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2025
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Invention
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Method for manufacturing ceramic heater.
The present disclosure relates to a method for manufact... |
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Invention
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Ceramic heater.
Provided is a ceramic heater. The ceramic heater includes a disk-shaped plate an... |
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Invention
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Susceptor manufacturing method and susceptor manufactured by method. The present invention relate... |
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Invention
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Ceramic susceptor.
Disclosed is a ceramic susceptor. The ceramic susceptor may include: an insul... |
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Invention
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Susceptor for high temperature semiconductor process.
The present disclosure provides a suscepto... |
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2024
|
Invention
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Ceramic susceptor.
Disclosed is a ceramic susceptor. The susceptor of the present disclosure may... |
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Invention
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Ceramic susceptor. The present disclosure relates to a ceramic susceptor including a ceramic plat... |
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Invention
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Ceramic susceptor.
The present disclosure relates to a ceramic susceptor including a ceramic pla... |
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Invention
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Susceptor including purge gas flow passage. Disclosed is a susceptor including a purge gas channe... |
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Invention
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Ceramic heater.
Disclosed is a ceramic heater. The ceramic heater includes a plate including a h... |
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|
Invention
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Ceramic heater.
An embodiment of the present disclosure provides a ceramic heater including a pl... |
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Invention
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Susceptor. The present disclosure relates to a susceptor, and a susceptor of the present disclosu... |
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Invention
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Ceramic susceptor and method of manufacturing same.
The present disclosure relates to a ceramic ... |
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Invention
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Susceptor. The present invention provides a susceptor comprising: a base member; and a dielectric... |
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Invention
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Ceramic susceptor and method of manufacturing same. The present disclosure relates to a ceramic s... |
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Invention
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Ceramic susceptor.
Disclosed is to a ceramic susceptor. The ceramic susceptor of the present dis... |
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|
Invention
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Ceramic susceptor and method of manufacturing the same.
The present invention relates to a ceram... |
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Invention
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Susceptor manufacturing method and susceptor manufactured by the same.
The present disclosure re... |
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Invention
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Ceramic susceptor. The present disclosure relates to a ceramic susceptor, and the ceramic suscept... |
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2023
|
Invention
|
Susceptor and method of manufacturing the same.
The present disclosure provides a susceptor incl... |
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Invention
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Electrostatic chuck heater and manufacturing method therefor.
The present invention relates to a... |
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|
Invention
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Ceramic susceptor. Provided is a ceramic susceptor, which includes a ceramic plate with a radio-f... |
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Invention
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Substrate heating device configured to suppress crack generation.
The present disclosure relates... |
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Invention
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Ceramic susceptor. The present disclosure relates to a ceramic susceptor. The ceramic susceptor o... |
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Invention
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Electrostatic chuck.
The present disclosure relates to an electrostatic chuck having an efficien... |
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Invention
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Ceramic heater. The present invention relates to a two-zone heating element which is embedded in ... |
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2022
|
Invention
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Method for manufacturing ceramic susceptor.
Disclosed is a method for manufacturing a ceramic su... |
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Invention
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Aluminum nitride sintered body and member for semiconductor manufacuting apparatus comprising sam... |
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Invention
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Electrostatic chuck. The present disclosure relates to an electrostatic chuck. The electrostatic ... |
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|
Invention
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Susceptor for high-temperature use having shaft with low thermal conductivity. 8 Ω·cm or more at ... |
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Invention
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Substrate heating apparatus with enhanced temperature uniformity characteristic.
The present dis... |
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Invention
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Ceramic susceptor. The present invention relates to a ceramic susceptor. The ceramic susceptor of... |
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2021
|
Invention
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Cryogenic susceptor and electric connector assembly used therein. Disclosed is a susceptor which ... |
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Invention
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Bonding head and bonding device having same. A bonding head comprises: a base block; an air block... |
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2020
|
Invention
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Susceptor and manufacturing method therefor.
Disclosed are a susceptor for enabling uniform plas... |
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Invention
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Susceptor and manufacturing method therefor. Disclosed are a susceptor for enabling uniform plasm... |
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|
Invention
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Ceramic heater. The present invention relates to a ceramic heater. The ceramic heater of the pres... |
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|
Invention
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Electrostatic chuck heater and manufacturing method therefor. The present invention relates to an... |
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Invention
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Ceramic heater and manufacturing method thereof.
The present invention relates to a ceramic heat... |
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Invention
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Ceramic heater and manufacturing method therefor.
The present invention relates to a ceramic hea... |
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2019
|
Invention
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Ceramic heater. A ceramic heater includes a heating element, and the ceramic heater is characteri... |
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Invention
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Ceramic heater for independently controlling middle region.
The present invention relates to a c... |
