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2022
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Invention
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Method for purifying tantalum source precursor. The present invention relates to the field of pur... |
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Invention
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Silicon-based precursor purification method and purification system. A silicon-based precursor pu... |
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Invention
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Method for purifying electronic-grade boron trichloride.
The present disclosure relates to the f... |
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Invention
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Purification method for electronic grade boron trichloride. The present invention relates to the ... |
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Invention
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Impurity gas adsorbent and preparation method therefor, and application. An impurity gas adsorben... |
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Invention
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Impurity adsorbent, preparation method and method for using adsorbent to purify trimethylaluminiu... |
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Invention
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Oxygen adsorbent, preparation method and method for reducing oxygen content in nitrous oxide raw ... |
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Invention
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Steel cylinder for storing electronic-grade nitric oxide and processing method therefor. A steel ... |
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Invention
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Preparation method for electronics-grade boron trichloride, and boron trichloride obtained thereb... |