
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Seal material and method for manufacturing seal material. This seal material includes a core part... |
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Invention
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Sensor system. A sensor system A1 is provided with: a first sensor 11 for converting a first phys... |
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Invention
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Wafer holder. A wafer holder A1 holds a plurality of wafers in a state of being aligned in a firs... |
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2024
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Invention
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Sealing material and sealing structure. A sealing material (A100) comprises: an elastic member (1... |
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Invention
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Substrate processing module and substrate processing device. This substrate processing module and... |
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2023
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Invention
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Ultrasonic wave generation device and substrate processing device. An ultrasonic wave generation ... |
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Invention
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Valve indicator. The present invention provides a valve indicator capable of accurately detecting... |
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Invention
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Sealing material and sealing structure. This sealing material and sealing structure are configure... |
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Invention
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Substrate processing device. This substrate processing device A1 includes: a substrate processing... |
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2022
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Invention
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Substrate drying device, substrate processing device, and substrate manufacturing method.
A subs... |
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Invention
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Substrate processing apparatus |
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Invention
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Substrate processing apparatus.
A substrate processing apparatus A1 includes: cup 1 for storing ... |
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Invention
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Seal member |
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2021
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Invention
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Substrate processing module and substrate processing device provided with same.
A substrate proc... |
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Invention
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Substrate processing module and substrate processing apparatus.
A substrate processing module in... |
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Invention
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Substrate processing module, substrate processing apparatus, and substrate manufacturing method. ... |
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2020
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Invention
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Filter housing and filter comprising same.
Disclosed is a filter housing which is a molded body ... |
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Invention
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Liquid chemical processing device.
A liquid chemical processing device that reduces variation in... |
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2019
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Invention
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Piezoelectric element having excellent flexibility and bend resistance. Provided is a novel piezo... |
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2018
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Invention
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Composite resin material and molded article. An object of the present invention is to provide a r... |
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2017
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Invention
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Method and apparatus for producing a polarized resin film. An object of the present invention is ... |
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Invention
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Composite resin material and molded body. Provided is a composite resin material that yields a re... |
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Invention
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Sealing material ring for a semiconductor manufacturing apparatus |
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2016
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Invention
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Method of recycling solar cell module. A method of recycling a solar cell module includes an encl... |
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2013
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Invention
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Polarized resin film and process for producing same. An object of the present invention is to pro... |
