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2024
|
Invention
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Semiconductor device fabrication apparatus. An embodiment of the present disclosure provides an u... |
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2023
|
Invention
|
Component for semiconductor device fabrication apparatus, semiconductor device fabrication appara... |
|
|
Invention
|
Sintered body and component part including same.
The sintered body includes boron carbide, where... |
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|
Invention
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Sintered body and parts including same.
The sintered body including boron carbide, wherein the s... |
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|
Invention
|
Sintered body and method of manufacturing sintered body.
The sintered body including silicon oxi... |
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|
Invention
|
Focus ring and plasma etching apparatus comprising the same.
A plasma etching apparatus includes... |
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|
Invention
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Focus ring and plasma etching device including same.
A focus ring for mounting an etching targe... |
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2022
|
Invention
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Manufacturing method of ring-shaped element for etcher.
A manufacturing method of a ring-shaped ... |
|
|
Invention
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Ceramic component and plasma etching apparatus comprising same. −1 Ω·cm to 20 Ω·cm, and wherein t... |
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|
Invention
|
Ceramic component and method of manufacturing ceramic component.
The present disclosure relates ... |
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2006
|
Invention
|
Method of preparing wear-resistant coating layer comprising metal matrix composite and coating la... |
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2005
|
Invention
|
Porous coated member and manufacturing method thereof using cold spray.
Disclosed is a coated me... |
